• Title/Summary/Keyword: roughness element

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Analysis of Contact Pressure for a 300mm Wafer Polishing Table with Air-Bag Head (Air-Bag Head 가압식 300mm 웨이퍼 폴리싱 테이블의 가압 분포 해석)

  • Ro, Seung-Kook
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.2
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    • pp.310-317
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    • 2013
  • In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

Development of form rolling technology for high precision worm using the rack dies of counter flow type (Counter Flow 방식의 랙 다이를 이용한 고정밀도 Worm 전조기술 개발)

  • 고대철;박준모;김병민
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1861-1864
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    • 2003
  • The objective of this study is to suggest the form rolling technology to produce high precision worm. Rack dies and roll dies are usually used to roll parts with worm teeth. The form roiling processes of worm shaft used as automotive part using the rack dies of counter flow type and the roll dies are considered and simulated by the commercial finite element code, DEFORM-3D. It is also important to determine the initial blank diameter in form rolling because it affects the quality of thread. The calculation method of the initial blank diameter in form rolling is suggested and it is verified by FE-simulation. The experiments using rack dies and roll dies are performed under the same conditions as those of simulation. The results of simulation and experiment in this study show that the from rolling process of worm shaft using the rack dies is decidedly superior to that using rolling dies from the aspect of the surface roughness and the profile of worm.

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Effects of Cutting Angle on Kerf width and Edge Shape in the Hotwire Cutting of EPS Foam for the Case of Single-Sloped Cutting for VLM-s Process (VLM-s 공정을 위한 EPS 폼의 단순 경사 열선 절단시 절단 경사각이 절단폭과 모서리 형상에 미치는 영향)

  • 안동규;양동열
    • Journal of Welding and Joining
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    • v.21 no.5
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    • pp.525-533
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    • 2003
  • The dimensional accuracy and global roughness between successive layers of VLM-s, which is a new rapid prototyping process using hotwire cutter and EPS foam, depend significantly on the operating parameters of hotwire cutter. In the present study, the effect of cutting angle on the kerf width and edge shape in hotwire cutting of EPS foam for the case of single-sloped cutting with one cutting angle was investigated. Through single-sloped cutting tests, the modified relationship between kerf width and effective heat input, considering the effect of the cutting angle, and the relationship between the melted area and the cutting angle were obtained. In order to investigate the effect of cutting angles on the thermal field in EPS foam, transient heat transfer analyses using single-sloped volumetric heat flux model and locally-conformed mesh were performed. Through the comparison between experimental and numerical results, it was shown that the proposed analysis model is needed to estimate the three-dimensional temperature distribution of the EPS foam for the case of single-sloped hotwire cutting.

Seismic response of a highway bridge in case of vehicle-bridge dynamic interaction

  • Erdogan, Yildirim S.;Catbas, Necati F.
    • Earthquakes and Structures
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    • v.18 no.1
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    • pp.1-14
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    • 2020
  • The vehicle-bridge interaction (VBI) analysis might be cumbersome and computationally expensive in bridge engineering due to the necessity of solving large number of coupled system of equations. However, VBI analysis can provide valuable insights into the dynamic behavior of highway bridges under specific loading conditions. Hence, this paper presents a numerical study on the dynamic behavior of a conventional highway bridge under strong near-field and far-field earthquake motions considering the VBI effects. A recursive substructuring method, which enables solving bridge and vehicle equations of motion separately and suitable to be adapted to general purpose finite element softwares, was used. A thorough analysis that provides valuable information about the effect of various traffic conditions, vehicle velocity, road roughness and effect of soil conditions under far-field and near-field strong earthquake motions has been presented. A real-life concrete highway bridge was chosen for numerical demonstrations. In addition, sprung mass models of vehicles consist of conventional truck and car models were created using physical and dynamic properties adopted from literature. Various scenarios, of which the results may help to highlight the different aspects of the dynamic response of concrete highway bridges under strong earthquakes, have been considered.

