• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.363-363
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• 2008

The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

• Journal of Energy Engineering
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• v.25 no.4
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• pp.124-132
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• 2016

In order to estimate the effect of flow distributors connected to an upper nozzle of CMT(Core Makeup Tank) on the thermal-hydraulic characteristics in the tank, a simplified 2 inch Small Break Loss of Coolant Accident(SBLOCA) was simulated by skipping the decay power and Passive Residual Heat Removal System(PRHRS) actuation. The CMT is a part of safety injection systems in the SMART (System Integrated Modular Advanced Reactor). Each test was performed with reliable boundary conditions. It means that the pressure distribution is provided with repeatable and reproducible behavior during SBLOCA simulations. The maximum flow rates were achieved at around 350 seconds after the initial opening of the isolation valve installed in CMT. After a short period of decreased flow rate, it attained a steady injection flow rate after about 1,250 seconds. This unstable injection period of the CMT coolant is due to the condensation of steam injected into the upper part of CMT. The steady injection flow rate was about 8.4% higher with B-type distributor than that with A-type distributor. The gravity injection during hot condition tests were in good agreement with that during cold condition tests except for the early stages.

• Geotechnical Engineering
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• v.13 no.5
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• pp.89-100
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• 1997

It is very improtant to evaluate the reliable nonlinear deformational characteristics of soils not only in the analysis of geotechnical structures under working stress conditions but also for the soil dynamic problems. Field testings such as crosshole and pressuremeter tests can be used to determine the modulus of soils under in-situ conditions, but it is not possible to determine the modulus over the entire strain amplitude range. Laboratory methods such as resonant column 1 torsional shear test can be used to determine the modulus over the whole strain amplitude range, but it is very difficult to obtain the representative undisturbed samples on the sixte. For the reliable evaluation of nonlinear deformation characteristics of soils on a typical site, small strain modulus obtained from field testy and nomalized modulus reduction curve determined by laboratory bests need to be combined. In this paper, laboratory and Held testy were performed at a sixte which consisted of granite wearthered residual boils to evaluate the nonlinear deformational characteristics of coils such as the effects of strain amplitude, loading frequency, confining pressure and sample disturbance. It has been shorn that when the effects of these factors are properly taken into account, the stiffness values evaluated by various field and labrotary tests are comparable to each other fairly well. Finally, the procedure to evaluate the nonlinear deformstional characteristics of the sixte was proposed.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.328-332
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• 2012

The work function of Ag (silver) is too low (~4.3 eV) to be used as an electrode of T-OLED (Top Emission Organic Light Emitting Diode). To solve this weakness, researches used plasma-, UV-, or thermal treatment on Ag films in order to increase the work function (~5.0 eV). So, most of studies have focused only on the work function of various treated Ag films, but studies focusing on nanomechanical properties were very important to investigate the efficiency and life time of T-OLED etc. In this paper, we focused on the mechanical properties of the Ag and $AgO_x$ film. The Ag was deposited on a glass substrate with the thickness of 150 nm by using rf-magnetron sputter with the power was fixed at 100 W and working pressure was 3 mTorr. The deposited Ag film was UV treated by UV lamp for several minutes (0~9 min). We measured the sheet resistance and mechanical property of the deposited film. From the experimental result, there were some differences of the sheet resistance and surface hardness of Ag thin film between short time (0~3 min) and long time UV treatment. These result presumed that the induced stress was taken place by the surface oxidation after UV treatment.

