• Title/Summary/Keyword: radial load

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Dependence of Dishing on Fluid Pressure during Chemical Mechanical Polishing

  • Higgs III, C. Fred;Ng, Sum Huan;Zhou, Chunhong;Yoon, In-Ho;Hight, Robert;Zhou, Zhiping;Yap, LipKong;Danyluk, Steven
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.441-442
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    • 2002
  • Chemical mechanical polishing (CMP) is a manufacturing process that uses controlled wear to planarize dielectric and metallic layers on silicon wafers. CMP experiments revealed that a sub-ambient film pressure developed at the wafer/pad interface. Additionally, dishing occurs in CMP processes when the copper-in-trench lines are removed at a rate higher than the barrier layer. In order to study dishing across a stationary wafer during polishing, dishing maps were created. Since dishing is a function of the total contact pressure resulting from the applied load and the fluid pressure, the hydrodynamic pressure model was refined and used in an existing model to study copper dishing. Density maps, highlighting varying levels of dishing across the wafer face at different radial positions, were developed. This work will present the results.

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Mechanical Behavior of Glass/Porous Alumina by Contact Loading (유리/다공성 알루미나의 접촉하중에 의한 기계적 거동)

  • Kim, Chul;Kim, Sang Kyum;Kim, Tae Woo;Lee, Kee Sung
    • Journal of the Korean Ceramic Society
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    • v.51 no.5
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    • pp.399-405
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    • 2014
  • Porous alumina with different porosities, 5.2 - 47.5%, were coated with cover-glass having a thickness of $160{\mu}m$, using epoxy adhesive. We investigated the effect of the porosity of the substrate layer on the crack initiation load, and the size of cracks propagated in the coating layer. Hertzian indentations were used to evaluate the damage behavior under a constrained loading condition. Typically, two types of cracks, ring cracks and radial cracks, were observed on the surface of the glass/porous alumina structure. Indentation stress-strain curves, crack initiation loads, crack propagation sizes, and flexural strengths were investigated as a function of porosities. The results indicated that a porosity of less than 30% and a higher substrate elastic modulus were beneficial at suppressing cracks occurrence and propagation. We expect lightweight mechanical components with high strength can be successfully fabricated by coating and controlling porosities in the substrate layer.

Improvement of Durability and Reliability by Developing a Bi-axial Test Process of Road Wheel (차량 로드 휠의 복합축 평가 프로세스 구축을 통한 내구신뢰성 강건화 및 주행안정성 향상)

  • Chung, Soo Sik;Yoo, Yoen Sang;Kim, Dae Sung
    • Journal of Auto-vehicle Safety Association
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    • v.8 no.1
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    • pp.26-30
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    • 2016
  • The steel road wheel on ventilation holes was cracked in the vehicle durability test. But the component durability test by uni-axial, CFT(Cornering Fatigue Test) and RFT(Radial Fatigue Test) had been satisfied. That is, the uni-axial component test could not forecast the crack of vehicle. Therefore this study developed the bi-axial test mode to reflect a vehicle condition(to reflect both vertical and lateral force simultaneously) based on real load data which was measured in Europe and China and developed CAE simulation too. It reproduced the cracks same as vehicle's and verified by bi-axial test machine in the LBF(Fraunhofer Institute for Structural Durability and System Reliability) durability research center in Germany. Finally this the durability CAE simulation by using HMC(Hyundai Motor Company)'s the bi-axial test mode predicts feasibly the steel wheel's durability performance before vehicle durability test.

Effects of Casing Shape on the Performance of a Small-Size Turbo-Compressor (케이싱 형상 변화가 소형 터보압축기 성능에 미치는 영향)

  • 김동원;김윤제
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.12
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    • pp.1031-1038
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    • 2002
  • The effects of casing shape on the performance and interaction between the impeller and casing in a small-size turbo-compressor are investigated. Numerical analysis is conducted for the compressor with circular and single volute casings from inlet to discharge nozzle. In order to predict the flow pattern inside the entire impeller, vaneless diffuer and casing, calculations with multiple frames of reference method between the rotating and stationery parts of the domain are carried out. For compressible turbulent flow fields, the continuity and three-dimensional time-averaged Wavier-Stokes equations are employed. To evaluate the performance of two types of casings, the static pressure and loss coefficients are obtained with various flow rates. Also, static pressure distributions around casings are studied for different casing shapes, which are very important to predict the distribution of radial load. To prove the accuracy of numerical results, measurements of static pressure around casing and pressure difference between the inlet and outlet of the compressor are peformed for the circular casing. Comparisons of these results between the experimental and numerical analyses are conducted, and reasonable agreement is obtained.

Hertzian contact fatigue of dental ceramic implant abutment (인공치아용 세라믹 임플란트 상부구조물의 반복하중 피로특성)

  • Lee Deuk Yong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.5
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    • pp.199-203
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    • 2004
  • Feasibility of 3Y-TZP for dental implant abutment was evaluated under the Hertzian cyclic fatigue by examining the extent of the indentation damage and strength degradation. Fatigue test was conducted at contact loads of 500 to 3000 N and up to $10^6$ cycles in exact in vitro environments. At 500 N, no strength degradation and crack generation was observed up to $5\times10^5$ contact cycles. As load rose, the dramatic reduction in strength was observed when the damage transition from ring to radial crack occurred. The. extent of strength degradation was more pronounced in vitro environment probably due to chemical corrosion of artificial saliva through cracks introduced during large numbers of contacts.

