• Title/Summary/Keyword: residual Si

Search Result 439, Processing Time 0.023 seconds

R-Curve Behavior of Particulate Composites of ${Al_2}{O_3}$ Containing SiC and $ZrO_2$: II. Theoretical Analysis (SiC와 $ZrO_2$를 함유하는 ${Al_2}{O_3}$ 입자복합체의 균열저항거동: II. 이론적 분석)

  • 나상웅;이재형
    • Journal of the Korean Ceramic Society
    • /
    • v.37 no.4
    • /
    • pp.368-375
    • /
    • 2000
  • Fracture toughness of particulate composites of Al2O3/SiC, Al2O3/ZrO2 and Al2O3/ZrO2/SiC was analysed theoretically. According to the suggested particle bridging model for obtaining the R-curve height, the crack extension resistance for the long crack was linearly proportional to the residual calmping stress at the interface between the second phase and the matrix. It was also a function of the particle size and the content. It was confirmed that the rising R-curve behavior of Al2O3 containing 30 vol% SiC particles of 3${\mu}{\textrm}{m}$ was owing to the strong crack bridging by SiC particles. For Al2O3/ZrO2/SiC composites, the tensional stress from the 3${\mu}{\textrm}{m}$ SiC particles was large enough to activate the spontaneous transformation of the ZrO2. The crack extension resistance due to the particle bridging mechanism did not seem to be affected much by the coupled toughening, but its resultant toughness increase could be significantly smaller due to the dependency on the matrix toughness.

  • PDF

Rolling Fatigue Life of Silicon Nitride Ceramic Balls (질화규소 세라믹볼의 구름피로수명)

  • 최인혁;박창남;최헌진;이준근;신동우
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
    • /
    • 1999.06a
    • /
    • pp.119-126
    • /
    • 1999
  • The rolling fatigue lives (RFL) of five kinds of silicon nitride balls were investigated. Four kinds of Si$_3$N$_4$ balls were fabricated using different raw materials, sintering aids and sintering conditions, Commercially available Si3N4 ball was also studied for comparison. All the balls were finished up to the dimensional accuracy of Grade 10 defined in KS B 2001 (Steel Balls for Ball Bearings) with a size of 9.525mm. RFL tests were then conducted under the initial theoretical maximum contact stress 6.38 GPa and the spindle speed 10,000 rpm. Gear oil was provided by oiled race as lubricant. The results of RFL test indicated the prerequisitic conditions for the long rolling life of Si$_3$N$_4$ball : (1) the high density, (2) mjcrostructures consisted of small uniformly distributed grains, (3) little glassy phase in grainboundary, and (4) little crystalline phase and secondary phase that induces residual thermal stress due to the differences of thermal expansion coefficient with Si$_3$N$_4$Phase.

  • PDF

Thermomechanical Analysis of Functionally Gradient Al-$SiC_{p}$ Composite for Electronic Packaging (전자패키지용 경사조성 Al-$SiC_{p}$ 복합재료의 열 . 기계적 변형특성 해석)

  • 송대현;최낙봉;김애정;조경목;박익민
    • Proceedings of the Korean Society For Composite Materials Conference
    • /
    • 2000.04a
    • /
    • pp.175-183
    • /
    • 2000
  • The internal residual stresses within the multilayered structure with shan interface induced by the difference in thermal expansion coefficient between the materials of adjacent layers often provide the source of failure such as delamination of interfaces and etc. Recent development of the multilayered structure with functionally graded interface would be the solution to prevent this kind of failure. However a systematic thermo-mechanical analysis is needed fur the customized structural design of multilayered structure. In this study, theoretical model for the thermo-mechanical analysis is developed for multilayered structures of the Al-$SiC_p$ functionally graded composite for electronic packaging. The evolution of curvature and internal stresses in response to temperature variations is presented for the different combinations of geometry. The resultant analytical solutions are used for the optimal design of the multilayered structures with functionally graded interface as well as with sharp interface.

