• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.11
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• pp.869-875
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• 2009

The purpose of this paper is to investigate the optimal condition of the syngas production by reforming of propane using Gliding arc plasma reformer. The gliding arc plasma reformer in 3 phases has been newly designed and developed with a quick starting and fast response time. It can be applicable to the various types of fuels (Hydrocarbons $C_xH_y$), and it has a high conversion rate of fuels and high production of hydrogen. The parametric screening studies were carried out according to the changes of a steam feed amount i.e., steam/carbon ratio, total gas flow rate and input electric power. The optimum operating conditions were S/C ratio 2.8, total gas flow rate of 14 L/min and input electric power of 2.4 kW. The result of optimum operating conditions showed the 55 % $H_2$, 14 % CO, 15 % $CO_2$, 10 % $C_3H_8$ and 4 % $CH_4$. Also, $C_3H_8$ conversion, $H_2$ yield and $H_2$ selectivity were 90 %, 42 %, 15 %, respectively. The energy efficiency and specific energy requirements were 37 % and 334 kJ/mol respectively.

• Journal of the Korean Ceramic Society
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• v.50 no.5
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• pp.326-332
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• 2013

In this study, we prepared yttria stabilized zirconia granules for thermal barrier coatings using a spray drying process. First, we characterized the properties of granules such as flow rate and packing density for utilizing the air plasma spray process. The flow rate and packing density data showed 0.732 g/sec and 2.14 $g/cm^3$, respectively, when we used larger and denser particles, which are better than hollow granules or smaller spherical granules. Second, we chose larger, spherical granules fabricated in alcohol solvent as starting powders and sprayed it on the bondcoat/nimonic alloy by an atmospheric plasma spray process varying the process parameters, the feeding rate, gun speed and spray distance. Finally, we evaluated representative thermal and mechanical characteristics. The thermal expansion coefficients of the coatings were $11{\sim}12.7{\times}10^{-6}/^{\circ}C$ and the indentation stress measured was 2.5 GPa at 0.15 of indentation strain.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1998.11a
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• pp.131-133
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• 1998

Electron temperature, electron density and electron energy distribution function were measured in Radio-Frequency Inductively Coupled Plasma(RFICP) using a probe method. Measurements were conducted in argon discharge for pressure from 10 mTorr to 40 mTorr and input rF power from 100W to 600W and flow rate from 3 sccm to 12 sccm. Spatial distribution of electron temperature, electron density and electron energy distribution function were measured for discharge with same aspect ratio (R/L=2). Electron temperature was found to depend on pressure, but only weakly on power. Electron density and electron energy distribution function strongly depended on both pressure and power. Electron density and electron energy distribution function increased with increasing flow rate. Radial distribution of the electron density and electron energy distribution function were peaked in the plasma center. Normal distribution of the electron density, electron energy distribution function were peaked in the center between quartz plate and substrate. These results were compared to a simple model of ICP, finally, we found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2515-2518
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• 2008

The vacuum interrupter (VI) is widely used in medium-voltage switching circuits due to its abilities and advantages as an environmental friendly circuit breaker. An understanding of the vacuum arc flow phenomena is very important for improving the performance of vacuum interrupter. In order to closely examine the vacuum arc phenomena, it is necessary to predict the magnetohydrodynamic (MHD) characteristics by the multidisciplinary numerical modeling, which is coupled with the electromagnetic and the thermal flow fields, simultaneously. In this study, we have investigated arc plasma constriction phenomena and an effect of AMF on the arc plasma with the high-current vacuum arcs for the cup-type AMF electrode by using a commercial finite element analysis (FEA) package, ANSYS. The simulation results applied with various AMFs and constant Joule heat generation show that strong axial magnetic field (AMF) permits the arc to be maintained in a diffused mode to a high-current vacuum arc. However, further studies are required on the two-way coupling method and radiation model for arc plasma in order to accomplish the advanced analysis method.

• Journal of the Semiconductor & Display Technology
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• v.19 no.2
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• pp.45-50
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• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• Journal of Microbiology and Biotechnology
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• v.32 no.6
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• pp.768-775
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• 2022

In this study we aimed to derive the response surface models for Escherichia coli reduction in wheat flour using atmospheric cold plasma (ACP) with three types of gas. The jet-type atmospheric cold plasma wand system was used with a 30 W power supply, and three gases (argon, air, and nitrogen) were applied as the treatment gas. The operating parameters for process optimization considered were wheat flour mass (g), treatment time (min), and gas flow rate (L/min). The wheat flour samples were artificially contaminated with E. coli at a concentration of 9.25 ± 0.74 log CFU/g. ACP treatments with argon, air, and nitrogen resulted in 2.66, 4.21, and 5.55 log CFU/g reduction of E. coli, respectively, in wheat flour under optimized conditions. The optimized conditions to reduce E. coli were 0.5 g of the flour mass, 15 min of treatment time, and 0.20 L/min of nitrogen gas flow rate, and the predicted highest reduction level from modeling was 5.63 log CFU/g.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• Archives of Pharmacal Research
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• v.21 no.4
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• pp.411-417
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• 1998

