• Title/Summary/Keyword: plasma synthesis

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Synthesis of graphene nano-sheet without catalysts and substrates using fullerene and spark plasma sintering process

  • Jun, Tae-Sung;Park, No-Hyung;So, Dea-Sup;Lee, Joon-Woo;Lim, Hak-Sang;Ham, Heon;Shim, Kwang Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.1
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    • pp.27-30
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    • 2013
  • Catalyst-free graphene nano-sheets without substrates have been synthesized using fullerene and a high direct current (dc) pulse in the spark plasma sintering (SPS) process. Graphene nano-sheets were synthesized directly in the gas phase of carbon atoms which are generated from fullerene at a temperature of $600^{\circ}C$. Characterization has been carried out by scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HR-TEM), Raman spectroscopy (Raman), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD).

Neural Network Modeling of PECVD SiN Films and Its Optimization Using Genetic Algorithms

  • Han, Seung-Soo
    • International Journal of Fuzzy Logic and Intelligent Systems
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    • v.1 no.1
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    • pp.87-94
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    • 2001
  • Silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) are useful for a variety of applications, including anti-reflecting coatings in solar cells, passivation layers, dielectric layers in metal/insulator structures, and diffusion masks. PECVD systems are controlled by many operating variables, including RF power, pressure, gas flow rate, reactant composition, and substrate temperature. The wide variety of processing conditions, as well as the complex nature of particle dynamics within a plasma, makes tailoring SiN film properties very challenging, since it is difficult to determine the exact relationship between desired film properties and controllable deposition conditions. In this study, SiN PECVD modeling using optimized neural networks has been investigated. The deposition of SiN was characterized via a central composite experimental design, and data from this experiment was used to train and optimize feed-forward neural networks using the back-propagation algorithm. From these neural process models, the effect of deposition conditions on film properties has been studied. A recipe synthesis (optimization) procedure was then performed using the optimized neural network models to generate the necessary deposition conditions to obtain several novel film qualities including high charge density and long lifetime. This optimization procedure utilized genetic algorithms, hybrid combinations of genetic algorithm and Powells algorithm, and hybrid combinations of genetic algorithm and simplex algorithm. Recipes predicted by these techniques were verified by experiment, and the performance of each optimization method are compared. It was found that the hybrid combinations of genetic algorithm and simplex algorithm generated recipes produced films of superior quality.

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Vertically Standing Graphene on Glass Substrate by PECVD

  • Ma, Yifei;Hwang, Wontae;Jang, Haegyu;Chae, Heeyeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.232.2-232.2
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    • 2014
  • Since its discovery in 2004, graphene, a sp2-hybridized 2-Dimension carbon material, has drawn enormous attention. A variety of approaches have been attempted, such as epitaxial growth from silicon carbide, chemical reduction of graphene oxide and CVD. Among these approaches, the CVD process takes great attention due to its guarantee of high quality and large scale with high yield on various transition metals. After synthesis of graphene on metal substrate, the subsequent transfer process is needed to transfer graphene onto various target substrates, such as bubbling transfer, renewable epoxy transfer and wet etching transfer. However, those transfer processes are hard to control and inevitably induce defects to graphene film. Especially for wet etching transfer, the metal substrate is totally etched away, which is horrendous resources wasting, time consuming, and unsuitable for industry production. Thus, our group develops one-step process to directly grow graphene on glass substrate in plasma enhanced chemical vapor deposition (PECVD). Copper foil is used as catalyst to enhance the growth of graphene, as well as a temperature shield to provide relatively low temperature to glass substrate. The effect of growth time is reported that longer growth time will provide lower sheet resistance and higher VSG flakes. The VSG with conductivity of $800{\Omega}/sq$ and thickness of 270 nm grown on glass substrate can be obtained under 12 min growing time. The morphology is clearly showed by SEM image and Raman spectra that VSG film is composed of base layer of amorphous carbon and vertically arranged graphene flakes.

