• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1007-1009
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• 1998

In this paper, the effects of the drive-in process parameters on the residual stress profile of the p+ silicon film has been investigated. All the residual stress profile has been estimated by the second-order polynomial. All the coefficients of the polynomial have been determined from the measurement of the deflections of cantilevers and a rotating beam by using a surface profiler meter and by means of focusing a calibrated microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual stress decreases. If the boron concentration decreases the tensile residual stress decreases except near the surface where the magnitude of compressive residual stress increases.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.96-98
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• 2006

A new ex-situ model to diagnose a plasma processing equipment was presented. The model was constructed by combining wavelet, scanning electron microscope, ex-situ measurement of etching profile, and neural network. The diagnosis technique was applied to a tungsten etching process, conducted in a $SF_6$ helicon plasma. The wavelet was used to characterize detailed variations of plasma-etched surface. The diagnosis model was constructed with the vertical wavelet component. For comparison, a conventional model was built by using the estimated profile data. Compared to the conventional model, the wavelet-based model, demonstrated a much improved diagnosis.

• Proceedings of the Korean Society of Agricultural Engineers Conference
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• 2000.10a
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• pp.346-351
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• 2000

The study was carried out to investigate the characteristics of vertical velocity distribution measured by current meter at Kangkyung station in Keum river during the period of 1995 to 1997. It suggests the quadratic parabola equation to estimate the vertical velocity profile only from the measurement data of surface velocity. The equation was found to be statistically very stable and showed high significance to express the surface velocity and bottom velocity. The vertical velocity profile was determined by the relationships to the surface velocity, and a coefficient of the quadratic parabola equation. The vertical velocity profile can be applied to calculating the mean velocity and discharge, and to and to analyse the dispersion of pollutant materials in the streamflow.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.288-293
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• 2005

A earn profile grinding machine is a mandatory machine tool for manufacture of high precision contoured cam. Experimental evaluation of modal analysis is an effective tool to investigate dynamic behavior of a machine. This paper presents the measurement system and experimental investigation on the modal analysis of a grinding machine. The weak part of the machine is found by the experimental evaluation. The results provide structure modification data for good dynamic behaviors. And safety of the machine was confirmed by the modal analysis of modified machine design. Finally, the cam profile grinding machine was successfully developed.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.85-91
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• 2008

White light scanning interferometry has gotten a firm position in 3D surface profile measuring field. Recently, the LCD industry gave a chance for this technology to enter into real industry fields. It is known that white-light phase-shifting algorithm give a best resolution compare to other algorithms, but there are some problems to be resolved. One of them is 300nm jump in height profile, called bat-wing effect. The main reason of this problem is an ambiguity of phase-peak detection algorithm, and some solution has been proposed, but it didn't work perfectly. In this paper, I will show the cases when these effects are occurred, and these height discrepancies will be almost disappeared when broad-band illuminators are used.

• Proceedings of the KIEE Conference
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• 1994.11a
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• pp.413-415
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• 1994

In this paper, a new technique for quantitative estimation of the stress profile along the depth of $p^+$ silicon films is presented. The $p^+$ silicon cantilevers with various beam thickness and a rotating beam supported by two cantilevers are used for estimating the stress profile of the films. The average of the residual stress distribution is estimated to be 50MPa. Most of $p^+$ silicon films are subjected to the tensile stress, except the region near the frontside.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.19 no.2
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• pp.75-83
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• 2023

For three-dimensional finite element welding residual stress simulation, several methods are available. Two widely used methods are the moving heat source model using heat flux and the temperature boundary condition model using the temperature profile of the welded beads. However, each model has pros and cons in terms of calculation times and difficulties in determining welding parameters. In this paper, a new method using the moving temperature profile model is proposed to perform efficiently 3-D FE welding residual stress analysis for large structures. Comparison with existing experimental residual stress measurement data of two-pass welding pipe and SNL(Sandia National Laboratories) mock-up canister shows the accuracy and efficiency of the proposed method.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.33 no.3
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• pp.248-258
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• 1997

The analytical solutions of the Fraunhofer Diffraction(FD) theory and the principle for measurement of the dispersion relation of plasma wave is presented. Especially, the method for measurement of low-frequency wave is discussed. The wavenumbers of the density fluctuations are obtained from the curve fitting between the expremental FD profile and theoretical one for each frequency component. In measurement of the wavenumber of the low -frequency region, the information of the wavenumber is easily obtained from the ratio of the intensity at = 0 to the intensity at =0.5. The millimeter wave FD apparatus was designed to measure low-frequency density fluctuations. The determined wavenumbers are in the range of =0.1~ 1.0cm. Thus, the millimeter wave FD method was shown to be useful for the measurement of low-frequency density fluctuations, which are impossible to be measured by using a convention. Thomson scattering. The obtained dispersion relations will be useful information for plasma waves.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• Journal of ILASS-Korea
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• v.7 no.2
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• pp.1-6
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• 2002

It is necessary to develope a high frequency diode laser sensor system based on the absorption spectroscopy for the measurement of temperature of the spray flame. DFB diode laser operating near $2.0{\mu}m$ was used to scan over selected $H_2O$ transitions near $1.9{\mu}m\;and\;2.2{\mu}m$, respectively. The measurement sensitivity at wide range of sweep frequency was evaluated using multi-pass cell containing $CO_2$ gas. This diode laser absorption sensor with high temporal resolution up to 10kHz was applied to measure the gas temperature in the spray flame region of liquid-gas 2-phase counter flow flame. The successful demonstration of time series temperature measurement in the spray flame gives us motivation of trying to establish non-intrusive temperature measurement method in the practical spray flame.