• Transactions on Electrical and Electronic Materials
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• v.9 no.1
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• pp.12-15
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• 2008

Hafnium oxynitride films have been deposited onto a silicon substrate by means of radio frequency (RF) reactive sputtering using a hafnium dioxide $(HfO_2)$ target with a variety of nitrogen! argon $(N_2/Ar)$ gas flow ratios. Auger electron spectroscopy (AES)results confirm that $N_2$ was successfully incorporated into the HfON films. An increase in the $N_2/Ar$ gas flow ratio resulted in metal oxynitride formation. The films prepared with a $N_2/Ar$ flow ratio of 20/20 sccm show (222), (530), and (611) directions of $HfO_2N_2$, and the (-111), (311) directions of $HfO_2$. From X-ray reflectometry measurements, it can be concluded that with $N_2$ incorporated into the HfON films, the film density increases. The density increases from 9.8 to $10.1g/cm^3$. XRR also reveals that the surface roughness is related to the $N_2/Ar$ flow ratio.

• Journal of the Korean institute of surface engineering
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• v.24 no.1
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• pp.24-24
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• 1991

Cr-N films were deposited on low-carbon steel sheets by the reactive arc-induced ion plating (AIIP). The influence of the deposition conditions (nitrogen pressure and substrate bias voltage) on the crystal orientation, morphology and microhardness of the Cr-N films has been investigated using x-ray diffractometer and scanning electron microscope. The impurities and contaminations on the surface and at the interface, and the layer-by-layer compositions of the film have been analyzed using scanning Auger multiprobe (SAM) and glow discharge spectroscope (GDS). The mixed state of Cr and Cr2N turned out to have a fine fibrous structure. The Cr2N films were deposited at a wide range of nitrogen flow rates. The orientations of Cr2N films were mainly (110) and (111), and the intensity of the (111) peak increased as the substrate bias voltage increased. The micorstructure of the Cr2N film was dense and no columnar structure was observed. The films in the mixed state of Cr2N and CrN were also dense without columnar structure. The maximum microhardness of the Cr-N films was 2400 kg/$\textrm{mm}^2$ at 10gf load.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.162-167
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• 1992

Tic and TiN layers were deposited on the stainless steel substrate by the reactive RF sputtering. Ar was used for sputtering gas and CzHz and Nz were used for reaction gas. Deposition rate increased linearly to the applied RF power, and decreased as the partial pressure ratio of sputter gas to reactive gas increased. The thin layers were stoichiometric at the partial pressure ratio of 0.03 for Tic and at partial pressure ratio of 0.05 for TiN. The morphologies and structures of the thin layers were investigated by AES, SEM and TEM. In addition, N+ ion was implanted to Tic and the resulting influence on the film and annealing effects were also examined.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.2
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• pp.71-84
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• 2000

A study on adhesion and wear resistance of VC(vanadium carbide) coating on die steels, STD11 and STD61, has been carried out. The VC coating on the die steels was made by immersing them in molten borax bath, a kind of TRD(thermo-reactive deposition and diffusion). Adhesion strength and wear resistance were investigated using scratch test, indentation test and plate-disc test(Ogoshi type) respectively. The influence of sliding distance on the amount of wear has been determined and dominant wear mechanisms has been characterized using optical microscopy, scanning electron microscopy and EDS spectroscopy. The critical adhesion strength($L_c$) between VC coating layer and substrate(STD11) was increased to 60N($L_c$) in the scratch test. In the case of STD61, the strength increased to 24N. The wear resistance of VC coated die steels was excellent because the diffusion layer formed just below the coating layer. The dominant wear mechanism was identified as adhesive wear for VC coating die steels which were worn by combination of cracking and plucking of VC fragments and disc.

• Journal of the Korean institute of surface engineering
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• v.25 no.1
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• pp.24-33
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• 1992

Cr-N films were deposited on low-carbon steel sheets by the reactive arc-induced ion plating (AIIP). The influence of the deposition conditions (nitrogen pressure and substrate bias voltage) on the crystal orientation, morphology and microhardness of the Cr-N films has been investigated using x-ray diffractometer and scanning electron microscope. The impurities and contaminations on the surface and at the interface, and the layer-by-layer compositions of the film have been analyzed using scanning Auger multiprobe (SAM) and glow discharge spectroscope (GDS). The mixed state of Cr and Cr₂N turned out to have a fine fibrous structure. The Cr₂N films were deposited at a wide range of nitrogen flow rates. The orientations of Cr₂N films were mainly (110) and (111), and the intensity of the (111) peak increased as the substrate bias voltage increased. The microstructure of the Cr₂N film was dense and no columnar structure was observed. The films in the mixed state of Cr₂N and CrN were also dense without columnar structure. The maximum microhardness of the Cr-N films was 2400 kg/㎟ at 10 gf load.

