• 제목/요약/키워드: residual Si

검색결과 437건 처리시간 0.029초

코발트 니켈 복합 실리사이드 공정에서 하부 형상에 따른 잔류 금속의 형상 변화 (Residual Metal Evolution with Pattern Density in Cobalt Nickel Composite Silicide Process)

  • 송오성;김상엽
    • 한국산학기술학회논문지
    • /
    • 제6권3호
    • /
    • pp.273-277
    • /
    • 2005
  • 새로이 제안된 15nm-Ni/15nm-Co의 적층구조로부터 제조된 NiCo 복합실리사이드를 실제 디바이스에 채용하기 위해, $SiO_2$ 스페이서를 가진 폴리실리콘 게이트 선폭이 $0.25\~l.5um$까지 변화하는 테스트그룹을 이용하여 30초-RTA를 이용한 실리사이드화 온도를 $700^{\circ}C\~1100^{\circ}C$까지 변화시키면서 이때 cleaning전후의 잔류금속의 생성모습을 확인하였다. RTA온도가 올라갈수록 $SiO_2$로 구성된 필드와 스페이서 상부와, 실리사이드가 형성된 게이트 상부에 $0.25{\mu}m$정도의 단축직경을 가진 타원형 잔류금속이 미로형 또는 게이트 방향으로 생성되는 특징이 있었고 동시에 응집이 많아지는 현상이 있었다. 응집이 많을수록 하부 절연층과의 반응도가 증가하여 절연특성이 저하될 수 있었고 과도한 습식제거 공정을 오래하여야 하므로 실험범위 내에서 가급적 저온 실리사이드화 열처리가 바람직하였다.

  • PDF

가변밸브 작동기구를 적용한 가솔린 기관의 잔류가스분율, 체적효율, 펌핑손실 예측을 위한 해석적 연구 (Numerical Analysis for Prediction of the Residual Gas Fraction, Volumetric Efficiency and Pumping Loss with Continuous Variable Valve Lift System in an SI Engine)

  • 조용석;이성욱;장익규;박정권;윤여빈;박영준;김현철;나병철
    • 한국자동차공학회논문집
    • /
    • 제18권2호
    • /
    • pp.7-13
    • /
    • 2010
  • To satisfy the needs on fuel economy and engine performance, continuous variable valve lift systems are applying to engines. In the CVVL system, fuel economy can be improved by reducing pumping loss during the induction process, and engine performance can be also improved by controlling volumetric efficiency and the residual gas fraction. Because the residual gas fraction directly affects volumetric efficiency, engine performance, combustion efficiency and emissions in SI engines, controlling residual gas fraction is one of the important things in engine development process. This analysis investigates the residual gas fraction and volumetric efficiency with changes of intake valve lifts and intake valve timings. In this study, unsteady state solutions were solved during exhaust and induction processes. Results show variation of the residual gas fraction and volumetric efficiency by changing intake valve timing and lift. Decreasing intake valve lift leads to increase the residual gas fraction and to decrease volumetric efficiency.

FeSiCr에 Fe50Ni가 첨가된 폴리머 복합 시트의 전자파 흡수 특성 (Electromagnetic Wave Absorbing Properties of FeSiCr and Fe50Ni Flaky Powder-Polymer Composite Sheet)

  • 이석문;김상문
    • 한국전기전자재료학회논문지
    • /
    • 제27권7호
    • /
    • pp.462-467
    • /
    • 2014
  • In this paper, we studied the magnetic composite sheets for electromagnetic wave noise absorber of quasi-microwave band by using soft magnetic FeSiCr and Fe50Ni flakes with the thickness of about $1{\mu}m$ and polymer. The magnetic hysteresis curve including saturation magnetization and residual magnetization and the complex permeability characteristics of the composite sheets were investigated to clarify the mixing effect on electromagnetic wave absorption properties. The saturation magnetization was decreased about 10% while the residual magnetization was increased about 15% and the real parts of complex permeability at below 500 MHz were increased 0.6~4 while those values at above 500 MHz were decreased 0.4~2.5 according to the change of contents of FeSiCr and Fe50Ni powders. As a result, the reflection loss can be moved to the lower frequency from 2~3 GHz to 1~1.5 GHz as the contents of Fe50Ni flaky powder into FeSiCr flaky powder was increased up to 50%.

