• Title/Summary/Keyword: plasma coating

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Measurement of Ion Energy Distribution using QMS & Ionization Enhancement by usign Magnetic Field in Triod BARE (자장을 이용한 이온화율 증대형 삼극형 BARE에서 이온화율의 증대경향과 QMS를 이용한 이온의 에너지 분포 측정)

  • 김익현;주정훈;한봉희
    • Journal of Surface Science and Engineering
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    • v.24 no.3
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    • pp.119-124
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    • 1991
  • Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD process using permanent magnet is developed, which enhances the ionization rate by confining the plasma suppressing the wall loss of electron. By the result to investigate the characteristic of glow discharge, the ionization rate of this process is enhanced about twice as high as that of triod BARE process (about 26%), and more dense TiN microstructures are obtained in this process. Cylindrical ion energy analyzer is made and attached in front of a quadrupole mass filter for the analysis of the energy distribution of reactive gas and activated gas ions from the plasma zone. To analyze the operation mechanism of ion energy analyzer, computer simulation is performed by calculation the electric field environment using finite element method. By these analyses of ion energy distribution of outcoming ions from the plasma zone, it is found that magnetic field enhances ion kinetic energy as well as ionization rate. The other results of this study is that the foundation of feed-back system is constructed, which automatically control the partial pressure of reactive gas. In can be possible by recording the data of mass spectrum and ion energy analysis using A-D converter.

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Microstructure Evolution of Cu-based BMG Coating during APS Process and Phase Analysis by Nano-indentation Test (대기 플라즈마 용사공정을 이용한 Cu계 벌크 비정질 금속 코팅의 미세조직 분석과 나노 압입시험을 이용한 상 분석)

  • Kim, Jung-Hwan;Kang, Ki-Cheol;Yoon, Sang-Hoon;Na, Hyun-Taek;Lee, Chang-Hee
    • Journal of Welding and Joining
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    • v.27 no.6
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    • pp.43-48
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    • 2009
  • In this study, Cu-based bulk metallic glass (BMG) coatings were deposited by atmospheric plasma spraying (APS) process with different process conditions (with- and without hydrogen gas). As adding the hydrogen gas, thermal energy in the plasma flame increased and induced difference in the melting state of the Cu-based BMG particles. The microstructure and mechanical properties of the coatings were analyzed using a scanning electron microscope (SEM) with an energy dispersive spectroscopy (EDS) and nano-indentation tester in the light of phase analysis. It was elucidated by the nano-indentation tests that un-melted region was a mainly amorphous phase which showed discrete plasticity observed as the flow serrations on the load.displacement (P - h) curves, and the curves of solidified region showed lower flow serrations as amorphous phase mingled with crystalline phase. Oxides produced during the spraying process had the highest hardness value among the phases and were well mixed with other phases resulted from the increase in melting degree.

Thermal Fatigue Behavior of Thermal Barrier Coatings by Air Plasma Spray (대기플라즈마 용사법으로 제조된 열차폐코팅의 열피로특성 평가)

  • Lee, Han-sang;Kim, Eui-hyun;Lee, Jung-hyuk
    • Korean Journal of Metals and Materials
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    • v.46 no.6
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    • pp.363-369
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    • 2008
  • Effects of top coat morphology and thickness on thermal fatigue behavior of thermal barrier coatings (TBC) were investigated in this study. Thermal fatigue tests were conducted on three coating specimens with different top coat morphology and thickness, and then the test data were compared via microstructures, cycles to failure, and fracture surfaces. In the air plasma spray specimens (APS1, APS2), top coat were 200 and $300{\mu}m$ respectively. The thickness of top coat was about $700{\mu}m$ in the perpendicular cracked specimen (PCS). Under thermal fatigue condition at $1,100^{\circ}C$, the cycles to top coat failure of APS1, APS2, and PCS were 350, 560 and 480 cycles, respectively. The cracks were initiated at the interface of top coat and thermally grown oxide (TGO) and propagated into TGO or top coat as the number of thermal fatigue cycles increased. For the PCS specimen, additive cracks were initiated and propagated at the starting points of perpendicular cracks in the top coat. Also, the thickness of TGO and the decrease of aluminium concentration in bond coat do not affect the cycles to failure.

