• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.131-132
• /
• 2006

We experimentally demonstrated the synthesis of silicon nanoparticles by using high-density ablation plasma prepared by the interaction of an intense pulsed light-ion beam (LIB) with a target. known as the intense pulsed ion beam evaporation (IBE) method. Light emission was obtained from the silicon nanoparticles. It was determined that the ambient gas reaction is very important and useful method to obtain the photoluminescence from the silicon nanoparticles.

• 공업화학
• /
• 제5권1호
• /
• pp.16-23
• /
• 1994

아르곤 열플라즈마 CVD장치를 제작하여 메탄과 수소기체의 화학적인 반응을 이용해서 대기압하에서 몰리브덴 기판에 준안정상(metastable state)의 다이아몬드를 합성하였다. 증착실험 후 SEM관찰, X선 회절 및 Raman분광분석을 행한 결과, 기판표면온도와 수소에 대한 메탄 농도비에 따라 증착 입자의 morphology가 변화하였다. 본 연구에서 설정한 증착조건 범위에서 다이아몬드는 기판표면의 온도가 약 $890^{\circ}C$와 수소에 대한 메탄 농도비가 0.5%로 하였을 때, 결정성, 밀도 및 품질이 우수한 다이아몬드 입자를 합성하는 것이 가능하였다.

• 한국세라믹학회지
• /
• 제27권4호
• /
• pp.513-520
• /
• 1990

Diamond film was deposited on Si wafer substrate from a gas mixture of methane, hydrogen and oxygen by microwave plasma-assisted chemical vapor deposition. The effects of the pre-treatments of the substrate and of the oxygen addition on the diamond film synthesis are described. In order to obtain diamond film, the substrate was pre-treated with 3 kinds of methods. When the substrate was ultrasonically vibrated within the ethyl alcohol dispersed with 25${\mu}{\textrm}{m}$ diamond powder, the denset diamond film was deposited. Addition of oxygen in the gas mixture of methane and hydrogen improved the crystallinity of the deposited diamond film and also increased the deposition rate of the diamond film more than two times.

• 대한전기학회논문지
• /
• 제39권10호
• /
• pp.1037-1043
• /
• 1990

Diamond thin films were synthesized from the mixed gases of methane and hydrogen on silicon substrates by RF plasma chemical vapor deposition and deposited films were investigated by SEM, X-ray diffractometry and Raman spectroscopy. It is found that high quality diamond-like carbon films were successfully synthesized by PECVD under the deposition condition of 1-10 vol% of methane concentration, 0.15-0.4torr of reactor pressure, 500W of RF power, and 5-20hr of reaction time. Especially, cubo-octahedral diamond-like carbon particles were synthesized by employing 1.0 vol % of methane concentration and 0.4torr of the reactor pressure.

• 한국재료학회지
• /
• 제7권1호
• /
• pp.27-32
• /
• 1997

본 연구에서는 고밀도 플라즈마를 형성하는 planar magnetron RF 플라즈마 CVD를 이용하여 DLC(diamond-like carbon) 박막을 합성하였다. 이 방법을 이용하여 DLC 박막을 합성한다면 고밀도 플라즈마 때문에 종래의 플라즈마 CVD(RF-PECVD)법보다 증착속도가 더욱더 향상될 것이라는 것에 착안하였다. 이를 위해 magnetron에 의한 고밀도 플라즈마가 존재할 때도 역시 DLC박막형성에 미치는 RF 전력과 반응가스 압력이 중요한 반응변수인가에 대해 조사하였고, 일정한 자기장의 세기에서 RF전력과 DC self-bias 전압과의 관계를 조사하였다. 또한 RF전력변화에 따른 박막의 증착속도와 밀도를 측정하였다. 본 연구에 의해 얻어진 박막의 증착속도는 magnetron에 의한 이온화율이 매우 높아 기존의 RF-PECVD 법보다 매우 빠르며, DLC박막의 구조와 물질특성을 알아보기 위해 FTIR(fourier transform infrared)및 Raman 분광분석을 행한 결과 전형적인 양질의 고경질 다이아몬드상 탄소박막임을 알 수 있었다.

