• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.65-65
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• 1999

Dry etching technique provides more easy controllability on the etch profile such as anisotropic etching than wet etching process and the results of lots of researches on the characterization of various plasmas or ion beams for semiconductor etching have been reported. Chlorine-based plasmas or chlorine ion beam have been often used to etch several semiconductor materials, in particular Si-based materials. We have studied the effect of He flow rate on the Si and SiO2 dry etching using chlorine-based plasma. Experiments were performed using reactive ion etching system. RF power was 300W. Cl2 gas flow rate was fixed at 58.6 sccm, and the He flow rate was varied from 0 to 120 sccm. Fig. 1 presents the etch depth of si layer versus the etching time at various He flow rate. In case of low He flow rate, the etch rate was measured to be negligible for both Si and SiO2. As the He flow increases over 30% of the total inlet gas flow, the plasma state becomes stable and the etch rate starts to increase. In high Ge flow rate (over 60%), the relation between the etch depth and the time was observed to be nearly linear. Fig. 2 presents the variation of the etch rate depending on the He flow rate. The etch rate increases linearly with He flow rate. The results of this preliminary study show that Cl2/He mixture plasma is good candidate for the controllable si dry etching.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.4
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• pp.813-824
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• 1988

Use of a plasma arc as the source of energy for penetration welding of thin plates gives rise to a cylindrical hole surrounded by the molten metal. Material moves from the front to the rear of the hole by flowing around the hole as the workpiece is translated relatively to the arc. Based on the finite difference method, three different computer models have been proposed for the steady state, two dimensional heat and mass flow during the plasma arc welding. In the formulation energy equation was derived by the energy blance method through the cell control volume, and all the governing equations derived for the fixed coordinates was translated for the moving coordinate system. The driving force for fluid flow being considered was only electromagnetic force. The calculated and measured molten poon and HAZ width were compared and better agreement was obtained for the models considering the keyhole effect.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1361-1366
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• 2009

This study is to see the internal flow for the plasma cutting fume collector. Plasma cutters are widely used in the canning industry and Fume cause the device because it will affect the performance of the design of dust collector. Therefore, to determine the distribution of the internal flow using CFD and Solver was used for calculated with commercial CFD code STAR-CCM+. The results show that design of chamber was incorrect after passed the filter for exhaust to the fan. And the location of the duct to the influx of dust collector and the design was incorrect. In addition, an array of filter was also inappropriate. As a result, present fume collector need to improvement.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.401-409
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• 2013

Numerical analysis on RF (Radio-Frequency) thermal plasma treatment of micro-sized Ni metal was carried out to understand the synthesis mechanism of nano-sized Ni powder by RF thermal plasma. For this purpose, the behaviors of Ni metal particles injected into RF plasma torch were investigated according to their diameters ($1{\sim}100{\mu}m$), RF input power (6 ~ 12 kW) and the flow rates of carrier gases (2 and 5 slpm). From the numerical results, it is predicted firstly that the velocities of carrier gases need to be minimized because the strong injection of carrier gas can cool down the central column of RF thermal plasma significantly, which is used as a main path for RF thermal plasma treatment of micro-sized Ni metal. In addition, the residence time of the injected particles in the high temperature region of RF thermal plasma is found to be also reduced in proportion to the flow rate of the carrier gas In spite of these effects of carrier gas velocities, however, calculation results show that a Ni metal particle even with the diameter of $100{\mu}m$ can be completely evaporated at relatively low power level of 10 kW during its flight of RF thermal plasma torch (< 10 ms) due to the relatively low melting point and high thermal conductivity. Based on these observations, nano-sized Ni metal powders are expected to be produced efficiently by a simple treatment of micro-sized Ni metal using RF thermal plasmas.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.183-186
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• 1991

In order to prepare the functional organic optic meterials, the capacitive coupled gas flow type plasma polymerization apparatus was designed and manufactured. Styrene and para-Xylene monomer were adopt as organic materisl. Optical constant, refrative index, extinction coefficient of organic thin films by the gas flow type plasma polymerization appratus were determined by envelope method using spectrophotometry. The refractive index of plasma polymerized thin films was decreased in accordance to increase of wave length and discharge time. The extinction coefficient was very small compared with refractive index. From the experimental result of optical constant and film thickness, it was considered that the films which had required optical properties and thickness can be prepared by control of polymerization condition.

