• 한국광학회지
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• 제10권6호
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• pp.453-461
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• 1999

본 연구에서는 파장 0.248$\mu$m의 KrF Eximer Laser를 광원으로 하고 NA가 0.65인 광학계를 사용하는 리소그래피 시스템에서, 환형(annular)조명과 4구(quadrupole)조명의 조건들을 바꾸어 가며 구현하고자 하는 패턴의 분해능과 초점심도 향상에 어떠한 영향을 주는지 알아보았다. 그 결과, 환형 조명에서는 원형 마스크와 광학적 근접효과를 보정하기 위해 보조 패턴을 삽입한 마스크의 경우, 최적의 분해능과 초점심도를 보이는 조명조건이 다름을 알 수 있었다. 또한, 사구 조명의 경우에는 일반적으로 사용되는 45$^{\circ}$위치의 X자형 배치를 주요 패턴의 방향에 따라 적절히 바꾸어 주면 분해능과 초점심도를 향상시킬 수 있음을 확인하였다.

• Mass Spectrometry Letters
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• 제6권3호
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• pp.59-64
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• 2015

Quadrupole ion trap mass analyzer with a simplified geometry, namely, the cylindrical ion trap (CIT), has been shown to be well-suited using in miniature mass spectrometry and even in mass spectrometer arrays. Computation of stability regions is of particular importance in designing and assembling an ion trap. However, solving CIT equations are rather more difficult and complex than QIT equations, so, analytical and matrix methods have been widely used to calculate the stability regions. In this article we present the results of numerical simulations of the physical properties and the fractional mass resolutions m/Δm of the confined ions in the first stability region was analyzed by the fifth order Runge-Kutta method (RKM5) at the optimum radius size for both ion traps. Because of similarity the both results, having determining the optimum radius, we can make much easier to design CIT. Also, the simulated results has been performed a high precision in the resolution of trapped ions at the optimum radius size.

• 대한화학회지
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• 제10권3호
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• pp.143-144
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• 1966

• 한국자기공명학회:학술대회논문집
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• 한국자기공명학회 1999년도 동계총회 및 제14회 자기공명 학술발표회
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• pp.2-3
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• 1999

• Applied Science and Convergence Technology
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• 제24권5호
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• pp.142-150
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• 2015

A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and $CF_4$, the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature.

• 소음진동
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• 제11권3호
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• pp.471-476
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• 2001

This paper focuses on the numerical prediction of airflow-induced sound in DVD drives. As a first step, computational fluid dynamics (CFD) is conducted to evaluate flow field characteristics due to the high-speed disk rotation, and to support the acoustic analysis. Acoustic analogy based on Ffowcs Wi1liams-Hawkings (FW-H) equation is adopted to predict aeroacoustic noise patterns. The integral solution for quadrupole volume source is included to identify the turbulence noise generated inside the DVD tray. The strength of sound pressure revel with respect to rotating speed is discussed to meet upfront demand on the high fidelity product development. The present study also focuses on the noise directivity and examines how much the sound noise is sensitive to change in rotating speed. Near-field noise is strongly affected by the flow field characteristic, which is caused by the complex shape of the tray. For a mid-field, the quadrupole noise play as a counterpart of thickness noise or loading noise, so it generates different sound noise Patterns compared with those in the near field.

• 한국진공학회지
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• 제16권2호
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• pp.91-98
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• 2007

한국표준과학연구원 진공기술센터에서 잔류기체분석기 교정장치를 개발하였으며, 이 장치를 이용하여 서로 다른 구조를 가진 두개의 사중극 질량분석기 (quadrupole mass spectrometer)의 질소, 아르곤, 헬륨에 대한 기체감도를 측정하였다. 그 결과 기체감도는 QMS 구조와 상관없이 기체의 질량이 클수록 높게 나타났고 압력에 따라서도 다른 특성을 보였으므로 정확한 사용을 위해서는 기체감도를 꼭 보정해야 함을 알 수 있었다.

• Journal of the Optical Society of Korea
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• 제15권4호
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• pp.368-372
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• 2011

An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.502-507
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• 2000

This paper presents the numerical prediction of airflow-induced sound in DVD drives. Computational fluid dynamics (CFD) is first conducted to evaluate flow field characteristics due to the high-speed disk rotation, and to support the acoustic analysis. The acoustic analogy based on Ffowcs Williams-Hawkings (FW-H) equation is adopted to predict aeroacoustic noise patterns. The integral solution for quadrupole volume source is included to identify the turbulence noise generated inside the DVD tray. Near-field noise is strongly affected by the flow field characteristic, which is caused by the complex shape of the tray. For a mid-field, the quadrupole noise play as a counterpart of thickness noise or loading noise, resulting in a different pattern compared with those in the near field.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권4호
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• pp.204-208
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• 2006

In this study, we investigated the ion energy distributions in a chlorine based inductively coupled plasma by quadrupole mass spectrometer with an electrostatic ion energy analyzer. Ion energy distributions are presented for various plasma parameters such as $BCl_3/Ar$ gas mixing ratio, RF power, and process pressure. As the $BCl_3/Ar$ gas mixing ratio and process pressure decreases, and RF power increases, the saddle-shaped structures is enhanced. The reason is that there are ionized energy difference between $BCl_3$ and Ar, change of plasma potential, alteration of mean free path. and variety of ion collision in the sheath.