Performance evaluation of plasma nitrided 316L stainless steel during long term high temperature sodium exposure

  • Akash Singh;R. Thirumurugesan;S. Krishnakumar;Revati Rani;S. Chandramouli;P. Parameswaran;R. Mythili
    • Nuclear Engineering and Technology
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    • v.55 no.4
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    • pp.1468-1475
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    • 2023
  • Enhancement of wear resistance of components used in fast reactors is necessary for long service life of the components. Plasma nitriding is a promising surface modification technology to impart high hardness and improved wear resistance of various steel components. This study discusses the characterization of chrome nitrided SS316L casing ring used in secondary sodium pump of fast breeder reactor and its stability under long term sodium exposure. Microstructural and hardness analysis showed that stress relieved component could be chrome nitrided successfully to a thickness of about 100 ㎛. Assessment of in-sodium performance of the chrome nitrided casing ring subjected to long term exposure up to 5000h at 550℃, showed retention of chrome nitrided layer with a case depth almost similar to that before sodium exposure. A slight decrease in the hardness was observed due to prolonged high temperature sodium exposure. Tribological studies indicate very low coefficient of friction indicating the retention of good wear resistance of the coating even after long term sodium exposure.

Low Temperature Growth of MCN(M=Ti, Hf) Coating Layers by Plasma Enhanced MOCVD and Study on Their Characteristics (플라즈마 보조 유기금속 화학기상 증착법에 의한 MCN(M=Ti, Hf) 코팅막의 저온성장과 그들의 특성연구)

  • Boo, Jin-Hyo;Heo, Cheol-Ho;Cho, Yong-Ki;Yoon, Joo-Sun;Han, Jeon-G.
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.563-575
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    • 2006
  • Ti(C,N) films are synthesized by pulsed DC plasma enhanced chemical vapor deposition (PEMOCVD) using metal-organic compounds of tetrakis diethylamide titanium at $200-300^{\circ}C$. To compare plasma parameter, in this study, $H_2$ and $He/H_2$ gases are used as carrier gas. The effect of $N_2\;and\;NH_3$ gases as reactive gas is also evaluated in reduction of C content of the films. Radical formation and ionization behaviors in plasma are analyzed in-situ by optical emission spectroscopy (OES) at various pulsed bias voltages and gas species. He and $H_2$ mixture is very effective in enhancing ionization of radicals, especially for the $N_2$. Ammonia $(NH_3)$ gas also highly reduces the formation of CN radical, thereby decreasing C content of Ti(C, N) films in a great deal. The microhardness of film is obtained to be $1,250\;Hk_{0.01}\;to\;1,760\;Hk_{0.01}$ depending on gas species and bias voltage. Higher hardness can be obtained under the conditions of $H_2\;and\;N_2$ gases as well as bias voltage of 600 V. Hf(C, N) films were also obtained by pulsed DC PEMOCYB from tetrakis diethyl-amide hafnium and $N_2/He-H_2$ mixture. The depositions were carried out at temperature of below $300^{\circ}C$, total chamber pressure of 1 Torr and varying the deposition parameters. Influences of the nitrogen contents in the plasma decreased the growth rate and attributed to amorphous components, to the high carbon content of the film. In XRD analysis the domain lattice plain was (111) direction and the maximum microhardness was observed to be $2,460\;Hk_{0.025}$ for a Hf(C,N) film grown under -600 V and 0.1 flow rate of nitrogen. The optical emission spectra measured during PEMOCVD processes of Hf(C, N) film growth were also discussed. $N_2,\;N_2^+$, H, He, CH, CN radicals and metal species(Hf) were detected and CH, CN radicals that make an important role of total PEMOCVD process increased carbon content.

