• Title/Summary/Keyword: pulsed power

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Process Diagnosis of Reactive Deposition of MgO by ICP Sputtering System (유도결합 플라즈마 스퍼터링 장치에서 MgO의 반응성 증착 시 공정 진단)

  • Joo, Junghoon
    • Journal of the Korean institute of surface engineering
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    • v.45 no.5
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    • pp.206-211
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    • 2012
  • Process analysis was carried out during deposition of MgO by inductively coupled plasma assisted reactive magnetron sputtering in Ar and $O_2$ ambient. At the initiation of Mg sputtering with bipolar pulsed dc power in Ar ambient, total pressure showed sharp increase and then slow fall. To analyse partial pressure change, QMS was used in downstream region, where the total pressure was maintained as low as $10^{-5}$ Torr during plasma processing, good for ion source and quadrupole operation. At base pressure, the major impurity was $H_2O$ and the second major impurity was $CO/N_2$ about 10%. During sputtering of Mg in Ar, $H_2$ soared up to 10.7% of Ar and remained as the major impurity during all the later process time. When $O_2$ was mixed with Ar, the partial pressure of Ar decreased in proportion to $O_2$ flow rate and that of $H_2$ dropped down to 2%. It was understood as Mg target surface was oxidized to stop $H_2$ emission by Ar ion sputtering. With ICP turned on, the major impurity $H_2$ was converted into $H_2O$ consuming $O_2$ and C was also oxidized to evolve CO and $CO_2$.

The Influence of Pulse Frequency and Duty Factor on Surface Characteristics during Low Temperature Plasma Nitrocarburizing Treatment of Duplex Stainless Steel (Duplex Stainless Steel의 저온 플라즈마 침질탄화시 Pulse Frequency 및 Duty Factor에 따른 표면 특성평가)

  • Cheon, Chang-Seok;Lee, Insup
    • Journal of the Korean institute of surface engineering
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    • v.47 no.5
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    • pp.221-226
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    • 2014
  • A low temperature plasma nitrocarburizng was implemented on the duplex stainless steel to achieve the enhancement of surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of Pulse frequency and Duty factor of pulsed power in a high Pulse frequency regime on the surface characteristics of the hardened layer. The hardened layer (S-phase) was formed on all of the treated surfaces. Surface hardness reached up to 1300 $HV_{0.1}$ which is about 4.6 times higher than that of the untreated material (280 $HV_{0.1}$). The thickness of the hardened layer tends to increase lightly with the higher Pulse frequency and the higher Duty factor. The corrosion resistance of nitrocarburized duplex stainless steel was almost similar to that of the untreated material. Both the Pulse frequency and the Duty factor do not have a significant influence on the corrosion property of plasma treated duplex stainless steel.

Monitoring of the Jamming Environment in the GNSS L5 Band in Korea Region

  • Lee, Hak-beom;Song, Young-Jin;Park, Dong-Hyuk;Lee, Sanguk;Won, Jong-Hoon
    • Journal of Positioning, Navigation, and Timing
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    • v.10 no.4
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    • pp.353-361
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    • 2021
  • This paper presents the jamming effect on the L5 band of Global Navigation Satellite System (GNSS) by analyzing real data collected via measurement campaigns in Korea region. In fact, the L5 band is one of the dedicated bands for various satellite navigation systems such as Global Positioning System (GPS), Galileo, BeiDou (BDS), and Quasi Zenith Satellite System (QZSS). And this band is also allocated along with various systems used for aeronautical radio navigation systems (ARNS). Among ARNS, the Distance Measuring Equipment (DME) and the Tactical Air Navigation System (TACAN) are systems that transmit and receive strong power pulse signals, which may cause unintentional jamming in the reception of GNSS signals. In this paper, signals in the main lobe of GPS L5, Galileo E5a, BDS B2a, and QZSS L5 are collected in Korean region to confirm whether the jamming effect exists in the band. And then, the pulse blanking technique, which is a simple signal processing technique capable of responding to pulsed jamming, is applied to analyze the jamming effect of DME/TACAN on the L5 band.

