• 제목/요약/키워드: plasma flow

검색결과 1,184건 처리시간 0.035초

실험계획법을 이용한 가스 혼합-순환식 플라즈마 공정의 최적화 (Optimization of Gas Mixing-circulation Plasma Process using Design of Experiments)

  • 김동석;박영식
    • 한국환경과학회지
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    • 제23권3호
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    • pp.359-368
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    • 2014
  • The aim of our research was to apply experimental design methodology in the optimization of N, N-Dimethyl-4-nitrosoaniline (RNO, which is indictor of OH radical formation) degradation using gas mixing-circulation plasma process. The reaction was mathematically described as a function of four independent variables [voltage ($X_1$), gas flow rate ($X_2$), liquid flow rate ($X_3$) and time ($X_4$)] being modeled by the use of the central composite design (CCD). RNO removal efficiency was evaluated using a second-order polynomial multiple regression model. Analysis of variance (ANOVA) showed a high coefficient of determination ($R^2$) value of 0.9111, thus ensuring a satisfactory adjustment of the second-order polynomial multiple regression model with the experimental data. The application of response surface methodology (RSM) yielded the following regression equation, which is an empirical relationship between the RNO removal efficiency and independent variables in a coded unit: RNO removal efficiency (%) = $77.71+10.04X_1+10.72X_2+1.78X_3+17.66X_4+5.91X_1X_2+3.64X_2X_3-8.72X_2X_4-7.80X{_1}^2-6.49X{_2}^2-5.67X{_4}^2$. Maximum RNO removal efficiency was predicted and experimentally validated. The optimum voltage, air flow rate, liquid flow rate and time were obtained for the highest desirability at 117.99 V, 4.88 L/min, 6.27 L/min and 24.65 min, respectively. Under optimal value of process parameters, high removal(> 97 %) was obtained for RNO.

대기압 Ar/O2 플라즈마 표면처리된 자동차용 냉연강판의 표면특성 및 접착특성평가 (The Evaluation of Surface and Adhesive Bonding Properties for Cold Rolled Steel Sheet for Automotive Treated by Ar/O2 Atmospheric Pressure Plasma)

  • 이찬주;이상곤;박근환;김병민
    • 대한기계학회논문집A
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    • 제32권4호
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    • pp.354-361
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    • 2008
  • Cold rolled steel sheet for automotive was treated by Ar/$O_2$ atmospheric pressure plasma to improve the adhesive bonding strength. Through the contact angle test and calculation of surface free energy for cold rolled steel sheet, the changes of surface properties were investigated before and after plasma treatment. The contact angle was decreased and surface free energy was increased after plasma treatment. And the change of surface roughness and morphology were observed by AFM(Atomic Force Microscope). The surface roughness of steel sheet was slightly changed. Based on Taguchi method, single lap shear test was performed to investigate the effect of experimental parameter such as plasma power, treatment time and flow rate of $O_2$ gas. Results shows that the bonding strength of steel sheet treated in Ar/$O_2$ atmospheric pressure plasma was improved about 20% compared with untreated sheet.

Properties of Inductively coupled Ar/CH4 plasma based on plasma diagnostics with fluid simulation

  • 차주홍;손의정;윤용수;한문기;김동현;이호준
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.210.2-210.2
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    • 2016
  • An inductively coupled plasma source was prepared for the deposition of a-C:H thin film. Properties of the inductively coupled plasma source are investigated by fluid simulation including Navier-Stokes equations and home-made tuned single Langmuir probe. Signal attenuation ratios of the Langmuir probe harmonic frequency were 13.56Mhz and 27.12Mhz. Dependencies of plasma parameters on process parameters were accord with simulation results. Ar/CH4 plasma simulation results shown that hydrocarbon radical densities have their lowest value at the vicinity of gas feeding line due to high flow velocity. For input power density of 0.07W/cm3, CH radical density qualitatively follows electron density distribution. On the other hand, central region of the chamber become deficient in CH3 radical due to high dissociation rate accompanied with high electron density. The result suggest that optimization of discharge power is important for controlling deposition film quality in high density plasma sources.

