• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.110-115
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• 2007

A plasma enhanced atomic layer deposition(PEALD) system has been constructed adopting an inductively coupled plasma(ICP) source with an ALD system, and its plasma generation was carried out. Cobalt thin films were deposited on a p-type Si(100) wafer at $230^{\circ}C$. $Co_{2}(CO)_{6}$ was used as a cobalt precursor, $NH_{3}$ as a reactant, and Ar as a carrier and purge gas. The properties of the thin films were investigated using field emission scanning electron microscopy(FESEM) and auger electron spectroscopy(AES). Large amounts of impurities were found in both the ALD film and the PEALD film, however, the amount of impurities in the PEALD film was reduced to about 50 % compared to that in the ALD film. It was found that $NH_{3}$ plasma, very effectively, induces the reaction with carbon in a cobalt precursor.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.353-357
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• 2005

LOx post damage occurs from the development process of the full-scale gas generator which is necessary to 30 tonf class engine development was described. The cause and analysis for damage was described. The combustion test result of 4 injector, the full-scale gas generator and redesigned injector was described. Combustion instability, purge, the low momentum of LOx spray, small recess number, the low flow of LOx, and the high spray angle is main reason the possibility of knowing. The redesign for the injector in the direction of increase of recess number, increase of LOx and fuel spray angle, decrease of gap interval between the LOx post outer wall and fuel screen and increase of LOx post wall thick became accomplished.

• Korean Journal of Materials Research
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• v.26 no.9
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• pp.486-492
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• 2016

Tungsten (W) thin film was deposited at $400^{\circ}C$ using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of $WF_6$ with $SiH_4$. (2) Inert gas purge. (3) $SiH_4$ exposure without $WF_6$ supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of $WF_6$ and $SiH_4$. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (${\sim}100{\mu}{\Omega}-cm$) than that of the latter (${\sim}25{\mu}{\Omega}-cm$). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

• Korean Journal of Food Science and Technology
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• v.28 no.4
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• pp.772-778
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• 1996

In order to investigate changes of flavor during food sterilization in retortable pluches, a model food system consisting of 50% chicken breast meat, 1% salt and 49% chicken stock was analyzed before and after retorting using GC and GC-MS. In the analysis of the volatile components collected by the nitrogen purge and trap technique before and after retorting, a total of 53 peaks were observed on chromatograms and 42 peaks were identified. Among the 42 peaks identified were 17 caused by aldehydes, 9 by hydrocarbons, 8 by alcohols, 6 by ketones, 1 by furan and 1 by terpene. Analysis of the data obtained from our model food system strongly suggested that the compounds responsible for retort flavor are 2-heptanone, 2-pentyl furan and various ketones.

• Journal of Environmental Health Sciences
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• v.18 no.2
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• pp.82-91
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• 1992

The examination of the pollutants originated from domestic sewage, industrial and agricutural activities the existences of some toxic heavy metals, organic matters and pathogenic microorganisms. A recent report of WHO brought out that such pollutants are in existence with above roughly 2,000 kinds of chemical substances and amongst them about 750 chemicals have been indentified by drinking water. And above 600 kinds of them are organic pollutants and in addition these include carcinogenic mutagenic and poisonous substances. This is not intended to embody a study of broad confined to various approaches on organic materials, and therefore will be THM produced on injection of chlorine at water filtration plant. To specify the relations between THM and factors having an effect upon THM such as TOC, Cl$_{2}$, Temperature, pH and reaction time, first of all the recovery ratio for analytical methods of THM (Head sapce, purge and trap, Liquid/ Liquid Extraction methods) was investigated. Provided that by using it,the correction coefficients are obtained, the accuracy of data might be able to be enhanced through analysis.The result of the experiments are given in the followings. 1) Among three kinds of analytical methods, recovery rate was higher in order of purge and trap Liquid/Liquid Extraction, Head space. There is no great difference in recovery rate among three methods. 2) The higher the concentration of TOC, the more the amount of THM. 3) The higher the reaction temperature, the more the amount of THM. 4) The longer the reaction time, the more the amount of THM. 5) The higher the pH, the more the amount of THM. 6) The higher the concectration of chlorine, the more the amount of THM.

