• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.85-85
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• 2010

Graphene, the building block of graphite, is one of the most promising materials due to their fascinating electronic transport properties. The pseudo-two-dimensional sp2 bonding in graphene layers yields one of the most effective solid lubricants. In this poster, we present the correlation between electrical and nanomechanical properties of graphene layer grown on Cu/Ni substrate with CVD (Chemical Vapor Deposition) method. The electrical (current and conductance) and nanomechanical (adhesion and friction) properties have been investigated by the combined apparatus of friction force microscopy/conductive probe atomic force microscopy (AFM). The experiment was carried out in a RHK AFM operating in ultrahigh vacuum using cantilevers with a conductive TiN coating. The current was measured as a function of the applied load between the AFM tip and the graphene layer. The contact area has been obtained with the continuum mechanical models. We will discuss the influence of mechanical deformation on the electrical transport mechanism on graphene layers.

• 한국지하수토양환경학회지:지하수토양환경
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• 제25권4호
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• pp.58-66
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• 2020

Since the typical horn-type ultrasonic equipment induces a reaction at the probe tip, the sonochemical reaction has a limitation that it occurs only in a specific area. As one of the ways to overcome this limitation, an ultrasonic device with multi-stepped horn equipped with several oscillators has been developed. The objective of this study was to investigate the sonochemical effects induced by acoustic cavitation system in 20 kHz multi-stepped ultrasonic horn using calorimetry, KI dosimetry and the luminol test. The sonochemical effects of multi-stepped ultrasonic horn were compared with that of the typical horn-type 20 kHz ultrasonic device. The effect of immersion depth and power on the sonochemical reaction was investigated in the ultrasonic system with multi-stepped ultrasonic horn. Higher calorimetric energy was obtained at higher immersion depth and power conditions. Sonochemical effects increased significantly when using the high immersion depth and input power. However, as the input power increased, the cavitation reaction zone concentrated around the ultrasonic horn. Additionally, the experiments to examine the effect of liquid temperature was conducted. The smaller sonochemical reaction was obtained for the higher liquid temperature. The effect on temperature seems to be closely related to liquid conditions such as viscosity and vapor pressure of water.

• 천문학회보
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• 제46권1호
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• pp.35.1-35.1
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• 2021

RR Lyrae stars are sensitive probe for the precision stellar astrophysics and also for the cosmic distance scale thanks to their well-defined near-infrared Period-Luminosity relations (PLRs). These horizontal branch variables can be used for primary calibration of the first-rung of population II distance ladder providing an evaluation of the ongoing tension between Cepheid-Supernovae based Hubble constant and the Planck results. Therefore, absolute calibration of RR Lyrae PLRs is now crucial to complement or test the tip of the red giant branch based distances, and in turn, population II star based Hubble constant measurements. While the pulsation models of RR Lyrae can reproduce most observables, they predict a significant metallicity effect on their JHKs-band PLRs that is inconsistent with so-far limited observational studies. We remedy this inconsistency of metallicity dependence in RR Lyrae PLRs by combining their near-infrared observations in the globular clusters of different mean-metallicities with the new parallaxes from the Gaia early data release 3 (EDR3). Our empirical results on Period-Luminosity-Metallicity (PLZ)relations are consistent with theoretical predictions but the precision of absolute calibrations is still affected by the parallax uncertainties and the systematic zero-point offset present in the Gaia EDR3.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• 한국지반공학회논문집
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• 제23권12호
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• pp.33-42
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• 2007

