• 한국환경과학회지
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• 제30권5호
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• pp.399-406
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• 2021

The dissolution of ionized gas in dielectric barrier plasma, similar to the principle of ozone generation, is a major performance-affecting factor. In this study, the plasma gas dissolving performance of a gas mixing-circulation plasma process was evaluated using an experimental design methodology. The plasma reaction is a function of four parameters [electric current (X₁), gas flow rate (X₂), liquid flow rate (X₃) and reaction time (X₄)] modeled by the Box-Behnken design. RNO (N, N-Dimethyl-4-nitrosoaniline), an indictor of OH radical formation, was evaluated using a quadratic response surface model. The model prediction equation derived for RNO degradation was shown as a second-order polynomial. By pooling the terms with poor explanatory power as error terms and performing ANOVA, results showed high significance, with an adjusted R² value of 0.9386; this indicate that the model adequately satisfies the polynomial fit. For the RNO degradation, the measured value and the predicted values by the model equation agreed relatively well. The optimum current, gas flow rate, liquid flow rate and reaction time were obtained for the highest desirability for RNO degradation at 0.21 A, 2.65 L/min, 0.75 L/min and 6.5 min, respectively.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.585-589
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• 2008

This study is performed to analyze the fluid flow about 150mm shower heads of semiconductor device. Under the air pressure, the ideal gas of moving fluid is injected as 5m/s velocity into inlet of shower heads and the flow distribution in shower heads is measured according to pitch of plasma distribution device. As results, the maximum and minimum value of fluid velocity are investigated with their position. The velocity values at outlet are also studied. From two experiment using the plasma distribution device, the results of CFD are compared with the experimental results. That results shows stable flow of fluid in that case of corrected design from CFD.

• Journal of Astronomy and Space Sciences
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• 제17권2호
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• pp.141-146
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• 2000

Some observational features on the July 5, 1995 substorm event are presented using the data from the Geotail satellite which was located at near-Earth plasma sheet, ${X}_{GSE}$ ∼ $-9.6R_{E}$, and quite close to the onset sector. Near-tail magnetic field reveals the typical dipolarizations starting ar ∼ 11-4 UT until ∼ 1113 UT. During the interval, two dipolarizations occur: First dipolarization is not strong and accompanies only weak(<150km/s) earthward/dawnward plasma flows, and in the second dipolarization that follows shortly, rather large amplitude magnetic fluctuations are seen, but it initiates with no significant earthward flow. The earthward bursty flow with a maximum speed of > 450km/s was observed, but delayed by ∼ 1 min with respect to the second dipolarization initiation. These features are in conflict with the flow-braking scenario for the substorm. Rather they fit better in the near-tail current disruption scenario.

• 동력기계공학회지
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• 제11권2호
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• pp.64-71
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• 2007

The main purpose of this study is to analyze the characteristics of toluene removal by plasma, photocatalyst, and plasma/photocatalyst system with the major parameters such as flow rate, inlet toluene concentration and applied voltage, etc., experimentally. In the combined plasma/photocatalyst process, rates of toluene conversion are represented as 99% at flow rate 250, 500 mL/min while, below 97% at flow rate 1000 mL/min due to the low residence time(reaction time) at the same applied voltage 4173 voltage and toluene inlet concentration 50 ppm. The intermediate products are detected by GC/MS analysis showing the small amounts of benzoic acid, benzyl alcohol and residual ozone concentration $0.04{\sim}0.05$ ppm generated by plasma process in the present system.

• Nuclear Engineering and Technology
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• 제44권1호
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• pp.21-32
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• 2012

Fluorinated compounds mainly used in the semiconductor industry are potent greenhouse gases. Recently, thermal plasma gas scrubbers have been gradually replacing conventional burn-wet type gas scrubbers which are based on the combustion of fossil fuels because high conversion efficiency and control of byproduct generation are achievable in chemically reactive high temperature thermal plasma. Chemical equilibrium composition at high temperature and numerical analysis on a complex thermal flow in the thermal plasma decomposition system are used to predict the process of thermal decomposition of fluorinated gas. In order to increase economic feasibility of the thermal plasma decomposition process, increase of thermal efficiency of the plasma torch and enhancement of gas mixing between the thermal plasma jet and waste gas are discussed. In addition, noble thermal plasma systems to be applied in the thermal plasma gas treatment are introduced in the present paper.

