• Title/Summary/Keyword: quadrupole mass analyzer

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Analysis of Amadori Compounds in Tobacco Leaf by LC-MS/MS (LC-MS/MS를 이용한 담배 중 Amadori Compounds의 분석)

  • Min, Hye-Jeong;Kim, Young-Hoi;Lee, Jeong-Min;Jang, Gi-Chul
    • Journal of the Korean Society of Tobacco Science
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    • v.33 no.1
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    • pp.21-27
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    • 2011
  • Amadori compounds(1-deoxy-1-amino-2-ketoses) are important precursors of color, flavor and aroma produced in foods. Amadori compounds occur naturally in tobacco. The contribution of amadori compounds to smoke quality has been (of) interest because of their roles of the Maillard reaction in the leaf chemistry. The amounts of these compound in tobacco are affected by the processes of aging, drying and storage conditions. In this study, eight compounds were chemically synthesized because amadori compounds (have not been sold commercially these days.) were not available for obtaining commercially. The aim of this study was to develop the analytical method of amadori compounds in tobacco leaf by the liquid chromatography mass spectrometry using triple quadrupole analyzer(LC-MS/MS). This method was simple, rapid, selective and sensitive, and eight amadori compounds were simultaneously and quantitatively analyzed within 20 minutes. This method showed excellent accuracy and precision. Recovery rates of amadori compounds ranged from 86% to 102%, with relative standard deviation(RSD) ranged from 2.6% to 5.9%. This method was applied to analysis of amadori compounds contents of tobacco leaves in different varieties. Furthermore, it was expected that the method could be extended to the analysis of other amadori compounds.

The Etching of $HfO_2$ Thin Film as the ion Energy Distributions in the $BCl_3/Ar$ Inductively Coupled Plasma System ($BCl_3/Ar$ 유도 결합 플라즈마 시스템에서 이온 에너지 분포에 따른 $HfO_2$ 박막의 식각)

  • Kim, Gwan-Ha;Kim, Kyoung-Tae;Kim, Jong-Gyu;Woo, Jong-Chang;Kang, Chan-Min;Kim, Chang-Il
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.2
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    • pp.349-354
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    • 2007
  • In this work, we investigated etching characteristics of $HfO_2$ thin film and Si using inductive coupled plasma(ICP) system. The ion energy distribution functions in an ICP system was analyzed by quadrupole mass spectrometer(QMS) with an electrostatic ion energy analyzer. The maximum etch rate of $HfO_2$ thin film is 85.5 nm/min at a $BCl_3/(BCl_3+Ar)$ of 20 % and decreased with further addition of $BCl_3$ gas. From the QMS measurements, the most dominant positive ion energy distributions(IEDS) showed a maximum at 20 % of $BCl_3$. These tendency was very similar to the etch characteristics. This result agreed with the universal energy dependency of ion enhanced chemical etching yields. And the maximum selectivity of $HfO_2$ over Si is 3.05 at a $O_2$ addition of 2 sccm into the $BCl_3/(BCl_3+Ar)$ of 20 % plasma.

The etching of $HfO_2$ thin film as the ion energy distributions in the $BCl_3/Ar$ inductively coupled plasma system ($BCl_3/Ar$ 유도 결합 플라즈마 시스템해서 이온 에너지 분포에 따른$HfO_2$ 박막 식각)

  • Kim, Gwan-Ha;Kim, Kyoung-Tae;Kim, Jong-Kyu;Woo, Jong-Chang;Kang, Chan-Min;Kim, Chang-II
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.117-118
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    • 2006
  • In this work, we investigated etching characteristics of $HfO_2$ thin film and Si using inductive coupled plasma (ICP) system. The ion energy distribution functions in an inductively coupled plasma was analyzed by quadrupole mass spectrometer with an electrostatic ion energy analyzer. The maximum etch rate of $HfO_2$ is 85.5 nm/min at a $BCl_3/(BCl_3+Ar)$ of 20% and decreased with further addition of $BCl_3$ gas. From the QMS measurements, the most dominant positive ion energy distributions (IEDs) showed a maximum at 20 % of $BCl_3$. These tendency was very similar to the etch characteristics. This result agreed with the universal energy dependency of ion enhanced chemical etching yields. And the maximum selectivity of $HfO_2$ over Si is 3.05 at a O2 addition of 2 sccm into the $BCl_3/(BCl_3+ Ar)$ of 20% plasma.

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