Representative Evaluation of Topographical Characteristics of Road Surface for Tire Contact Force Analysis (노면 표면거칠기 특성의 대표값 정량화와 타이어 접촉력 해석 기법에 대한 고찰)

  • Seo, Beom Gyo;Sung, In-Ha
    • Tribology and Lubricants
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    • v.33 no.6
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    • pp.303-308
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    • 2017
  • Most automobile tire companies have not yet considered the geometric information of a road at the design stage of a tire because the topographical characterization of a road surface is very difficult owing to its vastness and randomness. A road surface shows variable surface roughness values according to magnification, and thus, the contact force between the road and tire significantly fluctuates with respect to the scale. In this study, we make an attempt to define a representative value for surface topographical information at multi-scale levels. To represent surface topography, we use a statistical method called power spectral density (PSD). We use the fast Fourier transform (FFT) and PSD to analyze the height profiles of a random surface. The FFT and PSD of a surface help in obtaining a fractal dimension, which is a representative value of surface topography at all length scales. We develop three surfaces with different fractal dimensions. We use finite element analysis (FEA) to observe the contact forces between a tire and the road surfaces with three different fractal dimensions. The results from FEA reveal that an increase in the fractal dimension decreases the contact length between the tire and road surfaces. On the contrary, the average contact force increases. This result indicates that designing and manufacturing a tire considering the fractal dimension of a road makes safe driving possible, owing to the improvement in service life and braking performance of the tire.

Oxidation of CrAlN and CrZrN Films (CrAlN과 CrZrN의 산화)

  • Kim, Min-Jeong;Kim, Seul-Gi;Lee, Sang-Yul;Lee, Dong-Bok
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.33-35
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    • 2011
  • Films of CrAlN and CrZrN were deposited on a steel substrate by closed field unbalanced magnetron sputtering, and their oxidation behaviors were investigated. CrAlN films consisted of dense, polycrystalline CrN and AlN fine columns. The formed oxides consisted primarily of crystalline $Cr_2O_3$ incorporated with $Al_2O_3$. The oxide layers were thin and compact so as to make CrAlN films more protective than CrN films. In case of CrZrN films, Zr atoms were dissolved in the CrN phase. Zr atoms advantageously refined the columnar structure, reduced the surface roughness, and increased the micro-hardness. However, the addition of Zr did not increased oxidation resistance, mainly because Zr was not a protective element. All the deposited films displayed relatively good oxidation resistance, owing to the formation of the highly protective $Cr_2O_3$ on their surface. The $Cr_{40}Zr_9N$ and $Cr_{31}Zr_{16}N$ films oxidized to $Cr_2O_3$ as the major phase and ${\alpha}-ZrO_2$ as the minor one, whereas the CrN film oxidized to $Cr_2O_3$.

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Thickness Dependence of CVD-SiC-Based Composite Ceramic for the Mold of the Curved Cover Glass (곡면 커버 글라스용 금형 코팅을 위한 CVD-SiC 기반 세라믹 복합체의 두께에 따른 특성 연구)

  • Kim, Kyoung-Ho;Jeong, Seong-Min;Lee, Myung-Hyun;Bae, Si-Young
    • Journal of the Korean institute of surface engineering
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    • v.52 no.6
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    • pp.310-315
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    • 2019
  • The use of a silicon carbide (SiC)-based composite ceramic layer for the mold of a curved cover glass was demonstrated. The stress of SiC/VDR/graphite-based mold structure was evaluated via finite element analysis. The results revealed that the maximum tensile stress primarly occured at the edge region. Moreover, the stress can be reduced by employing a relatively thick SiC coating layer and, therefore, layers of various thicknesses were deposited by means of chemical vapor deposition. During growth of the layer, the orientation of the facets comprising the SiC grain became dominant with additional intense SiC(220) and SiC(004). However, the roughness of the SiC layer increased with increasing thickness of the layer and. Hence, the thickness of the SiC layer needs to be adjusted by values lower than the tolerance band of the curved cover glass mold.

