• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.184-184
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• 1999

반도체소자의 고집적, 미세화에 따라 MOSFET 소자에서의 고농도, 미세접합이 요구되고 있다. 이러한 고농도, 미세접합을 형성하기 위하여 기존의 저에너지 이온주입법을 대체 또는 병행할 목적으로 플라즈마 이온주입방법이 활발히 연구되고 있다. 본 연구에서는 플라즈마 이온주입방법을 이용하여 (100) 실리콘 기판에 보론을 주입후 열처리하여 형성된 p+층의 도펀트의 활성화와 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. 본 실험에서 (100)실리콘 기판에 도핑할 소스 가스로 BF3을 주입하고, D.C. pulse 플라즈마 도핑시스템을 사용하여 플라즈마 내의 보론이온을 웨이퍼 홀더에 -1~-5kV의 인가된 음전압에 의해 가속시키어 실리콘 웨이퍼에 주입하였다. 주입에너지 -1kV, -3kV, -5kV와 1$\times$1015, 3$\times$1515의 dose로 주입된 실리콘 기판을 급속가열방식(RTP)을 사용하여 $600^{\circ}C$~110$0^{\circ}C$의 온도구간에서 10초와 30초로 열처리하여 도펀트의 활성화와 미세접합을 형성한 후 SIMS, four-point probe, Hall 측정, 그리고 FT-IR을 이용하여 플라즈마 이온주입된 도펀트의 거동과 활성화율을 관찰하였고 FT-IR과 TEM의 분석을 통하여 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. SIMS, four-point probe, Hall 측정, 그리고 FT-IR의 분석으로 열처리 온도의 증가에 따라 도펀트의 활성화율이 증가하였고, 이온주입 에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose를 증가시키면 접합깊이가 증가함을 관찰하였다. 이온주입으로 인한 기판손상의 분석을 광학적 방법인 FT-IR과 미세구조를 분석할 수 있는 TEM을 이용하여 분석하였다. 이온주입으로 인한 dislocation이나 EOR(End Of Range)과 같은 extended defect가 없었고, 이온주입으로 인한 비정질층도 없는 p+층을 얻을수 있었다.

• Biotechnology and Bioprocess Engineering:BBE
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• 제6권6호
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• pp.402-409
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• 2001

Different bioligands carrying synthetic adsorbents have been reported in the literature for protein separation, We have developed a novel and new approach to obtain high protein ad-sorption capacity utilizing 2-methacrylamidohistidine(MAH) as a bioligand. MAH was synthe-sized by reacting methacrylocholride and histidine, Spherical beads with an average size of 150-200㎛ were obtained by the radical suspension polymerization of MAH and 2-hydrosyethyl-methacrylate(HEMA) conducted in an aqueous dispersion medium. p(HEMA-co-MAH) beads had a specific surface area of 17.6㎡/g . Synthesized MAH monomer was characterized by NMR. p(HEMA-co-MAH) beads were characterized by swelling test, FTIR and elemental analysis. Then Cu(II) ions were incorporated onto the beads and Cu(II) loading was found to be 0.96 mmol/g.These affinity beads with a swelling ration of 65% and containing, 1.6 mmol MAH/g were used in the adsorption/desorption of human serum albumin(HSA) from both aqueous solutions and hu-man serum. The adsorption of HSA onto p(HEM-co-MAH) was low(8.8 mg/g). Cu(II) chelation onto the beads significantly increased the HSA adsorption (56.3 mg/g). The maximum HSA ad-sorption ws observed at pH 8.0 Higher HSA adsorption was observed from human plasma(94.6 mgHSA/g) Adsorption of other serum proteins were obtained as 3.7 mg/g for fibrinogen and 8.5mg/g for γ-globulin. The total protein adsorption was determined as 107.1mg/g. Desorption of HSA was obtained using 0.1 M Tris/HCl buffer containing 0.5 M NaSCN, High desorption rations(up to 98% of the adsorbed HSA) were observed. It was possible to reuse Cu(II) chelated-p(HEMA-co-MAH) beads without significant decreases in the adsorption capacities.

• Journal of Astronomy and Space Sciences
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• 제30권4호
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• pp.335-344
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• 2013

TRiplet Ionospheric Observatory-CubeSat for Ion, Neutron, Electron & MAgnetic fields (TRIO-CINEMA) is a CubeSat with 3.14 kg in weight and 3-U ($10{\times}10{\times}30$ cm) in size, jointly developed by Kyung Hee University and UC Berkeley to measure magnetic fields of near Earth space and detect plasma particles. When a satellite is launched into orbit, it encounters ultra-high vacuum and extreme temperature. To verify the operation and survivability of the satellite in such an extreme space environment, experimental tests are conducted on the ground using thermal vacuum chamber. This paper describes the temperature control device and monitoring system suitable for CubeSat test environment using the thermal vacuum chamber of the School of Space Research, Kyung Hee University. To build the chamber, we use a general purpose thermal analysis program and NX 6.0 TMG program. We carry out thermal vacuum tests on the two flight models developed by Kyung Hee University based on the thermal model of the TRIO-CINEMA satellite. It is expected from this experiment that proper operation of the satellite in the space environment will be achieved.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.141-141
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• 2010

