• Title/Summary/Keyword: plasma flow

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Effect of Electrode Process Variables in case of Decomposition of $NO_{x}$ by SPCP (연면방전에 의한 질소산화물의 분해시 전극 공정변수에 대한 영향)

  • 안형환;강현춘
    • Journal of the Korea Safety Management & Science
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    • v.1 no.1
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    • pp.241-258
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    • 1999
  • For hazardous air pollutants(HAP) such as NO and $NO_{2}$ decomposition efficiency, power consumption, and applied voltage were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of HAP with various electric frequencies(5~50 kHz), flow rates(100~1,000 mL/min), initial concentrations(100~1,000 ppm), electrode materials(W, Cu, Al), electrode thickness(1, 2, 3 mm) and number of electrode windings(7, 9, 11) were measured. Experimental results showed that for the frequency of 10 kHz, the highest decomposition efficiency of 94.3 % for NO and 84.7 % for $NO_{2}$ were observed at the power consumptions of 19.8 and 20W respectively and that decomposition efficiency decreased with increasing frequency above 20 kHz. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. Decomposition efficiency was increased with increasing thickness of discharge electrode and the highest decomposition efficiency was obtained for the electrode diameter of 3 mm in this experiment. As the electrode material, decomposition efficiency was in order : tungsten(W), copper(Cu), aluminum(Al).

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Cyclic on/off Modulation of $CH_4\;and/or\;O_2$ Flows for the Enhancement of the Diamond Film Characteristics ($CH_4/O_2$의 사이클릭 유량제어에 의한 다이아몬드 박막의 특성향상)

  • Kim Tae-Gyu;Kim Sung-Hoon;Yoon Su-Jong
    • Journal of the Korean institute of surface engineering
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    • v.39 no.2
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    • pp.82-86
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    • 2006
  • Diamond films were deposited on 10.0$\times$10.0$mm^2$ pretreated (100) Si substrate using $CH_4$, $H_2$ and $O_2$ source gases in a horizontal-type microwave plasma enhanced chemical vapor deposition system. We introduced a cyclic on/off modulation of $CH_4$ and/or $O_2$ flows is a function of the reaction time during the initial deposition stage. Surface morphology and diamond quality of the films were investigated as a function of the different cyclic modulation process of the source gases flows: For the enhancement of the nucleation density, there is an optimal process for the incorporation of oxygen. Diamond qualities of the films were improved by introducing oxygen gas during the initial deposition stage.

Influence of Mori Radicis Cortex on the Renal Function of Dog (상백피가 개의 신장 기능에 미치는 영향)

  • 고석태;이은화
    • YAKHAK HOEJI
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    • v.26 no.4
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    • pp.197-208
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    • 1982
  • In this study attemps were made to obtain evidence as to the action of Mori Radicis Cortex on the renal' function of anesthetized mongrel dogs. 1. A light brown powder isolated from Mori Radicis Cortex (MRC) by a slight modification of Tanemura's method, when given intravenously in doses ranging 0.5 to 5.0mg/kg, elicited diuresis with the increase of positive water clearance and amounts of $Na^{+}$ and $K^{+}$ excreted in the urine. At this time the glomerular filtration rate, renal plasma flow and osmolar clearance were not observed to have any significant changes. This diuresis was augmented in process of time and its maximum effect was exhibited about 30 minutes after administration of MRC. 2. The MRC, when administered into a intra carotid artery, responded promptly with diuresis and natriuresis at a level too small to effect renal functions when administered intravenously. In this experiment the patterns of changes of renal function were the patterns of changes of renal function were the same as those of the above intravenously administered experiment. 3. When infused directly into a renal artery, the MRC exhibited little effect on either kidney. 4. During water diuresis, the MRC did not elicit diuretic action or significant changes in renal functions. The above observations suggest that the diuresis of MRC is brought about by the inhibition of the release of antidiuretic hormone with the mechanism facilitating the excretion of $Na^{+/}$ and $K^{+}$ in urine.

