• 제목/요약/키워드: plasma application

검색결과 907건 처리시간 0.036초

플라즈마 파암공법의 진동분석에 관한 기초적인 연구 (A Fundamental Study about Vibration Analysis of Plasma Rock Fragmentation Method)

  • 윤지선;김상훈
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2001년도 봄 학술발표회 논문집
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    • pp.129-136
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    • 2001
  • Blasting method is used most engineering works for rock excavation. Blasting method is done much to upgrade of operation efficiency, contraction of construction period than other method. But blasting method happens damage by blasting vibration, nose and scattering. Therefore this study examined about effect, characteristic and application of Plasma method. To confirm effect measured vibration, noise and frequency, and analyzed data compare with general blasting.

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이온 플레이팅 응용 스퍼터링 장치에 관한 연구 (A Study on the Sputtering System Using Ion Plating Technique)

  • 정연호;최영욱
    • 전기학회논문지
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    • 제56권12호
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    • pp.2179-2183
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    • 2007
  • In this paper, to produce sheet plasma with high density for ion plating, we designed magnetic circuit of ion plating device consisting of solenoid coil and rectangular permanent magnet. And, we analyzed the effects of the magnetic field distribution using FEM (Finite Element Methode). Additionally, we made a sputtering system including ion plating technique on the basis of the design and verified the possibility of the sheet plasma application for advanced sputter system.

자화된 평판형 유도 결합 플라즈마의 특성 및 건식 식각에의 응용 (The Characteristics of Magnetized Planar type Inductively Coupled Plasma and its Application to a Dry Etching Process)

  • 이수부;박헌건;이석현
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1364-1366
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    • 1997
  • Planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

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Measurement of electron density of atmospheric pressure Ar plasma jet by using Michelson interferometer

  • Lim, Jun-Sup;Hong, Young June;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.195.1-195.1
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    • 2016
  • Currently, as Plasma application is expanded to the industrial and medical industrial, low temperature plasma applications became important. Especially in medical and biology, many researchers have studied about generated radical species in atmospheric pressure low temperature plasma directly adapted to human body. Therefore, so measurement their plasma parameter is very important work and is widely studied all around world. One of the plasma parameters is electron density and it is closely relative to radical production through the plasma source. some kinds of method to measuring the electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods have very expensive cost and complex configuration to composed of experiment system. We selected Michelson interferometer system which is very cheap and simple to setting up, so we tried to measuring electron density by laser interferometer with laser beam chopping module for measurement of temporal phase difference in plasma jet. To measuring electron density at atmospheric pressure Ar plasma jet, we obtained the temporal phase shift signal of interferometer. Phase difference of interferometer can occur because of change by refractive index of electron density in plasma jet. The electron density was able to estimate with this phase difference values by using physical formula about refractive index change of external electromagnetic wave in plasma. Our guiding laser used Helium-Neon laser of the centered wavelength of 632 nm. We installed chopper module which can make a 4kHz pulse laser signal at the laser front side. In this experiment, we obtained more exact synchronized phase difference between with and without plasma jet than reported data at last year. Especially, we found the phase difference between time range of discharge current. Electron density is changed from Townsend discharge's electron bombardment, so we observed the phase difference phenomenon and calculated the temporal electron density by using phase shift. In our result, we suggest that the electron density have approximately range between 1014~ 1015 cm-3 in atmospheric pressure Ar plasma jet.

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플라즈마 공중합 고분자 절연막과 펜타센 반도체막의 계면특성 (Interface Charateristics of Plasma co-Polymerized Insulating Film/Pentacene Semiconductor Film)

  • 신백균;임헌찬;육재호;박종관;조기선;남광우;박종국;김용운;정무영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1349_1350
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    • 2009
  • Thin films of pp(ST-Co-VA) were fabricated by plasma deposition polymerization (PVDPM) technique. Properties of the plasma polymerized pp(ST-Co-VA) thin films were investigated for application to semiconductor device as insulator. Thickness, dielectric property, composition of the pp(ST-Co-VA) thin films were investigated considering the relationship with preparation condition such as gas pressure and deposition time. In order to verify the possibility of application to organic thin film transistor, a pentacene thin film was deposited on the pp(ST-Co-VA) insulator by vacuum thermal evaporation technique. Crystalline property of the pentacene thin film was investigated by XRD and SEM, FT-IR. Surface properties at the pp(ST-Co-VA)/pentacene interface was investigated by contact angle measurement. The pp(ST-Co-VA) thin film showed a high-k (k=4.6) and good interface characteristic with pentacene semiconducting layer, which indicates that it would be a promising material for organic thin film transistor (OTFT) application.