Removal of Volatile Organic Compounds by Photo-Catalytic Oxidation

  • Lee, Byeong-Kyu;Jung, Kwang-Ryun
    • Journal of Korean Society for Atmospheric Environment
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    • v.16 no.E
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    • pp.39-46
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    • 2000
  • Volatile Organic Compounds (VOCs) are considered as the precursors of atmospheric ozone and photochemical smog formation. In particular, chemical plants have produced a lot of VOCs and thus they have been forced to reduce or remove air emissions from the on-site chemical facilities. For the effective removal of VOCs produced in the chemical plants, the authors employed a titanium oxide(TiO$_2$) mediated photo-catalytic oxidation method. The initiation methods employed in this study to produce oxygen radicals for th photo-catalytic oxidation of the VOCs were Ultra-Violet(UV), Non-Thermal Plasma(NTS), and a combination of Uv and NTP. This study focused on a comparison of the removal efficiencies of VOCs as a function of the initiation method such as NTP and/or UV techniques. Removal efficiency change of VOCs as was investigated as a function of the wavelength of the UV lamp(254, 302, and 365 nm) and the degree of TiO$_2$ coating (10 and 30%). In this study, it was identified that removal efficiencies if the VOCs under the normal air environment were much better than those under the nitrogen gas environment containing small amount of oxygen. Removal efficiency by NTP technique was much better than the UV or the combination of UV and NTP techniques. In a comparison if UV wavelengths employed, it was found that shorter wavelength showed better removal efficiency, compared with longer ones. When the removal efficiencies of VOCs were compared in terms of the degree of TiO$_2$ coating, the higher TiO$_2$coating showed better removal efficiency that the lower TiO$_2$ coating

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An Evaluation of Skiving Cutting Characteristics of TiCN PACVD Coating Caribide Hob (TiCN PACVD코팅 초경호브의 Skiving절삭특성 평가)

  • Cheon, Jong-Pil
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.2
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    • pp.471-477
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    • 2012
  • SCM420 steel tempered after performing gear hove PACVD carbide coating on the surface after the cutting surface hardness was high. Difficult-to-cut, without coating is classified as mild as large, including materials like mild, high strength that improves tool life and productivity have limited availability. Drive to improve it in the TiCN-coated carbide call for war to the finish coating on cutting a hob skiving good workability, tool wear less, 2.5-fold increase in tool life results were obtained. Experiments using CNC Skiving hobbing machine with wet cutting conditions, cutting speed and feed rate to apply a variety of the tool wear and surface roughness data were obtained. Results from condition 2 (V = 200m/min F = 0.7mm/rev) cutting speed feed mark the cutting surface microstructure and surface roughness Rmax $4.7{\mu}m$(Ra $1.19{\mu}m$) of the data was obtained.

Influence of Subsurface Layer on the Indentation Damage Behavior of YSZ Thermal Barrier Coating Layers Deposited by Electron Beam Physical Vapor Deposition (전자 빔 물리적 증착(EB-PVD)법으로 코팅된 YSZ 열차폐층의 압흔손상 거동에 대한 하부층의 영향)

  • Heo, Yong-Suk;Park, Sang-Hyun;Han, In-Sub;Woo, Sang-Kuk;Jung, Yeon-Gil;Paik, Un-Gyu;Lee, Kee-Sung
    • Journal of the Korean Ceramic Society
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    • v.45 no.9
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    • pp.549-555
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    • 2008
  • The thermal barrier coating must withstand erosion when subjected to flowing gas and should also maintain good stability and mechanical properties while it must also protect the turbine component from high temperature, hot corrosion, creep, and oxidation during operation. In this study we investigated the influence of subsurface layer, $Al_2O_3$ or NiCrCoAIY bond coat layer, on the indentation damage behavior of YSZ thermal barrier coating layers deposited by electron beam physical vapor deposition (EB-PVD). The bond coat is deposited using different process such as air plasma spray (APS) or spray of high velocity oxygen fuel (HVOF) and the thickness is varied. Hertzian indentation technique is used to induce micro damages on the coated layer. The stress-strain behaviors are characterized by results of the indentation tests.