• Journal of Chest Surgery
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• v.46 no.5
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• pp.340-345
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• 2013

Background: This study aims to evaluate whether or not the method of right vertical axillary minithoracotomy (RVAM) is preferable to and as reliable as conventional sternotomy surgery, and also assesses its cosmetic results. Methods: Thirty-three patients (7 males, 26 females) with atrial septal defect were admitted to the Cardiovascular Surgery Clinic of Cukurova University from December 2005 until January 2010. The patients' ages ranged from 3 to 22. Patients who underwent vertical axillary minithracotomy were assigned to group I, and those undergoing conventional sternotomy, to group II. Group I and group II were compared with regard to the preoperative, perioperative and postoperative variables. Group I included 12 females and 4 males with an average age of $16.5{\pm}9.7$. Group II comprised 14 female and 3 male patients with an average age of $18.5{\pm}9.8$ showing similar features and pathologies. The cases were in Class I-II according to the New York Heart Association (NYHA) Classification, and patients with other cardiac and systemic problems were not included in the study. The ratio of the systemic blood flow to the pulmonary blood flow (Qp/Qs) was $1.8{\pm}0.2$. The average pulmonary artery pressure was $35{\pm}10$ mmHg. Following the diagnosis, performing elective surgery was planned. Results: No significant difference was detected in the average time of the patients' extraportal circulation, cross-clamp and surgery (p>0.05). In the early postoperative period of the cases, the duration of mechanical ventilator support, the drainage volume in the first 24 hours, and the hospitalization time in the intensive care unit were similar (p>0.05). Postoperative pains were evaluated together with narcotic analgesics taken intravenously or orally. While 7 cases (43.7%) in group I needed postoperative analgesics, 12 cases (70.6%) in group II needed them. No mortality or major morbidity has occurred in the patients. The incision style and sizes in all of the patients undergoing RVAM were preserved as they were at the beginning. Furthermore, the patients of group I were mobilized more quickly than the patients of group II. The patients of group I were quite pleased with the psychological and cosmetic results. No residual defects have been found in the early postoperative period and after the end of the follow-up periods. All of the patients achieved functional capacity per NYHA. No deformation of breast growth has been detected during 18 months of follow-up for the group I patients, who underwent RVAM. Conclusion: To conclude, the repair of atrial septal defect by RVAM, apart from the limited working zone for the surgeon in these pathologies as compared to sternotomymay be considered in terms of the outcomes, and early and late complications. And this has accounted for less need of analgesics and better cosmetic results in recent years.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.8
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• pp.5074-5081
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• 2015

A method for improving the warpage of the plastic part is a method of removing residual stress of the plastic product. that a non-uniform cooling are appeared in the injection molding process make uniform cooling. this study was developed the Rapid heating and cooling device used peltier module for uniform cooling. Make the Rapid heating and cooling device(RCHD), for Traditional water cooling device(TWCD) method and the Rapid heating and cooling method warpage were compared and were analyzed and the materials used amorphous ABS polymer. various warpage were compared for the process parameters such as packing pressure, packing time, resin temperature, mold temperature, In the amorphous ABS polymer, TWCD method has higher warpage than RCHD method and show the result to be a bit more uniform cooling. The distribution state of the ABS polymer was confirmed Through the Scanning electron microscope. In the TWCD method the distribution state of the polymer be densely distributed, and RCHS method be distributed wider than TWCD method. this is that injection molded parts be seen that cooling was made uniformly, As the temperature of the mold is gradually progress, Particles of the polymer is increased this is that internal stress was reduced.

• Journal of the Korean Geotechnical Society
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• v.32 no.6
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• pp.49-59
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• 2016

We develop liquefaction resistance curves, which represent the correlation between cyclic resistance ratio (CRR) and number of cycles (N) to estimate the build-up of residual excess pore pressure from simple shear tests performed for this study and also from published literature. The liquefaction curve is calculated from two models. The comparisons show that one of the models is not reliable because it underestimates CRR. The scatter of the data is shown to be significantly reduced when CRR is normalized to the resistance ratio at N = 15 ($CRR_{N=15}$). Use of the normalization is particularly useful because CRR can be easily estimated from field tests. From normalization, we propose mean, upper, and lower curves. The corresponding design equation and its parameters are also proposed. We believe that the proposed curves can be used for effective stress site response analyses and evaluation of the seismic performance of port structures.

