• Journal of Korean Ophthalmic Optics Society
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• v.6 no.1
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• pp.87-91
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• 2001

The a-C:H films have been grown on the glass substrate by PECVD method, where plasma was generated with a 60 Hz line power source. The carbonization is checked from peak intensities of D($sp^3$) and G($sp^2$) peaks in Raman spectra and is analyzed using the Gaussian convolution method of spectrum. Both the bonding strength of C-H and the ratio of $sp^3$ to $sp^2$ in bonding are found to be slightly dependent of partial pressure of $C_2H_2$.

• Laser Solutions
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• v.2 no.2
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• pp.8-17
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• 1999

This study includes a basic feature of laser surface alloying for enhancing the surface properties of materials. Effects of laser processing parameters such as beam power, beam size, scanning speed on the shape and composition of alloyed layer was simulated in case of moving beam conditions (2-dimensional numerical methods). Simulated results were compared with experiments, in which the plasma coating of 80% Ni ＋ 20% Cr deposited on the SS41 substrate was remelted with CO2 laser with Gaussian energy distribution. Simulation and experiments revealed that the shape (dimension)and composition of laser alloyed layer were strongly dependent upon the process parameters, especially interaction time (travel speed) as compared to beam diameter, beam power and absorptivity. The shape and composition of alloyed layervaried more or less exponentially with parameters.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.4
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• pp.136-139
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• 2003

The positive column of a discharge tube filled with a mixture of mercury-xenon has a tendency to become contracted at room temperature. However, once the tube temperature is raised over 50 [$^{\circ}C$], the positive column changes from a contracted state to a diffused state. The xenon emission is stronger in the contracted positive column than in the diffused column. Alternatively, the mercury emission is more intense in the diffused positive column, and the luminance of the phosphor coating on the inner surface of the tube is higher than that in the contracted positive column. Moreover, higher luminance can be obtained by increasing the xenon pressure.

• Proceedings of the KIEE Conference
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• 2000.11c
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• pp.583-585
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• 2000

This study reports the fluidic handling method using hydrophobic patterns inside PDMS microchannels. In order to obtain hydrophobic patterns, we pattern fluorcarbon(FC) film surfaces by lift-off process. FC films are deposited by spin coating method and plasma polymerization method. Hydrophobic surfaces are used as the barriers to control fluid flow. Injected liquid is spontaneously filled up inside PDMS-microchannels by the capillary action. Liquid flow stops when it meets hydrophobic regions which can be the barrier against fluid flow. Then, again, when liquid is pressurized externally, liquid can move toward another hydrophilic region by external air pressure. Contact angle analyses are performed on fluorocarbon films to estimate the wettability of film surfaces.

• Corrosion Science and Technology
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• v.5 no.1
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• pp.15-22
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• 2006

The introduction of two-grid inside a conventional process system produces a reactive coating deposition and increases metal ion ratio in the plasma, resulting in denser and smoother films. The corrosion behaviors of TiN coatings were investigated by electrochemical methods, such as potentiodynamic polarization test and electrochemical impedance spectroscopy (EIS) in deaerated 3.5% NaCl solution. Electrochemical tests were used to evaluate the effect of microstructure on the corrosion behavior of TiN coatings exposed to a corrosive environment. The crystal structure of the coatings was examined by X-ray diffractometry (XRD) and the microstructure of the coatings was investigated by scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM). In the potentiodynamic polarization test and EIS measurement, the corrosion current density of TiN deposited by two grid-attached magnetron sputtering was lower than TiN deposited by conventional magnetron type and also presented higher Rct values during 240 h immersion time. It is attributed to the formation of a dense microstructure, which promotes the compactness of coatings and yields lower porosity.

• Proceedings of the Membrane Society of Korea Conference
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• 2003.07a
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• pp.69-72
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• 2003

Volatile organic compounds (VOC) cause air pollution problem and deterioration of atmosphere of petrochemical and fine chemical plants. Hybrid process of membrane and cold-condensation were developed and it effectively removed and recycled the VOC. Operation parameters of the process were optimized to attain hish removal and recycle of VOC. Composite membranes for organic vapor separation were developed in this work by PDMS coating and plasma polymerization on polypropylene and polysulfone support membranes. PDMS and various silicone monomers were tested for several organic vapors such as benzene, toluene, TCE, and HCFC, which are produced in petrochemical and fine chemical industry and causes air pollution problems if are released to atmosphere. Composite membranes prepared in this work showed appreciable performance in terms of organic vapor removal and reuse. Performance variation of the membranes was correlated with their surface characteristics.

• Korean Journal of Materials Research
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• v.14 no.5
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• pp.343-347
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• 2004

We investigated the growth feasibility of polycrystalline Si film on mica substrate for the transfer of the layer to a plastic substrate. The annealing temperature was limited up to $600^{\circ}C$ because of crack development in the mica substrate. Amorphous Si film was deposited on mica substrate by PECVD and was crystallized by furnace annealing. During the annealing, bubbles were formed at the Si/mica interface. The bubble formation was avoided by the Ar-plasma treatment before amorphous Si deposition. A uniform and clean polycrystalline Si film was obtained by coating $NiCl_2$ on the amorphous Si film and annealing at $500^{\circ}C$ for 10 h. The conventional Si lithography was possible on the mica substrate and the devices fabricated on the substrate could be transferred to a plastic substrate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.39-42
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• 2000

The effect of excess Pb contents on the etching of PZT thin films and their electrical properties has been investigated. Ferroelectric PZT(53/47) thin films were prepared by the metal alkoxide-based Sol-Gel method, in which they were spin-coating on P7Ti/Si02/Si substrate using the PZT(53/47) stock solutions with various excess Pb contents. Etching of PZT film was performed using planar inductively coupled Ar/Cl$_2$/BCl$_3$ plasma. The etch rate of PZT film was 2450 $\AA$/min at Ar(20)/BCl$_3$(80) gas mixing ratio and substrate temperature of 8$0^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.48 no.5
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• pp.396-403
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• 2011

In this study, we investigated the mechanical behaviors of layered thermal barrier coatings by indentations. Various single and double-layered thermal barrier coatings were deposited by air plasma spray process using different type of commercialized YSZ (Yttria stabilized zirconia) starting powders. Indentation stress-strain curve, load-displacement curve and hardness of the single and the double-layered thermal barrier coatings were obtained experimentally and analyzed. The indentation damages at the same loads were compared, and thus, the results depend on the structure of each coating. The result indicates improvement in damage resistances from tailoring of layered structures in the component of gas turbine system is expected.

• Journal of Surface Science and Engineering
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• v.35 no.2
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• pp.101-106
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• 2002

The microstructural changes of $NiCrAlY/ZrO_2$-$Y_2$$O_3$ composite coatings that were manufactured by air-plasma-spraying were investigated using XRD and SEM/EDS. The as-sprayed microstructure consisted of (Ni,Cr)-rich regions, ($ZrO_2$-$Y_2$$O_3$)-rich regions, and $Al_2$$O_3$-rich layers that were formed during spraying owing to the oxidation of Al in NiCrAlY. During oxidation between 900 and $1100^{\circ}C$ in air, Cr in the (Ni,Cr)-rich regions diffused toward the $Al_2$$O_3$-rich layers, and oxidized to be dissolved in $A1_2$$O_3$-rich layers. The oxidation of Ni in the (Ni,Cr)-rich regions was less distinct, except at the outer surface of the coating.