In order to investigate the effect of the pretreatment with various doses of diltiazem (DTZ) on the pharmacokinetics of indocyanine green (ICG) at steady state, especially the hepatic blood clearance due to the change of hepatic blood flow, the following experiments were carried out with ICG, a hepatic function test marker, not metabolized in liver and only excreted in bile. The intravenous bolus injection ($3,780\mu\textrm{g}$/kg) and the constant-rate infusion ($10,100\mu\textrm{g}$/kg/hr) of ICG into the left femoral vein were made in order to check the steady-state plasma concentration ($C_{ss} of $10\mu\textrm{g}$/ml) of ICG at 20, 25 and 30 min. Following a 90-min washout period, the intravenous bolus injection (108, 430, 860 and $1,720\mu\textrm{g}$/kg) and the constant-rate infusion (108, 433, 866 and $1,730\mu\textrm{g}$/kg/hr) of DTZ into the right femoral vein were made and the achievement of the steady-state plasma levels ($C_{ss} of 50, 200, 400 and 800 ng/ml) of DTZ were conformed at 60, 70 and 80 min. During the steady state of DTZ, the intravenous bolus injection ($3,780\mu\textrm{g}$/kg) and the constant-rate infusion ($10,200\mu\textrm{g}$/kg/hr) of ICG into the left femoral vein were made and also the steady-state plasma concentration of ICG was checked at 20, 25 and 30 min. The plasma concentrations of DTZ and ICG were determined using a high performance liquid chromatographic technique. At the steady state, the hepatic blood clearance of ICG was obtained from the plasma concentration and blood-to-plasma concentration ratio ($R_B$) of ICG. The pretreatment with various doses of DTZ did not influence the plasma concentrations, $R_B$ and plasma free fraction ($f_p$) of ICG. So the hepatic blood clearance of ICG was independent of concentration of DTZ. The hepatic blood clearance of ICG could be affected by both hepatic bood flow and hepatic intrinsic clearance. But there was no change of the hepatic blood clearance of ICG between the control and the DTZ-pretreated rats in this study. So it may be suggested that DTZ does not influence hepatic blood flow.

• Progress in Superconductivity
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• v.5 no.1
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• pp.9-12
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• 2003

We observed the splitting of the fluxon-flow branches in the current-voltage characteristics of serially stacked intrinsic Josephson junctions (IJJs) formed in $Bi_2$$Sr_2$$CaCu_2$$O_{ 8＋x}$ single crystals in the long-junction limit. Stacks of IJJs were sandwiched between two Au electrodes deposited on the top and the bottom of the stack using the ‘double-side cleaving technique’. In all the samples studied, the branch splitting started occurring for a dense fluxon configuration around 2 T and became more distinct in a higher magnetic field range. This observation can be explained in terms of switching between different Josephson fluxon modes in resonance with the collective plasma oscillations induced by both inductive and capacitive coupling between stacked IJJs. This is the first detailed and quantitative identification of the coherent flux-flow modes in stacked..

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.570-570
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• 2013

최근 바이오산업에 플라즈마를 융합하면서 다양한 연구가 진행되고 있다. 그 중 세포 재생이나, 멸균 등의 연구에 플라즈마를 이용하는 연구도 활발하게 진행되고 있다. 그러나 현재 사용되는 대기압 플라즈마 소스는 주로 단일 소스를 이용한다. 그러나 단일소스로는 연구의 진행 속도나 재현성 면에서 오차가 있는 것이 현실이다. 그래서 멀티소스에 대한 필요성이 증대되고 있다. 멀티 대기압 소스는 균일한 플라즈마 방전이 핵심이다. 그러나 대기압 조건에서 각 소스별로 균일하게 방전시키기는 쉽지 않다. 각 소스별로 동일한 power인가를 하고 방전기체의 동일한 flow를 맞추기 위한 연구도 다양하게 진행 중에 있다. 본 연구에서는 4개의 멀티소스를 24 well 크기에 맞춰서 설계 및 제작을 하였고 균일한 방전 및 flow에 대한 측정 연구를 진행하였다. 균일한 방전 측정을 위해서 먼저 전기적으로 각각 그라운드를 설치하여 각 그라운드마다 전압 및 전류를 측정하였고, 방전기체의 균일한 flow를 확인하기 위해 각 소스별로 플라즈마 방전 전에 흐르는 기체의 양을 측정 하였다.