Ammonium uranate hydrate wet reconversion process for the production of nuclear-grade UO2 powder from uranyl nitrate hexahydrate solution

  • Byungkuk Lee ;Seungchul Yang;Dongyong Kwak ;Hyunkwang Jo ;Youngwoo Lee;Youngmoon Bae ;Jayhyung Lee
    • Nuclear Engineering and Technology
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    • v.55 no.6
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    • pp.2206-2214
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    • 2023
  • The existing wet reconversion processes for the recovery of scraps generated in manufacturing of nuclear fuel are complex and require several unit operation steps. In this study, it is attempted to simplify the recovery process of high-quality fuel-grade UO2 powder. A novel wet reconversion process for uranyl nitrate hexahydrate solution is suggested by using a newly developed pulsed fluidized bed reactor, and the resultant chemical characteristics are evaluated for the intermediate ammonium uranate hydrate product and subsequently converted UO2 powder, as well as the compliance with nuclear fuel specifications and advantages over existing wet processes. The UO2 powder obtained by the suggested process improved fuel pellet properties compared to those derived from the existing wet conversion processes. Powder performance tests revealed that the produced UO2 powder satisfies all specifications required for fuel pellets, including the sintered density, increase in re-sintered density, and grain size. Therefore, the processes described herein can aid realizing a simplified manufacturing process for nuclear-grade UO2 powders that can be used for nuclear power generation.

Study of The Anisotropy of Electron Energy Distribution of Optical-Field Ionized Oxygen Plasma by Using Polarization Spectroscopy

  • Kim, Dong-Eon;Kim, Jae-Hoon;Kawachi, Tetsuya;Hasegawa, Noboru;Sukegawa, Kouta;Iwamae, Atsushi;Fujimoto, Takashi
    • Journal of the Optical Society of Korea
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    • v.7 no.3
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    • pp.145-149
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    • 2003
  • The anisotropy of electron energy distribution in oxygen plasmas produced by a high intensity laser was investigated by using polarization spectroscopy. An ultra-short pulsed laser with a pulse duration of 66.5 fs and a power density of $1 {\times} 10^17/ W/$\textrm{cm}^2$$ was used. At this power density and pulse duration, the plasma was generated predominantly by optical field ionization. The degree of polarization of OVI 1s$^2$2p$^2$p2- 1s$^2$4d$^2$D$^{0}$ (J = 1/2-3/2 and 3/2-5/2) transition line at 129.92 $\AA$ was measured. O VI 1s$^2$2p$^2$P$^2$ -1s$^2$4s$^2$S$^2$ (J = 1/2-1/2 and 3/2-1/2) transition line at 132.26 $\AA$ was used to calibrate the sensitivity of the optical system. The dependencies of the degree of polarization on the initial gas density and on the laser polarization were investigated. When the laser polarization was changed from a linear to a circular polarization, the degree of polarization was decreased. When the initial gas density was increased, the degree of polarization was decreased.

Application of time-of-flight near infrared spectroscopy to Satsuma mandarin

  • Tsuchikawa, Satoru;Ito, Satomi;Inoue, Kinuyo;Miyamoto, Kumi
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.1627-1627
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    • 2001
  • In this study, a newly constructed optical measurement system, whose main components were a parametric tunable laser and a near infrared photoelectric multiplier, was applied to detection of the information for the inside of Satsuma mandarin using time-of-flight near infrared spectroscopy (TOF-NIRS). The combined effects on the time resolved profile of sample diameter, sugar content, the wavelength of the laser beam, and the detection position of transmitted light were investigated in detail. The samples used were Satsuma mandarin (Citrus unshu $M^{ARC}$.) (location: Wakayama, Japan) having the diameters of 50-84 mm. The sugar content measured by a refractometer varied from 9.9 to 16.3 Brix%. Equator of sample was irradiated vertically with the pulsed laser, and transmitted output power was measured on the restricted position of the equator using the optical fiber cable. The sampling time and the number of averaging the output power were 100 ns and 100 times, respectively. The variation of the attenuance of peak maxima At, the time delay of peak maxima t and the variation of full width at half maximum w were strongly dependent on the detection position and the wavelength of the laser beam. At, t and w increased gradually as the sample diameter increased to be much absorbed and vigorously scattered. On the other hand, each optical parameter had a tendency to increase as the sugar content increased. Such behavior was remarkable when the transmitted light was detected at the side face of a sample. When we apply TOF-NIRS to detection of the information for the inside of fruit with high moisture content like Satsuma mandarin, it is very important to give attention to the difference in the scattered light within tissues and the semi-straightly propagated light. Furthermore, we tried to express the resulting phenomena by using a model samples composed of water, sucrose, and milk. The variation of the time resolved profile is strongly governed by the combination of the light absorption component, scattering medium, and refractive index.

