• 제목/요약/키워드: plasma measurement

검색결과 781건 처리시간 0.031초

Measurement of plasma potential by a biased cut off probe

  • 김대웅;김정형;성대진;유신재;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.465-465
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    • 2010
  • Cut off probe, the efficient method, can measure the plasma parameters like the plasma electron density and the electron temperature. Plasma potential is also one of the important parameters in plasma processing but cannot be measured by cut off probe yet. Thus we developed method to measure plasma potential by focusing on relation between bias on a tip and sheath around tip. The system consist of a ICP(Inductive Coupled Plasma) source, a Network analyzer and a bias tee that can be bridge apply DC voltage on the cut off probe tip. Plasma potential is identified by using this system. The results corresponded well with the measured results by single langmuir probe(SLP).

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발치와의 혈소판 농축 혈장과 골 이식술 시행시 골 형성에 대한 임상 및 조직병리학적 연구 (Clinical and Histopathological Study Using Platelet Rich Plasma and Bone Grafts in Extraction Sockets)

  • 전영태;정진형;이종헌;임성빈
    • Journal of Periodontal and Implant Science
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    • 제31권2호
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    • pp.437-449
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    • 2001
  • The socket preservation procedure was a simple and effective technique, and has better prognosis for implantation. The socket preservation usually used barrier membrane in combination with/without alloplastic bone materials. A recently study had shown that a regenerative therapy to tooth extraction utilizing growth factors made better results. Platelet-rich plasma was clinically easy method that acquired the growth factors, and is known that accelerated new bone formation and mineralization of bone graft materials. The purpose of this study was to evaluate clinical and histopathologic results which occur following socket preservations using platelet-rich plasma and bovine bone powder. Twelve patients who required extraction of one or more teeth for implantation at the department of periodontics in Dankook University Dental Hospital were selected. Extraction sockets were treated by using platelet-rich plasma and bovine bone powder. 3 months later, we observed clinical and histopathological results as follows: 1. Internal vertical measurement was an average of 7.33mm preoperatively and statistically significantly decreased to an average of 1.42mm postoperatively(p<0.05). 2. External vertical measurement was an average of 3.33mm preoperatively and decreased to an average of 2.75mm postoperatively; therefore there was no significant difference. 3. Horizontal measurement was an average of 7.75mm preoperatively and statistically decreased to an average of 6.08mm postoperatively(p<0.05). 4. Osteocyte-like cells and new bone formation connected with bovine bone grafts were observed in histopathologic examination. This study implied that platelet-rich plasma and bovine bone powder grafts were effective treatment for socket preservation and regeneration of severe bony defect made by implantation failure.

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반도체 Ash 공정용 PWM 제어 Plasma 발생방법 (Plasma Generation Method using PWM Control for Ash Process)

  • 이정호;최대규;최상돈;이병국;원충연;김수석
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2006년도 전력전자학술대회 논문집
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    • pp.470-474
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    • 2006
  • This dissertation discuses about a ferrite core plasma source using low operating frequency without sputtering problem by the stored electric field. Compared with the conventional RF power system with 13.56MHz switching frequency, the proposed plasma power system is only separated at 400kHz, so that it makes possible to use of low cost switching elements, PWM control and soft switching. Moreover, it could improve the coupling efficiency for plasma and antenna by using the ferrite core in order to transfer the energy of the load This dissertation tried to analyze new plasma generation method for the plasma generation system by modeling the plasma load and grafting the concept of impedance matching in order to interpret it with the formula This dissertation verified the ferrite core inductive coupling plasma source authorized for 400kHz of low frequency power by applying to the semi-conductor ash process thru the measurement of ash capacity and uniformed plasma distribution on the actual wafer.

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분광학적 방법에 의한 Plasma Jet의 온도분석 측정 (Spectroscopic Measurement of Temperature Distribution in Some Plasma Jets)

  • 전춘생;박용관;임명선
    • 전기의세계
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    • 제26권2호
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    • pp.104-110
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    • 1977
  • This paper investigates temperature distribution of plasma jets which used argon gas, and nitrogen gas mixed with argon as working fluids in spectroscopic method, and studies correlations between them main results are as follows; 1) The temperature at the center of plasma jet increases with are current and gas flow, and decreases with magnetic flux density along the axial direction. 2) The changing rate of temperature of plasma jet in the radial direction decreases rapidly beyond 2mm from central axis. 3) Temperature drop rate of plasma jet in the central axis direction appears most apparant beyond 13mm above the nozzle exit. 4) When argon gas mixed with a small amount of nitrogen, plasma temperature increases at same are current compared with the case of argon gas only.

