• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.55 no.12
• /
• pp.565-569
• /
• 2006

Plasma enhanced chemical vapor deposition(PECVD) is a well established technique for the deposition of hydrogenated film of silicon nitride (SiNx:H), which is commonly used as an antireflection coating as well as passivating layer in crystalline silicon solar cell. PECVD-SiNx:H films were investigated by varying the deposition and annealing conditions to optimize for the application in silicon solar cells. By varying the gas ratio (ammonia to silane), the silicon nitride films of refractive indices 1.85 - 2.45 were obtained. The film deposited at $450^{\circ}C$ showed the best carrier lifetime through the film deposition rate was not encouraging. The film deposited with the gas ratio of 0.57 showed the best carrier lifetime after annealing at a temperature of $800^{\circ}C$. The single crystalline silicon solar cells fabricated in conventional industrial production line applying the optimized film deposition and annealing conditions on large area substrate of size $125mm{\times}125mm$ (pseudo square) was found to have the conversion efficiencies as high as 17.05 %. Low cost and high efficiency silicon solar cells fabrication sequence has also been explained in this paper.

• Journal of the Korean Ceramic Society
• /
• v.37 no.1
• /
• pp.96-101
• /
• 2000

Comparative studies on microstructure, and mechanical and anti-oxidation properties between TiN and Ti-Si-N films were performed. The Ti-Si-N films were deposited on high-speed steel and silicon wafer substrates by plasma-assisted chemcial vapor deposition(PACVD) technique. The Si addition to TiN film caused to change the microstructure such as grain size refinement, randomly multi-oriented microstructure, and nano-sized codeposition of silicon nitride in the TiN matrix. The Ti-Si-N film, contains Si content of ∼7 at.%, showed the micro-hardness value of ∼3400 HK, which was higher than the pure TiN film whose hardness was ∼1500HK. The Ti-Si(7 at.%)-N film also showed much improved anti-oxidation properties compared with those of the pure TiN film. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film was formed and retarded further oxidation of the nitridelayer. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film which was characterized by nano-sized precipitates of silicon nitride phase in the TiN matrix and randomly oriented grains.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2006.10a
• /
• pp.4-5
• /
• 2006

This paper represents modeling and optimization techniques for solar cell process on single-crystalline float zone (FZ) wafers with high efficiency; There were the four significant processes : i)emitter formation by diffusion, anti-reflection-coating (ARC) with silicon nitride using plasma-enhanced chemical vapor deposition (PECVD); iii)screen-printing for front and back metallization; and iv)contact formation by firing. In order to increase the performance of solar cells, the contact formation process is modeled and optimized. This paper utilizes the design of experiments (DOE) in contact formation to reduce process time, fabrication costs. The experiments were designed by using central composite design which is composed of $2^4$ factorial design augmented by 8 axial points with three center points. After contact formation process, the efficiency of the solar cell is modeled using neural networks. This model is used to analyse the characteristics of the process, and to optimize the process condition using genetic algorithms (GA). Finally, find optimal recipe for solar cell efficiency.

• Journal of Surface Science and Engineering
• /
• v.53 no.5
• /
• pp.201-206
• /
• 2020

A SiOxCy(-H) thin film was synthesized by atmospheric pressure dielectric barrier discharge(APDBD), and a SiO₂-like layer was formed on the surface of the film by oxidation treatment using oxygen plasma. Hexamethylcyclotrisiloxane was used as a precursor for the SiOxCy(-H) synthesis, and He gas was used for stabilizing APDBD. Oxygen permeability was evaluated by forming an oxidized SiOxCy(-H) thin film on a PET film. When the single-layer oxidized SiOxCy(-H) film was coated on the PET, the oxygen gas permeability decreased by 46% compared with bare PET. In case of three-layer oxidized SiOxCy(-H) film, the oxygen gas permeability decreased by 73%. The oxygen permeability was affected by the thickness of the SiO₂-like layer formed by oxidation treatment rather than the thickness of the SiOxCy(-H) film. The excellent corrosion resistance was demonstrated by coating an oxidized SiOxCy(-H) thin film on the silver-coated aluminum PCB for light emitting diode (LED).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.21 no.9
• /
• pp.808-811
• /
• 2008

Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of $CH_4$ and $H_2$ as the source gas. The optical and mechanical properties of DLC films were characterized by UV spectrometer, Ellipsometer and Nano-indenter. The change of the C/H ratio during synthesis of DLC films had many effects on the growth rate, transmittance, refractive index and hardness. The growth rate of the films increased exponentially with the increase in C/H ratio. The hardness of the films showed the tendency to improve with increasing C/H ratio, whereas the transmittance decreased. The refractive index was varied from 2.03 to 2.17, and these refractive indexes close to 2.0 indicates that it can be applied to Si-based solar cell.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2015.05a
• /
• pp.51-52
• /
• 2015

Organic light emitting diode (OLED) 나 organic photovoltaic device (OPV)와 같은 유기소자에 전극으로 쓰이고 있는 indium tin oxide (ITO)는 유연한 디바이스에 적용하기에는 유연성이 떨어진다는 문제가 있다. 이를 해결하기 위해서 ITO를 대체할 수 있는 CNT, Graphene, AgNWs, 전도성 고분자 등의 투명전극에 관한 연구가 활발히 진행되고 있다. 그러나 CNT, Grapene, 전도성 고분자는 여전히 전기적 특성이 좋지 못하기 때문에 차세대 투명전극으로 사용되기는 어려움이 있다. 반면에 AgNWs는 용액공정으로 제조 단가가 비교적 저렴하며, 높은 전기전도도 특성과 우수한 유연성을 가지는 투명 전극이기 때문에 많은 주목을 받고 있다. 그러나 NW-NW간의 접촉저항이 높아 전도성이 저하된다는 문제점과 Environmental stability가 좋지 못하다는 단점이 여전히 존재한다. 본 연구에서는 AgNW 전극 위에 플라즈마처리를 진행하여 AgNW의 전도성과 Stability를 향상시키고자하였다. 플렉서블한 PET기판위에 AgNW 전극을 Spray Coating하여 균일하게 전극을 형성하였고, 플라즈마 처리를 통해서 기판의 변형없이 AgNW의 저항을 45%이상 향상시켰으며, Stability 또한 아무것도 처리하지 않은 AgNW에 대비하여 2배 이상 향상된 것을 확인하였다.

• Journal of Surface Science and Engineering
• /
• v.34 no.1
• /
• pp.3-9
• /
• 2001

The purpose of this study is to evaluate the properties of the functional gradient thermal barrier coatings by plasma spray process. The evaluations of mechanical and thermal properties such as fatigue, oxidation and wear-resistance at high temperatures have been conducted. Furthermore, residual stress and bond strength have been evaluated. The range of thickness of coated layers was 550~600$\mu\textrm{m}$. The range of hardness of layers was 800~900 Hv and the porosity range of coatings was about 7 to 14%. The top coating layer of $ZrO_2$ in thermal barrier was composed of tetragonal structure after spraying. The coated layers of $ZrO_2$ on the Inconel substrate is the best resistance for thermal fatigue. Those coatings had the least compressive stress in comparison with other coatings. In high temperature oxidation test, the coatings on Inconel substrate was better than the coatings on SUS substrate. The bond strength of the concave type was greater than that of linear types and convex types coatings.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2005.05a
• /
• pp.279-282
• /
• 2005

