• 제목/요약/키워드: pulsed power

검색결과 588건 처리시간 0.034초

Unbalanced B-field 인가에 따른 HIPIMS (high power impulse magnetron sputtering) 증착 Al:ZnO 박막 특성 연구

  • 박동희;양정도;최지원;최원국
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
    • /
    • pp.193-193
    • /
    • 2010
  • HIPIMS(High sputtering impulse magnetron sputtering)은 수십 ${\mu}s$의 짧은 pulse 동안 수kw의 매우 높은 파워를 인가할 수 있어 밀도 $10^{13}/cm^3$ 이상의 고밀도 플라즈마 방전이 가능하여 스퍼터된 타겟 이온들의 이온화율이 매우 높은 특징을 가진다. HIPIMS를 통해 증착한 박막의 경우 매우 치밀한 조직을 가지고 있어 기존 DC, Pulsed DC, RF 증착을 통한 박막에 비해 우수한 물성을 보여준다. 본 실험에서는 대면적의 고품위 Al:ZnO 박막을 증착하기위하여 HIPIMS 증착법을 사용하였다. 1000mm폭 타겟상에서 균일한 증착을 위하여 Balanced B-field, Unbalanced field를 각각 인가하여 실험하였다. 시뮬레이션을 통하여 타겟 중심부와 가장자리의 자기장을 결정하였으며, target edge에서의 증착율과 cathode erosion 방지를 위하여 원형 트랙형으로 보조 자석을 설치하였다. $Al_2O_3$(2wt%)가 첨가된 planar target을 사용하였고, power는 700 W~2 kW, 그리고 pulse 폭은 $50-150 {\mu}s$정도로 변화시켜 가면서 상온에서 증착하였다. 플라즈마 가스로는 Ar만을 사용하여 두께는 60-100 nm정도로 증착하였다. Plasma emission monitoring을 통해 측정한 결과 Balanced B-field 에 비해 Unbalanced B-field 조건 에서 스퍼터된 이온들의 균일도가 우수하였으며 증착된 박막의 균일도 또한 증가하였다.

  • PDF

세포 및 동물모델용 펄스형 전자기장 자극 파라미터 가변장치 설계 및 평가 (Design and Evaluation of Pulsed Electromagnetic Field Stimulation Parameter Variable System for Cell and Animal Models)

  • 이자우;박창순;김준영;이용흠
    • 대한의용생체공학회:의공학회지
    • /
    • 제43권1호
    • /
    • pp.11-18
    • /
    • 2022
  • An electromagnetic generator with variable stimulation parameters is required to conduct basic research on magnetic flux density and frequency for pulsed electromagnetic fields (PEMFs). In this study, we design an electromagnetic generator that can conduct basic research by providing parameters optimized for cell and animal experimental conditions through adjustable stimulation parameters. The magnetic core was selected as a solenoid capable of uniform and stable electromagnetic stimulation. The solenoid was designed in consideration of the experimental mouse and cell culture dish insertion. A voltage and current adjustable power supply for variable magnetic flux density was designed. The system was designed to be adjustable in frequency and pulse width and to enable 3-channel output. The reliability of the system and solenoid was evaluated through magnetic flux density, frequency, and pulse width measurements. The measured magnetic flux density was expressed as an image and qualitatively observed. Based on the acquired image, the stimulation area according to the magnetic flux density decrease rate was extracted. The PEMF frequency and pulse width error rates were presented as mean ± SD, and were confirmed to be 0.0928 ± 0.0934% and 0.529 ± 0.527%, respectively. The magnetic flux density decreased as the distance from the center of the solenoid increased, and decreased sharply from 60 mm or more. The length of the magnetic stimulation area according to the degree of magnetic flux density decrease was obtained through the magnetic flux density image. A PEMF generator and stimulation parameter control system suitable for cell and animal models were designed, and system reliability was evaluated.

Spectra of Optical-field Ionized Gases by a Femtosecond Ti:Sapphire Laser

  • Mock, Tomas;Shin, Hyun-Joon;Cha, Yong-Ho;Lee, Dong-Gun;Hong, Kyung-Han;Nam, Chang-Hee
    • Journal of the Optical Society of Korea
    • /
    • 제2권2호
    • /
    • pp.50-53
    • /
    • 1998
  • We report on the spectroscopic investigation of optical-field ionized plasmas in the soft X-ray spectral region. The experiment was carried out by focusing pulses of the high-power Ti:Sapphire laser with an energy of ~ 40 mJ and time duration of ~30 fs into a gas jet of krypton, xenon, and argon from a pulsed nozzle. Strong soft X-ray emission on lines from ionic stages of $Kr^{7+} , Kr^{8+} , Xe^{7+} , Ar^{7+} , and Ar^{8+}$ is reported. The experimental result was found to be in good agreement with theoretical prediction.

고 출력 레이저 의한 충격파 현상 연구 및 응용 (Shock Compresssion and Microparticles Acceleration using High Power Laser)

  • 이현희;여재익
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2007년도 춘계학술대회B
    • /
    • pp.1916-1919
    • /
    • 2007
  • We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave propagates through the foil. The shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is applying shock wave and deformation of the thin foil from the ablation to accelerating micro-particles to a very high speed.