A Syudy on the High Temprerties of the 5Layer Functionally Gradient Thermal Barrier Coating (5층열장벽 피막의 고온 물성에 관한연구)

  • Han, J. C.;Jung, C.;Song, Y. S.;Yoon, J. K.;Lo, B. H.;Lee, K. H.
    • Journal of Surface Science and Engineering
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    • v.31 no.1
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    • pp.12-23
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    • 1998
  • The Thermal Barrier Coating(TBC) has been used to improve the heat barrier and tribological properties of the aircraft engine and the automobile engine in high temperature. Especially, the high temperature tribological propertied of the cylinder haed and the piston crown of diesel engine was emphasized. Therefore, the purpose of this work was to evaluate the microstructure, tribological propeer in high tempearmal shock resistance and bonding strength of five layer functionally gradient TBC for the applications. The five layerwere composed with 100% ceramic insulating later, 75(ceramic):25 (metal) layer, 50:50 layer, 25:75 layer and 100% metal bonding layer to redude the thermal stress. the YSL and MSL poweders were the insulation ceramics powers. The NiCrAly, Inconel625 and SUS powders were the bonding and mixingg powders for plasma spray process. According to the result of high temperature wear test, the wera resistance of YSZ/NiCrAlY siytem was most out standing at 600 and $800^{\circ}C$. At $400^{\circ}C$, the wear resistance of YSZ/Inconel system was better than others. Wear volume at other temperature because of the low temperature degration of zirconia. The thermal shock mechanism of 5 later is the vertical crack gegration in insulating layer. this means that the initial cracks were generated in the top layer, and then developed into the composite layers during thermal shock test. Finally, these cracks werereached to the interface of coating and substrate and also, these vertioal cracks join with the horizontal cracks of the each layers. The bonding strength of YSZ/NiCrAlY and YSZ/Inconel 5 layer system is better than other 5layer systems. The theramal shock resistance of thermal barrier coating s with 5 layer system is better than that of 3 layers and 2 layers.

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ALD-assisted Hybrid Processes for improved Corrosion Resistance of Hard coatings

  • Wan, Zhixin;Kwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.105-105
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    • 2016
  • Recently, high power impulse magnetron sputtering (HIPIMS) has attracted considerable attentions due to its high potential for industrial applications. By pulsing the sputtering target with high power density and short duration pulses, a high plasma density and high ionization of the sputtered species can be obtained. HIPIMS has exhibited several merits such as increased coating density, good adhesion, microparticle-free and smooth surface, which make the HIPIMS technique desirable for synthesizing hard coatings. However, hard coatings present intrinsic defects (columnar structures, pinholes, pores, discontinuities) which can affect the corrosion behavior, especially when substrates are active alloys like steel or in a wear-corrosion process. Atomic layer deposition (ALD), a CVD derived method with a broad spectrum of applications, has shown great potential for corrosion protection of high-precision metallic parts or systems. In ALD deposition, the growth proceeds through cyclic repetition of self-limiting surface reactions, which leads to the thin films possess high quality, low defect density, uniformity, low-temperature processing and exquisite thickness control. These merits make ALD an ideal candidate for the fabrication of excellent oxide barrier layer which can block the pinhole and other defects left in the coating structure to improve the corrosion protection of hard coatings. In this work, CrN/Al2O3/CrN multilayered coatings were synthesized by a hybrid process of HIPIMS and ALD techniques, aiming to improve the CrN hard coating properties. The influence of the Al2O3 interlayer addition, the thickness and intercalation position of the Al2O3 layer in the coatings on the microstructure, surface roughness, mechanical properties and corrosion behaviors were investigated. The results indicated that the dense Al2O3 interlayer addition by ALD lead to a significant decrease of the average grain size and surface roughness and greatly improved the mechanical properties and corrosion resistance of the CrN coatings. The thickness increase of the Al2O3 layer and intercalation position change to near the coating surface resulted in improved mechanical properties and corrosion resistance. The mechanism can be explained by that the dense Al2O3 interlayer acted as an excellent barrier for dislocation motion and diffusion of the corrosive substance.

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