• Journal of computational fluids engineering
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• v.17 no.2
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• pp.71-77
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• 2012

Numerical simulations are carried out for flow over a circular cylinder controlled by the momentum forcing which is generated by a pair of plasma actuators symmetrically mounted on the cylinder surface. A popular and empirical plasma model is used for the spatial distribution of momentum forcing. In this study, we consider two different types of actuation, i.e., steady and unsteady (or pulsed) actuation. In the unsteady actuation, the actuation is turned on and off periodically, its frequency being a control parameter. The objective of this study is to investigate the effects of actuator location and actuation frequency on the flow structures and the forces on the cylinder. Results show that the cylinder wake can be effectively controlled by proper actuator location. For example, when the actuators are located at $120^{\circ}$ from the stagnation point, vortex shedding is completely suppressed with the boundary layer almost fully attached to the surface, resulting in drag reduction and lift elimination.

• Journal of Welding and Joining
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• v.20 no.5
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• pp.120-126
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• 2002

Ni-5%Al alloy powder is widely used as the bond coating powder to improve the adhesive strength between the substrate and coating. The important properties in the bond coating are the deposition efficiency and surface roughness. In this study, it was tried to optimize the plasma spray parameters to maximize the deposition efficiency and surface roughness. In the first step, spray current and hydrogen gas flow rate were optimized in order to increase the deposition efficiency. In the next step, the seven plasma spray variables were selected and optimized to improve both the deposition efficiency and surface roughness using the Taguchi experimental method. By these optimization, the deposition efficiency was improved from about 10 % at the frist time to 51.2 % by the optimization of spray current and hydrogen gas flow rate and finally to 65.2 % by the Taguchi experimental method. The average surface roughness was increased from about $12.9\mu\textrm{m}$ to $15.4\mu\textrm{m}$.

• KIEE International Transaction on Systems and Control
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• v.2D no.2
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• pp.120-124
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• 2002

A new methodology is presented to diagnose faults in equipment plasma. This is accomplished by using neural networks as a pattern recognizer of radio frequency (rf) impedance match data. Using a match monitor system, the match data were collected. The monitor system consisted mainly of a multifunction board and a signal flow diagram coded by Visual Designer. Plasma anomaly was effectively represented by electrical match positions. Twenty sets of fault-symptom patterns were experimentally simulated with variations in process factors, which include rf source power, pressure, Ar, and $O_$2 flow rates. As an input to neural networks, two means and standard deviations of positions were used as well as a reflected power. Diagnostic accuracy was measured as a function of training factors, which include the number of hidden neurons, the magnitude of initial weights, and two gradients of neuron activation functions. The accuracy was the most sensitive to the number of hidden neurons. Interaction effects on the accuracy were also examined by performing a 2$^$4 full factorial experiment. The experiments were performed on multipole inductively coupled plasma equipment.

• Journal of the Korean Society of Propulsion Engineers
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• v.23 no.1
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• pp.61-70
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• 2019

A primary investigation on the underexpanded flow generated in a 0.4 MW class high enthalpy supersonic arc-heated plasma wind tunnel is conducted experimentally. The diameter and the position of the Mach disk from the nozzle exit is measured for overall pressure ratios ranging from 200 to 30. The empirical correlations for Mach disk diameter and position are determined which show very good agreement with experimental results.

• Korean Journal of Veterinary Research
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• v.34 no.2
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• pp.275-286
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• 1994

Plasma protein which has been known as one of nonspecific immunostimulators was added to feedstuff to examine its effect on the enhancement of cellular immune response in porcine immune system. A total of 40 piglets, 20 male and 20 female each, were fed for 30 days with or without plasma protein. The peripheral blood were collected and analyzed for the investigation of leukocyte subpopulations and their activities by using a panel of monoclonal antibodies specific to porcine leukocyte differentiation antigens and flow cytometry. The results obtained as follows. 1. Total weight gain, daily feed intake and feed conversion rate for 10 days were significantly improved to 56%, 20% and 22% in the piglets fed plasma protein, respectively. 2. A significant increase in N (null or non T/non B) cells was also noticed. Leukocyte proportion from piglets fed plasma protein was 20.2-24.7%, otherwise that from piglets fed without plasma protein was 12.3-13.4%, respectively. 3. A significant increase in the proportion of B cells and cells expressing poCD1 was not found in piglets fed plasma protein. 4. Reaction with monoclonal antibodies specific to adhesion molecules, poCD11a, poCD11b, poCD44 and poCD45A and poCD45B, has shown that leukocyte subpopulation from piglets fed plasma protein did not significantly higher than that from piglets fed without plasma protein. 5. Total proportion of granulocytes and monocytes was about 50% in both group and the proportion after treated with Hypaque/Ficoll was 2.7% and 5.8% in each group, respectively.