• Horticultural Science & Technology
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• v.32 no.5
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• pp.636-644
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• 2014

This experiment examined the effects of preharvest Ca-chitosan spraying and short-term post-harvest treatment with high $pCO_2$ on the shelf-life of 'Seolhyang' strawberry fruit. Fruit firmness decreased when harvested late in the season and was little affected by Ca-chitosan spray treatments. Short-term treatment with high $pCO_2$ after harvest, however, significantly increased fruit firmness regardless of preharvest treatment. The combined treatment of Ca-chitosan spray and high $pCO_2$ led to an additional increase in shelf-life through delay of skin disorder, fruit decay incidence and firmness loss during simulated marketing. The residual effects of both treatments, however, were reduced when fruit were harvested late in the season. Fruit firmness was more affected by high $pCO_2$ treatment whereas decay and visual quality were affected by preharvest spraying with Ca-chitosan. Although more research is required to determine the optimum concentration of calcium and chitosan, and the optimal spray interval, our results show that the combined treatment of preharvest Ca-chitosan spray and postharvest high $pCO_2$ is effective in improving strawberry fruit shelf-life by increasing firmness and delaying decay.

• Journal of the Korean GEO-environmental Society
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• v.6 no.4
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• pp.47-58
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• 2005

Development of underground space is conducted for various useful facility and underground structures and deep excavation technology for reclaimed area has been researched and developed. The seepage flow and behavior of phreatic line in reclaimed area was predominated by transient flow caused by tidal action. Also the soil-water characteristic relation is most important factor for transient flow analysis, therefore the research about the soil-water characteristic is strongly required. In this paper, laboratory tests (pressure cell, desiccator, and tensiometer test) and theoretical analysis were performed to investigate the soil-water characteristic such as air-entry value, metric suction, and residual water content. And the feasibility of prediction method for soil-water characteristic are presented by transient seepage analysis and comparison between analysis results and in-situ measured seepage flux in LNG TK-00 storage tank. Based on the result of laboratory and theoretical analysis, Fredlund and Xing's method provide to work out well for reclaimed ground soils. Also, the transient analysis result is more reasonable and effective for design of deep excavation work in coastal and reclaimed ground.

• Preventive Nutrition and Food Science
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• v.7 no.1
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• pp.78-87
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• 2002

This study investigated the production of insoluble dietary fiber using forest waste and the dietary effect of manufactured insoluble fiber on physiological function in rat fed high cholesterol duets. Insoluble dietary fiber was prepared from the wood chips of oak (Quercus mongolica). The best condition for steam-explosion treatment for the preparation of insonuble dietary fiber was 25 kg/cm$^3$pressure for 6 minutes. In the chemical analysis of insoluble dietary fiber pretreated by 1% sodium hydroxide solution with steam-exploded wood, $\alpha$-cellulose content was 61.7% in the insoluble dietary fiber which contained 7.6% residual lignin. In order to compare insoluble dietary fiber with commercial $\alpha$-cellulose of physiological function, Sprague-Dawley male rats weighing 100$\pm$10 g were randomly assigned to one normal diet and five high cholesterol diet containing 1% cholesterol. The high cholesterol diet groups were classified as fiber free diet (FF group), 5% commercial $\alpha$-cellulose diet (5C group), 10% commercial $\alpha$-cellulose (l0C group), 5% insoluble dietary fiber dict (5M group), and 10% insoluble dietary fiber (10M group). The rats were fed ad libidum for 4 weeks. Food intake, weights gain, and food efficiency ratio in high cholesterol groups were higher than those of normal group, but there were no significant differences between the experimental groups. There were not any significant differences in the weights of livers, kidneys and small intestine of insoluble dietary fiber supplemented groups, but weight of cecum in all insolube dietary fiber group were significantly higher than those of FF group. A gstrointestinal transit time was decreased by supplementation of insoluble dietary fiber. Weight and water contents of feces in the insoluble dietary fiber supplemented groups were significantly higher than those of the FF group. There were not any significant differences in the activities of the glutamic pyruvic transaminase (GPT) and glutamic oxaloacetic transaminase (GOT) between the experimental groups. In conclusion, the manufactured insoluble dietary fiber and commercial insoluble fiber have the same physiological effects. The preparation method of the insoluble dietary fiber from the oak chips suited its purpose.