• Title/Summary/Keyword: plasma measurement

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Physical Properties of Diamond-like Carbon Thin Films Prepared by a Microwave Plasma-Enhanced Chemical Vapor Deposition (마이크로웨이브 화학기상증착법으로 성장된 다이아몬드상 카본박막의 물리적인 특성연구)

  • Choi, Won-Seok;Hong, Byung-You
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.791-794
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    • 2003
  • DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

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Physical Properties of Diamond-like Carbon Thin Films Prepared by a Microwave Plasma-Enhanced Chemical Vapor Deposition (마이크로웨이브 화학기상증착법으로 성장된 다이아몬드상 카본박막의 물리적인 특성연구)

  • Choi, Won-Seok;Hong, Byung-You
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.842-845
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    • 2003
  • DLC thin films were prepared by microwave plasma-enhanced chemical vapor deposition method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas mixture. The negative DC bias ($-450V{\sim}-550V$) was applied to enhance the adhesion between the film and the substrate. The films were characterized by Raman spectrometer. The surface morphology was observed by an atomic force microscope (AFM). And also, the friction coefficients were investigated by AFM in friction force microscope (FFM) mode, which were compared with the pin-on-disc (POD) measurement.

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A Study on the Improvement of Decomposition Efficiency of Organic Substances Using Plasma Process and Catalytic Surface Chemical Reaction (플라즈마 프로세스 및 촉매 표면화학반응에 의한 유기화합물 분해효율 향상에 대한 연구)

  • Han, Sang-Bo
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.5
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    • pp.932-938
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    • 2010
  • This paper proposed the effective treatment method for organic substances using the barrier discharge plasma process and catalytic chemical reaction followed from ozone decomposition. The decomposition by the plasma process of organic substances such as trichloroethylene, methyl alcohol, acetone, and dichloromethane carried out, and ozone is generated effectively at the same time. By passing through catalysts, ozone easily decomposed and further decomposed organic substances. And, 2-dimensional distribution of ozone using the optical measurement method is performed to identify the catalytic surface chemical reaction. In addition, CO is easily oxidized into $CO_2$ by this chemical reaction, which might be induced oxygen atom radicals formed at the surface of catalyst from ozone decomposition.

Synthesis and Characterization of Glold Nanofluid Prepared by the Solution Plasma Processing (용액 플라즈마 공정을 이용하여 제조된 금 나노유체의 특성평가)

  • Heo, Yong-Kang;Lee, Sang-Yul
    • Journal of Powder Materials
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    • v.17 no.4
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    • pp.342-346
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    • 2010
  • In the present work, water-based gold nanofluids were synthesized by the solution plasma processing (SPP). The size distribution and the shape of gold nanoparticles in the nanofluids were investigated using high resolution transmission electron microscopy (HR-TEM). The dispersion stability of gold nanofluids was characterized using zeta potential, as well. The thermal properties of gold nanofluids were measured by utilizing lambda measurement device. Nanofluids containing nanoparticles with $64.0{\pm}42.1\;nm{\sim}18.10{\pm}5.0\;nm$ in diameter were successfully synthesized. As diameter of nanoparticles decreased, dispersion stability of nanofluids increased and the enhanced ratio of thermal conductivity increased. The nanofluid with nanoparticles of $18.10\;{\pm}\;5.0\;nm$ in diameter showed approximately 3% improvement in thermal conductivity measurement and this could be due to the enhanced Brownian movement.

Determining plasma boundary in Alvand-U tokamak

  • Yahya Sadeghi
    • Nuclear Engineering and Technology
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    • v.55 no.9
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    • pp.3485-3492
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    • 2023
  • One of the major topic of tokamak research is the determination of the magnetic profile due to magnetic coil fields and plasma current by mean of data from magnetic probes. The most practical approach is to use the current filament method, which models the plasma column with multiple current carrying filaments and the total current of these filaments is equal to the plasma current. Determining the plasma boundary in Alvand-U tokamak is the main purpose of this paper. In order to determine the magnetic field profile and plasma boundary, information concerning the magnetic coils, their position, and current is required in the computing code. Then, the plasma shape is determined and finally the plasma boundary is extracted by the code. In the conducted research, we discuss how to determine the plasma boundary and the performance of the computing code for extraction of the plasma boundary. The developed algorithm shows to be effective by running it in the regular pc machine with characteristics of Intel (R) core (TM) i3-10100 CPU @3.60 GHz and 8.00 GB of RAM. Finally, we present results of a test run for computing code using a typical experimental pulse.

