• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.142-142
• /
• 2011

Microwave diagnostics method for plasma science and engineering is vigorous research area for its good characteristics such as high sensitivity, reliability, and broad measurement spectrum from low density plasma to high density. We investigate mechanism of microwave probes (hairpin, impedance and absorbtionf probe) and apply it for interpretation of full transmitted spectrum of cutoff probe. Mechanism of the spectrum having same key roles of I-V curve of Langmuir probe is not exactly revealed yet in spite of its importance. This study elucidates physics behind it using a circuit model and E/M wave simulation. Circuit model reveals exact cut-off peak frequency taking account of a collision frequency and a plasma frequency and it enable precise diagnostics of plasma densty from low pressure to high pressre. Cut-off like peaks have been obstacle for choosing cut-off peak is analyzed by E/M simulation and one of cutoff like peaks made by probe holder used for acquire plasma density with cutoff peak applying the hairpin relation. Furthermore, phase difference method for plasma density is conducted. This method uses a single microwave frequency source and it is low-priced.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.18 no.5
• /
• pp.146-150
• /
• 2004

The effects on non-thermal plasma generation by duty Ratio and frequency of pulse voltage were investigated experimentally. For these, a new type of non-thermal plasma generator with mesh electrode was manufactured and it was possible to generate the surface and silent discharge simultaneously by new type of non-thermal plasma generator. Duty ratio and frequency were selected as main parameters to control the movement of electron which is mainly related to the non-thermal plasma generation. The characteristics of non-thermal plasma generation were investigated indirectly by measuring the I-V curve and quantity of ozone generation. The most effective condition of duty ratio and frequency to generate the non-thermal plasma was identified by experiments with manufactured non-thermal plasma generator.

• The Transactions of the Korean Institute of Electrical Engineers
• /
• v.36 no.1
• /
• pp.29-35
• /
• 1987

TPolystyrene thin films are prepared by glow discharge of sytrene monomer vapor th establish the growth mechanism of organic thin films by the plasma polymerization. As the discharge parameters, discharge current(5mA-20mA), frequency (10kHz-50kHz, 13.56MHz), gaspressure (0.2torr-1.5torr), and discharge time(2min-12min)are adopted. Plasma-polymerized filmsof styrene vapor are identified as polystyrene by IR spectra. The thickness of plasma-polymerized films increases with gas pressure, frequency and discharge current in the region of the low frequency and below the allowed gas pressure where the polymerization occurs. It is suggested that the growth mechanism can be explained by ionic reaction in d.c. and low frequency region, and by radical reaction in high frequency region.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.53 no.2
• /
• pp.79-82
• /
• 2004

The RF inductive discharge or inductively coupled plasma (ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technicology. Although most practical ICP operate at 13.56 [MHz]and 2.65 [MHz], the trend to reduce the operating frequency is clearly recognizable from recent ICP developments. In an electrodeless fluorescent lamp, the use of a lower operating frequency simplifies and reduces cost of rf matching systems and rf generators and can eliminate capacitive coupling between the inductor coil and plasma, which could be a strong factor in wall erosion and plasma contamination. In this study, the configuration of ferrite and fixture which operates at the frequency of 2.65[MHz]was discussed as functions of the ferrite thickness and distance by using the electromagnetic simulation software (Maxwell 2D).

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.57 no.4
• /
• pp.648-652
• /
• 2008

Corona discharge and ozone generation characteristics of a wire-plate plasma reactor, with a biased third electrode, have been investigated with an emphasis on the role of the bias voltage and frequency applied on the third electrode. It was found that the wire-plate plasma reactor, with the biased third electrode, had a switching characteristic on its I-V characteristics for negative and positive discharges, which is very different from that of a conventional wire-plate plasma reactor without the third electrode. As a result, the corona discharge and ozone generation characteristics of the proposed plasma reactor could be controlled by adjusting the bias voltage and frequency of the third electrode. The corona onset and breakdown voltages, and ozone generation and yield, were increased compared with those of without the third electrode. These, however, reveal the effectiveness of the biased third electrode.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2004.08a
• /
• pp.78-78
• /
• 2004

• Journal of electromagnetic engineering and science
• /
• v.17 no.3
• /
• pp.153-158
• /
• 2017

