• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.154.1-154.1
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• 2014

Indium gallium zinc oxide (IGZO)는 차세대 디스플레이 평판 패널에 사용되는 반도체 화합물의 일종으로 최근 주목받고 있는 물질의 하나이다. 기존의 IGZO를 사용하여 박막을 증착한 뒤 표면 처리를 통해 박막의 특성 변화에 대한 연구들이 진행되어 왔으며, 기존의 연구들은 plasma 환경에 노출을 시켜 간접적인 plasma treatment를 통해 박막의 특성을 향상시켜 왔다. 본 연구에서는 기존의 plasma treatment에서 발견된 방식인 ion beam treatment를 통해 플라즈마를 직접적으로 표면에 조사하여 박막의 특성 변화를 알아보았다. 한국표준과학연구원에서 자체 제작한 chamber를 이용하여 RF sputter로 Si wafer 위에 IGZO 박막을 증착하고 수소 ion beam treatment를 한 뒤, SEM과 XPS를 사용하여 박막 표면의 물성 변화를 분석하였다. 실험에 사용된 chamber에는 sputter gun과 ion beam이 함께 장착되어 있으며, scroll pump와 TMP를 사용하여 pressure를 유지하였다. 실험 시 base pressure는 $1.4{\times}10^{-6}Torr$였다. RF power 150 W. ion beam power 2,000 V에서 실험을 진행하였다.

• Journal of the Korean institute of surface engineering
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• v.23 no.1
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• pp.1-7
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• 1990

Ion implantation is a well established superior superior surface modification technique for the improvement of wear resistance, hardenece, hardness, corrosion resistance, biocompaibity, surface friction, as well as for the modification of surface electric conductance. Conventional ion implantaion is a line-of-sight process witch ues the ion beam accelerator techniques. Plasma sheath ion implantation (PSII), as a new technique, is described in this paper. In PSII high voltage pulse is applied to a target material placed directly in a plasma, forming a think ion-matrix sheath around the target. Ions accelerate through the sheath drop and bombard the traget from all sides simultaneosuslyregardless of the target shape. This paper describes the principle of PSII, which has non-line-of sight characteristics, as well as the experimental appratus.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.799-801
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• 2003

The secondary electron emission $coefficient({\bullet})$ of vacuum annealed MgO films has been investigated by ${\bullet}$ -focused ion beam(${\bullet}$ -FIB) system. The vacuum annealed MgO films have been found to have higher ${\bullet}$ values than those for as-deposited MgO films for Ne+ ion. Also it is found that the ${\bullet}$ for air-hold of vacuum annealed MgO layers for 24-hours is similar to that for vacuum annealed MgO films without any air-hold.

• Journal of Astronomy and Space Sciences
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• v.33 no.3
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• pp.207-210
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• 2016

Under the assumption of the presence of a medium-scale E × B drift vortex of plasma in the daytime midlatitude F region, and using a simplified ionospheric model, we demonstrate that the E × B drift produces noticeable perturbations in the horizontal distribution of the plasma density in the upper F region. The pattern of ion density perturbations shows two separate medium scale domains of enhanced and reduced ion density with respect to the background. The E × B drift does not produce multiple small-scale ion density irregularities through plasma mixing because of the suppression effect of the field-aligned ambipolar plasma diffusion.

• Journal of the Korean institute of surface engineering
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• v.32 no.4
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• pp.513-520
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• 1999

In this study, we investigated the effects of variously configured magnets on the characteristics of the plasmas to enhance plasma uniformity and density of an inductively coupled plasma source. As the magnets, Helmholtz type axial electromagnets and various multi-dipole magnets types around the chamber wall were used. To characterize the plasma as a function of the combination of the magnets and magnetic field strengths, ion density, electron temperature, and plasma potential were measured using an electrostatic probe along the chamber diameter for Ar plasmas. The measured maximum ion densities were $8$\times$10^{ 11}$$cm^{-3}$ with 600W inductive power and at 5mTorr of operational pressure and the uniformity of ion density was less than 5.9% at 2mTorr of operational pressure. The combination of an optimized multi-dipole magnet type and an axial electromagnet showed the lowest electron temperature (3eV) and plasma potential ($34V{p}$ )

• Journal of the Korean institute of surface engineering
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• v.43 no.3
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• pp.154-158
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• 2010

Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.76-76
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• 2012

Surface engineering of polymers has a broad array of scientific and technological applications that range from tissue engineering, regenerative medicine, microfluidics and novel lab on chip devices to building mechanical memories, stretchable electronics, and devising tunable surface adhesion for robotics. Recent advancements in the field of nanotechnology have provided robust techniques for controlled surface modification of polymers and creation of structural features on the polymeric surface at submicron scale. We have recently demonstrated techniques for controlled surfaces of soft and relatively hard polymers using ion beam irradiation and plasma treatment, which allows the fabrication of nanoscale surface features such as wrinkles, ripples, holes, and hairs with respect to its polymers. In this talk, we discuss the underlying mechanisms of formation of these structural features. This includes the change in the chemical composition of the surface layer of the polymers due to ion beam irradiation or plasma treatment and the instability and mechanics of the skin-substrate system. Using ion beam or plasma irradiation on polymers, we introduce a simple method for fabrication of one-dimensional, two-dimensional and nested hierarchical structural patterns on polymeric surfaces on various polymers such as polypropylene (PP), polyethylene (PE), poly (methyl methacrylate) PMMA, and polydimethylsiloxane (PDMS).

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.123-123
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• 2005

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.32-43
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• 2008

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.1
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• pp.216-221
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• 2001

In this study, the effects of nitriding methods and times on the fatigue strength of SACM 645 steel were investigated. The rotary bending tests were carried out to obtain and compare the fatigue strengths of plasma ion nitrided specimens and gas nitride specimen. The 70 hr. gas nitrided specimen had the highest fatigue strength of 1.05$\times$$10^3$ MPa over the 40 hr., 70 hr. and 90 hr. plasma ion nitrided specimens, which had the fatigue strength of 3.48$\times$$10^2$, 4.57$\times$$10^2$ and 4.64$\times$$10^2$ respectively. Also, the microhardness tests were conducted to measure the effective case depths. The plasma ion nitrided specimens showed much higher surface hardness values than the gas nitrided specimen overall.