• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.19 no.4
• /
• pp.1-8
• /
• 2005

Plasma researches using parallel-plate electrodes are widely used in semiconductor application such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56(MHz)). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a do self-bias voltage were also discussed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.204-204
• /
• 1999

The plasma source ion implantation(PSII) technique which is a method using high negative voltage pulse in plasma system has the potential to change the surface properties of polymer. PSII technique increase the surface free energy by introducing polar functional groups on the surface so that it improves reactivity, hydrophilicity, adhension, biocompatability, etc. However, the mobility of polymer chains enables the modified surface layers to adapt their composition to interfacial force. This hydrophobic recovery interrupts the stability of modified surfaces to keep for the long time. In this study, poly(methyl methacrylate)(PMMA), poly(2-hydroxyethyl methacrylate)(PHEMA), and polu(2-hydroxypropyl methacylate)(PHPMA) for contact lens application, were modified to improve the wettability with PSII technique and were investigated the surface stabilities. Polymer film was prepared with solution casting(3 wt.% solution) and was annealed at 11$0^{\circ}C$ under vacuum oven to remove solvent completely and to eliminate physical ageing. The thickness of the film measured by scanning electron microscopy (SEM) and surface profilometer was about 10${\mu}{\textrm}{m}$. Polymers were treated with different kinds of gases, pulse frequency, pulse with, pulse voltage, and treatment time. Even though PMMA, PHEMA, and PHPMA have similar repeat unit structure, the optimal treatment conditions and the tendency to hydrophobic recovery were different. PHPMA, more hydrophilic polymer than PMMA and PHEMA showd better wettability and stability after mild treatment. Surface tensions were obtained by water and diiodomethane contact angle measurements to monitor the relation between hydrophobic recovery and polymer structure. Different ion species in plasma change the polar component and dispersion component of polymer surface. For better wettability surface, the increase of polar component was a dominant factor. We also characterized modified polymer surfaces using x-ray photoelectron spectroscopy(XPS), secondary ion mass spectrometry(SIMS), Fourier Transform infrared spectroscopy(FT-IR), and SEM.

• Journal of Nutrition and Health
• /
• v.32 no.1
• /
• pp.17-23
• /
• 1999

The purpose of this study was to determine the extent of oxidative stress in NIDDM patients with diabetic complications and to determine the relationship between oxidative stress and diabetic complications. For this study, 139 NIDDM patients were recruited, 85 with diabetic complications and 54 without complications were recruited. The concentration of malondialdehyde(MDA) and the activities of antioxidant enzymes including catalase, superoxide dismutase(SOD), gluthatione peroxidase(GSH-Px)were determined. The daily intakes and plasma concentrations of beta-carotene, lycopene, lutein nd alpha-tocopherol were determined by food frequency questionnaire and by high performance liquid chromatography(HPLC), respectively. Among the antioxidant enzymes studied, only GSH-Px activity was lower in NIDDM patient, with diabetic complications than in those without complications(2.91$\pm$0.80 vs 3.54$\pm$0.44 U/mgHb, p<0.05). Those NIDDM patients with diabetic complications had higher MDA concentrations than those without diabetic complications(1.40$\pm$0.25 vs 1.25$\pm$0.11 nmol/ml, p<0.05). There were no significant differences in the dietary intakes of total carotenoids(2854 vs 2824ug/day)or vitamin E (9.5$\pm$3.2 vs 9.5$\pm$2.0mg/day)between NIDDA patients with and without complications. However, the plasma concentrations of beta-carotene and lycopene were significantly lower in NIDDM patients with complications than in NIDDM patients without complications (Beta-carotene : 24.2$\pm$12.5 vs 33.1$\pm$16.2(ug/dl), lycopene : 2.8$\pm$2.1 vs 4.3$\pm$2.8(ug/dl)). This study showed that in NIDDM patients with complications, the lipid peroxidation of erythrocytes was higher increased and the antioxidant reserves were significantly dipleted, compared with NIDDM patients without complications. The lower plasma concentrations of beta-carotene and lycopene in NIDDM patients may be due to the presence of diabetic complication, not due to the lower dietary intakes of antioxidant vitamins. To define the role of carotenoids in diabetes, more experimental and clinical studies are needed.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.17 no.6
• /
• pp.580-588
• /
• 1992

