• Title/Summary/Keyword: process fault

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Prediction of Semiconductor Exposure Process Measurement Results using XGBoost (XGBoost를 사용한 반도체 노광 공정 계측 결과 예측)

  • Shin, Jeong Il;Park, Ji Su;Shon, Jin Gon
    • Annual Conference of KIPS
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    • 2021.05a
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    • pp.505-508
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    • 2021
  • 반도체 회로의 미세화로 단위 공정이 증가하면 TAT(turn-around time) 증가에 따른 제조 비용이 늘어난다. 반도체 공정 중 포토 공정은 마스크의 회로를 웨이퍼에 전사하는 공정으로 전사를 담당하는 노광장비의 성능에 의해 회로의 정확성이 결정된다. 이런 정확성을 검증하는 계측공정은 회로의 미세화가 진행될수록 필요성은 증가하나 TAT 증가의 주된 요인으로 최근 기계학습을 사용한 다양한 예측 모형들의 개발로 계측 결과를 예측하는 실험들이 진행되고 있다. 본 논문은 노광장비 센서들의 이상값을 감지하여 분류 후 계측공정을 진행하는 LFDC(Lithography Fault Detection and Classification) 시스템의 문제인 분류 성능이 떨어지는 것을 해결하기 위해 XGBoost를 사용하여 계측공정을 진행하지 않고 노광장비 센서의 이상값을 학습된 학습기를 통해 분류하여 포토 공정을 재진행하거나 다음 공정을 진행하는 방법을 실험하였다. 실험에서 사용된 계측 결과 예측 모형은 89%의 정확도를 확보하였고 반도체 데이터 특성인 심각한 불균형의 데이터에 대해서도 같은 정확도를 얻었다. 이런 결과는 노광장비 센서들의 이상값에 대해 89%는 정상으로 판단하였고 정상으로 판단한 웨이퍼를 실제 계측 시 예측과 같은 결과를 얻었다. 계측 결과 예측 모형을 사용하면 실제 계측을 진행하지 않고 노광장비 센서들의 이상값에 대한 판정을 할 수 있어 TAT 단축으로 제조 비용감소, 계측 장비 부하 감소 및 효율 향상을 할 수 있다. 하지만 본 논문에서는 90%의 성능을 보이는 계측 결과 예측 모형으로 여전히 10%에 대해서는 실제 계측이 필요한 문제에 대해 추후 더 연구가 필요하다.

Mine water inrush characteristics based on RQD index of rock mass and multiple types of water channels

  • Jinhai Zhao;Weilong Zhu;Wenbin Sun;Changbao Jiang;Hailong Ma;Hui Yang
    • Geomechanics and Engineering
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    • v.38 no.3
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    • pp.215-229
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    • 2024
  • Because of the various patterns of deep-water inrush and complicated mechanisms, accurately predicting mine water inflows is always a difficult problem for coal mine geologists. In study presented in this paper, the water inrush channels were divided into four basic water diversion structures: aquifer, rock fracture zone, fracture zone and goaf. The fluid flow characteristics in each water-conducting structure were investigated by laboratory tests, and multistructure and multisystem coupling flow analysis models of different water-conducting structures were established to describe the entire water inrush process. Based on the research of the water inrush flow paths, the analysis model of different water inrush space structures was established and applied to the prediction of mine water inrush inflow. The results prove that the conduction sequence of different water-conducting structures and the changing rule of permeability caused by stress changes before and after the peak have important influences on the characteristics of mine water-gushing. Influenced by the differences in geological structure and combined with rock mass RQD and fault conductivity characteristics and other mine exploration data, the prediction of mine water inflow can be realized accurately. Taking the water transmitting path in the multistructure as the research object of water inrush, breaking through the limitation of traditional stratigraphic structure division, the prediction of water inflow and the estimation of potentially flooded area was realized, and water bursting intensity was predicted. It is of great significance in making reasonable emergency plans.

A Method to Specify and Verify Requirements for Safety Critical System (안전 필수 시스템을 위한 요구사항 명세 및 검증 방법)

  • Lim, Hye Sun;Lee, Seok-Won
    • Journal of KIISE
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    • v.44 no.9
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    • pp.893-907
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    • 2017
  • In safety-critical systems, software defects may have serious consequences. Therefore, defects should be considered during the requirements specification process, which is the first step of a software development lifecycle. Stakeholder requirements that are usually written in natural language are difficult to derived, and there may also be defects due to ambiguity and inaccuracy. To address these issues, we propose a requirement specification method using a standardized Boilerplate and a GSN Model. The Boilerplate is a semi-standard language that follows a predefined format. Due to its ability to provide a consistent representation of the requirements, boilerplate helps stakeholders avoid ambiguities about what they mean and to define the exact meaning of the requirement. Meanwhile, GSN is recognized notation to prepare a Safety Case to prove to authorities that a system is safe. It can be expressed as a functional goal, e.g., Safety Evidence, etc. The proposed study allows an analyst to easily identify a fault from the early stage of the software development lifecycle. The Boilerplate and GSN Model are designed to specify the requirements of safety critical systems and to prove safety conformity through a connection with Safety Evidence. In addition, the proposed approach is also useful to develop secure software by correcting deficiencies in the requirements found during this process.