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Fracture Analysis of a $SiN_x$ Encapsulation Layer for Flexible OLED using Electrical Methods (전기적 기법을 통한 플렉서블 OLED 봉지막의 파괴특성 연구)

  • Kim, Hyuk Jin;Oh, Seungha;Kim, Sungmin;Kim, Hyeong Joon
    • Journal of the Semiconductor & Display Technology
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    • v.13 no.4
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    • pp.15-20
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    • 2014
  • The fracture analysis of $SiN_x$ layers, which were deposited by low-temperature plasma enhanced chemical vapor deposition (LT-PECVD) and could be used for an encapsulation layer of a flexible organic light emitting display (OLED), was performed by an electrical method. The specimens of metal-insulator-metal (MIM) structure were prepared using Pt and ITO electrodes. We stressed MIM specimen mechanically by bending outward with a bending radius of 15mm repeatedly and measured leakage current through the top and bottom electrodes. We also observed the cracks, were generated on surface, by using optical microscope. Once the cracks were initiated, the leakage current started to flow. As the amount of cracks increased, the leakage current was also increased. By correlating the electrical leakage current in the MIM specimen with the bending times, the amount of cracks in the encapsulation layer, generated during the bending process, was quantitatively estimated and fracture behavior of the encapsulation layer was also closely investigated.

Pharmacokinetic Modeling and Simulation of the Carrier-Mediated Hepatic Transport of Organic Anions (음이온계 약물의 간수송과정에 있어서 담체매개 수송의 약물동력학적 모델링 및 시뮬레이션)

  • 이준섭;강민희;김묘경;이명구;정석재;심창구;정연복
    • YAKHAK HOEJI
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    • v.47 no.2
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    • pp.110-119
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    • 2003
  • The purpose of the present study was to kinetically investigate the carrier-mediated uptake in the hepatic transport of organic anions, and to simulate the ″in vivo counter-transport″ phenomena, using kinetic model which was developed in this study. The condition that the mobility of carrier-ligand complex is greater than that of free carrier is not essential for the occurrence of ″counter-transport″ phenomenon. To examine the inhibitory effects on the initial uptake of a ligand by the liver, it is necessary to judge whether the true counter-transport mechanism (trans-stimulation) is working or not. The initial plasma disappearance curves of a organic anion were then kinetically analyzed based on a flow model, in which the ligand is eliminated only from the peripheral compartment (liver compartment). Moreover, ″in vive counter-transport″ phenomena were simulated based on the perfusion model which incorporated the carrier-mediated transport and the saturable intracellular binding. The ″in vivo counter-transport″ phenomena in the hepatic transport of a organic anion were well demonstrated by incorporating the carrier-mediated process. However, the ″in vivo counter-transport″ phenomena may be also explained by the enhancement of back diffusion due to the displacement of intracellular binding. In conclusion, one should be more cautious in interpreting data obtained from so-called ″in vivo counter-transport″ experiments.

A study on the TiN coating applied to a rolling wire probe

  • Song, Young-Sik;S. K. Yang;Kim, J.
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.118-118
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    • 2003
  • In a rolling wire probe, a key component of an inspection apparatus for PDP electrode patterns, the electric performance of it is known to be strongly dependent on the surface condition of a collet pin, a needle pin, and a wire. However, the collet and needle pins rotate very rapidly in contact with each other, which results in the degradation of the surface by the heat and friction and finally the formation of black wear marks on the surface after a several hundred hours test. Once the black wear marks appear on the surface, the electric resistance of the probe increases sharply and so the integrity of the probe is severely damaged. In this experiment, TiN coating, which has excellent electric conductances and good wear-resistance, has been applied on the surface of collect and needle pins for preventing the surface damages. In order to achieve the homogeneous coating with a good adhesion property, special coating substrate stages and jigs were designed and applied during coating. TiN has been deposited using 99.999% Titanium target by a DC reactive sputtering method. According to the components and jigs, processing parameters, such as DC power, RF bias and the flow rate ratio of Ar and N$_2$ used as reactive gases, has been controlled to obtain good TiN films. Detailed problems and solutions for applying the new substrate stages and jigs will be discussed.