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Application of time-of-flight near infrared spectroscopy to Satsuma mandarin

  • Tsuchikawa, Satoru;Ito, Satomi;Inoue, Kinuyo;Miyamoto, Kumi
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.1626-1626
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    • 2001
  • In this study, a newly constructed optical measurement system, whose main components were a parametric tunable laser and a near infrared photoelectric multiplier, was applied to detection of the information for the inside of Satsuma mandarin using time-of-flight near infrared spectroscopy (TOF-NIRS). The combined effects on the time resolved profile of sample diameter, sugar content, the wavelength of the laser beam, and the detection position of transmitted light were investigated in detail. The samples used were Satsuma mandarin (Citrus unshu $M_{ARC}$.) (location: Wakayama, Japan) having the diameters of 50-84 mm. The sugar content measured by a refractometer varied from 9.9 to 16.3 Brix%. Equator of sample was irradiated vertically with the pulsed laser, and transmitted output power was measured on the restricted position of the equator using the optical fiber cable. The sampling time and the number of averaging the output power were 100 ns and 100 times, respectively. The variation of the attenuance of peak maxima At, the time delay of peak maxima $\Delta$t and the variation of full width at half maximum Δw were strongly dependent on the detection position and the wavelength of the laser beam. At, $\Delta$t and $\Delta$w increased gradually as the sample diameter increased to be much absorbed and vigorously scattered. On the other hand, each optical parameter had a tendency to increase as the sugar content increased. Such behavior was remarkable when the transmitted light was detected at the side face of a sample. When we apply TOF-NIRS to detection of the information for the inside of fruit with high moisture content like Satsuma mandarin, it is very important to give attention to the difference in the scattered light within tissues and the semi-straightly propagated light. Furthermore, we tried to express the resulting phenomena by using a model samples composed of water, sucrose, and milk. The variation of the time resolved profile is strongly governed by the combination of the light absorption component, scattering medium, and refractive index.

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Etch Characteristics of CO/NH3 Plasma Gas for Magnetic Random Access Memory in Pulsed-biased Inductively Coupled Plasmas

  • Yang, Gyeong-Chae;Jeon, Min-Hwan;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.200-200
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    • 2013
  • 기존 메모리 반도체에 비교해 빠른 재생속도와 높은 집적도, 비휘발성 등의 특성을 가지는 MRAM (Magnetic Random Access Memory)은 DRAM, flash memory 등을 대체할 수 있는 차세대 기억 소자로서 CoFeB/MgO/CoFeB로 구성된 한 개의 MTJ (Magnetic Tunnel Junction)를 단위 메모리로 사용한다. 이 MTJ 물질들은 고밀도 플라즈마를 이용한 건식 식각공정시 Cl2, BCl3 등과 같은 chlorine 을 포함한 가스를 이용하여 왔으나 식각 후 sidewall에서 발생하는 부식과 식각 선택비 확보의 어려움 등으로 마스크 물질에 제약을 받고 소자 특성이 감소하게 되는 등의 문제가 있다. 따라서 이러한 식각 문제점을 해결하기 위한 대안으로 noncorrosive 가스인 CO/NH3, CH3OH, CH4 등을 이용한 MTJ 식각 연구가 진행되어 오고 있으며 이중 CO/NH3 혼합가스는 부식성이 없고 hard mask와의 높은 선택비를 가지는 기체로 CO gas에 NH3 gas를 첨가하게 되면 etch rate이 증가하는 특성을 보인다. 또한 rf pulse-biased power를 이용하여 이온의 입사를 시간에 따라 제어함으로써 pulse off time 때 etch gas와 MTJ 물질간의 chemical reaction을 향상시킬 수 있다. 따라서 본 연구에서는 CO/NH3 혼합가스를 이용하여 다양한 rf pulse-biased power 조건에서 MTJ 물질인 CoFeB, MgO와 hard mask 물질인 W을 식각 한 뒤 식각특성을 분석하였으며 MTJ surface의 chemical binding state, surface roughness 측정을 진행하였다. 식각 샘플의 측정은 Alpha step profiler, XPS (X-ray Photoelectron Spectroscopy), AFM (Atomic Force Microscopy)를 통해 진행되었다. Time-averaged pulse bias에서는 duty ratio가 감소할수록 etch rate의 큰 감소 없이 CoFeB/W, MgO/W 물질의 etch selectivity가 향상됨을 확인할 수 있었으며 pulse off time 구간에서의 chemical reaction 향상으로 인해 식각부산물의 재증착이 감소하고 CoFeB의 surface roughness가 감소하는 것을 확인하였다.