Safety Techniques-Based Improvement of Task Execution Process Followed by Execution Maturity-Based Risk Management in Precedent Research Stage of Defense R&D Programs (국방 선행연구단계에서 안전분석 기법에 기반한 수행프로세스의 개선 및 수행성숙도 평가를 활용한 위험 관리)

  • Choi, Se Keun;Kim, Young-Min;Lee, Jae-Chon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.10
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    • pp.89-100
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    • 2018
  • The precedent study stage of defense programs is a project stage that is conducted to support the determination of an efficient acquisition method of the weapon system determined by the requirement. In this study, the FTA/FMEA technique was used in the safety analysis process to identify elements to be conducted in the precedent study stage and a methodology for deriving the key review elements through conceptualization and tailoring was suggested. To supplement the key elements derived from the existing research, it is necessary to analyze various events that may arise from key elements. To accomplish this, the HAZOP technique for safety analysis in other industrial fields was used to supplement the results of kdy element derivation. We analyzed and modeled the execution procedure by establishing input/output information and association with the key elements of the precedent study stage derived by linking HAZOP/FTA/FMEA techniques. In addition, performance maturity was evaluated for performance of precedent study, and a risk-based response manual was generated based on inter-working information with key elements with low maturity. Based on the results of this study, it is possible to meet the performance, cost, and schedule of the project implementation through application of the key elements and procedures and the risk management response manual in the precedent study stage of the defense program.

A Hardware Barrier Synchronization using Multi -drop Scheme in Parallel Computer Systems (병렬 컴퓨터 시스템에서의 Multi-drop 방식을 사용한 하드웨어 장벽 동기화)

  • Lee, June-Bum;Kim, Sung-Chun
    • Journal of KIISE:Computer Systems and Theory
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    • v.27 no.5
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    • pp.485-495
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    • 2000
  • The parallel computer system that uses parallel program on the application such as a large scale business or complex operation is required. One of crucial operation of parallel computer system is synchronization. A representative method of synchronization is barrier synchronization. A barrier forces all process to wait until all the process reach the barrier and then releases all of the processes. There are software schemes, hardware scheme, or combinations of these mechanism to achieve barrier synchronization which tends to use hardware scheme. Besides, barrier synchronization lets parallel computer system fast because it has fewer start-up overhead. In this paper, we propose a new switch module that can implement fast and fault-tolerant barrier synchronization in hardware scheme. A proposed barrier synchronization is operated not in full-switch-driven method but in processor-driven method. An effective barrier synchronization is executed with inexpensive hardware supports. Therefore, a new proposed hardware barrier synchronization is designed that it is operated in arbitrary network topology. In this paper, we only show comparison of barrier synchronization on Multistage Interconnection Network. This research results in 24.6-24.8% reduced average delay. Through this result, we can expect lower average delay in irregular network.

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Thermoelectric properties of SiC prepared by refined diatomite (정제 규조토로 합성한 탄화규소의 열전특성)

  • Pai, Chul-Hoon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.4
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    • pp.596-601
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    • 2020
  • Silicon carbide is considered a potentially useful material for high-temperature electronic devices because of its large band gap energy and p-type or n-type conduction that can be controlled by impurity doping. Accordingly, the thermoelectric properties of -SiC powder prepared by refined diatomite were investigated for high value-added applications of natural diatomite. -SiC powder was synthesized by a carbothermal reduction of the SiO2 in refined diatomite using carbon black. An acid-treatment process was then performed to eliminate the remaining impurities (Fe, Ca, etc.). n-Type semiconductors were fabricated by sintering the pressed powder at 2000℃ for 1~5h in an N2 atmosphere. The electrical conductivity increased with increasing sintering time, which might be due to an increase in carrier concentration and improvement in grain-to-grain connectivity. The carrier compensation effect caused by the remaining acceptor impurities (Al, etc.) in the obtained -SiC had a deleterious influence on the electrical conductivity. The absolute value of the Seebeck coefficient increased with increasing sintering time, which might be due to a decrease in the stacking fault density accompanied by grain or crystallite growth. On the other hand, the power factor, which reflects the thermoelectric conversion efficiency of the present work, was slightly lower than that of the porous SiC semiconductors fabricated by conventional high-purity -SiC powder, it can be stated that the thermoelectric properties could be improved further by precise control of an acid-treatment process.

