• Journal of the Microelectronics and Packaging Society
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• v.20 no.2
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• pp.11-15
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• 2013

The wafer bonding process becomes a flexible approach to material and device integration. The bonding strength in 3-dimensional process is crucial factor in various interface bonding process such as silicon to silicon, silicon to metals such as oxides to adhesive intermediates. A measurement method of bonding strength was proposed by utilizing AFM applied CNT probe tip which indicated the relative simplicity in preparation of sample and to have merit capable to measure regardless type of films. Also, New Tool was utilized to measure of tip radius. The cleaned $SiO_2$-Si bonding strength of SPFM indicated 0.089 $J/m^2$, and the cleaning result by RCA 1($NH_4OH:H_2O:H_2O_2$) measured 0.044 $J/m^2$, indicated negligible tolerance which verified the possibility capable to measure accurate bonding strength. And it could be confirmed the effective bonding is possible through SPFM cleaning.

• Journal of the Semiconductor & Display Technology
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• v.12 no.4
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• pp.39-44
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• 2013

In the semiconductor heat-treatment process, the temperature uniformity determines the film quality of a wafer. This film quality effects on the overall yield rate. The heat transfer of the wafer surface in the heat-treatment process equipment is occurred by convection and radiation complexly. Because of this, there is the nonlinearity between the wafer temperature and reactor. Therefore, the accurate prediction of temperature on the wafer surface is difficult without the direct measurement. The thermal camera and the T/C wafer are general ways to confirm the temperature uniformity on the heat-treatment process. As above ways have limit to measure the temperature in the precise domain under the micro-scale. In this study, we developed the thin film type temperature sensor using the MEMS technology to establish the system which can measure the temperature under the micro-scale. We combined the experiment and numerical analysis to verify and calibrate the system. Finally, we measured the temperature on the wafer surface on the semiconductor process using the developed system, and confirmed the temperature variation by comparison with the commercial T/C wafer.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.5
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• pp.468-476
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• 2005

The purpose of this study is to investigate actual air quality in newly-constructed multi-family houses and to improve Indoor Air Quality (IAQ). The field measurement was conducted in four different newly-constructed multi-family house complexes in Seoul and one existing multi-family house complex in Kyong-gi province. The result of the measurement shows that indoor concentrations of Formaldehyde and TVOC in newly-constructed multi-family houses are much higher than the foreign standards. To establish a proper process for reducing indoor air pollutants, various experiments have been conducted; application of natural materials, bake-out practice, closure of all openings without ventilation, and use of mechanical ventilation system. The result indicates that three practices (natural materials, bakeout, mechanical ventilation) can reduce the level of indoor air pollutants almost in half during the experiments. However, each practice has its limitation and is insufficient to satisfy IAQ standards. Therefore, the study proposes a proper reduction process of indoor air pollutants which combines four different practices in time sequence.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.270-273
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• 2001

Electrical tree is studied widely by manufacture state of insulating material fare and blazing fire diagnosis system of use in phenomenon of part discharge that happen for main cause of dielectric breakdown of equipment for electric power. Use process that draw tree pattern here measuring above zero to study special quality of this electricity tree, real-time processing by image processing is proposed because reproduction of tree blazing fire process drops and pattern of tree is difficult correct quantification of tree growth by existent visual observation by involution. This research presents general process that need in image processing of tree blazing fire, and that remove various noises that happen in above zero by measuring electrical tree dividing background and complete view in measured above zero taking advantage of specially proposed complete view object abstraction techniques effectively and quantification of tree becomes easy naturally, can apply to dielectric breakdown estimate because can chase growth process of tree.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.6
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• pp.752-759
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• 2007

For an accurate measurement of aerosol particle size distribution using a differential mobility analyser (DMA), a new calculation process, capable of predicting the masses for the various kinds of water cluster ions generated from a bipolar ionizer, was prepared by improving the previous process. The masses for the 5 kinds of positive and negative water cluster ions produced from a SMAC ionizer were predicted by the improved calculation process. The aerosol particle charging ratios calculated by applying the predicted ion masses to particle charging equations were in good accordance with the experimentally measured ones, indicating that the improved calculation process are more reasonable than the previous one in a mass prediction of bipolar water cluster ions.

