• Proceedings of the KWS Conference
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• 2003.05a
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• pp.111-113
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• 2003

The existing heating unit is indirect-heating method that make use or the nichrome wire or halogen lamp. The indirect-heating method has the demerits of long warming time, high power consumption and many organization parts. In this study, the heating unit of direct-heating method manufactured as being the thermal spray coating of conductive heating material on the surface of heating unit in order to improve the demerits of indirect-heating method. And YSZ added Ni-20Cr that had moderate electrical resistivity was chosen of the conductive heating material.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.11a
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• pp.57-59
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• 2001

• 한국초전도학회:학술대회논문집
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• v.15
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• pp.58-58
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2006.08a
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• pp.163-163
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• 2006

• Korean Journal of Materials Research
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• v.8 no.6
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• pp.538-544
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• 1998

The spallation of a thermal barrier coating layer depends on the formation of brittle spinels. thermal expansion mismatch between ceramic and metal. the phase transformation of a ceramic layer and residual stress of coating layer. In this work. the formation mechanism of oxide scale formed by oxidation treatment at 90$0^{\circ}C$ was investigated in order to verify oxidation behavior at the interface between E-beam coated $Zr0_2$-7wt.% $Y_20_3$ and plasma sprayed CoNiCrAIY. Some elements distributed in the bond coating layer were selectively oxidized after oxidation. At the initial time of oxidation. AI-depletion zone and $\alpha$-$Al_O_3$,O, were formed at the bond coating layer by the AI-outward diffusion. After layer grew until critical thickness. spinels. $Cr_20$, and $C0_2CrO_4$ by outward diffusion of Co. Cr, Ni were formed. It was found that the formation of spinels may be related to the spallation of $Zr0_2$-7wt.% $Y_20_3$ during isothermal oxidation.

• Korean Journal of Materials Research
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• v.10 no.4
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• pp.312-316
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• 2000

A study has been made to investigate the effects of hot isostatic pressing(HIP ping) on bond strength and elevated temperature characteristics of thermal barrier coating(TBC). The specimens were prepared by HIPping of TBC which is composed of the ceramic top coat(8wt%$Y_2$$O_3$-$ZrO_2$) and the metallic bond coat on the matrix of IN738LC superalloy. The results showed that the porosity and microcracks in the ceramic top coat of TBC were significantly decreased by HIP. As a result, the bond strength of the HIPped coating was increased above 48% compared to that of as-coated specimen and microstructure was homogenized. It was found that the thermal cycle resistance of HIPped coating was inferior to that of as-coated specimen. It was considered that this result was mainly caused by the reduction of internal defects in the top coat layer which could play a role in relaxing the thermal stress due to a large difference in thermal expansion between TBC and matrix.

• Journal of the Korean Ceramic Society
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• v.51 no.5
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• pp.481-486
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• 2014

Environmental barrier coatings (EBCs) are used to protect SiC-based ceramics or composites from oxidation and corrosion due to reaction with oxygen and water vapour at high temperatures above $1000^{\circ}C$. Mullite ceramics have been studied for environmental barrier coatings for Si-based ceramics. More recently, rare earth silicate ceramics have been identified as more water vapour-resistant materials than mullite for environmental barrier coatings. In this study, we fabricate mullite and yttrium silicate ceramics by an atmospheric plasma spray coating method using spherical granules fabricated by spray drying. As a result, EBCs with thicknesses in the range of $200-300{\mu}m$ are successfully fabricated without any macroscopic cracks or interfacial delamination. Phase and microstructure analysis are conducted, and the basic mechanical properties, such as hardness and indentation load-displacement curves are evaluated.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.490-495
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• 1999

In 0.18 $\mu \textrm m$ LOGIC device, the etch rate of NMOS polysilicons is different from that of PMOS polysilicons due to the state of polysilicon to manufacture gate line. To control the etch profile, we tested the ratio of $Cl_2$/HBr gas and the total chamber pressure, and also we reduced Back He pressure to get the vertical profile. In the case of manufacturing the gate photoresist line, we used Bottom Anti-Reflective Coating (BARC) to protect refrection of light. As a result we found that $CF_4O_2$ gas is good to etch BARC, because of high selectivity and good photoresist line profile after etching BARC. in the results of the characterization of plasma damage to the antenna effect of gate oxide, NO type thin film(growing gate oxide in 0, ambient followed by an NO anneal) is better than wet type thin film(growing gate oxide in $0_2+H_2$ ambient).

• Journal of the Korean Ceramic Society
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• v.55 no.2
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• pp.178-184
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• 2018

In the present study, $TiB_2-Co$ composite coatings were thermally sprayed onto the surface of a 304 stainless steel substrate using an atmospheric plasma spray (APS). The phase analysis of the powders and plasma-sprayed coatings was performed using X-ray diffractometry analysis. The microstructures of the coatings were studied by a scanning electron microscope (SEM). The average particle size and flowability of the feedstocks were also measured. Both $TiB_2-32Co$ and $TiB_2-45Co$ (wt.%) coatings possessed typical dense lamellar structures and high-quality adhesion to the substrate. The oxidation behaviors of the coatings were studied at $900^{\circ}C$ in an atmospheric environment. In addition, the cross-sectional images of the oxidized coatings were analyzed by SEM. A thin and well-adhered layer was formed on the surface of both $TiB_2-Co$ coatings, confirming satisfactory high-temperature oxidation resistance. The kinetic curves corresponding to the isothermal oxidation of the coatings illustrated a short transient stage from rapid to slow oxidation during the early portion of the oxidation experiment.

• Journal of the Korean Society for Heat Treatment
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• v.24 no.4
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• pp.209-216
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• 2011

Surface coatings were prepared on SKD11 core mold steel by plasma electrolytic oxidation (PEO). The coatings were investigated about the formation condition of core mold steel. SKD11 were coated by PEO in a mix solution of Sodium Aluminate $NaAlO_2$ (10 g/l), Sodium Silicate powder $Na_2SiO_3$ (0.5 g/l), Sodium tungstate dihydrate $Na_2WO_42H_2O$ (0.5 g/l) at less than $30^{\circ}C$. The electrical condition were voltage : 500~600 V; Pulse : 600~1800 Hz; current density 15~20 $A/dm^2$ various time : 3 min~40 min. The coatings surface morphology, cross-section, friction coefficient, hardness were investigated. The PEO coatings on SKD11 core mold steel showed the extended service life.