• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1994-1996
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• 1996

This paper presents the fabrication and testing of a polysilicon piezoresistive accelerometer with p+ silicon diaphragm by simple process such as two step photolithography for the RIE process to form the cantilevers and a deep anisotropic etch process for the complete fabrication of the accelerometer. The fabricated accelerometer consists of a seismic mass and four cantilevers on which polysilicon piezoresistors are formed. The measurement of the output signal from the bridge circuit of the fabricated accelerometer is carried out with the HP 3582A spectrum analyzer. The analysis of the experimental result is showed in terms of the sensitivity and the resonant frequency. At atmospheric condition, the measurement values of the sensitivity and the resonant frequency are $11\;{\mu}V/Vg$ and 475 Hz, respectively.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.560-564
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• 1999

Burr sensing for burr size measurement and deburring process control is one of the essential elements in an automated deburring procedure. This paper presents the implementation of capacitance sensing and acoustic emission (AE) to deburring. The first application is the "on-line" measurement of burrs using a capacitance sensor. A non-contact capacitance gauging sensor is attached to an ultra precision milling machine which was used as a positioning system. The setup is used to measure burr profiles along machined workpiece edges. The proposed scheme is shown to be accurate, easy to setup, and with minor modifications, readily applicable to automatic deburring processes. As the second example, AE signals were sampled and analyzed for the sensor feedback of a precision deburring process - laser deburring -. The results, such as the sensitivity of AE signals to burr shapes and edge detection capability show a clear correlation between physical process parameters and the AE signals. A subsequent control strategy for deburring automation is also briefly discussed.

• Proceedings of the KIEE Conference
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• 1998.11b
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• pp.481-483
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• 1998

In general, spatial filtering method was proposed to simplify measurement system through parallel Processing hardware. Spatial filtering is a method of detection that we can get a spatial pattern information, as we process a special space pattern, to say, as we process spatial parallel process by using the spatial weighting function. The important processing characteristics will be depended in according to how ire design a spatial weighting function, a spatial sensitive distribution. The form of the weighting function which is realized from the generally used spatial filtering is fixed and the weighting value was already became a binary-value. In this paper, we propose a new method in order to construct adaptive measurement systems. This method is a weighting function design to make multi-valued and variable.

• Particle and aerosol research
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• v.9 no.1
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• pp.1-6
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• 2013

New evaluation method for the particle size and morphology via change of ground particle during a grinding process was investigated. The grinding experiments were carried by a planetary ball mill. The relationship between the particle outline of the scanning electron microscopy photograph and measurement line, the measurement contact number was evaluated. The value of contact number decreased with the increase in the particle size of the ground sample, and varied with the experimental conditions. The value of contact number, which is related to the particle size of the raw sample, changed at the various experimental conditions.

• Journal of Korean Port Research
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• v.12 no.2
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• pp.323-328
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• 1998

A quartz crystal analyzer is utilized to monitor the corrosion process of an aluminum surface of a quartz crystal for marine sensor by sea water. A quartz crystal having 2000 $\AA$ of aluminum layer is installed in a specially designed cell and is in contact with sea water imitated electrolyte solution. While a constant potential is applied to the cell, the resonant frequency and resonant resistance are simultaneously measured using the quartz crystal analyzer. In addition, surface topographs are taken with an atomic force microscope(AFM) and the element analysis of the surface is conducted using an energy dispersive X-ray spectrometer(EDX). The simultaneous measurement of resonant frequency and resonant resistance during the corrosion process explains the change of surface structure caused by the corrosion. The variation of resonant frequency addresses the amount surface metal dissolution. As a conclusion, it is found that a simple measurement using the quartz crystal analyzer can replace the complex monitoring employing large equipments in the investigation of a corrosion process of sensor surface.