The effect of thermal anneal on the characteristics of structural properties and the enhancement of luminescence and photovoltaic (PV) characteristics of silicon-rich silicon-nitride films were investigated. By using an ultra high vacuum ion beam sputtering deposition, B-doped silicon-rich silicon-nitride (SRSN) thin films, with excess silicon content of 15 at. %, on P-doped (n-type) Si substrate was fabricated, sputtering a highly B doped Si wafer with a BN chip by N plasma. In order to examine the influence of thermal anneal, films were then annealed at different temperature up to $1100^{\circ}C$ under $N_2$ environment. Raman, X-ray diffraction, and X-ray photoemission spectroscopy did not show any reliable evidence of amorphous or crystalline Si clusters allowing us concluding that nearly no Si nano-cluster could be formed through the precipitation of excess Si from SRSN matrix during thermal anneal. Instead, results of Fourier transform infrared and X-ray photoemission spectroscopy clearly indicated that defective, amorphous Si-N matrix of films was changed to be well-ordered thanks to high temperature anneal. The measurement of spectral ellipsometry in UV-visible range was carried out and we found that the optical absorption edge of film was shifted to higher energy as the anneal temperature increased as the results of thermal anneal induced formation of $Si_3N_4$-like matrix. These are consistent with the observation that higher visible photoluminescence, which is likely due to the presence of Si-N bonds, from anneals at higher temperature. Based on these films, PV cells were fabricated by the formation of front/back metal electrodes. For all cells, typical I-V characteristic of p-n diode junction was observed. We also tried to measure PV properties using a solar-simulator and confirmed successful operation of PV devices. Carrier transport mechanism depending on anneal temperature and the implication of PV cells based on SRSN films were also discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.397-397
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• 2010

Bone is considered as hierarchically organized biocomposites of organic (collagen) and inorganic (hydroxyapatite) materials. The precise structural dependence between hydroxyapatite (HAp, $Ca_{10}(PO_4)_6(OH)_2)$ crystals and collagen fibril is critical to unique characteristics of bone. To meet those conditions and obtain optimal properties, it is essential to understand and control the initial growth mechanisms of hydroxyapatite at the molecular level, such as other nano-structured materials. In this study, collagen fibrils were prepared by adsorbing native type I collagen molecules onto hydrophobic surface. Hydrophobicity was introduced on the Si wafer surface by using PECVD (plasma enhanced chemical vapor deposition) method and cyclohexane as a precursor. Biomimetic nucleation and growth of HAp on the self-assembled collagen nanofibrils were occurred through incubation of the sample in SBF (simulated body fluid). Chemical and morphological evolution of HAp nanocrystals was investigated by surface-sensitive analytical techniques such as ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) and AFM (Atomic Force Microscopy) in the early growth stages (< 24 hrs). The very initial stages (< 12 hrs) of mineralization could be clearly demonstrated by ToF-SIMS chemical mapping of surface. In addition to ToF-SIMS and AFM measurement, scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis were conducted to characterize the HAp layer in the late stages. This study is of great importance in the growth of real bone-like materials with a structure analogous to that of natural bones and the development of biomimetic nanomaterials.

• Molecules and Cells
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• 제37권3호
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• pp.257-263
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• 2014

A mammalian cell renovates itself by autophagy, a process through which cellular components are recycled to produce energy and maintain homeostasis. Recently, the abundance of gap junction proteins was shown to be regulated by autophagy during starvation conditions, suggesting that transmembrane proteins are also regulated by autophagy. Transient receptor potential vanilloid type 1 (TRPV1), an ion channel localized to the plasma membrane and endoplasmic reticulum (ER), is a sensory transducer that is activated by a wide variety of exogenous and endogenous physical and chemical stimuli. Intriguingly, the abundance of cellular TRPV1 can change dynamically under pathological conditions. However, the mechanisms by which the protein levels of TRPV1 are regulated have not yet been explored. Therefore, we investigated the mechanisms of TRPV1 recycling using HeLa cells constitutively expressing TRPV1. Endogenous TRPV1 was degraded in starvation conditions; this degradation was blocked by chloroquine (CLQ), 3MA, or downregulation of Atg7. Interestingly, a glucocorticoid (cortisol) was capable of inducing autophagy in HeLa cells. Cortisol increased cellular conversion of LC3-I to LC-3II, leading autophagy and resulting in TRPV1 degradation, which was similarly inhibited by treatment with CLQ, 3MA, or downregulation of Atg7. Furthermore, cortisol treatment induced the colocalization of GFP-LC3 with endogenous TRPV1. Cumulatively, these observations provide evidence that degradation of TRPV1 is mediated by autophagy, and that this pathway can be enhanced by cortisol.