Composites comprising various volume fractions of crystalline nickel and bulk amorphous (BA) were produced by means of electroless coating of nickel on BA powder of $Cu_{54}Ni_6Zr_{22}Ti_{18}$ and subsequent spark plasma sintering (SPS) of coated BA powder. The flow curves of composites at various temperatures in the supercooled liquid region were determined by the uniaxial compression test with various strain rates. During compression at $450^{\circ}C$ with $\dot{\varepsilon}=2\times10^{-3}$, the monolithic BA sample and crystalline-BA composites displayed the superplastic deformation with $\varepsilon>1.4$. At temperatures above $460^{\circ}C$, the stress-strain curve of the monolithic BA sample depicted a sharp peak stress and a fellowing stress drop due to cracking, while those of the crystalline-BA composites displayed work-hardening up to the imposed strain. FEM analysis indicated that a fairly homogeneous strain state prevailed throughout the composite, while a higher level of stress was obtained in a harder BA.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.305-305
• /
• 2010

태양전지의 개발이 본격화 되면서 태양전지 웨이퍼 표면에서의 재결합에 의한 손실을 줄이고 전면에서의 반사도를 감소시키기 위한 ARC (Anti-reflection Coating) layer에 대한 연구가 활발히 진행되고 있다. 이 중 대표적인 물질이 실리콘 질화막이 있다. 실리콘 질화막은 PECVD(plasma-enhanced chemical vapor deposition)법으로 저온에서 실리콘 기판 위에 증착 가능한 장점이 있다. 또한 실리콘 질화막의 광학적, 전기적인 특성은 $SiH_4:NH_3$의 화학적 조성비에 의해 결정되며 가스비 가변에 따라 균일도 및 굴절률 조절을 가능케 하여 태양전지의 효율을 향상시킬 수 있다. 본 연구에서는 태양전지의 표면 반사도 저감 및 효율 향상에 최적화된 실리콘 질화막을 형성하기 위해 PECVD를 이용하였고, 가스비 가변을 통해 굴절률을 조절하여 실리콘 질화막을 증착하고 이를 이용한 태양전지를 제작한 후 특성을 비교, 분석하였다. 실리콘 질화막 증착을 위해 압력, 온도, 파워를 1Torr, $450^{\circ}C$, 300W로 고정하고 가스비는 $SiH_4$를 45 sccm으로 고정한 후 $NH_3$의 양을 각각 30, 60, 90, 120 sccm으로 가변하였다. $SiH_4:NH_3$ 비율이 45:90일 때 박막의 passivation효과가 최대였으며 이 조건로 ARC를 형성한 태양전지는 77% 후반의 높은 FF(Fill Factor)와 17%의 광 변환 효율을 나타냈다.

• Nutrition Research and Practice
• /
• v.12 no.6
• /
• pp.469-478
• /
• 2018

BACKGROUND/OBJECTIVES: Mulberry leaf (ML) has been shown to have an inhibitory effect on ${\alpha}$-glucosidase, and suppresses postprandial hyperglycemia, which may be related to its deoxynojirimycin (DNJ) content. This study was conducted to investigate the hypoglycemic and dyslipidemic effects of rice coated with ML rich in DNJ in a type 2 diabetes mouse model. MATERIALS/METHODS: The mice were divided into four groups (n = 8 each): non-diabetic normal control (NC); diabetic control (DM-C), fed with 10% polished rice powder (DM-R); and fed with 10% polished rice powder coated with DNJ-rich ML (DM-DNJR). RESULTS: Supplementation with DNJR for six weeks decreased levels of fasting blood glucose, plasma insulin, triglyceride, total cholesterol, and blood glycosylated hemoglobin; conversely, levels of glucagon-like peptide-1 and high-density lipoprotein-cholesterol showed an increase in the same treatment. In addition, weights of mesenteric, epididymal, and total adipose tissues decreased with DNJR supplementation, when compared with diabetic control db/db mice, while maltase, lactase, and sucrase activity in the small intestine were inhibited. The anti-diabetic effects were marginally greater in the DM-DNJR group than in the DM-R group. CONCLUSIONS: These results suggest that rice coated with ML rich in DNJ can reduce hyperglycemia and hyperlipidemia in db/db mice, and may prove useful for individuals with diabetes.