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Secondary Electron Emission Characteristics of Functional Layer in AC-PDP

  • Son, Chang-Gil;Han, Young-Gyu;Kim, Yong-Hee;Cho, Byeong-Seong;Hong, Young-Jun;Song, Ki-Baek;Bae, Young-Joo;Kim, In-Tae;Choi, Eun-Ha
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.736-739
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    • 2009
  • We have studied that the secondary electron emission characteristics of functional layers which have different kinds of MgO sub-micrometer size powder in AC-PDP. We used cathodoluminescence(CL) and gamma focused ion beam (${\gamma}$-FIB) system for measurement of secondary electron emission characteristics. Also we made 6 inch test panel which applied functional layers for evaluation of discharge characteristics.

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Synthesis of N-doped Ethylcyclohexane Plasma Polymer Thin Films with Controlled Ammonia Flow Rate by PECVD Method

  • Seo, Hyunjin;Cho, Sang-Jin;Boo, Jin-Hyo
    • Applied Science and Convergence Technology
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    • 제23권1호
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    • pp.44-47
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    • 2014
  • In this study, we investigated the basic properties of N-doped ethylcyclohexene plasma polymer thin films that deposited by radio frequency (13.56 MHz) plasma-enhanced chemical vapor deposition (PECVD) method with controlled ammonia flow rate. Ethylcyclohexene was used as organic precursor with hydrogen gas as the precursor bubbler gas. Additionally, ammonia ($NH_3$) gas was used as nitrogen dopant. The as-grown polymerized thin films were analyzed using ellipsometry, Fourier-transform infrared [FT-IR] spectroscopy, UV-Visible spectroscopy, and water contact angle measurement. We found that with increasing plasma power, film thickness is gradually increased while optical transmittance is drastically decreased. However, under the same plasma condition, water contact angle is decreased with increasing $NH_3$ flow rate. The FT-IR spectra showed that the N-doped ethylcyclohexene plasma polymer films were completely fragmented and polymerized from ethylcyclohexane.

Improvement in Interfacial Performances of Silicone Rubber by Oxygen Plasma Treatment

  • Lee, Ki-Taek;Seo, Yu-Jin;Huh, Chang-Su
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.232-233
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    • 2005
  • The Surface of semi-conductive silicone rubber was treated by oxygen plasma to improve adhesion and electric performance in joints between insulating and semi-conductive silicone materials. Surface characterizations were assessed using contact angle measurement and Fourier transform infrared spectroscope (FTIR). Adhesion level was understood from T-peel tests between plasma treated semi-conductive and insulating material. Electrical breakdown strength was measured to understand the charge of electrical performance. From the results, the oxygen plasma treatment produces a significant increase in function group of containing oxygen which can be mainly ascribed to the creation of carbonyl groups on the silicone surface from the strength were improved. Therefore it is concluded then plasma treatment leads to decrease voids originating form poor adhesive, and the improve the adhesion in silicone interface. So we could obtain higher electrical design level of silicone material used for electrical apparatus using oxygen plasma treatment.

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광학적인 방법에 의한 플라즈마 디스플레이 패널의 3차원 광 방출 측정과 분석 (The Measurement and Analysis of Three-Dimensional Light Emitted from Plasma Disp1ay Panel by Optica1 Method)

  • 최훈영;이석현;이승걸
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제51권1호
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    • pp.31-38
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    • 2002
  • We measured a 3-dimensional images of the light emitted from plasma display panel(PDP) by using newly proposed scanned point detecting system. In the panel without phosphor, as we scan from the rear glass to the front glass, the detected light intensity increases and the light intensity detected in the inside edge of the ITO electrodes shows the stronger intensity than others. The light intensity detected between the barrier ribs shows the largest value of brightness. Also, as the sustain voltage increases, the detected light intensity increases. In the panel with phosphor, the intensity of light detected at barrier rib shows the stronger light intensity than rear plate. Therefore, the phosphor of barrier rib is very important. From these results the 3-dimensional measurement is necessary to understand exactly the discharge phenomenon in the PDP cell.