• 제목/요약/키워드: plasma application

검색결과 908건 처리시간 0.025초

Investigation of Plasma Damage and Restoration in InGaZnO Thin-Film Transistors

  • 정하동;박정훈;조원주
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.209.1-209.1
    • /
    • 2015
  • Indium gallium zinc oxide (IGZO), indium zinc oxide (IZO) 그리고 zinc tin oxide (ZTO) 같은 zinc oxide 기반의 산화물 반도체는 높은 이동도, 투과도 그리고 유연성 같은 장점을 갖고 있어, display application의 backplane 소자로 적용되고 있다. 또한 최근에는 산화물 반도체를 이용한 thin-film transistor (TFT) 뿐만아니라 resistive random access memory (RRAM), flash memory 그리고 pH 센서 등 다양한 반도체 소자에 적용을 위한 연구가 활발히 진행 중이다. 그러나 zinc oxide 기반의 산화물 반도체의 전기 화학적 불안정성은 위와 같은 소자에 적용하는데 제약이 있다. 산화물 반도체의 안정성에 영향을 미치는 다양한 요인들 중 한 가지는, sputter 같은 plasma를 이용한 공정 진행 시 active layer가 plasma에 노출되면서 threshold voltage (Vth)가 급격하게 변화하는 plasma damage effect 이다. 급격한 Vth의 변화는 동작 전압의 불안정성을 가져옴과 동시에 누설전류를 증가시키는 결과를 초래 한다. 따라서 본 연구에서는, IGZO 기반의 TFT를 제작 후 plasma 분위기에 노출시켜, power와 노출 시간에 따른 전기적 특성 변화를 확인 하였다. 또한, thermal annealing을 적용하여 열처리 온도와 시간에 따른 Vth의 회복특성을 조사 하였다. 이러한 결과는 추후 산화물 반도체를 이용한 다양한 소자 설계 시 유용할 것으로 기대된다.

  • PDF

Simplified HPLC Method for the Determination of Prazosin in Human Plasma and Its Application to Single-dose Pharmacokinetics

  • Gwak, Hye-Sun;Chun, In-Koo
    • Biomolecules & Therapeutics
    • /
    • 제13권2호
    • /
    • pp.90-94
    • /
    • 2005
  • Prazosin hydrochloride is an antihypertensive drug with selective ${\alpha}_1$-adrenoreceptor blocking effects. A simple high performance liquid chromatographic method has been developed and validated for the quantitative determination of prazosin in human plasma. A reversed-phase C18 column was used for the separation of prazosin and terazosin (internal standard) with a mobile phase composed of water, acetonitrile and triethylamine(75:25:0.1, V/V;pH5.0) at a flow rate of 1.5 ml/min. the fluorescence detector was set at excitation and emissionwavelengths of 250 and 370 nm, respectively. Intra-and inter-day precision and accuracy were acceptable for all quality control samples including the lower limit of quantification of 0.5 ng/ml. Good recovery (>80%) was seen in plasma. Prazosin was stable in human plasma under various storage conditions. This method was used successfully for a pharmacokinetic study in plasma after oral administration of a single 2-mg dose as prazosin base to 16 healthy volunteers. The maximum plasma concentration of prazosin was 23.1 ${\pm}$ 16.5 ng/ml at 2.1 h, and the mean area under the curve and elimination half-life were calculated to be 108.4 ${\pm}$ 74.2 ng ${\cdot}$hr/ml and 2.5 ${\pm}$ 0.6 h, respectively.

Nanoparticle Phosphors Synthesized by Inductively Controlled Plasma Process for Plasma Based Display

  • Yang, Choong-Jin;Park, Jong-Il;Choi, Seung-Dueg;Park, Eon-Byeong;Lee, Young-Joo
    • 한국세라믹학회지
    • /
    • 제45권7호
    • /
    • pp.380-386
    • /
    • 2008
  • Optimized volume production of nanoscale phosphor powders synthesized by radio frequency (RF) plasma process was developed for the application to plasma display panels. The nano powders were synthesized by feeding the both solid and liquid type precursors, and nanoparticle phosphors were characterized in terms of particle size, shape, and photoluminescence (PL) intensities. Computer simulation was performed in advance to determine the process parameters, and nano phosphors were evaluated by comparing with current commercial micron-sized phosphor powders. Practical feeding of both solid and liquid type precursor was proved to be effective for volume production.The developed process showed a potential as a production method for red, blue and green phosphor although the PL intensity still needs further improvement.

