• Title/Summary/Keyword: process measurement

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Adaptive Force Ripple Compensation and Precision Tracking Control of High Precision Linear Motor System (초정밀 선형 모터 시스템의 적응형 힘리플 보상과 정밀 트랙킹 제어)

  • Choi Young-Man;Gweon Dae-Gab;Lee Moon G.
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.12 s.177
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    • pp.51-60
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    • 2005
  • This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

Optimal Design of Controller for Ultra-Precision Plane X-Y Stage (초정밀 평면 X-Y 스테이지의 최적제어기 설계)

  • Kwak, L. K.;kim, J. Y.;Yang, D. J.;Ko, M. S.;You, S.;Kim, K. T.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.342-347
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    • 2002
  • After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

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Friction Behavior of Oil-enriched Nanoporous Anodic Aluminum Oxide Film (오일 함침된 나노 기공 산화알루미늄 필름의 마찰 거동)

  • Kim, Hyo-Sang;Kim, Dae-Hyun;Hahn, Jun-Hee;Ahn, Hyo-Sok
    • Tribology and Lubricants
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    • v.27 no.4
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    • pp.193-197
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    • 2011
  • Friction behavior of nanoporous anodic aluminum oxide(AAO) film was investigated. A 60 ${\mu}m$ thick AAO film having nanopores of 45 nm diameter with 105 nm interpore-diatance was fabricated by mild anodization process. The AAO film was then saturated with paraffinic oil. Reciprocating ball-on-flat sliding friction tests using 1 mm diameter steel ball as the counterpart were carried out with normal load ranging from 0.1 N to 1 N in an ambient environment. The morphology of worn surfaces were analyzed using scanning electron microscopy. The friction coefficient significantly increased with the increase of load. The boundary lubrication layer of paraffinic oil contributed to the lower friction at relatively low load (0.1 N), but it is less effective at high load (1 N). Plastic deformed layer patches were formed on the worn surface of oil-enriched AAO at relatively low load (0.1 N) without evidence of tribochemical reaction. On the other hand, thick tribolayers were formed on the worn surface of both oil-enriched and as-prepared AAO at relatively high load (1 N) due to tribochemical reaction and material transfer.

Design of an Inductively Coupled Plasma Source with Consideration of Electrical Properties and its Practical Issues (전기적 특성을 고려한 ICP Source 설계)

  • Lee, S.W.
    • Journal of the Korean Vacuum Society
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    • v.18 no.3
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    • pp.176-185
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    • 2009
  • The realization and the performance of ICP source are strongly affected by its electrical impedance and the electric/magnetic field distribution. The ICP source impedance is determined by the antenna impedance and the plasma one. It is preferred to keep the imaginary impedance between -100 ohm to 100 ohm, since it should be avoided the high voltage formation on the antenna and abrupt impedance variation during the thin film process. The plasma uniformity is affected by the electric and magnetic field which is formed by the antenna current and voltage. The influence of azimuthal symmetry are shown by the electromagnetic simulation and the measurement result of plasma density. The radial uniformity can be controlled by locating the concentric antennas which have different diameters. The power distribution ratio and its control method are presented in the case of parallel antenna connections.

Estimation of Han River runoff using Cheugugi data (측우기 자료를 이용한 한강 유출량 추정)

  • Moon, Jang Won
    • Journal of Korea Water Resources Association
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    • v.52 no.12
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    • pp.1067-1074
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    • 2019
  • In Korea, there are long-term rainfall observation data using Cheugugi, but it is relatively insufficient to use the data for water resources planning and management. In this study, river runoff is estimated based on the measurement data using Cheugugi so that it can be used as a scenario for the water resources planning process. After deriving the relationship between rainfall and runoff, the results are applied to the observations of Cheugugi to estimate the Han River runoff. An analysis of the estimated river runoff is made to confirm that there is a very severe drought for three consecutive years from 1900 to 1902. Especially, it is analyzed that there is a very small runoff in 1901, which is 8.6% compared to the average of estimated runoff. Consequently, it is judged that the results of this study can be useful as a scenario for water resources planning or drought response planning.