Image Encryption and Decryption System using Frequency Phase Encoding and Phase Wrapping Method (주파수 위상 부호화와 위상 랩핑 방법을 이용한 영상 암호화 및 복호화 시스템)

  • Seo, Dong-Hoan;Shin, Chang-Mok;Cho, Kyu-Bo
    • Korean Journal of Optics and Photonics
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    • v.17 no.6
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    • pp.507-513
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    • 2006
  • In this paper, we propose an improved image encryption and fault-tolerance decryption method using phase wrapping and phase encoding in the frequency domain. To generate an encrypted image, an encrypting key which denotes the product of a phase-encoded virtual image, not an original image, and a random phase image is zero-padded and Fourier transformed and its real-valued data is phase-encoded. The decryption process is simply performed by performing the inverse Fourier transform for multiplication of the encrypted key with the decrypting key, made of the proposed phase wrapping method, in the output plane with a spatial filter. This process has the advantages of solving optical alignment and pixel-to-pixel mapping problems. The proposed method using the virtual image, which does not contain any information from the original image, prevents the possibility of counterfeiting from unauthorized people and also can be used as a current spatial light modulator technology by phase encoding of the real-valued data. Computer simulations show the validity of the encryption scheme and the robustness to noise of the encrypted key or the decryption key in the proposed technique.

A Research on Trust Realization Strategies for Oriental Medical Quality Improvement (한방의료 품질 향상을 위한 신뢰구현 체계구축 연구)

  • Kim, Hyun Ji;Kim, So Youn;Ji, Young Seung;Nam, Seung Kyu;Kim, Jeong Ho;Kim, Young Il
    • Journal of Acupuncture Research
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    • v.31 no.1
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    • pp.75-93
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    • 2014
  • Objectives : This study was designed to establish medical trust realization system by finding factors influential to it using questionnaire. Methods : 277 subjects were participated in this study. After a treatment, we conducted a survey from April 1st to October 31th about medical service perception index, medical trust index, patient satisfaction index, patient reliability index, patient flow degree index, recall intension index, and hospital image index. To evaluate the influence of medical service perception with other 6 indexes, we statistically made regression analysis of the results through the survey. Results : By the results of the analysis, evaluation of hospital image influenced all 6 indexes. The systemicity of treatment process had an effect on 5 indexes except for the flow degree of patients. The humanity of medical team brought out the estimation of 4 indexes except for the patient flow degree and hospital image. The empathic ability of doctor and appropriacy of medical costs hold the next rank influencing 3 indexes. It reached the conclusion that the systemicity of medical team tend to determine the medical trust and patient reliability. The expertise, professional skill of doctor, the fault, commercial application, fame of medical team, the speed of treatment process, the newest and clean medical facility affected each one index. Conclusions : Korean medicine should find a way to consider the mind of patients for improving the medical quality through trust realization system, keeping up with times. As a result of this research, we can find out important causes which influence the trustful medical system. From now on, we should apply this result to actual treatment of psychology customized system. Also, more simple and clear questionnaire was organized through this research, it can be used to forward research to apprehend patient mentality more conveniently.

Active-Active Message Replica Scheme for Enhancing Performance of Distributed Message Broker (분산 브로커의 가용성 향상을 위한 메시지 레플리카 액티브-액티브 구조 기법)

  • Seo, Kyeonghee;Yeo, Sangho;Oh, Sangyoon
    • KIPS Transactions on Computer and Communication Systems
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    • v.7 no.6
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    • pp.145-154
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    • 2018
  • A loosely coupled message broker system is a popular method for integrating distributed software components. Especially, a distributed broker structure with multiple brokers with active-standby or active-active message replicas are used to enhance availability as well as message processing performance. However, there are problems in both active-standby and active-active replica structure. The active-standby has relatively low processing performance and The active-active structure requires a high synchronization overhead. In this paper, we propose an active-active structure of replicas to increase the availability of the brokers without compromising its high fault-tolerancy. In the proposed structure, standby replicas process the requests of the active replicas so that load balancing is achieved without additional brokers, while the distributed coordinators are used for the synchronization process to decrease the overhead. We formulated the overhead incurred when synchronizing messages among replicas, and the formulation was used to support the experiment results. From the experiment, we observed that replicas of the active-active structure show better performance than the active stand-by structure with increasing number of users.

In-network Aggregation Query Processing using the Data-Loss Correction Method in Data-Centric Storage Scheme (데이터 중심 저장 환경에서 소설 데이터 보정 기법을 이용한 인-네트워크 병합 질의 처리)

  • Park, Jun-Ho;Lee, Hyo-Joon;Seong, Dong-Ook;Yoo, Jae-Soo
    • Journal of KIISE:Databases
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    • v.37 no.6
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    • pp.315-323
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    • 2010
  • In Wireless Sensor Networks (WSNs), various Data-Centric Storages (DCS) schemes have been proposed to store the collected data and to efficiently process a query. A DCS scheme assigns distributed data regions to sensor nodes and stores the collected data to the sensor which is responsible for the data region to process the query efficiently. However, since the whole data stored in a node will be lost when a fault of the node occurs, the accuracy of the query processing becomes low, In this paper, we propose an in-network aggregation query processing method that assures the high accuracy of query result in the case of data loss due to the faults of the nodes in the DCS scheme. When a data loss occurs, the proposed method creates a compensation model for an area of data loss using the linear regression technique and returns the result of the query including the virtual data. It guarantees the query result with high accuracy in spite of the faults of the nodes, To show the superiority of our proposed method, we compare E-KDDCS (KDDCS with the proposed method) with existing DCS schemes without the data-loss correction method. In the result, our proposed method increases accuracy and reduces query processing costs over the existing schemes.