Measurement of The Thermal Contact Conductance in Nuclear Fuel Element (핵 연료 요소내의 접촉 열전도도 측정)

  • Sung-Deok Hong;;Goon-Cherl Park
    • Nuclear Engineering and Technology
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    • v.22 no.1
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    • pp.75-81
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    • 1990
  • Experiments to predict the thermal contact conductance between the fuel pellet and cladding have been performed, which is important to determine the temperature distibution within the fuel rod. UO$_2$and Zircaloy-2 are used in these experiments. The measuring apparatus is composed of a presser which controls the contact pressure, a thermometer with 5.5 sheathed thermocouples, a vacuum pump, pellet and cladding rods, and two heating devices, etc. The thermal contact conductances were measured with varying the contact pressure and surface roughnesses of UO$_2$and Zircaloy-2 bars. The results show that an increase in the contact pressure and a decrease of surface roughness resulted in increase of the thermal contact conductance. Finally, a fitting correlation has been established and compared with widely-used correlations.

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Icing Wind Tunnel Tests to Improve the Surface Roughness Model for Icing Simulations (착빙 해석의 표면 거칠기 모델 개선을 위한 착빙 풍동시험 연구)

  • Son, Chankyu;Min, Seungin;Kim, Taeseong;Kim, Sun-Tae;Yee, Kwanjung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.46 no.8
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    • pp.611-620
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    • 2018
  • For the past decades, the analytic model for distributed surface roughness has been developed to improve the accuracy of the icing simulation code. However, it remains limitations to validate the developed model and determine the empirical parameters due to the absence of the quantitative experimental data which were focused on the surface state. To this end, the experimental study conducted to analyze the ice covered surface state from a micro-perspective. Above all, the tendency of the smooth zone width which occurs near the stagnation point has been quantitatively analyzed. It is observed that the smooth zone width is increased as growing the ambient temperature and freestream velocity. Next, the characteristics of the ice covered surface under rime and glaze ice have been analyzed. For rime ice conditions, ice elements are developed as the opaque circular corn in the opposite direction of freestream. The height and interval of each circular corn are increased as rising the ambient temperature. For glaze ice conditions, numerous lumps of translucent ice can be observed. This is because the beads formed by gravity concentrate and froze on the lower surface.

Relationship Between Annealing Temperature and Structural Properties of BaTiO3 Thin Films Grown on p-Si Substrates (p-Si 기판에 성장한 BaTiO3 박막의 어닐링온도와 구조적 특성과의 관계)

  • Min, Ki-Deuk;Kim, Dong-Jin;Lee, Jong-Won;Park, In-Yong;Kim, Kyu-Jin
    • Korean Journal of Materials Research
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    • v.18 no.4
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    • pp.222-227
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    • 2008
  • In this study, $BaTiO_3$ thin films were grown by RF-magnetron sputtering, and the effects of a post-annealing process on the structural characteristics of the $BaTiO_3$ thin films were investigated. For the crystallization of the grown thin films, post-annealing was carried out in air at an annealing temperature that varied from $500-1000^{\circ}C$. XRD results showed that the highest crystal quality was obtained from the samples annealed at $600-700^{\circ}C$. From the SEM analysis, no crystal grains were observed after annealing at temperatures ranging from 500 to $600^{\circ}C$; and 80 nm grains were obtained at $700^{\circ}C$. The surface roughness of the $BaTiO_3$ thin films from AFM measurements and the crystal quality from Raman analysis also showed that the optimum annealing temperature was $700^{\circ}C$. XPS results demonstrated that the binding energy of each element of the thin-film-type $BaTiO_3$ in this study shifted with the annealing temperature. Additionally, a Ti-rich phenomenon was observed for samples annealed at $1000^{\circ}C$. Depth-profiling analysis through a GDS (glow discharge spectrometer) showed that a stoichiometric composition could be obtained when the annealing temperature was in the range of 500 to $700^{\circ}C$. All of the results obtained in this study clearly demonstrate that an annealing temperature of $700^{\circ}C$ results in optimal structural properties of $BaTiO_3$ thin films in terms of their crystal quality, surface roughness, and composition.