Non-contact Measurement and Analysis of Surface Hardness on Welding Steel using Laser-induced Breakdown Spectroscopy (레이저 유도 플라즈마 분광 기법을 이용한 용접 연강에서의 비접촉 강도 측정과 해석)

  • Kim, Joohan;Ko, Chansol
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.2
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    • pp.141-148
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    • 2014
  • In this work, effects of plasma on different hardness of welding steel using laser-induced breakdown spectroscopy were investigated. The ratios of ionic to atomic spectrum peaks were related to its material hardness. The major spectrum peak (Fe) and minor spectrum peak (Mn) were considered as monitoring elements. The stronger repulse plasma was generated, the harder material it was. The ratios of ionic to atomic spectrum peaks increased with respect to the material hardness as well. The correlation of minor spectrum peaks was stronger than that of major spectrum peaks. However, the major spectrum peaks indicated a similar trend, which could be used to estimate the hardness, too. Based on this result, the method could be used as a non-contact remote measurement of material properties.

Measurement of Electron Density and Electron-neutral Collision Frequency Using Cutoff Probe Based on the Plasma Reactance Measurement

  • Yu, Gwang-Ho;Kim, Dae-Ung;Na, Byeong-Geun;Seo, Byeong-Hun;Yu, Sin-Jae;Kim, Jeong-Hyeong;Seong, Dae-Jin;Sin, Yong-Hyeon;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.184-184
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    • 2012
  • We proposed a new measurement method of cutoff probe using the reactance spectrum of the plasma in cutoff probe system instead of transmission spectrum. The high accurate reactance spectrum of the plasma which is expected in previous circuit simulation of cutoff probe [1] was measured by using the automatic port extension method of the network analyzer. The measured reactance spectrum is good agreement with E/M wave simulation result (CST Microwave Studio). From the analysis of the measured reactance spectrum based on the circuit modeling, not only the electron density but also electron-neutral collision frequency can be simply obtained. The obtained results of electron density and e-n collision frequency were presented and discussed in wide range of experimental conditions, together with comparison result with previous methods (a previous cutoff probe using transmission spectrum and a single langmuir probe).

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HIP Effects on Mechanical Properties of Oxide Plasma-sprayed Coatings

  • Korobova, N.;Soh, Dea-Wha
    • Journal of the Speleological Society of Korea
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    • no.76
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    • pp.61-66
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    • 2006
  • The present report is the investigation of the effects of the HIP treatment on plasma-sprayed ceramic coating of $Al_2O_3$, $Al_2O_3-SiO_2$ on the metal substrate. These effects were characterized by phase identification, Vickers hardness measurement, and tensile test before and after HIPing.

Polymerized Organic Thin Films and Comparison on their Physical and Electrochemical Properties

  • Cho, S.H.;You, Y.J.;Kim, J.G.;Boo, J.H.
    • Journal of the Korean institute of surface engineering
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    • v.36 no.1
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    • pp.9-13
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    • 2003
  • Plasma polymerized organic thin films were deposited on Si(100), glass and metal substrates at $25∼100 ^{\circ}C$ using thiophene and toluene precursors by PECVD method. In order to compare physical and electrochemical properties of the as-grown thin films, the effects of the RF plasma power in the range of 30∼100 W and deposition temperature on both corrosion protection efficiency and physical properties were studied. We found that the corrosion protection efficiency ($P_{k}$), which is one of the important factors for corrosion protection in the interlayer dielectrics of microelectronic devices application, was increased with increasing RF power. The highest $P_{k}$ value of plasma polymerized toluene film (85.27% at 70 W) was higher than that of the plasma polymerized thiophene film (65.17% at 100 W), indicating inhibition of oxygen reduction. The densely packed and tightly interconnected toluene film could act as an efficient barrier layer to the diffusion of molecular oxygen. The result of contact angle measurement showed that the plasma polymerized toluene films have more hydrophobic surface than those of the plasma polymerized thiophene films.