• Title/Summary/Keyword: process measurement

Search Result 5,167, Processing Time 0.037 seconds

Wafer TTV Measurement and Variable Effect Analysis According to Settling Time (Settling Time에 따른 웨이퍼 TTV 측정 및 변수 영향 분석)

  • Hyeong Won Kim;Anmok Jeong;Taeho Kim;Hak Jun Lee
    • Journal of the Semiconductor & Display Technology
    • /
    • v.22 no.3
    • /
    • pp.8-13
    • /
    • 2023
  • High bandwidth memory a core technology of the future memory semiconductor industry, is attracting attention. Temporary bonding and debonding process technology, which plays an important role in high bandwidth memory process technology, is also being studied. In this process, total thickness variation is a major factor determining wafer performance. In this study, the reliability of the equipment measuring total thickness variation is identified, and the servo motor settling, and wafer total thickness variation measurement accuracy are analyzed. As for the experimental variables, vacuum, acceleration time, and speed are changed to find the most efficient value by comparing the stabilization time. The smaller the vacuum and the larger the radius, the longer the settling time. If the radius is small, high-speed rotation performance is good, and if the radius is large, low-speed rotation performance is good. In the future, we plan to conduct an experiment to measure the entire of the wafer.

  • PDF

A Study on the Applicability of Smart-phone Accelerometer for the Measurement of Dynamic Behavior in Bridges (교량의 동적 거동 계측을 위한 스마트폰 가속도센서의 적용성에 관한 연구)

  • Lee, Hyeong-Jin
    • Journal of the Korean Society of Industry Convergence
    • /
    • v.23 no.5
    • /
    • pp.747-756
    • /
    • 2020
  • In recent years, measurement in a smart-phone environment is attracting attention in various fields due to its easy set-up process, various functions, convenience and expandability. Even in the field of safety evaluation and maintenance of large-scale infra-structures, the appropriate application of these effective and convenient measurement techniques can be of great help. In this paper, an experimental study was conducted to investigate the effectiveness, problems and complementary methods of applying smart-phone accelerometers to the measurement in infra-structure such as bridges. In model bridge subjected to impact and moving loads, the measured accelerations using a smart-phone and a professional accelerometer were directly compared in time domain. And the statistical and frequency characteristics of the measured signal and transfer function were also examined in frequency domain. The results show that the accuracy of measurement using smart-phone sensor is primarily affected by its incomplete sampling performance. In conclusion, smart-phone sensors cannot be considered suitable for precise assessment, where measurements must be accurate over a wide frequency range, but we can say that the technique is still useful and fairly accurate for some purpose over a limited frequency range, such as the low pass frequency range, which is a major concern for civil structures.

Noise Measurement Method Development and Correlation Analysis According to Measurement Location of Small Unmanned Robot (소형 무인 로봇의 소음 측정법 개발 및 측정 장소에 따른 상관성 분석)

  • Ok, Jinkyu;Park, Eunjoo;Park, Minsu;Lee, Myungchun
    • Journal of the Korea Institute of Military Science and Technology
    • /
    • v.20 no.5
    • /
    • pp.633-638
    • /
    • 2017
  • The small unmanned robot developed in this paper can perform tasks such as surveillance and reconnaissance in the battle field. The noise generated during the operation of the robot may expose the operation area. Therefore, in this study, we developed a method to quantitatively measure the noise of the developed small unmanned ground robot. The criteria for noise measurement in indoor and outdoor are presented. It was used for statistical verification method to verify the reliability of the developed noise measurement method. The noise was measured at different places, and the correlation was analyzed. Thus, we proposed a method to predict the noise level in the operation area where the robot is operated by the noise test data measured during the development process.