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고밀도 플라즈마 화학 증착 장치를 이용한 $TiB_2$ 박막 제조 (Deposition Of $TiB_2$ Films by High Density Plasma Assisted Chemical Vapor Deposition)

  • 이승훈;남경희;홍승찬;이정중
    • 한국표면공학회지
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    • 제38권2호
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    • pp.60-64
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    • 2005
  • The ICP-CVD (inductively coupled plasma chemical vapor deposition) process was applied to the deposition of $TiB_2$ films. For plasma generation, 13.56 MHz r.f. power was supplied to 2-turn Cu coil placed inside chamber. And the gas mixture of $TiCl_4,\;BCl_3,\;H_2$ and Ar was used for $TiB_2$ deposition. $TiB_2$ films with high hardness (<40 GPa) were obtained at extremely low deposition temperature $(250^{\circ}C)$, and the films hardness increased with ICP power and gas flow ratio of $TiCl_4/BCl_3$. The film structure was changed from (100) preferred orientation to random orientation with increasing RF power. It is supposed that the enhanced hardness of films was caused by a strong Ti-B chemical bonding of stoichiometric $TiB_2$ films and film densification induced by high density plasma.

플라즈마 표면처리에 의한 Silk/PLA 바이오복합재료의 계면접착 (Interfacial Adhesion of Silk/PLA Biocomposites by Plasma Surface Treatment)

  • 추보영;권미연;이승구;조동환;박원호;한성옥
    • 접착 및 계면
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    • 제5권4호
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    • pp.9-16
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    • 2004
  • 견섬유와 폴리라틱산(PLA) 사이의 계면접착 특성을 향상시키기 위하여 천연섬유 표면을 아르곤과 에틸렌 플라즈마로 각각 처리하였다. 플라즈마 표면처리 후, 견섬유의 표면 모폴로지와 접착이 크게 변화하였다. 다음의 여러 플라즈마 처리조건이 본 연구에 사용되었다: 10, 25, 50 그리고 150 W의 전력, 1, 3, 5, 7 그리고 10분의 처리시간 및 10과 50 sccm의 가스흐름속도, 플라즈마 처리된 Silk/PLA 바이오복합재료의 계면전단강도는 단섬유 micro-droplet debonding 시험방법으로 측정하였다. 결과는 Silk/PLA 바이오복합재료의 계면접착을 향상시키기 위한 최적의 플라즈마 처리 조건을 제공하여 주었다.

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가토(家兎) 신장기능(腎臟機能)에 미치는 측뇌실내(側腦室內) Ouabain의 영향(影響) (Influence of Intraventricular Ouabain on the Renal Function of the Rabbit)

  • 이신웅
    • 대한약리학회지
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    • 제12권1호
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    • pp.31-44
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    • 1976
  • It has been reported that many of the effects of digitalis glycosides could be mediated partly through the central nervous system. In this study the effects of ouabain given directly into the lateral ventricle of the brain on the renal function of the rabbit were investigated. Intraventricular ouabain elicited antidiuresis in doses ranging from 0.1 to $3\;{\mu}g$, exhibiting a rough dose-response relationship, and decreased the renal plasma flow, glomerular filtration rate and urinary excretion of sodium and potassium, concomitant with the decrease of urine flow. These decreases in urine flow, excretory rate of electrolytes significantly correlated with the decrease in renal plasma flow or glomerular filtration rate, suggesting that the antidiuresis might have been induced by the hemodynamic changes. Intravenous ouabain in a dose of $1\;{\mu}g$ did not affect the renal function. Systemic blood pressure as well as cardiac activity was not affected by the intraventricular ouabain. Effects of the intraventricular ouabain on renal function were abolished by the intravenous phentolamine-pretreatment but not affected by intraventricular phentolamine-pretreatment. Neither vasopressin infusion nor hydration did affect the renal effects of intraventricular ouabain. From these observations, it is suggested that the antidiuresis of intraventricular ouabain is induced by the increased sympathetic influence to the kidney.

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Determination of Li by Isotope Dilution Inductively Coupled Plasma Mass Spectrometry

  • Park, Chang J.;Chung, Bag S.
    • 분석과학
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    • 제8권4호
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    • pp.427-434
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    • 1995
  • Inductively coupled plasma mass spectrometry combined with the isotope dilution method is used for the determination of lithium. The isotope dilution method is based on the addition of a known amount of enriched isotope (spike) to a sample. The analyte concentration is obtained by measuring the altered isotope ratio. The spike solution is calibrated through so called reverse isotope dilution with a primary standard. The spike calibration is an important step to minimize error in the determined concentration. It has been found essential to add spike to a sample and the primary standard so that the two isotope ratios should be as dose as possible. Since lithium is neither corrosive nor toxic, lithium is used as a chemical tracer in the nuclear power plants to measure feedwater flow rate. 99.9% $^7Li$ was injected into a feedwater line of an experimental system and sample were taken downstream to be spiked with 95% $^6Li$ for the isotope dilution measurements. Effects of uncertainties in the spike enrichment and isotope ratio measurement error at various spike-to-sample ratios are presented together with the flow rate measurement results in comparison with a vortex flow meter.