Plasma-spraying was conducted to produced the microwave absorbing surface films on the alumi-num-alloy used for the fuselage to protect the aircraft against the RADAR detction. The surface films were produced by plasma-splaying the mecharucally mixed composite powders of the silicon carblde and Ni-Zn ferrite. This M /W absorbers were designed experimentally and fabricated trialty, as a result of which the rolative frequency bandwidth of 7.6 to 8.4% were obtained under the tolerance limits of the re-flection coefficients lower than -6dB(absorption ratio 75%), and the maximum absorption thickness becomes 0.5 to 0.5.imm, which Is much thinner than that of the conventional ones.

• Journal of Powder Materials
• /
• v.20 no.6
• /
• pp.467-473
• /
• 2013

This research presents a preparation method of dental components by metal injection molding process (MIM process) using titanium scrap. About $20{\mu}m$ sized spherical titanium powders for MIM process were successfully prepared by a novel dehydrogenation and spheroidization method using in-situ radio frequency thermal plasma treatment. The effects of MIM process parameters on the mechanical and biological properties of dental components were investigated and the optimum condition was obtained. After sintering at $1250^{\circ}C$ for 1 hour in vacuum, the hardness and the tensile strength of MIMed titanium components were 289 Hv and 584 MPa, respectively. Prepared titanium dental components were not cytotoxic and they showed a good cell proliferation property.

• Textile Coloration and Finishing
• /
• v.6 no.3
• /
• pp.27-36
• /
• 1994

In order to produce a water repellent surface on polyester fabric, samples were treated in the atmosphere of $CF_4$ glow discharge plasma. The samples used in the study were ployester fabric and poyester film. The purpose of film treatment is for the comparison of hydrophobicity with fabric sample at same treatment condition. Radio frequency(13.56MHz) generator was used as electric source and its in put power is 100 Watt. Water repellency was evaluated by contact angle measurement. Result obtained are as follows. 1) Fiber interstice of original fabric was ana lysed as 0.43$\mu$m, and this value was sufficiently ideal for making water repellent fabric. 2) The most favorable setting position of substrate was the center area between two electrodes. 3) Fabric contact angle was higher than film contact angle at same treatment condition, and its difference was more than 50${\circ}$. And it was incapalbe of fabric contact angle measurement when the film contact angle was less than 90${\circ}$. because the fabric is susceptible to absorption of water by the capillary effect. 4) Fabric contact angle can not revealed the precise defferences of surface hydrophobicity, however, the film contact angle showed the real hydrophobic nature. 5) It was not sufficient method to evaluate the hydrophobicity of fabric surface by merely measure of the water contact angle. 6) It showed high water repellent nature at 0.06 torr of $CF_4$ plasma gas pressure and duration of 45 seconds treatment, and it can not be anticipated more improved nature if the pressure and duration of treatment time were increased.

• Journal of the Korean Vacuum Society
• /
• v.7 no.s1
• /
• pp.85-99
• /
• 1998

A ultrahigh vacuum chemical vapor deposition(UHVCVD)/metalorganic chemical vapor deposition(MOMBE) system equipped with a radio frequency(RF)-plasma cell was employed to grow GaN layer on the sapphire at a low temperature. The x-ray photoelectron spectroscopy analysis of nitrogen composition on the nitridated sapphite surface indicated that a nitridation process is mostly affected by the RF power at low temperature. Atomic force microscope images of nitridated surface the protrusion density on the nitridated sapphire is dependent on the nitridation temperature. The crystallinity of GaN grown at $450^{\circ}C$ was found to be much improved when the sapphire was nitridated at low temperature prior to the GaN layer growth. Moreover, a strong photoluminescence spectrum of GaN grown by UHVCVD/MOMBE with a rf-nitrogen plasma was observed for the first time at room temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.11a
• /
• pp.459-459
• /
• 2007