• Proceedings of the KIEE Conference
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• 2003.11c
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• pp.449-451
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• 2003

The estimation of time-series data is fundamental process in many data analysis cases. However, the unwanted measurement error is usually added to true data, so that the exact estimation depends on efficient method to eliminate the error components. The wavelet transform method nowadays is expected to improve the accuracy of estimation, because it is able to decompose and analyze the data in various resolutions. Therefore, the wavelet based Kalman filter method for the estimation of time-series data is proposed in this paper. The wavelet transform separates the data in accordance with frequency bandwidth, and the detail wavelet coefficient reflects the stochastic process of error components. This property makes it possible to obtain the covariance of measurement error. We attempt the estimation of true data through recursive Kalman filtering algorithm with the obtained covariance value. The procedure is verified with the fundamental example of Brownian walk process.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.7
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• pp.34-42
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• 2022

Minimizing the backlash of gears and reducers is important for their proper and precise functioning. In this study, an automatic backlash measuring system was developed for the mass production and quality control of a military-grade reducer. The developed automatic backlash measurement system eliminates human error during the backlash measurement process. It also reduces the manufacturing time and digitizes the backlash number. The system was tested for an aircraft machine gun control reducer that required low-torque and high-precision conditions. The test results show that the torque range was 0.820-4.788 Nm. The maximum torque error is less than 0.231 N·m at 2.943 N·m, and 1.2 arcmin of the maximum backlash error with ± 0.3 arcmin of repeatability. The developed system satisfies all required conditions: torque of 1-3 Nm, torque accuracy within ± 0.5 N·m, and backlash accuracy of ± 3 arcmin.

• Transactions of Materials Processing
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• v.32 no.6
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• pp.376-383
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• 2023

The torsion bar, which is a steering torque sensor, is mounted between the steering pinion and the input shaft in the IPA(input pinion assembly). Accurate torque measurement is important to improve the sense of operation, and the straightness of the torsion bar can affect torque measurement. In this study, the amount of bending was measured and the exact shape was analyzed regarding the bending phenomenon in the press-fitting process for torsion bars. The effect of alignment error was analyzed through finite element forming analysis. Process data analysis was conducted for the double-end press fit model. If there is an alignment error of about 10% of the serration tooth height, the indentation load is reduced by about 10%. If there is an alignment error, the torsion bar is rotated.

• Journal of the Speleological Society of Korea
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• no.78
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• pp.29-31
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• 2007

This paper is devoted to a study of the characterization of the plasma state. For the purpose of monitoring plasma condition, we experiment on reactive ion etching (RIE) process. Without actual etch process, generated oxygen plasma, measurement of plasma emission intensity. Changing plasma process parameters, oxygen flow, RF power and chamber pressure have controlled. Using the optical emission spectroscopy (OES), we conform to the unique oxygen wavelength (777nm), the most powerful intensity region of the designated range. Increase of RF power and chamber pressure, emission intensity is increased. oxygen flow is not affect to emission intensity.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.421-426
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• 2009

This paper presents vibration analysis of maskless exposure module in Printed Circuit Board (PCB) manufacturing system. In order to complete exposure process in PCB, masking type module has been widely used in electronics industries. However, masking process confronts some limitations of application due to higher production cost for masking as well as lower printing resolution. Therefore, maskless exposure module is started to be in the spotlight for flexible production system to meet the needs of fabrication in variable patterns at low cost. Since maskless exposure process adopts direct patterning to PCB, vibration problems become more critical compared to conventional masking type process. Moreover, movements of exposure engine as well as stage generate vibration sources in the system. Thus, it is imperative to analyze the vibration characteristics for the maskless exposure module to improve the quality and accuracy of PCB. In this study, vibration analysis using the Finite Element Analysis is conducted to identify the critical structural parts deteriorating vibration performance. Also, Experimental investigations are conducted by single/dual encoder measurement process under the operating module speed. Measurement points of vibration are selected by three places, which are base of stage, exposure engine and top of stage, to check the effect of vibration from the exposure engine. Comparisons between analysis results and experimental measurement are conducted to confirm the accuracy of analysis results including the developed FE model. Finally, this studies show feasibility of optimal design using the developed FE analysis model.