연약지반의 강성평가는 샘플링(sampling)과 현장 접근에 따른 교란으로 인해 정확하게 평가하는 것이 상당히 어렵다. 이를 위해 개발된 링 타입 FVP를 이용하여 부산 신항에서 실험이 수행 되었다. 이 논문의 목적은 지반 관입시 발생하는 교란을 최소화 할 수 있도록 기존의 링 타입 FVP를 블레이드 타입 FVP로 개량하는 것이다. 블레이드 타입 FVP는 하단의 웨지 모양, 시료 교란, 트랜스듀서, 케이블의 보호, 그리고 케이블과 트랜스듀서간의 전자기적 커플링을 고려하여 설계하였다. 케이블 간 누화현상은 케이블의 접지와 통합을 통해 제거 할 수 있었다. FVP의 전단파 속도는 초기 도달 시간과 이동거리를 이용하여 간단하게 계산될 수 있었다. FVP 블레이드의 관입에 의한 교란 효과 조사 및 FVP를 통해 측정된 전단파 속도의 타당성을 확인하기 위하여 실내 대형 calibration 챔버를 이용하여 비교 시험을 수행하였다. 블레이드 타입 FVP는 30m 깊이까지 측정이 되었으며, 전단파 속도는 매 심도 10cm마다 측정이 되었다. 본 논문에서 제시된 개량된 블레이드 타입의 FVP는 대상 지반의 교란을 최소화 시키며 현장에서 직접 전단파 속도를 측정 할 수 있는 효과적인 장비라고 할 수 있다.

• 대한토목학회논문집
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• 제30권2C호
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• pp.85-93
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• 2010

전단 강성은 지반 거동을 이해하기 위한 필수적인 요소로 인식되고 있으며, 특히 탄성계수 및 간극비는 구조물의 기본적인 설계 정수로서 그 중요성이 점차 증가하고 있다. 본 연구의 목적은 전단파와 압축파 같은 탄성파 및 전기비저항 측정이 가능한 현장 탄성파 및 전기비저항 측정 장비(FVRP)를 개발하고, 이를 이용하여 대상지반의 탄성계수 및 간극비를 산정하는 것이다. 압축파 및 전단파는 각각 피에조 디스크 엘리먼트와 벤더 엘리먼트를 이용하여 측정하였다. 그리고 전기비저항은 소형 전기비저항 측정 프로브를 제작하여FVRP 선단에 설치하여 측정하였다. 개발된 장비는 실내의 대형토조와 현장에 적용되었다. 대형 토조실험의 경우, 모래와 점토를 슬러리 상태에서 혼합하여 지반을 조성한 후 상재하중을 가하여 조성된 지반을 압밀 시킨 후 진행되었으며, 탄성파 및 전기비저항의 측정은 매 심도 1cm 간격으로 수행되었다. 현장 실험은 남해안 지역에서 수행되었으며, 탄성파 및 전기비저항 측정은 관입심도 6m부터 20m까지 10cm 간격으로 수행하였다. 토조 및 현장 실험을 통해 측정된 탄성파와 전기비저항은 이론적인 관계식을 이용하여 탄성계수 및 간극비로 환산되었다. 탄성파와 전기비저항을 이용한 간극비는 부피를 이용하여 산정한 간극비와 유사한 값을 나타내었다. 본 연구에서 개발된 탄성파와 전기비저항을 동시에 측정할 수 있는 FVRP는 연약지반의 탄성계수 및 간극비 산정에 유용한 장비가 될 수 있음을 보여준다.

• 항공우주기술
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• 제7권2호
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• pp.46-52
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• 2008

5MW급 발전용 가스터빈의 주요 구성품 중 압축기에서의 성능시험 및 해석을 위해 측정 파라미터와 그 파라미터를 계측하기 위한 센서류를 선정하고자 한다. 축류압축기의 경우 각 단의 케이싱에서 정압 분포를 평균하여 계측하고, 내부 유동장에서 Kiel 온도관을 이용하여 전압 및 전온도 분포를 계측한다. 원심압축기의 경우 임펠러 출구의 허브면과 팁면에서의 정압 분포는 일반적으로 상당한 차이가 존재하므로 각 면에서 정압을 측정하여 평균하고, 디퓨저 내부와 디스월러 내부에서의 정압 분포를 계측하기 위해 한 피치에서 5개의 유선을 따라 10 곳에서 정압을 측정하고자 한다. 또한 압축기 내 유동특성과 동익-정익간의 상호작용을 고찰하기 위해 5공 피토관을 이용하여 내부 상세유동을 계측한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.599-603
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• 2003

