• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.42-47
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• 1998

We have fabricated electron-optical lens for micro E-beam system that can overcome the limitation of current E-beam lithography. Our electron-optical lens consists of multiple silicon electrodes which were fabricated by micromachining technology and assembled by anodic bonding. The assembled system was installed in UHV chamber to observe the emission characteristics of focused electrons by the electro-optical lens. We used STM(Scanning Tunneling Microscope) tip for electron source. By performing lithography with the focused electrons with PMMA(poly-methylmethacrylate) as E-beam resist. We could draw 0.13${\mu}{\textrm}{m}$ nano-scale lines.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.311-311
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• 2006

The morphology of Poly(styrene-b-methylmethacrylate) (P(S-b-MMA)) block copolymer thin films deposited on silicon wafers was controlled by treating the substrates with Self-Assembled Monolayers (SAM) of phenylsilanes with different alkyl chain lengths. It was found that the treatment with SAM strongly modified the substrates properties, especillay the surface energy, as compared with bare silicon oxide. By futher adjusting the molecular weight of P(S-b-MMA), a variety of morphologies could be generated, including a perpendicular orientation of lamellea of PS and PMMA, which is required for industrial applications.

• Proceedings of the Membrane Society of Korea Conference
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• 2004.05a
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• pp.15-18
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• 2004

Computational fluid dynamics (CFD) was applied to modeling particle dynamics in microfiltration (MF). The rejection properties of poly methylmethacrylate (PMMA) and polystyrene (PS) were calculated. Calculated rejection (R) of PMMA was independent with the porosity of the membrane, and the R was constant in the range of volume flux between $1\times 1-^{-4}-1\times 10^{-2}$ m/s. These observations were in quantity agreement with our experimental observations. The dependence of PMMA and PS rejection on the ratio of particle diameter and pore diameter were good agreement with the experimental values, which suggesting that the validity of CFD simulation to evaluate rejection of particle in MF membranes. Change of rejection of PMMA as a function of time was molded based on the CFD result which explained well the experimental observation.

• Textile Coloration and Finishing
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• v.5 no.1
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• pp.19-25
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• 1993

Plastic optical fibers(POFs) composed of poly(methylmethacrylate) (PMMA), polystyrene (PS), or polycarbonate(PC) as a core materials, and of fluorinated polymer or PMMA as a cladding were fabricated and their properties were investigated in this study. The attenuation loss of PMAA core POF was about 1,700 dB/Km at 660 nm, the loss of PS core POF was 1,800 dB/Km at 560 nm, and the loss of PC core POF was 2,200 dB/Km at 780 nm. These attenuation losses of POFs prepared ill this study were higher than those of commerically available POFs. Compared to PMMA and PS core POFs, PC core POF has excellent characteristics, including high thermal stability, high flexibility, and high impact strength.

• Korean Membrane Journal
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• v.9 no.1
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• pp.1-11
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• 2007

To prepare chemically stable asymmetric microporous membranes with a hydrophilic surface, which would be expected to have better antifouling properties, poly(vinylidene fluoride) (PVDF) blend membranes were prepared by the phase inversion process. PVDF mixture solutions in N-methylpyrrolidone (NMP) blended with several polar potential ionic polymers such as polyacrylonitrile (PAN), poly(methylmethacrylate) (PMMA) and poly(N-isopropylacrylamide) (NIPAM) were used for the formation of the PVDF blend membranes. They were then characterized with several analytical methods such as FESEM, FTIR, contact angle measurement, pore size distribution and permeability measurement. Regardless of different polar polymers blended, they all showed a finger-like structure with more hydrophilic surface than the pristine PVDF membrane. For all the PVDF blend membrane, due to the polar potential ionic polymers used, the flux of those was improved. Especially the PVDF blend membrane with NIPAM showed the highest flux among the membranes prepared. Also antifouling property of the PVDF membrane was improved by the use of the polar polymers.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.410-415
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• 2004

Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and $Nos\acute{e}$-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion force and friction force on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.343-348
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• 2007

