• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.229-229
• /
• 2010

With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

• Applied Biological Chemistry
• /
• v.7
• /
• pp.21-27
• /
• 1966

This experiment was performed to investigate the effect of the frequency of meals on the metatolism and the body composition of rats when equal amount of purified diet was ingested. Thirty approximately days old rats weighing 290 g and thirty-two about 40 days old rats weighing 180 g were employed for the period of 34 days. Rats fed ad libitum (10 to 15 meals per day) and two-meal per day were pair-fed and equal amount of diet was fed to each rat in pair. The experimental results obtained are summarized as follows: 1. Frequency of meal did not exert any effect on the body weight gain. However, rats fed two-meal per· day gained significantly (p <0.005) more fat and energy than ad libitum group. The rate of gain of protein in ad libitum group was higher than that of two-meal group. No difference was observed for the mineral deposition of rat body. 2. From the preperation of rat liver it was found that the activity of glucose-6-phosphate dehydrogenase was much higher for the rats fed two-meals per day than those fed ad libitum. Therefore, it is suggested that the metabolic pathway of carbohydrate for two-meal group has been shifted from glycolysis to Hexose Monophosphate Shunt and produced more NADPH which would be the essential cofactor of fatty acids synthesis. 3. The rate of excretion of urinary nitrogen for two-meal group was significantly (p<0.005) higher than that of ad libitum group. It is apparent that considerable amount of over-loaded amino acids by feeding two-big-meal daily· could not be used for the protein biosynthesis all at once and excreted following deamination through urine. The residual carbon chain could be served as a precursor of fatty acids synthesis. 4. The heat production rate of rats fed two-meal group was significantly (p<0.005) lower than that of ad libitum group. It seems possible that the activity of thyroid gland (and consequently BMR) can be depressed by the frequency of meal.

• Journal of the Korean Applied Science and Technology
• /
• v.29 no.1
• /
• pp.71-80
• /
• 2012

Vinca alkaloids produced from Catharanthus roseus are one of the most important natural product drugs in treatments of human cancers. These anticancer drugs are derived from coupling of the two monomeric indole alkaloids, catharanthine and vindoline. In order to investigate vindoline biosynthesis, tabersonine-$CD_3$ 1a is synthesized to use as a deuterium labeled precursor, which is distinguished clearly from the natural counterpart. We show that these deuterium labeled tabersonine 1a are successfully incorporated into the vindoline biosynthetic pathway to yield three deuterated vindoline intermediates. 16-Hydroxytabersonine-$CD_3$ (m/z 356) 2a, 16-Methoxytabersonine-$CD_3$ (m/z 370) 3a, 16-Methoxy-2,3-dihydro-3-hydroxytabersonine-$CD_3$ (m/z 388) 4a are produced from the cell suspension culture measured by UPLC/MS at 5 and 13 days after feeding tabersonine. The conversion rates from 1a to 2a and 2a to 3a are fast, whereas that from 3a to 4a is much slower. This indicates that the rate determining step among the first three vindoline biosynthesis is the last step. As a result of the slow conversion rate from 3a to 4a, the accumulation level of 16-Methoxytabersonine-$CD_3$ 3a is significantly increased up to 13 days. The accumulation ratio among 2a, 3a and 4a is 1, 2 and 0.1 at 5 days. However, the peaks of desacetoxyvindoline-$CD_3$ 5a, deacetylvindoline-$CD_3$ 6a and vindoline-$CD_3$ 7a are not found from the cell extracts even after 13 days of incubation which may indicate no presence of their corresponding enzymes.