• 한국추진공학회지
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• 제22권5호
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• pp.115-124
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• 2018

전북대학교 고온플라즈마응용연구센터에서는 지구 재진입 및 고온재료의 열부하 평가를 위해 0.4 MW 급 아크가열플라즈마 풍동을 이용한 내열재료의 삭마 거동 등을 연구해 오고 있다. 아크가열 플라즈마 풍동은 고엔탈피 플라즈마를 발생시켜 다양한 고열부하의 극한 환경을 만들어 낸다. 이를 위해서는 플라즈마 토치내에 공기유량과 입력전류 등을 조절하여 다양한 열유속을 형성한다. 본 연구는 0.4 MW 아크가열 플라즈마 풍동의 다양한 방전 특성에 대해 조사하였다.

• 대한전기학회논문지
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• 제39권11호
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• pp.1219-1226
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• 1990

This paper is to report the results on the design and construction of a thermal plasma generator with high current DC source. Also, this paper presents the methods to stabilize plasma and to find effects of process variables on plasma characteristics. For this purpose, the reaction chamber, vacuum system, plasma generating torch, magnetic field generating coil with power supply, high current DC source and the other parts have been designed. Fundamental properties of the thermal plasma under various conditions have been measured and analyzed. Magnetic Reynolds Number has been introduced to explain the relationship between plasma and external magnetic field. Through this number, the effect of magnetic field on the plasma has been explained under various flow rates and pressure. A sudden increase in the plasma voltage has been observed with the increase of magnetic field. From this, fundamental changes in plasma flow are believed to occur at the nozzle, and an effort to explain the phenomenon has been tried.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.78-79
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• 2007

In this study, chemical dry characteristics of silicon nitride layers were investigated in the $F_2/N_2/Ar$ remote plasma. A toroidal-type remote plasma source was used for the generation of remote plasmas. The effects of additive $N_2$ gas on the etch rates of various silicon nitride layers deposited using different deposition techniques and precursors were investigated by varying the various process parameters, such as the $F_2$ flow rate, the addition $N_2$ flow rate and the substrate temperature. The etch rates of the various silicon nitride layers at the room temperature were initially increased and then decreased with the $N_2$ flow increased, which indicates an existence of the maximum etch rates. The etch rates of the silicon oxide layers were also significantly increased with the substrate temperature increased. In the present experiments the $F_2$ gas flow, addition $N_2$ flow rate and the substrate temperature were found to be the critical parameters in determining the etch rate of the silicon nitride layers

• 한국대기환경학회지
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• 제26권6호
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• pp.624-632
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• 2010

Perfluorocarbons (PFCs) are widely used in semiconductor industry. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetimes which cause the global warming effect. To destruct $CF_4$, a waterjet gliding arc plasma was designed and manufactured. The highest $CF_4$ destruction showed at waterjet plasma case, compared to plasma discharge only or water scrubber only, respectively. In addition, it could be known that the $CF_4$ destruction should be associated with the electron and OH radicals. The operating conditions such as waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input were investigated experimentally using a plasma waterjet scrubber. Through the parametric studies, the highest $CF_4$ destruction of 94.5% was achieved at 0.2% $CF_4$, 2.1 kJ/L SEI, 20 L/min total gas flow rate and 18.5 mL/min waterjet flow rate.

• International Journal of Aeronautical and Space Sciences
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• 제16권3호
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• pp.339-346
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• 2015

Aerodynamic flow control phenomena were investigated with a low-current DC surface discharge plasma actuator. The plasma actuator was found to operate in three different discharge modes with similar discharge currents of about 1 mA or less. Stable continuous DC discharge without audible noise was obtained at higher ballast resistances and lower discharge currents. However, even with continuous DC power input, a low-frequency self-pulsed discharge was obtained at lower ballast resistances, and a high-frequency self-pulsed discharge was obtained at higher set-point currents and higher ballast resistances, both with audible noise. The Schlieren image reveals that the low-frequency self-pulsed mode produces a synthetic jet-like flow implying that a gas heating effect plays a role, even though the discharge current is small. The high-frequency self-pulsed mode produces pulsed jets in a tangent direction, and the continuous DC mode produces a steady straight pressure wave. Particle image velocimetry (PIV) images reveal that the induced flow field by the low-frequency self-pulsed mode has flow propagating in the radial direction and centered between the electrodes. The high-frequency self-pulsed mode and continuous DC mode produce flow from the anode to the cathode. The perturbed region downstream of the cathode is larger in the high-frequency self-pulsed mode with similar maximum speeds.