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AN EFFECT OF Nd : VAG LASER IRRADIATION ON THE MICROHARDNESS OF ROOT SURFACE (Nd : YAG layer 조사가 치근면의 미세경도에 미치는 영향)

  • Ahn, Jae-Hyeun;Kim, Byung-Ok;Han, Kyung-Yoon
    • Journal of Periodontal and Implant Science
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    • v.25 no.3
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    • pp.614-622
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    • 1995
  • Root caries is very frequently developed on exposed root surface after periodontal surgical treatment. In order to determine the anti-caries effect of Nd : YAG laser irradiation on periodontally exposed root surface, 40 mandibular molar teeth that had been extracted due to excessive periodontal destruction were used as the experimental teeth. All teeth were treated by the same procedure as conventional periodontal root treatment, ie thorough scaling, root planing and root conditioning with tetracycline HCl(100mg/ml, 5min.). Within middle one third of root, mesial half surface(20) or distal half surface(20) was randomly irradiated at various power of 1.0W, 2.0W, 3.0W and 4.0W for 60 seconds by non-contact(5mm) delivery of a pulsed Nd : YAG laser(EN.EL.EN060, Italy). The microhardness was measured by Vikers microhardness tester(Wilson, USA) at 2mm/second of jog speed under 100gm load. The difference of microhardness between irradiated side and non-irradiated side was statistically analyzed ANOVA and Duncan's method. Following results were obtained ; 1. The microhardness(Knoop hardness number) was significantly higher in laser irradiated surface than non-irradiated surface(p<0.05). 2. There was no significant difference in microhardness between experimental groups classified by different laser power(p>0.1). The results suggest that Nd : YAG laser irradiation on exposed root suface after periodontal therapy may inhibit the root caries development by enhancing surface microhardness.

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Laser Cladding with Al-36%Si Powder Paste on A319 Al Alloy Surface to Improve Wear Resistance (A319 알루미늄 합금 표면에 Al-36%Si 합금분말의 레이저 클래딩에 의한 내마모성 향상)

  • Lee, Hyoung-Keun
    • Journal of Welding and Joining
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    • v.35 no.2
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    • pp.58-62
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    • 2017
  • A319 aluminum alloy containing 6.5% Si and 3.5% Cu as major alloying elements has been widely used in machinery parts because of its excellent castability and crack resistance. However it needs more wear resistance to extend its usage to the severe wear environments. It has been known that hyper-eutectic Al-Si alloy having more than 12.6% Si contains pro-eutectic Si particles, which give better wear resistance and lubrication characteristics than hypo-eutectic Al-Si alloy like A319 alloy. In this study, it was tried to clad hyper-eutectic Al-Si alloy on the surface of A319 alloy. In the experiments, Al-36%Si alloy powder was mixed with organic binder to make a fluidic paste. The paste was screen-printed on the A319 alloy surface, melted by pulsed Nd:YAG laser and alloyed with the A319 base alloy. As experimental parameters, the average laser power was changed to 111 W, 202 W and 280 W. With increasing the average laser power, the melting depth was changed to $142{\mu}m$, $205{\mu}m$ and $245{\mu}m$, and the dilution rate to 67.2 %, 72.4 % and 75.7 %, and the Si content in the cladding layer to 16.2 %, 14.6 % and 13.7 %, respectively. The cross-section of the cladding layer showed very fine eutectic microstructure even though it was hyper-eutectic Al-Si alloy. This seems to be due to the rapid solidification of the melted spot by single laser pulse. The average hardness for the three cladding layers was HV175, which was much higher than HV96 of A319 base alloy. From the block-on-roll wear tests, A319 alloy had a wear loss of 5.8 mg, but the three cladding layers had an average wear loss of 3.5 mg, which meant that an increase of 40 % in wear resistance was obtained by laser cladding.