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Receptor Specificity of Adenosine Analogs in Terms of Renal Function and Renin Release (Adenosine 유사체의 신장효과에 미치는 Adenosine 차단제의 영향)

  • Yun, Young-Yi;Koh, Gou-Young;Kim, Suhn-Hee;Cho, Kyung-Woo
    • The Korean Journal of Physiology
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    • v.24 no.2
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    • pp.269-280
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    • 1990
  • The purpose of the present experiment was to determine the functional subclassification of renal adenosine receptor fer the hemdynamic, excretory and secretory functions in unanesthetized rabbits. Adenosine antagonist, 8-phenyltheophylline (8-PT) or theophylline, was infused into the left renal artery followed by an infusion of adenosine agonist, cyclohexyladenosine (CHA) or 5'-N-ethylcarboxamidoadenosine (NECA). Intrarenal arterial infusion of CHA or NECA caused decreases in urine volume, glomerular filtration rate, renal plasma flow and excreted amount of electrolytes and renin release in a dose-dependent manner. Dose-response curves in renal function by CHA or NECA was similar and shifted to the right with pretreatment of 8-PT or theophylline. No significant differences in renal response to CHA and NECA in antagonist-treated rabbits were observed. However, the decrease in renin secretion rate was not affected by the adminstration of adenosine antagonists. These results suggest that the renal effect of adenosine receptor agonists appears by way of specific adenosine receptor, but which is not functionally subclassified in the rabbit.

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A Characteristic Analysis of Ozone Generator Using the Al2O3 Ceramic Dielectric According to Gas Type(O2/Air) (Al2O3 유전체를 이용한 산소/공기 원료에 따른 오존발생기의 특성)

  • Park, Hyun-Mi;Song, Hyun-Jig;Park, Won-Joo;Lee, Kwang-Sik
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.28 no.5
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    • pp.76-81
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    • 2014
  • The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

Dry etching of Si by direct DC biasing (직접 인가된 DC 바이어스에 의한 Si의 건식 식각)

  • Ahn, H.J.;Moon, S.H.;Lee, J.S.;Shim, K.H.;Yang, J.W.;Shin, H.C.;Lee, K.H.;Lee, J.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.162-163
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    • 2007
  • The dry etching of Si was investigated using direct dc biasing to the Si substrate. The TCP type etching system with a feed-through for applying a dc bias was used in the etching. The applied dc bias and ICP power was varied to examine the effect on the etching at the fixed chamber pressure and $SF_6$ flow rate of 10 mTorr and 10 sccm during. When the plasma was generated at ICP power of 100 W, the etch rate of Si was increased with the bias for the biased samples. However, the etching of Si for the non-biased sample was enhanced for the increased ICP power.

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Properties of $SnO_2$ Thin Films Depending on Reaction Parameter (반응 변수에 따른 $SnO_2$ 박막의 특성)

  • Lee, Jeong-Hoon;Jang, Gun-Eik;Kim, Kyoung-Won;Son, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.356-357
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    • 2006
  • Tin oxide thin films have been prepared on display glass from mixtures of dibutyl tin diacetate as a tin source, oxygen as an oxidant by Plasma Enhanced Chemical Vapor Deposition (PECVD) method. The relationships between the properties of tin oxide thin films and various reaction parameters such as the deposition temperature, deposition time and the oxygen gas flow rate were studied. As the deposition temperature increased, the texture plane of $SnO_2$ changed from (200) plane to denser (211) and (110) planes. Lower deposition temperature and thinner thickness of deposited film led to decreasing grain size, surface roughness and electrical resistivity of the formed thin films at $325{\sim}425^{\circ}C$. The properties of fabricated $SnO_2$ films are highly changed with variations of substrate temperature and deposition time.

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