  • PDF

Preparation of Polymer Thin Films of Pentafluorostyrene via Plasma Polymerization

  • Ahn, C.J.;Yoon, T.H.
    • 접착 및 계면
    • /
    • 제7권1호
    • /
    • pp.23-29
    • /
    • 2006
  • Polymer thin films of pentafluorostyrene (PFS) were prepared by RF plasma (13.56 MHz) polymerization in continuous wave (CW) mode, as a function of plasma power and monomer pressure. Conditions for film preparation were optimized by measuring the solvent resistance of plasma polymer thin films in DMAc, NMP, THF, acetone and chloroform, as well as by evaluating the optical clarity via UV-VIS measurements. Pulsed mode plasma polymerization was also utilized to enhance the optical properties of the films by varying the period of on-time and duty cycle. Finally, the films were subjected to refractive index measurements and analyzed by ${\alpha}$-step, TGA and FT-IR.

  • PDF

Optical Ozone Monitor Using UV Source

  • Chung, Wan-Young
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 제어로봇시스템학회 2003년도 ICCAS
    • /
    • pp.49-52
    • /
    • 2003
  • Two types of ozone monitors using UV absorption method were tried in consideration of cost of the monitor and precision in measuring. The high concentration ozone monitor for high concentration real time ozone monitoring from ozone generator was composed of a low pressure mercury lamp as UV source, a photo multiplier tube as UV detector and signal processing unit for the most part. This structure could be very useful for low price high concentration ozone monitor due to simple system structure and fairly good monitoring characteristics. The developed system showed good linear output characteristics to ozone in the measuring concentration range of 0.05 and 2 wt.%. For accuracy ambient ozone monitoring in ambient in ppm level, the system composed of a high power pulsed xenon lamp as UV source, an optical spectrometer with a high sensitivity linear CCD array as UV detector and signal processing unit in brief speaking was proposed our study for the first time in the world. The developed system showed good linearity and sensitivity in relative low measuring range between 10ppm and 10,000ppm, and showed some feasibility of high resolution ozone monitor using CCD array as photodetector.

  • PDF

Design of the Pseudolite Pulsing Scheme

  • Chang, Jae-Won;Cho, Deuk-Jae;Park, Chan-Sik;Lee, Sang-Jeong
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 제어로봇시스템학회 2004년도 ICCAS
    • /
    • pp.215-218
    • /
    • 2004
  • The pseudolites are ground-based transmitters that can be configured to emit GPS-like signals with the purpose of enhancing the GPS by providing increased accuracy, integrity, and availability. Although the use of the pseudolites offers many potentially significant benefits, a number of technical issues must also be addressed. One is the pseudolite signal power level which is related with near-far problem, and other issues include deployment requirements, signal data rate, signal integrity monitoring, and user antenna location and sensitivity. In order to solve the near-far problem, the frequency offset or the pulsing schemes is implemented in most the pseudolites. However, in the case of the previous pulsing scheme with the fixed code pattern, the near-far problem still remains. This paper aims to design a sequential pulsing scheme to avoid the near-far problem. A pulse mode pseudolite has less interference than the continuous mode.

  • PDF

Enhanced Inductively Coupled Plasma의 자화 주파수 의존 특성 (Magnetized Frequency characteristics of Enhanced Inductively Coupled Plasma)

  • 라상호;박세근;오범환
    • 대한전자공학회:학술대회논문집
    • /
    • 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
    • /
    • pp.302-305
    • /
    • 2000
  • It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.

  • PDF

2-단계 HID 램프용 전자식 안정기의 디지털 제어 (Digital Control of Two-Stage Electronic ballast for HID Lamps)

  • 이우철
    • 전력전자학회:학술대회논문집
    • /
    • 전력전자학회 2013년도 추계학술대회 논문집
    • /
    • pp.229-230
    • /
    • 2013
  • The conventional Three-Stage electronic ballast is stable, but Two-Stage electronic ballast has been researching because of efficiency. Three-Stage electronic ballast is consisted of PFC circuit, buck converter, and inverter circuit, but Two-stage is consisted of PFC circuit, Buck-Inverter full bridge circuit. The Buck-Inverter full bridge inverter consists of two half bridge inverters for low frequency switching, and high frequency switching. In the case of street lamp it is far from a lamp to a ballast, the conventional pulsed high voltage ignitor can not turn on the HID lamps because of reduction of ignition voltage. Therefore, it needs to do the research on a resonant ignition to turn on the HID lamps. Therefore, in the Two-Stage electronic ballast which has the resonant tank for ignition, the transient resonant current because of low frequency changing is analyzed, the novel algorithm is proposed to resuce the transient current.

  • PDF

Oxide Glasses for Holographic Data Storage

  • Poirier, Gael;Nalin, Marcelo;Ribeiro, Sidney J.L;Messaddeq, Younes
    • 세라미스트
    • /
    • 제10권3호
    • /
    • pp.86-90
    • /
    • 2007
  • Novel photochromic oxide glasses are presented in this section. These glasses are based on phosphate formers containing both tungsten and antimony atoms. Exposure to visible continuous or pulsed laser beam results in an intense photochromic effect witch is shown to occur in the volume of the glass and results in a broad absorption band in the visible and near infrared. This effect was not identified to be related with a structural change and is assumed to be entirely electronic. A change in the absorption coefficient is observed in function of tungsten content, exposure time and increases with beam power. These glasses have been investigated regarding the possibility of holographic data storage using visible lasers sources. Changes in both refractive index and the absorption coefficient were measured using a holographic setup. The modulation of the optical constants is reversible by heat treatment.

  • PDF