  • PDF

Deposition of $SiC_xN_y$ Thin Film as a Membrane Application

  • Huh, Sung-Min;Park, Chang-Mo;Jinho Ahn
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.8 no.1
    • /
    • pp.39-43
    • /
    • 2001
  • $SiC_{x}N$_{y}$ film is deposited by electron cyclotron resonance plasma chemical vapor deposition system using $SiH_4$(5% in Ar), $CH_4$ and $N_2$. Ternary phase $SiC_{x}N$_{y}$ thin film deposited at the microwave power of 600 W and substrate temperature of 700 contains considerable amount of strong C-N bonds. Change in $CH_4$flow rate can effectively control the residual film stress, and typical surface roughness of 34.6 (rms) was obtained. Extreme]y high hardness (3952 Hv) and optical transmittance (95% at 633 nm) was achieved, which is suitable for a LIGA mask membrane application.

  • PDF

Rolling Fatigue Life of Silicon Nitride Ceramic Balls (질화규소 세라믹볼의 구름피로수명)

  • 최인혁;박창남;최헌진;이준근;신동우
    • Tribology and Lubricants
    • /
    • v.15 no.2
    • /
    • pp.150-155
    • /
    • 1999
  • The rolling fatigue lives (RFL) of five kinds of silicon nitride balls were investigated. Four kinds of Si$_3$N$_4$balls were fabricated using different raw materials, sintering aids and sintering conditions. Commercially available Si$_3$N$_4$ball was also studied for comparison. All the balls were finished up to the dimensional accuracy of Grade 10 defined in KS B 2001 (Steel Balls fer Ball Bearings) with a size of 9.525 mm. RFL tests were then conducted under the initial theoretical maximum contact stress 6.38 GPa and the spindle speed 10,000 rpm. Gear oil was provided by oiled race as lubricant. The results of RFL test indicated the prerequisitic conditions for the long rolling life of Si$_3$N$_4$ball : (1) the high density, (2) microstructures consisted of small uniformly distributed grains, (3) little glassy phase in grainboundary, and (4) little crystalline phase and secondary phase that induces residual thermal stress due to the differences of thermal expansion coefficient with Si$_3$N$_4$phase.

Hertzian Crack Suppression and Damage Tolerance of Silicon Nitride Bilayer

  • Lee, Kee-Sung;Kim, Do-Kyung;Lee, Seung-Kun;Lawn, Brian R.
    • The Korean Journal of Ceramics
    • /
    • v.4 no.4
    • /
    • pp.356-362
    • /
    • 1998
  • Hertzian crack suppression phenomena and relatively high damage tolerance were investigated in hard/soft silicon nitride ($Si_3N_4$) bilayers. Coarse $\alpha}-Si_3N_4$ powder was wsed for the hard coating layer and fine $\alpha}-Si_3N_4$ powder was used for the soft substrate layer. The two layers were designed with a strong interface. Hertzian indentation was used to investigate contact fracture and damage tolerance property. Hertzian crack suppression has occurred with increasing applied load and decreasing coating thickness. The crack suppression contributed strength improvement, especially in the bilayers with thinner coatings. Ultimately, the combination of hard coating with soft but tough underlayer improved the damage tolerance of brittle $Si_3N_4$ ceramics.

  • PDF

Low-Temperatrue Synthesis of Mullite Powders by the Emulsion Technique (MgO-Al2O3-SiO2계 요업원료의 제조 및 소결특성 -에멀젼법에 의한 Mullite분체의 저온합성-)

  • 현상훈;이희수;송승룡
    • Journal of the Korean Ceramic Society
    • /
    • v.26 no.3
    • /
    • pp.361-370
    • /
    • 1989
  • Mullite powders were synthesized from the common solution of aluminum sulfate and sodium silicate solutions by the emulsion-hot kerosene technique. The reaction temperature and mechanism for mullitization and the characteristics of synthesized mullite powders were investigated. The effect of Na components introduced from sodium silicate solution on the physical property and microstructure of sintered mullite was also examined. It was proved that mullites were formed at 75$0^{\circ}C$ through the reaction mechanism of Na2O.2.2SiO2+3.3Al2(SO4)3longrightarrow1.1(3Al2O3.2SiO2)+Na2SO4+8.9SO3. Synthetic mullite powders consisted of the compositiion of 3Al2O3.2SiO2 and showed highly agglomeration of hollow spherical particles of 1${\mu}{\textrm}{m}$ diameter. The density and fracture toughness of sintered mullites were somewhat reduced because of the effect of a very small amount of residual Na components.

