• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.36-36
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• 2002

To Establish of standard technique of length measurent in 2D plane, we develope AFM system. The XY scanner scans the sample only in XY plane, while the Z scanner scans the specimen only in Z-direction. Cantilever tip is controlled to has constant height relative to speciman surface by feedback of PSPD signal. To acquire high accuracy, Z-axis measuring sensor will be added.(COXI or others). In this paper we design XYZ stage suitable for this AEM system. For XY stage, single module parallel-kinnematic flexure stage is used which has high orthogonality and minimum out-of-plane motion. To obtain best performance optimal design is performed. For XY stage, to be robust about parasitic motion optimal design of maximizing Z and tilt stiffness is performed under the constraint of motion range and stage size. And for Z stage, optimal design of maximizing 1st resonant frequency is performed. Because if resonant frequency is get higher, scan speed is improved. So it makes reduce the error by sensor drift. Resultly XYZ stage each have 1st natural frequency of 115㎐, 201㎐, 2.66㎑ and range 109㎛, 110㎛, 12㎛.

• Proceedings of the Korea Concrete Institute Conference
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• 1998.10b
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• pp.725-730
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• 1998

Recently, non-destructive tests are getting popular in evaluating concrete properties without braking specimens. Among several NDT methods, P-wave velocity measurement technique has been widely used to evaluate the stiffness and strength of concrete. The purpose of this study is to investigate factors influencing P-wave velocity measured by impact-resonant method and ultrasonic pulse velocity method, such as moisture content of concrete, existence and size of coarse aggregates, sensor and sampling rate. Test results show that rod-wave velocity measured by impact-resonant method and ultrasonic pulse velocity are significantly affected by the moisture content of concrete, i.e., the lower moisture content, the lower velocity. Moisture content influences rod-wave velocity stronger than ultrasonic pulse velocity. Rod-wave velocity is faster in concrete than in mortar and is also faster in concrete containing small size aggregates. Sensor and sampling rate have little influence on velocity.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Journal of the Korean Physical Society
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• v.73 no.9
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• pp.1399-1404
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• 2018

This study used an inductively coupled plasma (ICP) dry etching process with a metal amplitude mask to fabricate a double-side notched long-period fiber grating (DNLPFG) for loading sensing. The DNLPFG exhibited increasing resonance attenuation loss for a particular wavelength when subjected to loading. When the DNLPFG was subjected to force loading, the transmission spectra were changed, showing a with wavelength shift and resonance attenuation loss. The experimental results showed that the resonant dip of the DNLPFG increased with increasing loading. The maximum resonant dip of the $40-{\mu}m$ DNLPFG sensor was -26.522 dB under 0.049-N loading, and the largest force sensitivity was -436.664 dB/N. The results demonstrate that the proposed DNLPFG has potential for force sensing applications.

• Transactions of the Korean Society of Automotive Engineers
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• v.12 no.6
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• pp.143-150
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• 2004

In this paper, resonant ultrasound spectroscopy(RUS) was used to determine the natural frequency of a ceramic ferrule and a ball lens. The ceramic ferrules are cylinderical shape with $\phi$ 2.56mm diameter and l0mm in length. Crack lengths of these ferrules are 10.40$\mu$m, 21.18$\mu$m and 32.35$\mu$m. The spherical ball lens was made of BK-7 glass, one's diameter in 2mm and 5mm. RUS system is consisted of spectrum analyzer, power amplifier, PZT sensor and support frame. The principle of RUS is that the mechanical resonant frequency of the materials depends on density and the coefficient of elasticity. Rus system is based on that given resonant frequency of the materials can be represented by the function of density and the coefficient of elasticity, and it is applied to excite specimen and to inspect the difference of natural frequency pattern between acceptable specimen and defective ones. Defect evaluation by RUS are performed to investigate the natural frequency measure of ferrule and ball lens.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1159-1163
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• 2012

In this paper, we would like to introduce two dimensional non-contact position sensor by using an electromagnetic induction based coil system and an algorithm to estimate the position of pointer. The sensor which will introduce in this paper is composed of a pointer including LC resonant circuit and a sensor board to detect the electromagnetic signal from the pointer. Because of the simplicity shape of the line antenna, low cost and free form curved shape of the sensor device is possible. In this research, we proposed a new two dimensional non-contact type electromagnetic sensor system and realized the proposed sensor device. From the experiments, the proposed device can be employed for the two dimensional position sensor.

• The Journal of the Korea institute of electronic communication sciences
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• v.4 no.2
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• pp.75-81
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• 2009

In this paper, Microwave doppler radar sensor operated in 10.525GHz is designed by dielectric resonant oscillator. According to doppler effects, a characteristic of Microwave sensor with FMCW was analyzed. The qualities of objects velocity and distance between object and microwave sensor by sensor output frequency difference was measured. As a result of Microwave doppler radar sensor, the prototype sensor is available for indoor burglar alarms and other application through FMCW signal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.387-391
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• 2004

[ $(Bi_{1/2}Na_{1/2})TiO_3$ ](BNT) is considered to be an excellent candidate for the key material of lead-free piezoelectric ceramic due to properties of strong ferroelectricity with a relatively large remanent polarization $Pr=38{\mu}C/cm^2$, and a large coercive field, Ec=73KV/cm. In this study, electrical properties of pressure sensor using a $0.96Bi_{0.5}(Na_{0.84}K_{0.16})_{0.5}TiO_3+0.04SrTiO_3+0.2wt%La_2O_3$ ceramics are investigated. Resonant frequency of pressure sensor was decreased with increasing pressure. However, its anti-resonant frequency was increased with increasing pressure.

• Journal of Sensor Science and Technology
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• v.24 no.3
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• pp.169-174
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• 2015

In this study, we developed a system to detect the various defects in the metallic objects using the phenomenon that the defects cause the changes of the natural resonant frequencies. Our system consists of a FFT Amp, an Auto Impact Hammer, a Hammer controller and a PC. Auto Impact Hammer creates vibrations in the metallic objects when tapped on the surface. These vibrational signals are converted to the voltage signals by an acceleration sensor attached to the metallic part surface. These analog voltage signals were fed into an ADC (analog-digital converter) and an FFT (fast fourier transform) conversion in the FFT Amp to obtain the digital data in the frequency domain. Labview graphical program was used to process the digital data from th FFT amp to display the spectrum. We compared those spectra with the standard spectrum to find the shifts in the resonant frequencies of the metal parts, and thus detecting the defects. We used PCB's acceleration sensor and TI's TMS320F28335 DSP (digital signal processor) to obtain the resolution of 2.93 Hz and to analyze the frequencies up to 44 kHz.