• Journal of Society of Preventive Korean Medicine
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• v.13 no.1
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• pp.105-115
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• 2009

Background: The resource-based relative value scale has been applied to Korean medicine services as part of the National Health Insurance, yet the proper scoring method for physician's work needs to be developed. Objectives: To measure physician's work for Korean medicine services using Analytical Hierarchy Process(AHP) and to compare results abstracted by AHP with those by Magnitude Estimation method. Methods: We developed the AHP questionnaires for Korean Medicine services and administered it to 12 Korean medicine insurance experts. Weighted scores were calculated and were converted into physician's work scores. Results: In AHP measurement, the physician's work scores for acupuncture activities, especially special acupunctures, far increased, while those for diagnosis and basic consultations decreased. Variations in the scores enlarged. Conclusions: As an alternative, AHP method can be considered for measuring the physician's work for Korean medicine services with careful management of scoring variation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.1
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• pp.11-16
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• 2016

The conduction behavior and electron concentration change in a-IGZO thin-films according to the RTA (rapid thermal annealing) were studied. The electrical characteristics of TFTs (thin-film-transistors) annealed by different temperatures were measured. The sheet resistance, electron concentration, and oxygen vacancy of a-IGZO film were measured by the four-point-probe-measurement, hall-effect-measurement, and XPS analysis. The RTA process increased the driving current of IGZO TFTs but the VTH shifted to the negative direction at the same time. When the RTA temperature is higher than $250^{\circ}C$, the leakage current at off-state increased significantly. This is attributed to the increase of oxygen vacancy resulting in the increase of electron concentration. We demonstrate that the RTA is a promising process to adjust the VTH of TFT because the RTA process can easily modify the electron concentration and control the conductivity of IGZO film with short process time.

• 한국신재생에너지학회:학술대회논문집
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• 2006.06a
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• pp.415-418
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• 2006

In Japan, research and development were undertaken on gas hydrate-side industrial processes associated with power generation system connections that may particularly be necessary to develop gas hydrated technology-based industrial systems. In so doing, data and engineering technologies useful n formulating guidelines on design of practical process were accumulated. In addition, basic research into theoretical evidence were carried out to promote and support the development of technological elements for those processes. In basic research designed to promote and support the research and development of elemental technologies microanalyses were conducted to understand the decomposition mechanism of mixed gas hydrate. Moreover, measurement technologies that can be applied in industrial processes, such as numerical analyses and concentration ion measurement, were examined. Japan has developed a highly efficient gas hydrate formation process using micro-bubbles with a tubular reactor. Higher formation rate over conventional systems has been obtained by the process. As mentioned above, the technical problems were clarified and the economics were studied from a view point of the NGH technology in this study. The results can be applied for utilization and must contribute to popularization of gas hydrate production.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.10 no.6
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• pp.2463-2482
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• 2016

Cloud services are often provisioned to their customers using user-friendly web browsers with flexible and rich plug-in environments. Delay is one of the fundamental performance metrics of these web-based services. Commonly-used network measurement tools usually only measure network delay and it may be difficult to infer the web-delay performance using only network layer measurement approaches. In this paper, we propose to evaluate the application layer delay in a browser-based network measurement platform using engineered scripts. We conducted a delay measurement study using instrumented scripts in the proposed browser-based measurement platform. Our investigation included a comparison study of three browser-scripting delay measurement methods, including Java applet, JSP and Flash ActionScript. We developed a browser-based delay measurement testbed over the Internet so that different delay measurement tools could be evaluated in the same real network environment including typical Internet paths and the Baidu cloud. We also decomposed the components of the end-to-end delay process of the above measurements to reveal the difference and relationship between the network-layer delay and the application-layer delay. Our measurement results characterize the stochastic properties of the application-layer delay over real Internet paths, and how these properties vary from the underlying network layer delay. This browser-scripting measurement approach can be easily deployed on different cloud service platforms to inspect their application-layer delay performance between end clients and the cloud platforms. Our measurement results may provide insights into designing new cloud services with enhanced quality-of-experience perceived by cloud users.

• Journal of Korean Society of Water and Wastewater
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• v.18 no.6
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• pp.807-813
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• 2004

Wastewater was treated by two different treatment processes; activated sludge process and advanced wastewater treatment process (KNR process) using lab-scale experiment. Two treated wastewater showed good treatment efficiency of organic matter removal, up to 90% removal. Nitrogen and phosphorus were not effectively removed though activated sludge process, while KNR process showed good removal efficiency of nitrogen and phosphorus; 56% nitrogen removal and 95% phosphorus removal. KNR process showed better removal efficiency of organic matter, nitrogen, and phosphorus compared to activated sludge process. Organic matter characterization was tracked though measurement of UV scan, SUVA, and XAD fractionation. Treated wastewater showed higher SUVA value than wastewater influent, indicting less aromatic characteristic of organic matter. XAD fractionation showed hydrophilic fraction decreased though wastewater treatment, suggesting microbes preferentially digest hydrophilic and aliphatic molecules rather than hydrophobic and aromatic molecules of organic matter.