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플라즈마트론을 이용한 촉매 개질 특성 연구 (Study on Characteristic of Reforming with Catalyst Using Plasmatron)

  • 김성천;전영남
    • 한국수소및신에너지학회논문집
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    • 제16권4호
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    • pp.356-363
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    • 2005
  • The purpose of this paper is to investigate the optimal condition of the Syngas production by reforming of fuel using plasmatron. Plasma was generated by air and arc discharge. The effects of applied steam, $CO_2$ or Ni-catalyst on fuel conversion, as well as hydrogen yield and $H_2$/CO ratio were studied. When the variations of $O_2$/fuel ratio, $H_2O$/fuel flow ratio and $CO_2$/fuel flow ratio were $0.94{\sim}1.48$, $4.3{\sim}10$ and $0.8{\sim}3.05$, respectively. Under the condition mentioned above, result of $H_2O$/fuel flow ratio was maximum $H_2$ concentration, or $28.2{\sim}31.6%$, and result of $H_2O$/fuel flow ratio with catalyst was minimum CO concentration or $6.6{\sim}7.1%$. and $H_2$/CO ratio were $3.89{\sim}4.86$.

미소 유량 센서에 관한 실험적 연구 (Experimental Study on a Micro Flow Sensor)

  • 김태훈;김성진
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.1783-1788
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    • 2004
  • In the present paper, a micro flow sensor, which can be used at bio-delivery systems and micro heat pumps, is developed. For this, the micro flow sensor is integrated on a quartz wafer ($SiO_2$) and is manufactured by simple and convenient microfabrication processes. The micro flow sensor aims for measuring mass flow rates in the low range of about $0{\sim}20$ SCCM. The micro flow sensor is composed of temperature sensors, a heater, and a flow microchannel. The temperature sensors and the heater are manufactured by the sputtering processes in this study. In the microfabrication processes, stainless steel masks with different patterns are used to deposit alumel and chromel for temperature sensors and nichrome for the heater on the quartz wafer. The microchannel is made of Polydimethylsiloxane(PDMS) easily. A deposited quartz wafer is bonded to the PDMS microchannel by using the air plasma. Finally, we confirmed the good operation of the present micro flow sensor by measuring flow rate.

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RF 플라즈마에 의해 생성된 산소 플라즈마의 발광 스펙트럼 (Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma)

  • 김도엽;김민수;김태훈;김군식;최현영;조민영;전수민;박성동;김진하;김은도;황도원;임재영
    • 한국진공학회지
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    • 제18권2호
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    • pp.102-107
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    • 2009
  • 본 연구에서는 ZnO 박막을 성장하기 위한 plasma-assisted molecular beam epitaxy (PAMBE)에 장착된 플라즈마건에 13.56 MHz의 rf 전력을 인가하였을 때 발생되는 산소 플라즈마의 발광 스펙트럼을 광발광 분광기(optical emission spectroscopy: OES)를 이용하여 조사하였다. 실험은 산소 가스 유량을 1 sccm에서 20 sccm, rf 전력을 25W에서 250 W 범위에서 플라즈마건의 오리피스의 직경을 각각 3 mm 와 5 mm로 달리하여 행해졌다. 산소 플라즈마를 발생시켰을 때 오리피스의 직경에 상관없이 전형적인 산소 플라즈마의 발광 스펙트럼이 관측되었다. 특히 776.8 nm와 843.9 nm에서 $3p^{5}P-3s^{5}S^{0}$, $3p^{3}P-3s^{3}S^{0}$ 천이에 기인하는 강한 산소 원자 발광선이 관측되었다. 산소 유량과 rf 파워가 증가함에 따라 776.8 nm와 843.9 nm의 발광 세기는 증가하였고, 776.8 nm의 스펙트럼 발광 세기의 증가율이 843.9 nm의 스펙트럼 발광 세기 증가율보다 컸다. 또한 오리피스 직경이 3 mm일 때가 5 mm일 때보다 산소 플라즈마가 더 안정적으로 발생하였다.