Installation of Induced Current Measurement Systems in Substations and Analysis of GIC Data during Geomagnetic Storms

  • Choi, Kyu-Cheol;Park, Mi-Young;Ryu, Youngsoo;Hong, Youngsu;Yi, Jong-Hyuk;Park, Sung-Won;Kim, Jae-Hun
    • Journal of Astronomy and Space Sciences
    • /
    • v.32 no.4
    • /
    • pp.427-434
    • /
    • 2015
  • Coronal Mass Ejections (CME), which originate from active regions of the Sun's surface, e.g., sunspots, result in geomagnetic storms on Earth. The variation of the Earth's geomagnetic field during such storms induces surface currents that could cause breakdowns in electricity power grids. Hence, it is essential to both monitor Geomagnetically Induced Currents (GICs) in real time and analyze previous GIC data. In 2012, in order to monitor the variation of GICs, the Korean Space Weather Center (KSWC) installed an induced current measurement system at SINGAPYEONG Substation, which is equipped with 765 kV extra-high-voltage transformers. Furthermore, in 2014, two induced current measurement systems were installed on the 345 kV high-voltage transformers at the MIGEUM and SINPOCHEON substations. This paper reports the installation process of the induced current measurement systems at these three substations. Furthermore, it presents the results of both an analysis performed using GIC data measured at the SINGAPYEONG Substation during periods of geomagnetic storms from July 2013 through April 2015 and the comparison between the obtained GIC data and magnetic field variation (dH/dt) data measured at the Icheon geomagnetic observatory.

2M Class CCM(Compact Camera Module) Defect Inspection (2M급 CCM(Compact Camera Module) 불량 검사)

  • Cho S.Y.;Ko K.W.;Lee Y.J.;Lee J.H.;Kang C.G.
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.1079-1082
    • /
    • 2005
  • This paper deals with the algorithm development that inspects defects such as Lens Focus, Focus check, Black Defect, Dark Defect, Dim Defect, Color Defect, and Line Defect, Angle Defect, IrisAgc Defect caused by the process of 2M Class Compact Camera Module (CCM). Domestic market was majorly comprised of VGA(0.3 million pixel) market. But in the middle of year 2004, camera phone with Mega Pixel has appeared, and it is estimated that the camera phone with Mega Pixel will take up to 28% of total phone sales if it is released in the end of year 2004. Since the inspection of finished products is done manually, it is major obstacle in production increment In this paper, to solve these problems, we developed the imaging processing algorithm to inspect the defects in captured image of assembled CCM. The performances of the developed inspection system and we can recognize various types of defect of CCM modules with good accuracy and high speed

  • PDF

Study on the Error Compensation in Strain Measurement of Sheet Metal Forming (박판성형 변형률 측정 오차보정에 관한 연구)

  • 한병엽;차지혜;금영탁
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2003.05a
    • /
    • pp.270-273
    • /
    • 2003
  • The strain measurement of the panel in the sheet metal forming is essential work which provides experimental data needed to die design, process design, and product inspection. To measure efficiently the complex geometry strain, the 3-dimensional automative strain measurement system, which has high accuracy in theory, but has some 3∼5% errors in practice, is often used. The object of this study is to develop the error compensation technology to eliminate the strain, errors resulted when formed panels are measured using an automated strain measurement system. To achieve the study object, the position error calibration method correcting coordinates of the grid node recognized by a camera using error functions is suggested. Then the position errors were found by calculating the difference in the position of the cube node between real coordinates and measured coordinates in toms of node coordinates and the error calibration equations were derived by regressing the position errors. In order to show the validation of the suggested position error calibration method, finite element analysis and current calibration method was performed for the initial-blankformed.

  • PDF

A Case Study of Six Sigma Project for Improving Measurement Method of Skin Elasticity (피부탄성 측정 문제점 개선을 위한 6시그마 프로젝트)

  • Lee, Hae-Jung;Kang, Nam-Sik;Jeon, Young-Ju;Kim, Keun-Ho;Kim, Hong-Gie;Kim, Jong-Yeol
    • Korean Journal of Oriental Medicine
    • /
    • v.16 no.3
    • /
    • pp.135-140
    • /
    • 2010
  • The usefulness of constitutional diagnoses based on skin measurements has been established in oriental medicine. According to Sasang constitutional medicine, humans can be distinguished based on properties of skin's friction, thickness and elasticity. To quantify and standardize skin diagnosis, the present study designed an equipment for measuring skin elasticity of hand. But there were some noises in measuring skin elasticity such as measurement method, environment, operator and conditions of patient. So we considered a six sigma project for reducing the measurement errors. The project was followed to discipline process of five macro phases: Define, Measure, Analyze, Improve and Control(DMAIC). So, we could find the major factors which should be controled for stabilizing measurement system and we revised the SOP(Standard Operating Procedure) of the skin elasticity measurement.