자기세정을 위한 스퍼터링 TiO2 박막의 산소 표면처리에 따른 특성 (Effects of Oxygen Surface Treatment on the Properties of TiO2 Thin Film for Self-cleaning Application)

  • 김남훈;박용섭
    • 한국전기전자재료학회논문지
    • /
    • 제29권5호
    • /
    • pp.294-297
    • /
    • 2016
  • Titanium oxide ($TiO_2$) thin films were fabricated by unbalanced magnetron (UBM) sputtering. The fabricated $TiO_2$ films were treated by oxygen plasma under various RF powers. We investigated the characteristics of oxygen plasma treatment on the surface, structural, and physical properties of $TiO_2$ films prepared at various plasma treatment RF powers. UBM sputtered $TiO_2$ films exhibited higher contact angle value, smooth surface, and amorphous structure. However, the rms surface roughness $TiO_2$ films were rough, and the contact angle value was decreased with the increase of the plasma treatment RF power Also, the hardness value of $TiO_2$ film as physical properties was slightly increased with the increase of the plasma treatment RF power. In the results, the performance of $TiO_2$ films for self cleaning critically depended on the with the plasma treatment RF power.

용사층의 마모 기구에 관한 연구 (Study on the Wear Mechanism of the Plasma Spray Coatings)

  • 윤우생;송요승;변응선;이구현;노병호
    • 연구논문집
    • /
    • 통권25호
    • /
    • pp.193-205
    • /
    • 1995
  • Plasma 용사 코팅 기술은 전자산업과 정보산업의 기초인 Micro 반도체 산업의 기능성 목적으로 응용되고 있으며, 항공기 등의 첨단산업에서 디젤엔진이나 가스터빈 등 응용 범위를 점차 확대하고 있는 실정이다. 또한 첨단요소 부품에 적용하여 내마모성, 내열성, 내피로성, 내부식성 등을 부여하고 있다. 기능성 부품에 후처리하여 제품의 부가가치를 향상시킬 수 있어, Plasma 용사 코팅기술의 중요성은 날로 증대되고 있는 실정이다. 본 연구에서는 Plasma 용사 기술을 이용하여 코팅을 형성 내마모시험을 통해 국내 첨단요소 부품에 기능성 부여과 낙후된 용사 기술을 향상시키는 데 있다.

  • PDF

$H_2$ plasma treatment effects on electrical and optical properties of the BZO (ZnO:B) thin films

  • Yoo, Ha-Jin;Son, Chan-Hee;Choi, Joon-Ho;Kang, Jung-Wook;Cho, Won-Tae;Park, Sang-Gi;Lee, Yong-Hyun;Choi, Eun-Ha;Cho, Guang-Sup;Kwon, Gi-Chung
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.309-309
    • /
    • 2010
  • We have investigated the effect of $H_2$ plasma treatment on the BZO (ZnO:B, Boron doped ZnO) thin films. The BZO thin films are prepared by LP-MOCVD (Low Pressure Metal Organic Chemical Vapor Deposition) technique and the samples of BZO thin film are performed with $H_2$ plasma treatment by plasma treatment system with 13.56 MHz as RIE (Reactive Ion Etching) type. After exposing $H_2$ plasma treatment, measurement of transmittance, reflectance and haze spectra in 300~1100 nm, electrical properties as resistivity, mobility and carrier concentration and work function was analysed. Regarding the results of the $H_2$ plasma treatment on the BZO thin films are application to the TCO for solar cells, such as the a-Si thin films solar cell.

  • PDF

통계적 회귀 모형과 인공 신경망을 이용한 Plasma-MIG 하이브리드 용접의 인장강도 예측 (Prediction of Tensile Strength for Plasma-MIG Hybrid Welding Using Statistical Regression Model and Neural Network Algorithm)

  • 정진수;이희근;박영환
    • Journal of Welding and Joining
    • /
    • 제34권2호
    • /
    • pp.67-72
    • /
    • 2016
  • Aluminum alloy is one of light weight material and it is used to make LNG tank and ship. However, in order to weld aluminum alloy high density heat source is needed. In this paper, I-butt welding of Al 5083 with 6mm thickness using Plasma-MIG welding was carried out. The experiment was performed to investigate the influence of plasma-MIG welding parameters such as plasma current, wire feeding rate, MIG-welding voltage and welding speed on the tensile strength of weld. In addition we suggested 3 strength estimation models which are second order polynomial regression model, multiple nonlinear regression model and neural network model. The estimation performance of 3 models was evaluated in terms of average error rate (AER) and their values were 0.125, 0.238, and 0.021 respectively. Neural network model which has training concept and reflects non -linearity was best estimation performance.