The Study on Attrition Resistance of ZnO/natural-zeolite/Fe$_2$O$_3$ Desulfurization Sorbents with CaO for Hot Gas Clean-up (산화칼슘이 첨가된 ZnO/Natural-zeolite/Balho Kim/Fe$_2$O$_3$ 탈황제의 내마모성특성 연구)

  • 정용길;박노국;이종대;전진혁;류시옥;이태진
    • Journal of Energy Engineering
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    • v.13 no.1
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    • pp.75-81
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    • 2004
  • ZZFCa sorbents for hot gas desulfurization in IGCC were prepared by adding calcium oxide to ZZF sorbent in order to improve its attrition resistance in this study. ASTM attrition test for the sorbent was performed at several different weight percentages of CaO to investigate the attrition characteristics of ZBFCa sorbents as a function of CaO content. Attrition index of ZZF without CaO was 28.3% and its collected attrition index was 10.8%. ZZFCa-3 containing 3 wt% CaO showed the lowest attrition index (AI=17.3%, CAI=8.8%) in the test. From the results of SEM morphologies and particle size distribution measurements, ZZFCa-3 maintained a fine shape and a desirable average particle size even after attrition test. In the experiments of sulfidation/regeneration for ZZFCa-3 sorbent concentration of hydrogen sulfide in coal gas was lowered from 10000 ppm to below 1 ppm. Sulfur removing capacity was about 28.8 g S/100 g sorbent. Neither formation of CaSO$_4$ was observed in XRD measurement nor SO$_2$ slippage was observed during sulfidation process.

IMAGING SPECTROMETRY FOR DETECTING FECES AND INGESTA ON POULTRY CARCASSES

  • Park, Bo-Soon;William R.Windham;Kurt C.Lawrence;Smith, Douglas-P
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.3106-3106
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    • 2001
  • Imaging spectrometry or hyperspectral imaging is a recent development that makes possible quantitative and qualitative measurement for food quality and safety. This paper presents the research results that a hyperspectral imaging system can be used effectively for detecting fecal (from duodenum, cecum, and colon) and ingesta contamination on poultry carcasses from the different feed meals (wheat, mile, and corn with soybean) for poultry safety inspection. A hyperspectral imaging system has been developed and tested for the identification of fecal and ingesta surface contamination on poultry carcasses. Hypercube image data including both spectral and spatial domains between 430 and 900 nm were acquired from poultry carcasses with fecal and ingesta contamination. A transportable hyperspectral imaging system including fiber optically fabricated line lights, motorized lens control for line scans, and hypercube image data from contaminated carcasses with different feeds are presented. Calibration method of a hyperspectral imaging system is demonstrated using different lighting sources and reflectance panels. Principal Component and Minimum Noise Fraction transformations will be discussed to characterize hyperspectral images and further image processing algorithms such as image band ratio of dual-wavelength images and its histogram stretching with thresholding process will be demonstrated to identify fecal and ingesta materials on poultry carcasses. This algorithm could be further applied for real-time classification of fecal and ingesta contamination on poultry carcasses in the poultry processing line.

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USE OF NEAR INFRARED FOR THE QUANTITATIVE ANALYSES OF BAUXITE

  • Walker, Graham S.;Cirulis, Robyn;Fletcher, Benjimin;Chandrashekar, S.
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.1171-1171
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    • 2001
  • Quantitative analysis is an important requirement in exploration, mining and processing of minerals. There is an increasing need for the use of quantitative mineralogical data to assist with bore hole logging, deposit delineation, grade control, feed to processing plants and monitoring of solid process residues. Quantitative analysis using X-Ray Powder Diffraction (XRD) requires fine grinding and the addition of a reference material, or the application of Rietveld analysis to XRD patterns to provide accurate analysis of the suite of minerals present. Whilst accurate quantitative data can be obtained in this manner, the method is time consuming and limited to the laboratory. Mid infrared when combined with multivariant analysis has also been used for quantitative analysis. However, factors such as the absorption coefficients and refractive index of the minerals requires special sample preparation and dilution in a dispersive medium, such as KBr to minimize distortion of spectral features. In contrast, the lower intensity of the overtones and combinations of the fundamental vibrations in the near infrared allow direct measurement of virtually any solid without special sample preparation or dilution. Thus Near Infrared Spectroscopy (NIR) has found application for quantitative on-line/in line analysis and control in a range of processing applications which include, moisture control in clay and textile processing, fermentation processes, wheat analysis, gasoline analysis and chemicals and polymers. It is developing rapidly in the mineral exploration industry and has been underpinned by the development of portable NIR spectrometers and spectral libraries of a wide range of minerals. For example, iron ores have been identified and characterized in terms of the individual mineral components using field spectrometers. Data acquisition time of NIR field instruments is of the order of seconds and sample preparation is minimal. Consequently these types of spectrometers have great potential for in-line or on-line application in the minerals industry. To demonstrate the applicability of NIR field spectroscopy for quantitative analysis of minerals, a specific example on the quantification of lateritic bauxites will be presented. It has been shown that the application of Partial Least Squares regression analysis (PLS) to the NIR spectra can be used to quantify chemistry and mineralogy in a range of lateritic bauxites. Important, issues such as sampling, precision, repeatability, and replication which influence the results will be discussed.

