• Title/Summary/Keyword: rapid processing

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Control of Wafer Temperature Uniformity in Rapid Thermal Processing using an Optimal Iterative teaming Control Technique (최적 반복 학습 제어기법을 이용한 RTP의 웨이퍼 온도균일제어)

  • 이진호;진인식;이광순;최진훈
    • 제어로봇시스템학회:학술대회논문집
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    • 2000.10a
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    • pp.358-358
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    • 2000
  • An iterative learning control technique based on a linear quadratic optimal criterion is proposed for temperature uniformity control of a silicon wafer in rapid thermal processing.

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Development of Sheet Deposition Type Rapid Prototyping System Minimizing Post Processing (후처리를 최소화하는 판재적층방식 쾌속조형기의 개발)

  • Cho, In-Haeng;Lee, Kun-Woo;Song, Yong-Ak
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.7
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    • pp.210-218
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    • 1999
  • Sheet deposition type rapid prototyping system have many advantages : high build speed, low operating cost, large part size, no phase change, no need for support generation, and forth. However, those sheet deposition type rapid prototyping system require an additional post processing to remove excessive material attached to the part. This post processing is time consuming and labor intensive. Moreover, it is difficult for those system to fabricate parts with hollow cores and internal cavities. A new sheet deposition type rapid prototyping system that minimizes the post processing is proposed. The proposed system automatically removes excessive material in a peeling-off process between two cutting processes. In this way, the proposed system can reduce the post-processing time and cost as well as the limitation of the feasible geometric shapes in the conventional sheet deposition system.

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Rapid and Accurate GPS Data Processing with Ultra-rapid Orbits (초신속궤도력을 이용한 신속한 고정밀 GPS 데이터 처리)

  • 박관동;조정호;하지현;임형철
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.21 no.4
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    • pp.309-316
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    • 2003
  • Rapid and accurate data processing is required in many GPS(Global Positioning System) applications including surveying. While one can use four different kinds of GPS satellite orbits, we evaluated the accuracy and precision of each kind of orbits to find the best candidate for rapid and accurate data processing. The four different kinds of orbits we: broadcast orbits from GPS satellites; and ultra-rapid orbits, rapid orbits, and precise orbits provided by international GPS data analysis centers such as IGS. With GIPSY and ultra-rapid orbits, we could get the positioning accuracy of 1.5cm from seven days of GPS data. From this study, we conclude that rapid and accurate data processing is achieved with GIPSY and ultra-rapid orbits.

광조형을 이용한 마이크로가공에 관한 기초적인 연구

  • 김동욱
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1996.04a
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    • pp.161-165
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    • 1996
  • Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main way to manufacture micromachine in the past. Because these processing method was 2.5-dimensional, there was the limit in processing perfect three-dimensional micromachine. In this study, we developed the rapid prototyping system for micromachine and tested its property. We also realized .mu. m - order processing and three-dimensional structure processing. The results showed the possibility of manufacturing micromachine with the rapid prototyping system

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Minimization of Post-processing area for Stereolithography Parts by Selection of Part Orientation (부품방향의 선정을 통한 광조형물의 후가공면적 최소화)

  • Kim, Ho-Chan;Lee, Seok-Hee
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.11
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    • pp.2409-2414
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    • 2002
  • The surfaces of prototypes become rough due to the stair-stepping which is the inevitable phenomenon in the Rapid Prototypes are not used only for the verification of feature. The grinding, coating, or the composition of them is a main operation in post-processing in which lots of costs and long build time are needed. The solution is proposed to increase the efficiency of rapid prototyping by minimizing or removing the composition of them is a main operation in post-processing in which lots of costs and long build time are needed. the solution is proposed to increase the efficiency of rapid prototyping by minimizing or removing the regions for post-processing. the factors to cause the surface roughness and their effects are analyzed through the experiments. Software modules are developed to predict the surface roughness of each face in the prototyping with the result. An experimental compensation method is developed to apply the modules to various RP equipments, materials and build styles. The build direction is searched with use of genetic algorithm to maximize the total areas of the surface of which roughness is better than the user-defined value.

Analytical Study on Traditional Rapid-brew Alcoholic Beverages of Three Days or More I. About Brewing from Regular Rice (삼일주와 삼일 기이내로 빚어지는 우리나라의 속성주 I. 쌀로 빛은 속성주)

  • 전정일;신민자;최영진;김현숙;이혜정;정재홍;백숙은
    • Journal of the East Asian Society of Dietary Life
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    • v.9 no.3
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    • pp.267-276
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    • 1999
  • This study was carried out to understand the brewing and processing methods of rapid-brew alcoholic beverages. In the contents of 45 classical records, there were 68 items about rapid-brew alcoholic beverages. and single and double-brew alcoholic beverages. Those alcoholic beverages. of the 68 items studied, were made iron green grown at that time-rice, glutinous rice, regular rice. Selected 38 items among those brew, alcoholics glution rice, were distributed into 34 patterns. Four patterns, grounded on rapid-brewing and processing methods, were set one thing to another and analyzed.

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Analytical Study on Traditional Rapid-brew Alcoholic Beverages of Three Days or More II. About Brewing from Glutinous Rice (삼일주와 삼일 기이내로 빚어지는 우리나라의 속성주 II. 참쌀로 빛은 속성주)

  • 전정일;신민자;최영진;김현숙;이혜정;정재홍;백숙은
    • Journal of the East Asian Society of Dietary Life
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    • v.9 no.3
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    • pp.277-288
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    • 1999
  • This study was carried out to understand the brewing and processing methods of rapid-brew alcoholic beverage. In the contents of 45 classical records, there were 68 items about rapid-brew alcoholic beverage and sin91e and double brew alcoholic beverage. Those alcoholic beverage of 68 items above, were made from green grown at that time-rice, glutinous rice. regular rice. Selected 38 items among those brewages. alcoholics from glutinous rice, were distributed into 4 patterns. Four patterns, grounded on rapid-brewing and processing methods, were set one thing to another and analyzed.

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Application of Delaunay Triangulation on RP (Delaunay삼각형 분할법의 RP에의 응용)

  • 명태식;채희창;김옥현
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.8 no.3
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    • pp.35-41
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    • 1999
  • STL which is used in Rapid Prototyping is composed of a lot of triangular facets. The number of triangles and the shapes of these triangles determine the quality of STL. Therefore, proper algorithm is necessary to enhance the quality of triangular patch. In this paper we used the Delaunay triangulation method to apply to following processes. 1) On processing for reducing sharp triangles which cause errors on intersection. 2) On processing for connecting two or more collinear edges. 3) On processing for deleting unnecessarily inserted points in coplanar polygon.

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A robust controller design for rapid thermal processing in semiconductor manufacturing

  • Choi, Byung-Wook;Choi, Seong-Gyu;Kim, Dong-Sung;Park, Jae-Hong
    • 제어로봇시스템학회:학술대회논문집
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    • 1995.10a
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    • pp.79-82
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    • 1995
  • The problem of temperature control for rapid thermal processing (RTP) in semiconductor manufacturing is discussed in this paper. Among sub=micron technologies for VLSI devices, reducing the junction depth of doped region is of great importance. This paper investigates existing methods for manufacturing wafers, focusing on the RPT which is considered to be good for formation of shallow junctions and performs the wafer fabrication operation in a single chamber of annealing, oxidation, chemical vapor deposition, etc., within a few minutes. In RTP for semiconductor manufacturing, accurate and uniform control of the wafer temperature is essential. In this paper, a robustr controller is designed using a recently developed optimization technique. The controller designed is then tested via computer simulation and compared with the other results.

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