• Title/Summary/Keyword: plasma technique

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Sensitivity Analysis of Plasma Charge-up Monitoring Sensor Using Neural Networks

  • Lee, Sung-Joon;Kim, Sun-Phil;Soh, Dae-Wha;Hong, Sang-Jeen
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.2
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    • pp.303-306
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    • 2005
  • High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

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Nanostructure Ceramics of Silicon Nitride Produced by Spark Plasma Sintering

  • Hojo, Junichi;Hotta, Mikinori
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.323-324
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    • 2006
  • The nanostructure control of $Si_3N_4$ ceramics can be achieved by using fine starting powder and retardation of grain growth. The spark plasma sintering technique is useful to retard the grain growth by rapid heating. In the present work, the change of microstructure was investigated with emphasis on the particle size of starting powder, the amount of sintering additive and the heating schedule. The rapid heating by spark plasma sintering gave the fine microstructure consisting of equiaxed grains with the same size as starting particles. The spark plasma sintering of $Si_3N_4$ fine powder was effective to control the microstrucutre on nano-meter level.

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The Morphology of Equatorial Plasma Bubbles - a review

  • Kil, Hyosub
    • Journal of Astronomy and Space Sciences
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    • v.32 no.1
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    • pp.13-19
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    • 2015
  • Plasma bubbles that occur in the equatorial F-region make up one of the most distinguishing phenomena in the ionosphere. Bubbles represent plasma depletions with respect to the background ionosphere, and are the major source of electron density irregularities in the equatorial F-region. Such bubbles are seen as plasma depletion holes (in situ satellite observations), vertical plumes (radar observations), and emission-depletion bands elongated in the north-south direction (optical observations). However, no technique can observe the whole three-dimensional structure of a bubble. Various aspects of bubbles identified using different techniques indicate that a bubble has a "shell" structure. This paper reviews the development of the concepts of "bubble" and "shell" in this context.

POLYMER SURFACE MODIFICATION WITH PLASMA SOURCE ION IMPLANTATION TECHNIQUE

  • Han, Seung-Hee;Lee, Yeon-Hee;Lee, Jung-Hye;Yoon, Jung-Hyeon;Kim, Hai-Dong;Kim, Gon-ho;Kim, GunWoo
    • Journal of the Korean institute of surface engineering
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    • v.29 no.5
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    • pp.345-349
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    • 1996
  • The wetting property of polymer surfaces is very important for practical applications. Plasma source ion implantation technique was used to improve the wetting properties of polymer surfaces. Poly(ethylene terephtalate) and other polymer sheets were mounted on the target stage and an RF plasma was generated by means of an antenna located inside the vacuum chamber. High voltage pulses of up to -10kV, 10 $\mu$sec, and up to 1 kHz were applied to the stage. The samples were implanted for 5 minutes with using Ar, $N_2,O_2,CH_4,CF_4$ and their mixture as source gases. A contact angle meter was used to measure the water contact angles of the implanted samples and of the samples stored in ambient conditions after implantation. The modified surfaces were analysed with Time-Of-Flight Mass Spectrometer (TOF-SIMS) and Auger Electron Spectroscopy (AES). The oxygen-implanted samples showed extremely low water contact angles of $3^{\circ}C$ compared to $79^{\circ}C$ of unimplanted ones. Furthermore, the modified surfaces were relatively stable with respect to aging in ambient conditions, which is one of the major concerns of the other surface treatment techniques. From TOF-SIMS analysis it was found that oxygen-containing functional groups had been formed on the implanted surfaces. On the other hand, the $CF_4$-implanted samples turned out to be more hydro-phobic than unimplanted ones, giving water contact angles exceeding $100^{\circ}C$ . The experiment showed that plasma source ion implantation is a very promising technique for polymer surface modification especially for large area treatment.

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Multi-Secondary Transformer: A Modeling Technique for Simulation - II

  • Patel, A.;Singh, N.P.;Gupta, L.N.;Raval, B.;Oza, K.;Thakar, A.;Parmar, D.;Dhola, H.;Dave, R.;Gupta, V.;Gajjar, S.;Patel, P.J.;Baruah, U.K.
    • Journal of international Conference on Electrical Machines and Systems
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    • v.3 no.1
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    • pp.78-82
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    • 2014
  • Power Transformers with more than one secondary winding are not uncommon in industrial applications. But new classes of applications where very large number of independent secondaries are used are becoming popular in controlled converters for medium and high voltage applications. Cascade H-bridge medium voltage drives and Pulse Step Modulation (PSM) based high voltage power supplies are such applications. Regulated high voltage power supplies (Fig. 1) with 35-100 kV, 5-10 MW output range with very fast dynamics (${\mu}S$ order) uses such transformers. Such power supplies are widely used in fusion research. Here series connection of isolated voltage sources with conventional switching semiconductor devices is achieved by large number of separate transformers or by single unit of multi-secondary transformer. Naturally, a transformer having numbers of secondary windings (~40) on single core is the preferred solution due to space and cost considerations. For design and simulation analysis of such a power supply, the model of a multi-secondary transformer poses special problem to any circuit analysis software as many simulation softwares provide transformer models with limited number (3-6) of secondary windings. Multi-Secondary transformer models with 3 different schemes are available. A comparison of test results from a practical Multi-secondary transformer with a simulation model using magnetic component is found to describe the behavior closer to observed test results. Earlier models assumed magnetising inductance in a linear loss less core model although in actual it is saturable core made-up of CRGO steel laminations. This article discusses a more detailed representation of flux coupled magnetic model with saturable core properties to simulate actual transformers very close to its observed parameters in test and actual usage.