• Korean Journal of Plant Resources
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• v.11 no.2
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• pp.173-178
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• 1998

The feeding effects of Herba hottuynia extracts on the lipids profiles and the content of TAB-reactive substances were evaluated in rats fed a high cholesterol diet. Hot water or ethanol extracts of the dried leave were evaporated and lyophilized . The experimental animals wer edevided to four groups and fed the following diets for 4 weeks : BAsal (cholesterol-free diet), CHOL(cholesterol-enriched diet),CW (cholesterol plus water extract) and CE(cholesterol plus ethanol extract). Dietary cholesterol increased significantly the activities of serum GOT and GPT, but the extracts feeding (0.5% of diet) did not influence the activities induced by dietary cholesterol. Although dietary cholesterol increased significantly the concentrationof serum andliver cholesterol, it tended to decrease the concentation of serum triglycerides. CHolesterol feeding had a lowering effect on the lipid peroxidation value of serum, but not inliver.Furthermore, the extracts feeding, especially water extract, decreased markedly the liver peroxidation value. The results suggest that Houttyunia cordata extracts have an in vivo antioxidant effect, judged from the TBA value in the liver rats fed a high cholesterol diet.

• Journal of Institute of Control, Robotics and Systems
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• v.8 no.11
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• pp.954-962
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• 2002

In a park or street, we can see many people jogging or walking with their dogs tracking their masters. In this study, an entertainment robot that imitates a dog's behavior is created. The robot's task is tracking a moving target that is recognized as the master. In order to design the robot, the ecological approach. in which the robot's goals and surroundings heavily influence its design, is used. A three-wheel type locomotion system is designed as the robot's physical structure which can follow a human jogging in outdoor space like a park. A sensor system which can detect the position of a master for the robot in the outdoor space, is developed. This sensor system consists of a signal transmitter which is at the hand of a master and some sensors which are mounted on the robot. The transmitter emits RF(radio frequency) and ultrasonic signals and the sensors detect the direction and distance from the robot to the transmitter by using the received signals. For the control architecture of the robot, a purely reactive behavior-based method is used in order to increase speed of response. The developed robot is evaluated through experiments conducted in indoor and outdoor environments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.409-414
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• 1999

The influence of ion beam energy and reactive oxygen partial pressure on the electrical and crystallographic characteristics of transition metal oxide compound(Cr0x) film was studied in this paper. Chromium oxide films were prepared onto the coverglass using Ion Beam Sputter Deposition(1BSD) technique according to the processing conditions of the partial pressure of reactive oxygen gas and ion beam energy. Crystallinity and grain size of as-deposited films were analyzed using XRD analysis. Thickness and Resistivity of the films were measured by $\alpha$-step and 4-point probe measurement. As results, according to the XRD, XPS and resistivity measurement, the deposited films were the cermet type films which has a crystal structure including amorphous oxide(a-oxide) phase and metal Cr phase simultaneously. The increasernent of the ion b m energy during the deposition process happened to decreasernent of metal Cr grain size and the rapid change of resistivity above the critical $O_2$ partial pressure.

• Transactions on Electrical and Electronic Materials
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• v.1 no.2
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• pp.23-27
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• 2000

Indium in oxide(ITO) films have been deposited on PET and glass substrates by DC reactive magnetron sputtering without post-deposition thermal treatment, The high quality for microstructure, electrical and optical properties of the as-deposited ITO films on unheated substrates is dominated by the sputtering parameters, The influence of the working gas pressure, DC power and oxygen partial pressure has been systematically investigated, The lowest DC power, and oxygen partial pressure has been systematically investigated, The lowest resistivity of ITO films deposited on PET substrates was 6$\times$10$^{-4}$ $\Omega$cm. It has been obtained at a working pressure of 3 mTorr and DC power of 30 W. The sheet resistance and optical transmittance of these film were 22 $\Omega$/square and 84% respectively. The best values of figures of merit for the electrical and optical characteristics such as T/ $R_{sh}$ and $T^{10}$ / $R_{sh}$ are approximately 38.1 and 7.95($\times$10$^{-3}$ $\Omega$$^{-1}$ ), respectively.

• Journal of Korean Society of Water and Wastewater
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• v.12 no.4
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• pp.78-85
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• 1998

Strains degrading and decolorizing reactive dyes, Procion blue HEGN and Procion red HE7B were isolated from water system, are named as RBK1 and RRK, the growth characteristics of which were investigated. Decolorization efficiencies after 42 hrs in batch culture were 95% and 77%, respectively. and the optimal culture condition of temperature and pH were $30^{\circ}C$, 7.0. Decolorization efficiencies in condition of aerobic shaking culture by strains RBK1 and RRK conspicuously increased, and culture by strain RBK1 was found as 95% after 42 hrs, while standing culture was 64%, Optimum nitrogen source was peptone, and It was found that decolorization efficiencies by strains RBK1 and RRK increased up to 4,000mg/l of peptone concentration as nitrogen source, but peptone concentration did' nt influence the decolorization efficiency in above 4,000mg/l. When the concentration of dyes were more than 800 mg/l and 400 mg/l respectively, the strains RBK1 and RRK, which degrade Procion bule HEGN and Procion red HE7B, showed a sharply decreased decolorization efficiencies; then the specific growth rate were $0.25hr^{-1}$ and $0.09hr^{-1}$.