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Electrochemical Properties of Individual Carbon Nanotube Fabricated by Reactive Ion Etching (반응성 이온 식각법에 의해 제작된 탄소나노튜브 전극의 전기화학적 특성)

  • Hwang, Sook-Hyun;Choi, Hyon-Kwang;Kim, Sang-Hyo;Han, Young-Moon;Jeon, Min-Hyon
    • Korean Journal of Materials Research
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    • v.21 no.2
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    • pp.89-94
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    • 2011
  • In this work, fabrication and electrochemical analysis of an individual multi-walled carbon nanotube (MWNT) electrode are carried out to confirm the applicability of electrochemical sensing. The reactive ion etching (RIE) process is performed to obtain sensitive MWNT electrodes. In order to characterize the electrochemical properties, an individual MWNT is cut by RIE under oxygen atmosphere into two segments with a small gap: one segment is applied to the working electrode and the other is used as a counter electrode. Electrical contacts are provided by nanolithography to the two MWNT electrodes. Dopamine is specially selected as an analytical molecule for electrochemical detection using the MWNT electrode. Using a quasi-Ag/AgCl reference electrode, which was fabricated by us, the nanoelectrodes are subjected to cyclic voltammetry inside a $2{\mu}L$ droplet of dopamine solution. In the experiment, RIE power is found to be a more effective parameter to cut an individual MWNT and to generate "broken" open state, which shows good electrochemical performance, at the end of the MWNT segments. It is found that the pico-molar level concentration of analytical molecules can be determined by an MWNT electrode. We believe that the MWNT electrode fabricated and treated by RIE has the potential for use in high-sensitivity electrochemical measurement and that the proposed scheme can contribute to device miniaturization.

Influence of Heat Stress Temperature on Sympathetic Nerve Activities (Heat-stress 온도 적용이 교감신경활동에 미치는 영향)

  • Lim, Young-Eun;Yang, Eun-Young;Kim, Tae-Youl
    • Journal of the Korean Academy of Clinical Electrophysiology
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    • v.5 no.2
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    • pp.11-21
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    • 2007
  • The purpose of this study were to investigate influence of heat stress temperature on sympathetic nerve activities. Subjects were 8 normal adults (4 men, 4 women, 21.36 years old). First sympathetic nerve activities were measured at the point that increase of core temperature stops at the state of applying normal thermic temperature (NIT; $34^{\circ}C$). After measurement, temperature of bathtub was increased to heat stress temperature (HST; $46^{\circ}C$) and sympathetic nerve activities were remeasured at the point that temperature increase stops. Sympathetic skin response (SSR) were analyzed using EMG, IR thermometer, and auto stethoscope. SSR latency showed significant differences at both palms by electrical stimulation to median nerve (p<.05). Electrical stimulation to forehead showed significant difference at left palm (p<.05) and electrical stimulation to navel showed significant difference at right palm (p<.05). Median nerve in changes of SSR amplitude showed significant differences at both palms in HST (p<.01). Electrical stimulation to navel showed significant difference at left palm (p<.05). Ts of forehead and xiphoid process showed significant differences (p<0.01). Tc of oral (p<0.05) and inner ear (p<0.01) showed significant differences. Pulse rate showed significant difference (<0.05). This study showed that immersion in HST had significant decrease of excitability in sympathetic nervous system compared to immersion in NTT.

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