VHF ICP (Very High Frequency Inductively Coupled Plasma) 반응기에서 반응기 압력, 수증기 유량, 플라즈마 출력, 반응기온도 등의 공정변수에 따른 수증기 분해특성과 수소생성거동을 실험하였다. 플라즈마 분해 특성은 OES(Optical Emission Spectroscopy)를 사용하여 분석하였으며, QMS(Quadrapole Mass Spectroscopy)를 이용하여 배기가스 성분을 분석하여, 수증기 분해거동 및 수소생성 효율을 조사하였다. 본 연구실에서 설계한 초고주파 유도결합 플라즈마는 고밀도 플라즈마 생성과 낮은 압력에서도 안정된 플라즈마 발생 특징을 나타내었다. 플라즈마 출력의 증가에 따른 수증기의 분해와 수소생성 거동은 개시영역, 선형증가영역, 포화영역의 세 영역으로 구분되는 특징을 나타내었다. 유량 및 압력의 증가에 따라 포화에 필요한 플라즈마의 출력이 증가되는 경향을 나타내었다. 본 실험의 온도범위에서는 온도 증가에 따른 수증기 분해 및 수소생성 증가효과는 플라즈마 출력의 영향에 비하여 매우 미미한 정도로 플라즈마의 높은 에너지 전달효과를 확인할 수 있었다. 따라서, 낮은 반응기 온도에서도, 유량 및 압력에 따른 포화 플라즈마조건을 설정할 경우, 높은 에너지 효율의 수소 제조가 가능함을 알 수 있었으며, 물분해 플라즈마를 이용한 저온 산화물 박막증착에의 적용도 기대된다.

• Korean Journal of Materials Research
• /
• v.27 no.6
• /
• pp.295-300
• /
• 2017

Aluminum-oxide($Al_2O_3$) thin films were deposited by electron cyclotron resonance plasma-enhanced atomic layer deposition at room temperature using trimethylaluminum(TMA) as the Al source and $O_2$ plasma as the oxidant. In order to compare our results with those obtained using the conventional thermal ALD method, $Al_2O_3$ films were also deposited with TMA and $H_2O$ as reactants at $280^{\circ}C$. The chemical composition and microstructure of the as-deposited $Al_2O_3$ films were characterized by X-ray diffraction(XRD), X-ray photo-electric spectroscopy(XPS), atomic force microscopy(AFM) and transmission electron microscopy(TEM). Optical properties of the $Al_2O_3$ films were characterized using UV-vis and ellipsometry measurements. Electrical properties were characterized by capacitance-frequency and current-voltage measurements. Using the ECR method, a growth rate of 0.18 nm/cycle was achieved, which is much higher than the growth rate of 0.14 nm/cycle obtained using thermal ALD. Excellent dielectric and insulating properties were demonstrated for both $Al_2O_3$ films.

• Polymer(Korea)
• /
• v.28 no.3
• /
• pp.218-224
• /
• 2004

The adhesion and proliferation of mammalian cells on polymeric biomaterials depend on the surface characteristics such as wettability, chemistry, charge and roughness. In order to recognize the correlation between the adhesion and proliferation of human bone marrow derived stem cells (BMSCs) and surface property, radio frequency generated plasma treatment on low density polyethylene (LDPE) has been carried out. The modified LDPE surfaces were characterized by measuring the static water contact angle. The adhesion and proliferation of cells on LDPE films were characterized by cell counting and reverse transcription-polymerase chain reaction (RT-PCR). The water contact angle of the film surface decreased with plasma treatment time. Proto-oncogenes (c-myc, c-fos) and tumor suppressor gene (p153) showed maximum expression with contact angle of 60 ∼ 70$^{\circ}$ range of LDPE film. By cell counting, we confirmed that the rate of cell proliferation appeared the higher on the film surface of the contact angle of 60∼70$^{\circ}$ We concluded that the surface wettability is an important role for the growth and differentiation of BMSCs.