• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.250-250
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• ETRI Journal
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• v.28 no.6
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• pp.739-744
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• 2006

In this paper, we report numerically calculated results of testing a temperature-insensitive refractive sensor based on a planar-type long-period waveguide grating (LPWG). The LPWG consists of properly chosen polymer materials with an optimized thermo-optic coefficient for the core layer in a four-layer waveguide structure. The resonant wavelength shift below the spectral resolution of the conventional optical spectrum analyzer is obtained accurately over a temperature change of ${\pm}7.5^{\circ}C$ even without any temperature control. The refractive index sensitivity of the proposed grating scheme is about 0.004 per resonant wavelength shift of 0.1 nm for an optimized thermo-optic coefficient.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.328.2-328
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• 2002

General modeling of a resonant shunting damper has been made Iron piezoelectric sensor/actuator equation. It is found that an additional damping, which is augmented to a system, is generated by the shunt damping effect The transfer function of the tuned electrical absorber is derived for both series and parallel shunt circuit. The governing equations and associated boundary conditions are derived using Hamilton's Principle. The shunt voltage equation is also derived from the charge generated in PZT due to beam vibration. The frequency response function of the obtained mathematical model is compared with that of the tuned eledtrical absorber and experimental work. The vibration amplitude is reduced about 15 dB at targeted second mode frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.31-34
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• 1996

In this paper, the rheological chances in sensitive materials was investigated by using QCA(Quartz Chemical Analyzer). Langmuir-Blodgett method was used to transfer sensitive material to the quartz crystals because of its facility to control that amount, and deposited sensitive material has uniformity to compare with other methods respectively. For the gas sensor using mass loading effect of quartz crystal microbalance, generally the Sauberary equation has been believed to represent the only mass loading effect. But when the organic gas is adsorpted into sensitive material, the rheological changes are occurred with different pattern as to the kinds of gases. Thus, much simpler method to identify the organic or hazard gas will be obtained by the consideration of resonant frequency changes and resonant admittance changes simultaneously.

• Journal of the korean Society of Automotive Engineers
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• v.15 no.3
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• pp.81-88
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• 1993

This report describes the experimental research on the flow phenomena of the aq uaous polymer solution within the Cuette flow of the concentric, cylinders type with a wide circular gap. We have investigated the phenomena of the fluid flow through torque measuring in the system that the inner cylinder is stationary and the outer one is rotating. Geometrical parameters of the system are the gap ratio of t/R$_{0}$=0.2 and Aspect ratio of l/t=100. The torque increases considerably in about 420-480RPM, So, it is considered a turbulent transition boundary, the higher plymer concentration is, the lower torque value is and the higher transition Reynolds number is. In each of the polymer concentration, the unstable boundary of torque, that is, idiosyncrasies of torque is observed around 220-280RPM. and the boundary is looked upon as a resonant vibration which is caused by the inner cylinder and tortional vibration of torque sensor.r.

• The Journal of the Acoustical Society of Korea
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• v.26 no.2
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• pp.95-101
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• 2007

This paper presents the feasibilityof a thickness mode piezoelectric oscillator to detect damages in structures. The thickness mode oscillator sensor is composed of an electronic feedback oscillator circuit and a piezoelectric thickness mode vibrator to be attached to a structure of interest. Damage to the structure causes a change in the impedance spectrum of the structure, which results in a corresponding change of a resonant frequency of the structure. The oscillator sensor can instantly detect the frequency change in a very simple manner. Feasibility of the piezoelectric oscillator sensor was verified with a sample aluminum plate where artificial cracks of different lengths and number were imposed in sequence. Validity of the measurement was confirmed through comparison of the experimental data with the results of finite element analyses of a plate with cracks.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.1
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• pp.1-5
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• 2010

Acoustic emission(AE) has emerged as a powerful nondestructive tool to detect or monitor preexisting defects and leaks in the vessel structures. A Bragg grating based acoustic emission sensor system is developed. Various type of fiber Bragg grating sensor including the variable length of sensing part was fabricated and prototype sensor system was tested by using PZT pulser and pencil lead break sources. Two types of sensor attachment were used. First, the fiber Bragg grating sensor was attached fully to the surface using bonding agent. Second one is that one part of fiber was attached to the surface partly by bonding and the other part of fiber will be act as a cantilever. That is, the resonant frequency of the fiber Bragg grating sensor will depend on the length of sensing part. The final goal of the sensor system is to provide on-line monitoring of cracks or leaks in reactor vessel head penetration of nuclear power plants.

• Journal of Sensor Science and Technology
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• v.5 no.4
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• pp.71-79
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• 1996

The mechanism of electrochemical polymerization of polypyrrole was analyzed using Q.C.A. via measuring the resonant frequency and resonant resistance of AT-cut quartz crystal, whose electrodes were fabricated with indium tin oxide by sputtering method. The quantity of polymerized polypyrrole was able to be calculated from the resonant frequency and the viscoelasticity of polypyrrole film from resonant resistance. We found that the elastic film is formed at the first stage of the polymerization, but transformed to viscoelastic film later and that this transition repeated at some point. From these results, it was confirmed that the rheological characteristics of electrochemically polymerized polypyrrole thin film can be analyzed using Q.C.A.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.407-413
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• 1999

The resonant frequency of dielectric rod resonator can be calculated very accurately by means of the concept of electric and magnetic walls from the symmetry. But in a real situation, when the supporter is placed in the cavity, asymmetry appears due to the supporter and its dielectric constant. Then we need research into the resonance characteristic of asymmetric dielectric resonator. In this paper, for the dielectric rod resonator which is placed in the asymmetric position in the conducting cavity, the equation for resonance characteristic was derived and the resonant frequency was calculated with the eigenfunction expansion method. We found that the calculated resonant frequency is very accurate when it was compared with the experimental result and that asymmetry affects the resonant frequency more in TM mode than in TE or in hybrid mode.