• Transactions of the Korean hydrogen and new energy society
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• v.27 no.4
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• pp.412-420
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• 2016

Effect of $H_2S$ on reactivity of oxygen carrier was measured and discussed using fluidized bed reactor and SDN70 oxygen carrier. We could get 100% of fuel conversion and $CO_2$ selectivity even though $H_2S$ containing simulated syngas was used as fuel for reduction. Absorbed sulfur was released during oxidation and $N_2$ purge step after oxidation as $SO_2$ form. We could get 100% of fuel conversion and $CO_2$ selectivity during cyclic reduction-oxidation tests up to 10th cycle. However, only 6~7% of sulfur can be removed during oxidation and $N_2$ purge step and 93~94% of sulfur was accumulated in the oxygen carrier. Therefore we could conclude that total removal of sulfur was not possible. $SO_2$ emission during oxidation decreased as the number of cycle increased. Therefore we could expect that the reactivity of oxygen carrier will be decreased with time.

• The Transactions of the Korean Institute of Power Electronics
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• v.13 no.6
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• pp.469-475
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• 2008

In this paper, control of small PEM(Proton Exchange Membrane) fuel cell stack by a microprocessor is introduced. The water management of fuel cell stack inside, a key technique in fuel cell control, can be achieved by adjusting the required air flow for fuel and cooling, and by purging the excessive water from the stack. It is very important to precisely control the BOS(Balance of Stack) since the stable operation of the fuel cell system mainly depends on it. In this study the fuel efficiency of the system is improved by the control of the system based on the measured air flow and purge cycle during the optimal operation and its effectiveness is proved by the experiments. The operating stability of the system is improved by the developed controller using a microprocessor and it is expected to be widely used for the control of small PEM fuel cell stack.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.463-463
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• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• The Korean Journal of Food And Nutrition
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• v.14 no.1
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• pp.20-27
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• 2001

The consumption of radish ( Rhaphanus sativus L.) sprout, which is Cruciferae family, is increasing because of its pungent flavor and taste. Its volatile components were analyzed by SDE (simultaneous steam distillation & extraction) method and P&T(purge & cryogenic trapping) method. As a solvent, diethyl ether and diethyl ether : pentane mixture(2:1, v/v) were used in SDE method, and diethyl ether in P&T method. Analyzing by GC and GC-MS, the major component was sulfur compounds (19 species, peak area 76.6%) with diethyl ether, sulfur compounds(15. 44.0%) and hydrocarbons(23, 23.8%) with diethyl ether-pentane mixture in SDE method. Also, hydrocarbons(25, 84.1% ) was major component in P& T method. The major volatile component of fresh radish sprout were n-heptane, methyl pentane and that of boiled radish sprout were 4-methylthio-3-butenyl isothiocyanate, methyl mercaptane, 2,3-dimethyl disulfide. Low molecular volatile components were detected more by P& T method, but types and relative quantities of volatile components were measured less comparing to SDE method.

• Asian-Australasian Journal of Animal Sciences
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• v.30 no.7
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• pp.1021-1028
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• 2017

Objective: The objective of this study was to evaluate the effects of ageing time of lamb loins prior to freezing on technological characteristics and oxidation stability of coarse ground lamb loin sausage using in a model system. Methods: Lamb loins (M. longissimus lumborum, n = 25) were aged at $-1.5^{\circ}C$ for 0, 1, 2, 3, and 8 wk and then frozen for the remaining days (a total of 30 wk). The aged/frozen/thawed lamb loins were ground, and model sausages were formulated with 75% aged/frozen/thawed lamb loin, 25% water, 1.5% sodium chloride (NaCl) and 0.3% sodium tripolyphosphate. The pH and thaw/purge loss of aged/frozen/thawed lamb loins were evaluated, and protein functionality (protein solubility and emulsifying capacity), water-holding capacity and textural properties of model sausages were determined. Cooked model sausages were vacuum-packaged in a plastic bag and displayed under continuous fluorescent natural white light ($3^{\circ}C{\pm}1^{\circ}C$). Colour and lipid oxidation of the cooked model sausages were evaluated on 0 and 21 d of display storage. Results: Ageing prior to freezing had no impact on pH and purge/thaw loss of lamb loins and the colour of cooked sausages (p>0.05) made from the loins. Lamb loins aged for at least 3 wk prior to freezing numerically improved total and myofibrillar protein solubilities (p>0.05) and emulsion activity index (p = 0.009) of meat batter, but decreased cooking loss (p = 0.003) and lipid oxidation (p<0.05) of model sausages. Conclusion: This study suggests that post-mortem ageing of raw meat prior to freezing could improve water-holding capacity and lipid oxidative stability of sausage made from the meat.