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Effects of Opuntia ficus-indica Complex on Lipid Metabolism in Streptozotocin-induced Diabetic Rats (손바닥선인장 복합물이 Streptozotocin으로 유발된 당뇨 쥐의 지질대사에 미치는 효과)

  • Yoon, Jin A
    • The Korean Journal of Food And Nutrition
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    • v.26 no.3
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    • pp.526-534
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    • 2013
  • This study was conducted to examine the effects of Opuntia ficus-indica complex (OF) on the lipid metabolism, bile acid in feces, alanine aminotransferase (ALT) activity, aspatate aminotransferase (AST) activity, composition of urine and expression of cholesterol related mRNA in streptozotocin (STZ)-induced diabetic rats. Thirty two male Sprague-Dawley rats were randomly divided into non-diabetic control (NC), diabetic control (DC), diabetic OF of 2% (OF-2) and diabetic OF of 5% (OF-5), then each group was fed for 3 weeks. Plasma total cholesterol, non-esterified fatty acids (NEFA), total cholesterol, low density lipoprotein (LDL), very low density lipoprotein (VLDL) were decreased significantly (p<0.05) in OF-5 group compared to DC, but high density lipoprotein (HDL) was not changed. AST and ALT were also reduced and bile acid excretion was improved. Composition of urine in OF-5 was almost same in NC. The expression of cholesterol $7{\alpha}$-hydroxylase (CYP7A1), 3-hydroxy-3-methylglutaryl-coenzyme A reductase (HMG-CoA-R), Low density lipoprotein receptor (LDL-R) mRNA indicated that feeding OF have the effects of cholesterol decreation in plasma by synthesis of bile acid from cholesterol. These results provide experimental evidence about improved lipid metabolism of the OF feeding in the STZ-induced diabetic rats.

전북대학교 소재공정용 다목적 100 kW ICP (RF) 플라즈마 발생 장치 구축

  • Seo, Jun-Ho;Lee, Mi-Yeon;Kim, Jeong-Su;Choe, Chae-Hong;Kim, Min-Ho;Hong, Bong-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.190-190
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    • 2012
  • 전북대학교 고온 플라즈마 응용 연구 센터는 교육과학기술부 기초연구사업 중 고가연구장비 구축사업의 일환으로 소재공정용 다목적 100 kW 플라즈마 발생장치를 구축하고 있다. 100kW급 ICP (RF)형 플라즈마 발생장치는 RF 전력 인출이 이중으로 되어있어 한쪽에서는 수~수십 um 크기의 금속, 세라믹 등 고융점 원료분말을 순간적으로 용해, 기화 및 분해시키고 이들 기화 또는 분해된 증기를 급랭시키는 과정에서 초미분(<1 um)을 합성하는 플라즈마 합성법 연구가 가능하도록 RF 플라즈마 분말 합성 시스템이 연결되어 있고 다른 한쪽으로는 진공 챔버 내에서 고온 고속의 RF 플라즈마 불꽃을 형성 한 후 RF 플라즈마의 축 방향으로 반응성 가스 및 코팅 대상 물질을 주입하여 코팅 할 수 있는 열플라즈마 용사코팅 시스템이 연결되어 있는 다목적 연구 장치이다. 본 장치는 100 kW급 RF 전원 공급기와 유도결합형 플라즈마 토치, 플라즈마 분말 합성 부, 플라즈마 코팅 및 반응성 증착부, 가스 공급부, 냉각수 공급부, 전기 계장/제어부로 구성되어 있다.

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A Study on ASM Pulsed Power Generator for Non-thermal Plasma Applications (저온 플라즈마 발생을 위한 ASM 방식의 펄스파워 발생장치에 관한 연구)

  • Yang, Chun-Suk;Chung, Yong-Ho;Kim, Han-Joon
    • Proceedings of the KIEE Conference
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    • 1999.07e
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    • pp.2035-2037
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    • 1999
  • This paper describes an ASM(All Solid-state Modulator) pulsed power generator for non-thermal plasma applications. The proposed generator can produce 20kV, 500A, 100ns pulses at repetition rates up to 10kHz, and it is composed of 30 series connections of power circuit card assembly which contains paralleled MOSFETs, MOSFET drivers, energy storage capacitors and specially designed 1:1 pulse transformer. Higher pulse voltages and currents can easily be obtained by increasing the numbers of series and parallel connections of power circuit card and MOSFETs, respectively. Component layouts are optimized to minimize the leakage inductance and the voltage spikes across switching devices. Especially it put emphasis on the over-current protection (including short circuit) for the reliable operation in real situations. Experimental results show that the proposed pulser is very efficient in air pollution control application and could be useful for other applications such as synthesis of nanosize powders and non-thermal food processing.