Molecular dynamics study of thermal NIL (Nano Imprint Lithography) process is performed to examine stamp-resist interactions. A layered structure consists of Ni stamp, poly-(methylmethacrylate) thin film resist and Si substrate was constructed for isothermal ensemble simulations. Imposing confined periodicity to the layered unit-cell, sequential movement of stamp followed by NVT simulation was implemented in accordance with the real NIL process. Both vdW and electrostatic potentials were considered in all non-bond interactions and resultant interaction energy between stamp and PMMA resist was monitored during stamping and releasing procedures. As a result, the stamp-resist interaction energy shows repulsive and adhesive characteristics in indentation and release respectively and irregular atomic concentration near the patterned layer were observed. Also, the spring back and rearrangement of PMMA molecules were analyzed in releasing process.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.310-313
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• 2008

Recently, study on the weak interaction energy between the soft polymer surface and liquid crystals has been a primary topic for new LC device applications. In this paper, to understand the switching property of nematic liquid crystals (LCs) at the interface with a weak anchoring boundary, we investigate experimentally the rotation property of surface nematic director by electric field on non-treated Poly-Methylmethacrylate (PMMA, $T_g=110^{\circ}C$, Sigma Aldrich) film observed under various temperatures including the glass transition temperature ($T_g$) of the polymer layer.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.6 s.237
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• pp.852-859
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• 2005

Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and Nose-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion and friction forces on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.217-217
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• 2010

유기물/무기물 나노 복합재료는 고온과 저전력에서 동작해야하는 차세대 전자 소자와 광소자 제작에 대단히 유용한 소재이다. 간단하고 저렴한 제조 방법과 휘어짐이 가능한 특성을 이용하여 유기물/무기물 나노 복합재료를 사용한 비휘발성 메모리 소자의 제작과 메모리 특성에 대한 연구가 수행되었으나, SnO2 나노 입자가 삽입된 고분자 박막을 기반으로 제작한 저항 구조의 비휘발성 메모리 소자인 유기 쌍안정성 소자에 대한 연구는 상대적으로 미흡하다. 본 연구에서는 poly(methyl methacrylate) (PMMA) 박막 안에 분산된 SnO2 나노 입자를 사용하여 제작한 유기 쌍안정성 소자의 메모리 특성을 관찰하였다. 소자를 제작하기 위해 나노 입자의 전구체인 Tin 2-ethylhexanoate을 dibutyl ether에 용해시킨 후, 화학적 방법을 사용하여 용매 안에서 SnO2 나노 입자를 합성하였다. 합성한 SnO2 나노 입자와 PMMA를 클로로벤젠에 용해하여 고분자 용액을 제작하였다. 전극인 indium-tin-oxide가 증착된 유리 기판 위에 제작한 고분자 용액을 스핀 코팅하고, 열을 가해 용매를 제거하여 SnO2 나노 입자가 분산되어 있는 PMMA 나노복합체를 형성하였다. 그 위에 Al 전극을 증착하여 유기 쌍안정성 소자를 완성하였다. 제작된 소자에 전압을 인가하여 전류를 측정한 결과 유기 쌍안정성 소자에서는 동일 전압에서 높은 전류 (ON 상태)와 낮은 전류 (OFF 상태)가 흐르는 쌍안정성 특성을 나타냈다. 그러나 SnO2 나노 입자가 없는 PMMA 박막으로 형성된 소자에서는 전류-전압 측정에서 쌍안정성 특성이 나타나지 않았다. 따라서 PMMA 박막 안에 삽입된 SnO2 나노 입자가 유기 쌍안정성 소자의 메모리 효과를 나타내는 원인임을 알 수 있었다. 전류-시간 측정 결과는 소자의 ON 상태 및 OFF 상태 전류가 시간에 따른 큰 변화 없이 1000 사이클 이상 지속적으로 유지 하고 있음을 보여 줌으로써 유기 쌍안정성 소자를 장시간 사용할 수 있음을 확인시켜 주었다.