Vision-based Automatic System for Non-contact Measurement of Morphometric Characteristics of Flatfish

  • Jeong, Seong-Jae;Yang, Yong-Su;Lee, Kyounghoon;Kang, Jun-Gu;Lee, Dong-Gil
    • Journal of Electrical Engineering and Technology
    • /
    • v.8 no.5
    • /
    • pp.1194-1201
    • /
    • 2013
  • This paper introduces a vision-based automatic system (VAMS) for non-contact measurement of morphometric characteristics of flatfish, such as total length (TL), body width (BW), height (H), and weight (W). The H and W are simply measured by a laser displacement and a load cell, respectively. The TL and BW are measured by a proposed morphological image processing algorithm. The proposed algorithm cans measurement, when the tail of flatfish is deformed, and when it is randomly oriented. In the experiment, the average and maximum measurement errors were recorded, and standard deviations and coefficients of variation (CVs) for the measurements were calculated. From those results, when flatfish the TL measurements had an average of 266.844 mm, a standard deviation of 0.351 mm, a CV of 0.131%, and a maximum error of 0.87 mm with straightened flatfish ($TL_A$ : 267 mm, $BW_A$ : 141 mm), and when flatfish of different sizes were measured, the errors in the TL and BW measurements were both about 0.2 %. Using a single conveyor, the VAMS can process up to 900 fishes per hour. Moreover, it can measure morphometric characteristics of flatfish with a TL of up to 500 mm.

System Development for Automatic Tool Wear Measurement (자종공무마모계측시스템개발)

  • Kim, Y.I.
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.11 no.6
    • /
    • pp.185-199
    • /
    • 1994
  • This study has been performed to present a new automatic tool wear measurement by digital image processing. The purpose of this paper is to develop an automatic tool wear measuring system based on the image processing which can be applied to the quasi-real time measurement of the characteristics of insert tip in turning. Tool wear monitoring is one of the key-problems, for the development of control systems of modern unmanned factory which are not completely solved now. In oredr words at present complete qualitative and quantitative information on tool wear morphology is required, at least on the following aspects : flank wear, its dimensions and distribution on the maximum and mean values on VB pqrqmeter in the various zones of the wearland. crater wear, its main dimensions and values of KT parameters. This research has been performed to this technique made possible by designing a proper lighting system to the worn tool with following features : The flank wear is measured by observing the active cutting part from a proper direction and by lighting the wearland by a diffuser optic system. The crater wear is visualized by lighting the tool by a He-Ne gas laser system developed in this study. By means of this system it is research to evaluate classical parameters of tool wear and to have complete information about tool wear morphology.

  • PDF

Selection of Measurement Locations at Inner Barrel Assembly Top Plate in the Reactor (원자로 내부배럴집합체 상부면 측정위치 선정)

  • Ko, Do-Young;Kim, Kyu-Hyung;Kim, Sung-Hwan
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 2012.04a
    • /
    • pp.734-738
    • /
    • 2012
  • A comprehensive vibration assessment program for the Advanced Power Reactor 1400 reactor vessel internals is established in accordance with the United States Nuclear Regulatory Commission Regulatory Guide 1.20 Revision 3. This paper is related to instruments and measurement locations based on the vibration and stress response analysis results at the inner barrel assembly top plate in the reactor. The analysis results of the inner barrel assembly top plate in the reactor show that the deterministic stress and deformation due to the reactor coolant pump induced pressure pulsations are larger than the random stress and deformation induced by the flow turbulence. The selection of the instruments and measurement locations at Inner barrel assembly top plate in the reactor is essential requirements and very important study process for the vibration and stress measurement program in comprehensive vibration assessment program for the Advanced Power Reactor 1400 reactor vessel internals.

  • PDF