• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.313-320
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• 2004

We present a null testing method fer aspheric surfaces, utilizing a phase-shifting diffraction grating interferometer along with a binary amplitude computer generated hologram (CGH). The binary amplitude CGH is designed to compensate for the wavefront between a point source and the aspheric surface under test. The fringe visibility of the grating interferometer is controlled easily by selecting suitable grating diffraction orders for the measurement and reference wavefronts or by optimizing the groove shape of the grating used. The binary amplitude CGH is designed by numerical analysis of ray tracing and fabricated using e-beam lithography for autostigmatic testing. Experimental results of a large-scale aspheric mirror surface are discussed to verify the measurement performance of the proposed diffraction grating interferometer.

• Korean Journal of Optics and Photonics
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• v.12 no.4
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• pp.334-338
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• 2001

A Fizeau interferometer without beam splitter was constructed. Single-mode optical fiber was used as a spherical wave source and the face of fiber end was polished and coated to be a reflecting surface. The reflecting surface was angled so that interference fringe could be detected by CCD camera. Beam splitter in front of a spherical wave source could distort the wave front and that was one of the component error sources. With the proposed configuration there was no need to place beam splitter in the system. Improvement of phase measuring accuracy was evaluated quantitatively by comparing the result of this setup with that of a conventional Fizeau interferometer. Wave front of the angled end-face optical fiber source was also measured to verify its sphericity by PS/PDI (Phase Shifting/Point Diffraction Interferometer). The principle of this technique was presented and the experimental results and its applications were discussed. ussed.

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.121-122
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• 2009

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.352-353
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• 2005

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.138-139
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• 2007

The use of conventional Twyman and Fizeau interferometers inevitably fails in testing high precision optics because of errors always existing in reference elements producing the reference wavefront. Therefore it is necessary to apply to this task the interferometers of a radically new type, which are able to produce perfect reference wavefront with the help of light diffraction by a small obstacle or pinhole. In this paper new theoretical approaches and schematics of point diffraction interferometers are considered in detail with paying attention to constructive reliability. Such interferometers do not use reference optical surfaces and readily provide adequate estimation of errors and aberrations value of 0.01 wavelengths.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.25-26
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• 2006

The method measuring the absolute position of a point diffraction source emitting a spherical wavefront in three-dimension is proposed. Two-dimensional interference of spherical wavefronts is used to overcome ambiguity of phase order. The spherical wavefront is explicated by Taylor series expansion, from which a radius of curvature of a spherical wavefront and its center position in three-dimension are obtainable. The spherical wavefront is reconstructed by a modified lateral shearing interferometer, which uses single-mode fiber as a point diffraction source.

• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.361-365
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• 2005

An absolute interferometer system with multiple point-sources is devised for tile 3-D measurement of rough surface profiles. The positions of the point sources are determined to be the system parameters that influence the measurement accuracy, so they are calibrated precisely prior to performing actual measurements. For the calibration, a CCD camera composed of a two-dimensional array of photo-detectors was used. Performing optimization of the cost function constructed with phase values measured at each pixel on the CCD camera, the position coordinates of each point source is precisely determined. Measurement results after calibration performed for the warpage inspection of chip scale packages (CSPs) demonstrate that the maximum discrepancy is 9.8 mm with a standard deviation o( 1.5 mm in comparison with the test results obtained by using a Form Taly Surf instrument.

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.521-529
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• 2002

We have recently proposed the new concept of a phase-measuring volumetric interferometer that enables us to accurately measure the xyz-coordinates of the probe without metrology frames. The interferometer is composed of a movable target and a fixed photo-detector array. The target is made of point diffraction sources to emit two spherical wavefronts, whose interference is monitored by an array of photo-detectors. Phase shifting is applied to obtain the precise phase values of the photo-detectors. Then the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. The proposed interferometer has been designed and built with a volumetric uncertainty of less than 1.0 $\mu\textrm{m}$ within a cubic working volume of side 120 mm. Here, in this paper, we also present error sources, an evaluated uncertainty, and test results from the prototype system. The self-calibration of two-dimensional precision metrology stages is applied to test the performance of the interferometer.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.1
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• pp.47-52
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• 2008

We present a 3-D profiler specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional non-contact interferometer. The profiler comprises multiple two-point-diffraction sources made of single-mode optical fibers. Test measurement proves that the proposed profiler is well suited for the warpage inspection of microelectronics components with rough surface, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip package.