  • PDF

Light-emitting mechanism varying in Si-rich-SiNx controlled by film's composition

  • Torchynska, Tetyana V.;Vega-Macotela, Leonardo G.;Khomenkova, Larysa;Slaoui, Abdelilah
    • Advances in nano research
    • /
    • v.5 no.3
    • /
    • pp.261-279
    • /
    • 2017
  • Spectroscopic investigation of Si quantum dots (Si-QDs) embedded in silicon nitride was performed over a broad stoichiometry range to optimize light emission. Plasma-enhanced chemical vapor deposition was used to grow the $SiN_x$ films on Si (001) substrates. The film composition was controlled via the flow ratio of silane ($SiH_4$) and ammonia ($NH_3$) in the range of R = 0.45-1.0 allowed to vary the Si excess in the range of 21-62 at.%. The films were submitted to annealing at $1100^{\circ}C$ for 30 min in nitrogen to form the Si-QDs. The properties of as-deposited and annealed films were investigated using spectroscopic ellipsometry, Fourier transform infrared spectroscopy, Raman scattering and photoluminescence (PL) methods. Si-QDs were detected in $SiN_x$ films demonstrating the increase of sizes with Si excess. The residual amorphous Si clusters were found to be present in the films grown with Si excess higher than 50 at.%. Multi-component PL spectra at 300 K in the range of 1.5-3.5 eV were detected and nonmonotonous varying total PL peak versus Si excess was revealed. To identify the different PL components, the temperature dependence of PL spectra was investigated in the range of 20-300 K. The analysis allowed concluding that the "blue-orange" emission is due to the radiative defects in a $SiN_x$ matrix, whereas the "red" and "infrared" PL bands are caused by the exciton recombination in crystalline Si-QDs and amorphous Si clusters. The nature of radiative and no radiative defects in $SiN_x$ films is discussed. The ways to control the dominant PL emission mechanisms are proposed.

The Residual Stress of TiN Thin Film Deposited by PECVD (PECVD에 의해 증착된 TiN 박막의 잔류응력)

  • Song, K.D.;Nam, D.H.;Lee, I.W.;Lee, G.H.;Kim, M.I.
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.6 no.2
    • /
    • pp.70-78
    • /
    • 1993
  • The presence of a residual stress in a thin film affects the properties and performances of the film, so the study of stress in a film must be very important. In this study, therefore, considering the characteristics of PECVD process, it was discussed that the residual stress, measured by $sin^2{\Psi}$ method, fo TiN films deposited on substrates with different TECs (thermal expansion coefficients) changed with film thickness. As a results, it was obtained that the residual stress of TiN film was compressive stress about all kinds of substrates and increased with film thickness. Also, the compressive residual stresses of TiN films increased in Si, Ti, STS304 order. According to the above results, we confirmed that the changes of residual stress of TiN film with substrates were due to the thermal stress originated form the difference in the TECs of the film and substrates, and that the intrinsic stress had dominating effect on the residual stress of TiN film deposited by PECVD. And in this study, the intrinsic stress of TiN film was compressive stress in spite of the Zone 1 structure. It is due to the entrapment of impurities in grain boundary or void.

  • PDF

Analysis of Residual Stress of Ceramic/Metal Joint (세라믹/금속 접합재의 잔류응력 해석)

  • Park, Young-Chul;Hue, Sun-Chul;Kim, Kwang-Young
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.14 no.1
    • /
    • pp.7-15
    • /
    • 1994
  • The two-dimensional elastoplastic analysis was peformed to reveal a detail residual stress distribution of ceramic/metal joint specimen using finite element method and X-ray method. The highest tensile residual stress, ${\sigma}_x$ perpendicular to the interface appeared at the edge of the ceramic near the interface. In the vicinity of the interface, the high stress concentration occurs and residual stress distributes three-dimensionally. Therefore, the measured stress distribution differed remarkably from the result of the two-dimensional finite-element analysis. Especially at the center of the specimen near the interface, the residual stress, ox obtained from the finite element analysis was compressive, whereas X-ray measurement yielded tensile ${\sigma}_x$. Therefore, it is also attempted to investigate the finite element model for the prediction of residual stress ${\sigma}_x$ distributed nearly the interface of joint.

  • PDF