Research on the magnetic confinement of laser-induced plasma (레이저 유도 플라즈마에 대한 자기장 감금의 영향 연구)

  • Eunjoo Hyeon;Yong H. Ghym
    • Journal of IKEEE
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    • v.28 no.1
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    • pp.38-45
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    • 2024
  • Most previous works about magnetic effect on plasma emission were interested in emission enhancement which was useful to various fields of plasma application. On the contrary, the following work is interested in plasma dissipation rarely reported in prior researches and expected to help advance plasma-controlling technique. Nd:YAG laser (1064 nm, 6 ns) was focused on three kinds of metals (Al, Ti and STS) and air. The permanent magnetic field (0.4 T) of Nd2Fe14B magnet was provided passing throughout laser-induced plasma. The spectra of plasma in both the presence and absence of the magnetic field were observed with varying laser power and delay time of the spectrograph. In this work it was uniquely discovered that the plasma always dissipated easily in the presence of magnetic field irrespective of the laser power. With the O I(777.42 nm)-line shape function fitted to Lorentz profile, its half width at half maximum (HWHM) was evaluated to verify that the magnetic field increased the plasma density. It is concluded that magnetic field facilitates not only plasma emission enhancement but also plasma dissipation, increasing recombination rate which is proportional to plasma density.

Effects of Plasma Lipoproteins on Expression of Vasular Cell Adhesion Molecule- in Human Microvasuclar Endothelial Cells (혈관내피세포에서 Vascular Cell Adhesion Molecule-1 발현에 대한 혈장 지단백의 효과)

  • 박성희
    • Journal of Nutrition and Health
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    • v.31 no.8
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    • pp.1235-1243
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    • 1998
  • Although an elevated plasma level of high density lipoprotein (HDL) is known as a protective component against the development of atherosclerosis and ensuing coronary heart diseases, the related mechanisms are still not established . It has been clearly demonstrated in the early stages of atherogenesis that adhesion of monocytes and lymphocytes to the vascular endothelium is enhanced via adhesion molecules, and that monocytes and macrophages accumulate in the subendothelial space. The present study has investigated whether isolated plasma HDL plays a role in protection against atherogenesis by inhibiting the expression of vascular cell adhesioin molecule-1(VCAM-1) on the endothelial cells. Effects of plasma native low density lipoprotein (LDL) and ac ethylated LDL(AcLDL) on VCAM-1 expression were also examined by using an immunocytochemical technique. While plasma HDL did not alter the basal expression of VCAM-1 , lipopolysaccharide(LPS) induction of this adhesion modlecule was markedly inhibited at a phyaiological concentration of HDL. In contrast, 30$\mu\textrm{g}$ protein/ml AcLDL increased sifnificantly both basal VCAM-1 expression and its LPD induction , suggesting that this modified LDL enhances leukocyte adhesiion to endothelial cells. Unlike AcLDL , plasma native LDL inhibited significantly VCAM-1 expression. This indicates that LDL did not undergo oxidative modificantion while incubated with endothelial cells. These results suggest that plasam HDL may inhibit atherogenesis by reducing the expression of adhesion molecules, which is a protective mechanism independent of tis reverse cholesterol transport function . Modified LDL is a potent iducer for adhesion molecules in vascular endothelical cells and could play a role in the pathogenesis of atherosclerosis by adhering to blood cells.

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Development and validation of a simple, sensitive enzyme immunoassay for quantification of androstenedione in bull plasma

  • Mallick, Smrutirekha;Kumar, BS Bharath;Prakash, BS;Aggrawal, Anjali;Pandita, Sujata
    • Journal of Animal Science and Technology
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    • v.57 no.4
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    • pp.13.1-13.5
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    • 2015
  • As an alternative to radioimmunoassay a simple and highly sensitive enzyme immunoassay (EIA) was developed and validated for androstenedione quantification in plasma of Karan Fries bulls using second antibody coating technique. The wells of the microtitreplate were coated with affinity-purified goat immunoglobulin (antirabbit IgG) that binds the hormone specific antibody. The EIA was performed to analyze androstenedione directly in $40{\mu}l$ of bull plasma. The androstenedione standards ranged from 0.20 to 200 pg/$40{\mu}l$/well and the sensitivity of the assay was 5 pg/ml plasma. Serially diluted bull plasma containing high endogenous androstenedione showed good parallelism with bovine androstenedione standard curve. Intra- and inter-assay coefficients of variation (CV) were found to be 8 and 9%, respectively. Peripheral plasma androstenedione concentrations determined in young and adult bull samples ranged between 104-990 pg/ml and 184-2040 pg/ml, respectively.