This paper present an error compensation system and On-Machine Measurement(OMM) system for improving the machining accuracy of ultra-precision lathe. The Fast-Tool-Servo(FTS) driven by a piezoelectric actuator is applied for error compensation system. The controller is implemented on the 32bit DSP for feedback control of piezoelectric actuator. The control system is designed to compensates three kinds of machining errors such as the straightness error of X-axis slide, the thermal growth error of the spindle. and the squareness between spindle and X-axis slide. OMM is preposed to measure the finished profile of workpiece on the machine-tool using capacitive sensor with highly accurate ruby tip probe guided by air bearing. The data acquisition system is linked to the CNC controller to get the position of each axis in real-time. Through the experiments, it is founded that the thermal growth of spindle and tile squareness error between spindle and X-axis slide influenced to machining error more than straightness error of X-axis slide in small travel length. These errors were simulated as a sinusoidal signal which has very low frequency and the FTS could compensate the signal less than 30 m. The implemented OMM system has been tested by measuring flat surface of 50 mm diameter and shows measurement error less than 400 mm

• 대한기계학회논문집B
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• 제36권12호
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• pp.1171-1176
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• 2012

실리콘 기판 위에 플라즈마 기상층착법을 이용하여 합성된 탄소나노튜브를 화학적인 방법이나 전자빔 혹은 이온빔과 같은 진공 챔버 내에서의 공정없이 펨토초레이저를 이용하여 선택적으로 패터닝 하는 방법을 구현하였다. 플라즈마 기상층착법으로 합성된 탄소나노튜브는 수직성장이 가능하며 탄소나노튜브 간의 간격을 조절하여 성장이 가능하다. 이러한 장점으로 전계방출소자, 바이오센서 등의 응용을 위하여 이용되는 합성 방법이다. 이러한 응용을 위하여 선택적으로 나노튜브를 제거하고 탄소나노튜브 끝의 촉매금속을 제거하는 것이 응용의 효율을 높이는데 매우 중요하다. 본 연구에서는 탄소나노튜브의 전기적, 구조적 특성에 영향을 줄 수 있는 화학적인 방법을 사용하지 않고 펨토초레이저를 사용하여 패터닝과 촉매금속을 제거하는 방법을 구현하였다.

• Journal of Radiation Protection and Research
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• 제41권3호
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• pp.222-228
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• 2016

Background: We are developing a small size dosimeter for dose estimation in particle therapies. The developed dosimeter is an optical fiber based dosimeter mounting an radiation induced luminescence material, such as an OSL or a scintillator, at a tip. These materials generally suffer from the quenching effect under high LET particle irradiation. Materials and Methods: We fabricated two types of the small size dosimeters. They used an OSL material Eu:BaFBr and a BGO scintillator. Carbon ions were irradiated into the fabricated dosimeters at Heavy Ion Medical Accelerator in Chiba (HIMAC). The small size dosimeters were set behind the water equivalent acrylic phantom. Bragg peak was observed by changing the phantom thickness. An ion chamber was also placed near the small size dosimeters as a reference. Results and Discussion: Eu:BaFBr and BGO dosimeters showed a Bragg peak at the same thickness as the ion chamber. Under high LET particle irradiation, the response of the luminescence-based small size dosimeters deteriorated compared with that of the ion chamber due to the quenching effect. We confirmed the luminescence efficiency of Eu:BaFBr and BGO decrease with the LET. The reduction coefficient of luminescence efficiency was different between the BGO and the Eu:BaFBr. The LET can be determined from the luminescence ratio between Eu:BaFBr and BGO, and the dosimeter response can be corrected. Conclusion: We evaluated the LET dependence of the luminescence efficiency of the BGO and Eu:BaFBr as the quenching effect. We propose and discuss the correction of the quenching effect using the signal intensity ratio of the both materials. Although the correction precision is not sufficient, feasibility of the proposed correction method is proved through basic experiments.