Strength of Glass/Epoxy Fabric Joints under the Pin-Loading (핀하중을 받는 유리/에폭시 평직 적층판의 체결부 강도)

  • 박노희;권진희;김종훈;변준형;양승운
    • Composites Research
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    • v.15 no.2
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    • pp.1-10
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    • 2002
  • The strength of glass/epoxy fabric joints under pin-loading is estimated based on the characteristics length method and experiment. To investigate the effect of finite element idealization for the contact between pin and laminate, three modeling cases are analyzed; assuming the cosine load distribution around the contact area, constraining the radial displacement at the hole boundary, and using the contact element. To study the effect of failure criteria, Tsai-Wu and Yamada-Sun methods are applied on the characteristic curve. The results of the nonlinear analysis using the contact element showed good agrements with experimental data in both laminates made of uni-directional prepreg tapes and fabrics. In terms of failure criteria, Tsai-Wu method showed better agreement with experimental results than the one by Yamada-Sun laminate.

Thermal analysis of the wafers in LPCVD process (LPCVD 공정중 웨이퍼의 온도장 해석)

  • Kim, Il-Gyeong;Jeong, Min-Cheol;Yu, Seung-Il;Chae, Seung-Gi;Kim, U-Seung;Nam, Gi-Heum
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.22 no.5
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    • pp.651-660
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    • 1998
  • In the LPCVD reactor the temperature variations within the wafer load are the most important factor to maintain the thickness of the materials deposited on the surface of the wafer constant and to affect the deformation of each wafer. In this study the temporal variations of radial and axial temperature nonuniformities of each wafer in the LPCVD reactor are numerically estimated by assuming diffuse reflection. To verify the validity of the present numerical results, the present results obtained from the transient analysis are compared with those of Badgwell's work in which a steady-state condition was assumed. The main objective of this work is to determine the temporal variations of the temperature of each wafer in the LPCVD process since the wafers experience severe change in temperature in the early stage of the process.

Effects of solar variations on standing Alfven waves in the dayside magnetosphere: Polar observations

  • Kim, Khan-Hyuk;Takahashi, Kazue
    • Bulletin of the Korean Space Science Society
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    • 2008.10a
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    • pp.23.4-23.4
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    • 2008
  • In March and April 2001, the apogee (~9 Re) of the Polar spacecraft was located near the subsolar magnetopause with its orbital plane nearly parallel to a magnetic meridian plane. Polar electric and magnetic field data acquired during the two-month interval of solar maximum have been used to study fundamental standing Alfven waves near the subsolar meridian plane (magnetic local time = 1000-1400 hours) at magnetic latitudes from the equator to $\pm45$ degrees and at L values between 7 and 12. In the frequency band from 1.5 to 10 mHz, fundamental mode oscillations were identified based on high coherence (more than 0.7) and an approximately 90-degree phase shift between the azimuthal magnetic and radial electric field components. The L dependence of the fundamental frequencies is studied, and the frequencies are compared with those observed near the solar minimum interval (Takahashi et al. 2001). We found that the average frequencies in solar maximum are lower than those in solar minimum by a factor of ~2. This implies that the mass density in solar maximum is higher than that in solar minimum by a factor of ~4. Since there is a positive correlation between solar irradiance and solar activity, we suggest that the ionosphere in solar maximum produces more ions and load magnetic flux tubes with more ions.

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In-Plane Buckling Analysis of Curved Beams Using DQM (미분구적법(DQM)을 이용한 곡선보의 내평면 좌굴해석)

  • Kang, Ki-Jun;Kim, Young-Woo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.7
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    • pp.2858-2864
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    • 2012
  • The differential quadrature method (DQM) is applied to computation of the eigenvalues of in-plane buckling of the curved beams. Critical moments and loads are calculated for the beam subjected to equal and opposite bending moments and uniformly distributed radial loads with various end conditions and opening angles. Results are compared with existing exact solutions where available. The DQM gives good accuracy even when only a limited number of grid points is used. More results are given for two sets of boundary conditions not considered by previous investigators for in-plane buckling: clamped-clamped and simply supported-clamped ends.

A Study on the Application Impacts on Korean Power System by Introducing SFCL

  • Kim, Jong-Yul;Park, Heung-Kwan;Yoon, Jae-Young
    • KIEE International Transactions on Power Engineering
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    • v.3A no.1
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    • pp.1-6
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    • 2003
  • As power systems grow more complex and power demands increase, the fault current tends to gradually increase. In the near future, the fault current will exceed a circuit breaker rating for some substations, which is an especially important issue in the Seoul metropolitan area because of its highly meshed configuration. Currently, the Korean power system is regulated by changing the 154 ㎸ system configuration from a loop connection to a radial system, by splitting the bus where load balance can be achieved, and by upgrading the circuit breaker rating. A development project applying 154 ㎸ Superconducting Fault Current Limiter(SFCL) to 154 ㎸ transmission systems is proceeding with implementation slated for after 2010. In this paper, the resistive and inductive SFCLs are applied to re-duce the fault current in Korean power system and their technical and economic impacts are evaluated. The results show that the application of SFCL can eliminate the need to upgrade the circuit breaker rat-ing and the economic potential of SFCL is evaluated positively.