Effects $H_2$ carrier gas on the mechanical properties of poly 3C-SiC thin films
($H_2$ 캐리어가스가 다결정 3C-SiC 박막의 기계적 특성에 미치는 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.89-90
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- 2007