Design Fabrication and Test of Piezoelectric Multi-Layer Cantilever Microactuators for Optical Signal Modulation (초기변형 최소화를 위한 광변조 압전 다층박막 액추에이터의 설계, 제작 및 실험)
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- The Transactions of the Korean Institute of Electrical Engineers C
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- v.49 no.9
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- pp.495-501
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- 2000