$UV/O_3$을 이용한 Si contact hole 건식세정에 관한 연구 (Dry Cleaning of Si Contact Hole using$UV/O_3$ Method)

  • 최진식;고용득;구경완;김성일;천희곤
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제10권1호
    • /
    • pp.8-14
    • /
    • 1997
  • The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

  • PDF

화학적 기상 반응법에 의한 탄화규소 피복 흑연의 제조(II) (Fabrication of SiC Converted Graphite by Chemical Vapor Reaction Method(II))

  • 윤영훈;최성철
    • 한국세라믹학회지
    • /
    • 제36권1호
    • /
    • pp.21-29
    • /
    • 1999
  • 흑연 기판에 탄화규소 전환층을 형성하는데 있어서 기판의 밀도와 기공 크기 분포의 영향이 조사되었다. 전환층형성을 위한 화학 반응은 기판의 표면 또는 표면 하부에서 SiO 기체의 침투를 통해 이루어졌다. 전환 공정 동안 기판 표면에서의 충분한 양의 SiO 기체 침투 및 연속적인 화학반응에 요구되는 기공크기 분포는 1.0~10.0$\mu\textrm{m}$ 범위인 것으로 추정되엇다. 유한요소법에 의한 탄화규소 층의 응력 해석에서는 열적 불일치에 기인하는 잔류응력 분포를 나타냈다. 그러나. X-선 회절에 의해 탄화규소 층에서는 압축응력이 측정되었으며, 탄화규소 층에서의 잔류응력 분포에 대해 SiC 층과 흑연 기판간의 interlayer의 constraining 효과, 전환층의 치밀화 거동 및 입자성장에 의해 주로 영향받는 것으로 추정되었다.

  • PDF

스파크 점화 기관에서 밸브오버랩이 잔류가스율 변화에 미치는 영향 (Effect of Operating Conditions on the Residual Gas Fraction in an SI Engine)

  • 장진영;박용국;배충식;김우태
    • 한국자동차공학회논문집
    • /
    • 제10권6호
    • /
    • pp.11-18
    • /
    • 2002
  • Residual gas fraction in an engine cylinder affects engine performance, efficiency and emission characteristics. With high residual gas fractions, a flame speed and maximum combustion temperature are decreased and these are deeply related with combustion stability especially at idle and NOx emission at relatively high engine load. In this work, the residual gas fraction was calculated by an engine simulation code, which was validated by the experimental data (cylinder pressure and emissions) obtained from 4-cyliner spark ignition engine. A comparison between experimental and computational calculation results was made. The residual gas is generated mostly at low engine speed by the larger pressure difference between the intake and exhaust port. As the valve overlap duration was increased, the amount of residual gas in the cylinder, the amount of HC emission in the exhaust gas and the variation of power output increased.

플라즈마 용사법에 의한 지르코니아 코팅에서의 잔류응력에 대한 연구 (Residual stresses on plasma sprayed zirconia coatings)

  • 류지호;강춘식
    • Journal of Welding and Joining
    • /
    • 제7권4호
    • /
    • pp.46-55
    • /
    • 1989
  • Zirconia coatings are performed by the plasma spraying on the substrate of Al-Si alloy. In case of plasma sprayed ceramic coatings, it is important to control properly residual stress occurred during cooling process. Residual stress in coating layer varies with sprayed conditions and is influenced greatly by the coating layer thickness. Surface residual stress due to coating layer thickness is measured by X-ray diffraction method and the residual stress in coating layer is estimated by the deflection of coating layer when the restraint force in substrate was removed. When zirconia was coated on the substrate, tensile residual stress remains on zirconia coated surface layer. The tensile stress is increased to 0.35mm thickness and after 0.45mm thickness it is decreased abrouptly. A thick bond and composite coating reduce the zirconia surface stress and composite coating controls effectively the thick zirconia surface stress.

  • PDF

Performance Analysis of Full-Duplex Relay Networks with Residual Self-Interference and Crosstalk

  • Liu, Guoling;Feng, Wenjiang;Zhang, Bowei;Ying, Tengda;Lu, Luran
    • KSII Transactions on Internet and Information Systems (TIIS)
    • /
    • 제10권10호
    • /
    • pp.4957-4976
    • /
    • 2016
  • This paper investigates the error performance of the amplify-and-forward (AF) relaying systems in the context of full-duplex (FD) communication. In addition to the inherent self-interference (SI) due to simultaneous transmission and reception, coexistent FD terminals may cause crosstalk. In this paper, we utilize the information exchange via the crosstalk channel to construct a particular distributed space-time code (DSTC). The residual SI is also considered. Closed-form pairwise error probability (PEP) is first derived. Then we obtain the upper bound of PEP in high transmit power region to provide more insights of diversity and coding gain. The proposed DSTC scheme can attain full cooperative diversity if the variance of SI is not a function of the transmit power. The coding gain can be improved by lengthening the frame and proper power control. Feasibility and efficiency of the proposed DSTC are verified in numerical simulations.