Metal-organic Chemical Vapor Deposition of Uniform Transition Metal Dichalcogenides Single Layers and Heterostructures (유기금속화학기상증착법을 이용한 전이금속 칼코게나이드 단일층 및 이종구조 성장)
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- Journal of the Microelectronics and Packaging Society
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- v.27 no.4
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- pp.119-125
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- 2020