• 제목/요약/키워드: plasma synthesis

검색결과 464건 처리시간 0.027초

플라즈마 아크방전(PAD)법으로 제조된 FeAl 나노분말 특성 (Preparation of FeAl nanopowders by Plasma Arc Discharge Process)

  • 박우영;윤철수;유지훈;오영우;최철진
    • 한국분말재료학회지
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    • 제11권6호
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    • pp.522-527
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    • 2004
  • Nano sized FeAl intermetallic particles were successfully synthesized by plasma arc discharge pro-cess. The synthesized powders shouted core-shell structures with the particle size of 10-20 nm. The core was metallic FeAl and shell was composed of amorphous $AI_{2}O_{3}\;and\;a\;little\;amount\;of\;metallic\;Fe_{3}O_{4}.$ Because of the difference of Fe and Al vapor pressure during synthesis, the Al contents in the nanoparticles depended on the Al contents of master alloy.

Synthesis of Diamond Thin Film by Helicon Plasma Chemical Vapor Deposition

  • Hyun, Jun-Won;Kim, Yong-Kin
    • Transactions on Electrical and Electronic Materials
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    • 제1권1호
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    • pp.1-5
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    • 2000
  • Diamond films have been achieved on Si(100) substrates using helicon plasma chemical vapor deposition(HPCVD), Gas mixtures with methane and hydrogen have been used. The growth characteristics were investigated by means of X-ray photoelectroton spectroscopy, Atomic force microscopy and X-ray diffraction. We obtained a plasma density as high as 10$\^$10/~10$\^$11/ cm$\^$-3/ by helicon source. The smooth(100) faces of submicron diamond crystallites were found to exhibit pyramidal shaped architecture, The XPS spectrum for the nucleation layer indicates the presence of diamond at 285.4 eV, close to the reported value of 285.5 eV for diamond , XRD results demonstrates the existence of polycrystalline diamond as the diamond (111) and (220) peaks.

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용액 플라즈마 공정을 이용하여 제조된 금 나노유체의 특성평가 (Synthesis and Characterization of Glold Nanofluid Prepared by the Solution Plasma Processing)

  • 허용강;이상율
    • 한국분말재료학회지
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    • 제17권4호
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    • pp.342-346
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    • 2010
  • In the present work, water-based gold nanofluids were synthesized by the solution plasma processing (SPP). The size distribution and the shape of gold nanoparticles in the nanofluids were investigated using high resolution transmission electron microscopy (HR-TEM). The dispersion stability of gold nanofluids was characterized using zeta potential, as well. The thermal properties of gold nanofluids were measured by utilizing lambda measurement device. Nanofluids containing nanoparticles with $64.0{\pm}42.1\;nm{\sim}18.10{\pm}5.0\;nm$ in diameter were successfully synthesized. As diameter of nanoparticles decreased, dispersion stability of nanofluids increased and the enhanced ratio of thermal conductivity increased. The nanofluid with nanoparticles of $18.10\;{\pm}\;5.0\;nm$ in diameter showed approximately 3% improvement in thermal conductivity measurement and this could be due to the enhanced Brownian movement.

RF Plasma CVD에 의한 다이아몬드 박막의 합성 (Synthesis of Diamond thin films by RF Plasma CVD)

  • 이상희;이병수;이덕출;김영봉;김보열;이종태;우호환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.246-249
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    • 1997
  • Diamond thin films were deposited on Si wafer from a mixture of CE$_4$ and H$_2$ by RF Plasma CVD. The films were de77sited under the following conditions : discharge power of 500w, H$_2$ flow rate of 30sccm, chanter pressure of 20∼50Torr, and CH$_4$ concentration of 0.5∼2%. The deposition time was 30∼40 hours because of low growth rate. The deposited films were characterized by Scanning Electron Microscopy and X-ray Diffraction method.

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Preparation of $TiB_2$ Dispersed Cu Alloy by Spark Plasma Sintering

  • Kim, Kyong-Ju;Lee, Gil-Geun;Park, Ik-Min
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.523-524
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    • 2006
  • The $TiB_2$ dispersion strengthened copper alloy was attracted as thermal and electrical functional material for the high mechanical strength, high thermal stability and good conductivity of $TiB_2$. In the present study, the focus is on the synthesis of $TiB_2$ dispersed copper alloy by spark plasma sintering process using copper oxide and titanium diboride as raw materials. The mechanical, thermal and electrical properties of sintered bodies were discussed with the sintering parameters, and developed microstructure and phase of sintered bodies.

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Synthesis of Diamond-Like Carbon Films on a TiO₂ Substrate by DC-Discharge Plasma Enhanced Chemical Vapor Deposition

  • 구수진;김창민;지종기
    • Bulletin of the Korean Chemical Society
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    • 제16권9호
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    • pp.813-818
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    • 1995
  • A diamond-like carbon (DLC) film was produced on a TiO2 substrate using a plasma enhance chemical vapor deposition (PECVD) method. The CH4-H2 plasma was produced by applying 400 V DC. The DLC film with the best crystalline structure was obtained when the concentration of CH4 in H2 was 0.75 percent by volume and total pressure was 40 torr. The presence of the diamond structure was confirmed by Raman spectroscopy, X-ray diffraction, and scanning electron microscopy methods. It was found that the diluting gas H2 played an important role in producing a DLC film using a PECVD method.