This work reports on the effect of plasma area on the frequency characteristics of the monostatic radar cross section (RCS) of a square metallic plate. A dielectric barrier discharge (DBD) plasma actuator consisting of 10 rings is proposed. The actuator is fabricated in three different configurations such that only three inner rings, seven inner rings, and all rings can be biased. By applying an 18-kV bias at 1 kHz, the three types of DBD actuators generate plasma with a total area of 16.96, 36.74, and $53.69cm^2$, respectively, in a ring or circular form. The experimental results reveal that when the DBD actuator is placed in front of a $20mm{\times}20cm$ conducting plate, the monostatic RCS is reduced by as much as 18.5 dB in the range of 9.41-11.65 GHz. Furthermore, by generating the plasma and changing the area, the frequency of maximum reduction in the monostatic RCS of the plate can be controlled. The frequency is reduced by nearly 20% in the X band when all rings are biased. Finally, an electromagnetic model of the plasma is obtained by comparing the experimental and full-wave simulated results.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.268-268
• /
• 2012

Atmospheric pressure microwave induced plasmas are used to excite and ionize chemical species for elemental analysis, for plasma reforming, and for plasma surface treatment. Microwave plasma differs significantly from other plasmas and has several interesting properties. For example, the electron density is higher in microwave plasma than in radio-frequency (RF) or direct current (DC) plasma. Several types of radical species with high density are generated under high electron density, so the reactivity of microwave plasma is expected to be very high [1]. Therefore, useful applications of atmospheric pressure microwave plasmas are expected. The surface characteristics of SUS304 stainless steel are investigated before and after surface modification by microwave plasma under atmospheric pressure conditions. The plasma device was operated by power sources with microwave frequency. We used a device based on a coaxial transmission line resonator (CTLR). The atmospheric pressure plasma jet (APPJ) in the case of microwave frequency (880 MHz) used Ar as plasma gas [2]. Typical microwave Pw was 3-10 W. To determine the optimal processing conditions, the surface treatment experiments were performed using various values of Pw (3-10 W), treatment time (5-120 s), and ratios of mixture gas (hydrogen peroxide). Torch-to-sample distance was fixed at the plasma edge point. Plasma treatment of a stainless steel plate significantly affected the wettability, contact angle (CA), and free energy (mJ/$m^2$) of the SUS304 surface. CA and ${\gamma}$ were analyzed. The optimal surface modification parameters to modify were a power of 10 W, a treatment time of 45 s, and a hydrogen peroxide content of 0.6 wt% [3]. Under these processing conditions, a CA of just $9.8^{\circ}$ was obtained. As CA decreased, wettability increased; i.e. the surface changed from hydrophobic to hydrophilic. From these results, 10 W power and 45 s treatment time are the best values to minimize CA and maximize ${\gamma}$.

• Food Science of Animal Resources
• /
• v.33 no.3
• /
• pp.317-324
• /
• 2013

Radio-frequency driven atmospheric pressure plasma using argon gas was studied in the inactivation of Campylobacter jejuni in order to investigate its applicability. First, the inactivation study was conducted on an agar surface. C. jejuni NCTC11168 was reduced by more than 7 Log CFU after an 88 s treatment. Another strain, ATCC49943, was studied; however, the inactivation was less efficient, with a 5 Log CFU reduction after a 2 min treatment. Then, chicken breast ham was studied at the $10^6$ CFU inoculation level. The inactivation efficiency was much lower for both strains compared to that on the agar plates. C. jejuni NCTC11168 and ATCC49943 were reduced by 3 Log CFU after a 6 min treatment and by 1.5 Log CFU after a 10 min treatment, respectively. The scanning electron microscopy analysis indicated that C. jejuni cells were deformed or transformed into coccoid form under the plasma treatment. During the plasma treatment, the temperature of the samples did not rise above $43^{\circ}C$, suggesting that heat did not contribute to the inactivation. Meanwhile, water activity significantly decreased after a 10 min treatment (p<0.05). This study conveyed that radio-frequency atmospheric pressure plasma can effectively inactivate C. jejuni with strain-specific variation.

• Journal of Powder Materials
• /
• v.28 no.2
• /
• pp.97-102
• /
• 2021

Powder quality, including high flowability and spherical shape, determines the properties of additively manufactured products. Therefore, the cheap production of high-quality powders is critical in additive manufacturing. Radio frequency plasma treatment is an effective method to fabricate spherical powders by melting the surface of irregularly shaped powders; in the present work, mechanically milled Zr powders are spheroidized by radio frequency plasma treatment and their properties are compared with those of commercial Zircaloy-2 alloy powder. Spherical Zr particles are successfully fabricated by plasma treatment, although their flowability and impurity contents are poorer than those of the commercial Zircaloy-2 alloy powder. This result shows that radio-frequency plasma treatment with mechanically milled powders requires further research and development for manufacturing low-cost powders for additive manufacturing.