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Synthesis and Lubricant Properties of Nitrogen doped Amorphous Carbon (a-C:N) Thin Films by Closed-field unbalanced Magnetron Sputtering Method (비대칭 마그네트론 스퍼터링법에 의한 비정질 질화탄소 박막의 합성 및 윤활 특성)

  • Park, Yong-Seob;Cho, Hyung-Jun;Choi, Won-Seok;Hong, Byung-You
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.8
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    • pp.701-705
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    • 2007
  • The incorporation of N in a-C film is able to improve the friction coefficient and the adhesion to various substrates. In this study, a-C:N films were deposited on Si and steel substrates by closed-field unbalanced magnetron (CFUBM) sputtering system in $Ar/N_2$ plasma. The lubricant characteristics was investigated for a-C:N deposited with total working pressure from 4 to 7 mTorr. We obtained high hardness up to 24GPa, friction coefficient lower than 0.1 and the smooth surface of having the extremely low roughness (0.16 nm). The physcial properties of a-C:N thin film are related to the increase of cross-linked $sp^2$ bonding clusters in the film. However, the decrease of hardness, elastic modulus and the increase of surface roughness, friction coefficient with the increase of $N_2$ partial pressrue might be due to the effect of energetic ions as a result of the increase of ion bombardment with the increase of ion density in the plasma.

Dietary Salt Modulates the Adrenocortical Expression of P450 11Beta-hydroxylase in Mice

  • Jahng, Jeong-Won;Youn, Bu-Hyun;Choi, Si-Ho;Moon, Young-Wha
    • Animal cells and systems
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    • v.9 no.1
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    • pp.19-25
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    • 2005
  • This study was conducted to determine the effect of dietary salt on the synthesis of glucocorticoids in the adrenal cortex of mice. Mice had ad libitum access to 3% sodium chloride as the only drinking fluid (high salt diet) for either 4 days or 4 weeks. Adrenocortical expression of cytochrome P450 11beta-hydroxylase, a major regulatory enzyme in the biosynthesis of glucocorticoids, was examined by immunohistochemistry and western blot analysis. Ultrastructure of adrenocortical cell and plasma level of corticosterone were analyzed as well. Size and density of lipid droplets in the cortical cell were increased by high salt diet. Four days of high salt diet decreased P450 11beta-hydroxylase in the adrenal cortex, but 4 weeks increased it. Plasma level of corticosterone changed in parallel with the Cortical level of P450 11 beta-hydroxylase. These results suggest that high salt diet may modulate the biosynthesis of glucocorticoids, at least partly, via regulating the expression of P450 11beta-hydroxylase in adrenocortical cells.

Effects of oxygen, hydrogen and nitrogen addition in the synthesis of diamond-like carbon films (DLC 합성시 산소, 수소 및 질소 첨가의 효과)

  • 황민선;이종무
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.165-171
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    • 1999
  • Diamond-like carbon(DLC) films were synthesized using the rf-plasma CVD technique with the addition of small amounts of nitrogen and oxygen to a gas mixture of $CH_4$ and $H_2$. The gas flow ratio of $CH_4$ to $H_2$ was 2.4:1, and 3% , 13.6% of nitrogen were added to the gas mixture of $CH_4$ and $H_2$ for the deposition of DLC films. The film stress tended to decrease as the nitrogen concentration increased from 3% to 13.6%, probably due to the decrease of the number of the interlink between carbon atoms. The residual stress tended to slightly decrease when 3% of oxygen was added. Scratch tests were performed to investigate the adhesion between the DLC films and the Ti intelayer after pretreating the TiN surface with direct hydrogen plasma. The adhesion was enhanced by adding nitrogen and oxygen to the $CH_4$ and $H_2$ gas mixture. The adhesion for the 3% nitrogen addition was better than that for the 13.6% nitrogen addition. The Vicker's hardness of the DLC films was measured to be 1100Hv.

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Preparation and Luminescent Characteristics of Phosphate-Based Phosphors (포페이트계열 형광체의 합성 및 광특성 평가)

  • Noh, Seh-Chul;Kim, You-Hyuk
    • Korean Journal of Materials Research
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    • v.12 no.1
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    • pp.21-26
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    • 2002
  • In order to search new phosphors for plasma display panel(PDP), phosphate hosts which has a host excitation band at around 150nm were prepared and their luminescent properties were investigated. In the preparation of $YPO_4: Eu\; and\; (Y,Gd)PO_4: Eu$ phosphors, the effect of oxide and oxalate starting materials on prepared phosphors were compared in terms of relative emission intensities and particle characteristics. The results showed that oxalate starting materials gave better performance in emission intensities and smaller size and more round shape phosphors which would be more applicable for high resolution display. Additionally, Gd, V, Nb and Ta ions were doped to $YPO_4:Eu$ and the luminescent properties of the resulant solid solutions were investigated to find efficient sensitizer. Among these ions, Gd, V and Nb ions increased the emission intensities of parent phosphor to around 10%. While Nb ion gave the best result in emission intensities, CIE color coordinate were improved by doping V ion into $YPO_4:Eu$ phosphor to give x=0.6523, y=0.3406 compared to commercial sample.