• 한국표면공학회지
• /
• 제51권3호
• /
• pp.179-184
• /
• 2018

In this study, Ni and tungsten carbide (WC) nanoparticles are simultaneously synthesized with the mesoporous carbon nanoparticles (CNP) using a solution plasma processing (SPP) in the benzene. The Ni and WC nanoparticles were formed through the sputtering effect of electrodes during discharge, and mean time CNP were formed through reduction reaction. TEM observation showed that loaded Ni and WC nanoparticles were evenly dispersed on the CNP. The results of electrochemical analysis demonstrated that an introduction of Ni nanoparticles promoted to improve catalytic activity for oxygen reduction reaction (ORR). Moreover, Ni-WC/CNP lead to fast electron transfer process compared to that of WC/CNP. Therefore, the inexpensive Ni-WC/CNP might be a promising as catalytic material for cathodes in fuel cell applications.

• Transactions on Electrical and Electronic Materials
• /
• 제16권4호
• /
• pp.198-200
• /
• 2015

The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H₂) and methane (CH₄) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.

• 한국지능시스템학회:학술대회논문집
• /
• 한국퍼지및지능시스템학회 1996년도 추계학술대회 학술발표 논문집
• /
• pp.234-238
• /
• 1996

In this paper, Plasma-Enhanced Chemical Vapor Deposition (PECVD) modeling using Polynomial Neural Networks (PNN) has been introduced. The deposition of SiO2 was characterized via a 25-1 fractional factorial experiment, was used to train PNNs using predicted squared error (PSE). The optimal neural network structure and learning parameters were determined by means of a second fractional factorial experiment. The optimized networks minimized both learning and prediction error. From these PNN process models, the effect of deposition conditions on film properties has been studied. The deposition experiments were carried out in a Plasma Therm 700 series PECVD system. The models obtained will ultimately be used for several other manufacturing applications, including recipe synthesis and process control.

• Archives of Pharmacal Research
• /
• 제13권4호
• /
• pp.359-364
• /
• 1990

The present study was performed to evaluate the hypoglycemic mechanism of brazilin. Brazilin significantly reduced plasma glucose level in streptozotocin induced diabetie rats and this effect seems to be mediated by extrapancratic effects rather than by pacreatic effect because no significant changes were observed in plasma insulin levels. The rates of glycogen synthesis, glycolysis and glucose oxidation in soleus muscle were markedly increased following brazilin treatment to diabetic animals. Glucose transport seemed to be increased by the treatment of brazilin. Brazilin did not affect insulin binding to muscles from streptozotiocin induced diabetic rats. These results suggest that potentiation of periopheral glucose utilization may be one of the major causes of hypoglucemic action of brazilin.

• 약학회지
• /
• 제47권4호
• /
• pp.218-223
• /
• 2003

Effect of taurine treatment on metabolism of glutathione (GSH) was studied in adult male ICR mice. An acute injection of taurine (250 mg/kg, ip) resulted in a significant decline of hepatic GSH level at t = 6 hr, but plasma GSH level was not altered. The activity of GSH-related enzyme in liver, such as GSH peroxidase, GSSG reductase, GSH S-transferases, ${\gamma}$-glutamylcysteine synthetase or ${\gamma}$-glutamyltranspeptidase, was not affected by taurine at t = 2.5 or 6 hr. Plasma cysteine and cystine levels were elevated rapidly following taurine treatment. Hepatic cysteine level was decreased by taurine, reaching a level approximately 70％ of control at t = 4 and 6 hr. In conclusion, the results indicate that an acute dose of taurine decreases hepatic GSH level by reducing the availability of cysteine, an essential substrate for synthesis of this tripeptide in liver. It is also suggested that taurine may decrease the cysteine uptake by competing with this S-amino acid for a non-specific amino acid transporter.