• 공업화학
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• 제16권6호
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• pp.853-856
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• 2005

자성 메모리반도체의 핵심 소자인 magnetic tunnel junction (MTJ) stack에 대한 고밀도 유도결합 플라즈마 반응성 식각이 연구되었다. MTJ stack은 electron(e)-beam lithography 공정을 사용하여 나노미터 크기의 패턴 형성이 되었으며 식각을 위한 하드 마스크(hard mask)로서 TiN 박막이 이용되었다. TiN 박막은 Ar, $Cl_2/Ar$, 그리고 $SF_6/Ar$들의 가스를 사용하여 식각공정이 연구되었다. E-beam lithography로 패턴된 TiN/MTJ stack은 첫 번째 단계로 TiN 하드 마스크가 식각되고 두 번째로 MTJ stack이 식각되어 완성되었다. MTJ stack은 Ar, $Cl_2/Ar$, $BCl_3/Ar$을 이용하여 식각되었으며 각각의 가스농도와 가스 압력을 변화시켜 MTJ stack의 식각특성이 조사되었다.

• 공업화학
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• 제27권2호
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• pp.165-170
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• 2016

본 연구에서는, 실제 $150000Nm^3/hr$ 규모의 연소로에서 운전된 $VO_x/TiO_2$ SCR 촉매의 활성저하 원인을 규명하고자 XRD, BET, AES ICP, $H_2$-TPR, $NH_3$-TPD 분석을 수행하였다. $TiO_2$의 상전이 및 $VO_x$의 결정화가 발생하지 않았기 때문에 열에 의한 촉매의 활성저하는 없는 것으로 나타났다. 반면, 성분 분석결과 S의 함량이 검출되지 않고 Ca이 다량 검출됨에 따라 $SO_2$에 의한 피독이 아닌 Ca에 의한 피독이 발생하였음을 확인하였으며 이러한 Ca의 피독은 $NH_3$의 흡착량을 감소시켜 반응활성을 감소시키는 것으로 나타났다.

• 한국염색가공학회지
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• 제11권3호
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• pp.15-22
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• 1999

This study investigated the mordanting effect of natural mordants such as camellia ash, bean chaff ash and pyrolignite of iron(Iron(II) Acetate) on silk fabrics dyed with green tea extracts. Experimental variables include the conditions of extraction and dyeing, and types of natural mordants. Inorganic ion contents In natural mordants were analysed by Induced Coupled Plasma Atomic Emission Spectrometer. In the ash Al, Fe, Si and Mn were in % unit, Cr and Ni were detected in ppm unit, and in the aqueous extracts of the ash all the metal ions were in ppm unit. On the other hand, fairly high content of Al(2.13% ) in camellia ash extract and Fe(7.91% ) in the aqueous extracts of pyrolignite iron were detected. The absorbance intensity of green tea extracts in UV-Visible spectrum increased with the temperature and time of extraction. The maximum absorption wavelength of the extracts appeared at 272.5nm and 210.5nm. The US values of silk fabrics dyed with green tea extracts were increased with temperature and time of dyeing. Surface color of silk fabric dyed with green tea extracts was 9.1YR, but it was changed from 7.9YR to 7.5YR by camellia ash extract and 7.4YR to 6.4YR by bean chaff ash extract with increase in mordant concentration. Pre-mordanted and post-mordanted fabrics with pyrolignite of iron were changed from 1.4YR to 1.1R and 7.2P to 4.2P, respectively.

• 한국표면공학회지
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• 제32권3호
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• pp.312-316
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• 1999

The interfacial structure of duplex treated AISI 4140 consisting of iron nitride and TiN layer was characterized by optical microscope, SEM and XRD. A black layer was formed from the decomposition of iron nitride during Ti ion bombardment. The black layer was characterized as an a-Fe phase transformed from the iron nitride by XRD. In order to identify the formation mechanism of the black layer, a thermal analysis of iron nitride undertaken by DSC method. As an iron nitride was mostly consisted of ${\gamma}$'-Fe$_4$N and $\varepsilon$-$Fe_3$N phase after plasma nitriding, in this study, a ${\gamma}$'$-Fe_4$N and $\varepsilon$-$Fe_3$N powders were separately prepared by the different processing conditions of gas nitriding of iron powder in the fluidized bed. From the DSC thermal analysis, the phase transformation of ${\gamma}$'$-Fe_4$N, $\varepsilon$-$Fe_3$N was followed the path of transformation; $ \Upsilon{'}-Fe_4$Nlongrightarrow${\gamma}$-Felongrightarrowa-Fe and of $\varepsilon$-$Fe_3$Nlongrightarrow$\varepsilon$-$Fe_{2.5}$ /N+${\gamma}$'$-Fe_4$Nlongrightarrow${\gamma}$'-Fe$_4$Nlongrightarrow${\gamma}$longrightarrowFelongrightarrowalongrightarrowFe, respectively. It explains the reason why the $\varepsilon$ $-Fe_3$N phase disappeared in the first time and then ${\gamma}$'-Fe$_4$N in the formation of the black layer in the duplex coating.