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Hypoglycemic Effect of Exo- and Endo-biopolymers Produced by Submerged Mycelial Culture of Ganoderma lucidum in Streptozotocin-Induced Diabetic Rats

  • Yang, Byung-Keun;Michael A Wilson;Cho, Kai-Yip;Song, Chi-Hyun
    • Journal of Microbiology and Biotechnology
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    • 제14권5호
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    • pp.972-977
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    • 2004
  • The hypoglycemic effect of an exo-biopolymer (EXO) and endo-biopolymer (ENDO) produced from submerged mycelial culture of Ganoderma lucidum was investigated in streptozotocin (STZ)-induced diabetic rats. Both the EXO and ENDO showed hypoglycemic potential, however, the former proved to be more potent than the latter. The administration of the EXO at the dose of 100 mg/kg body weight (BW) significantly reduced the plasma glucose level (23.5%) and increased the plasma insulin level (2.2 fold) in the diabetic animals. The EXO also lowered the plasma total cholesterol, triglyceride, low-density lipoprotein (LDL) cholesterol, and athrogenic index by 14.7, 31.4, 24.1, and 45.4%, respectively, and reduced the liver total cholesterol and triglyceride levels by 6.7 and 25.8%, respectively. It increased the plasma high-density lipoprotein (HDL) cholesterol (37.7%), compared to the control group. Furthermore, the alanine transaminase (ALT) and aspartate transaminase (AST) showed lower activities in the EXO administered groups than the other experimental groups. Taken together, these results suggest that the exo-biopolymer may alleviate the blood glucose level by increased insulin secretion.

전자계-촉매형 플라즈마 반응기의 질소 산화물 제거 특성 (Removal Characteristics of Nitrogen Oxide in Electromagnetic-Catalytic Plasma Reactor)

  • 이현수;박재윤;이동훈;한병성
    • 한국전기전자재료학회논문지
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    • 제15권7호
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    • pp.640-648
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    • 2002
  • This study is to develop electromagnetic-catalyst application plasma reactors for indoor air purification. Nitrogen Oxide(NOx) removal characteristics are measured in the electromagnetic catalyst application plasma reactors with various parameters and the effect of catalyst or/and magnetic field are investigated on the NOx removal. And AC or DC high voltage is applied for corona discharge, flow rates are 150~1500 $\ell/min$ and NO initial concentration is about 10 ppm. $Mn0_2$ and $TiO_2$ catalysts to increase NOx removal rate are used. In the results, NOx removal rate by AC power is about 10 % higher than that by DC power under the experimental condition of 700 $\ell/min$, 5 magnets, $MnO_2$ and $Ti)_2$ catalysts. When magnet is applied to the reactor, NOx removal rate increased. Also, the reactor with $MnO_2$ and $Ti)_2$ catalyst and magnet have the best removal rate.

Gallium Nitride Nanoparticle Synthesis Using Non-thermal Plasma with N2 Gas

  • 유광호;김정형;유신재;류현;성대진;신용현;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.236.1-236.1
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    • 2014
  • Compounds of Ga, such as gallium oxide (Ga2O3) and gallium nitride (GaN), are of interest due to its unique properties in semiconductor application. In particular, GaN has the potentially application for optoelectronic device such as light-emitting diodes (LEDs) and laser diodes (LDs) [1]. Nanoparticle is an interesting material due to its unique properties compared to the bulk equivalents. In this report, we develop a synthesizing method for gallium nitride nanoparticle using non-thermal plasma. For gallium source, the gallium is heated by thermal conduction of tungsten boat which is heated by eddy current induced from RF current in antenna. Nitrogen source for nanoparticle synthesis are from inductively coupled plasma with N2 gas. The synthesized nano particles are analyzed using field-emission scanning microscope (FESEM), transmission electron microscope (TEM) and x-ray photoelectron spectroscopy (XPS). The synthesized particles are investigated and discussed in wide range of experiment conditions such as flow rate, pressure and RF power.

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고빈도-저강도 경피신경전기자극이 혈장 $\beta-endorphin$ 농도에 미치는 영향 (Effect of Conventional Transcutaneous Electrical Nerve Stimulation on Plasma $\beta-endorphin$ Level)

  • 이재형;박춘서;강정구
    • The Journal of Korean Physical Therapy
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    • 제5권1호
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    • pp.39-46
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    • 1993
  • The purpose of this study was to examine the effect and $\beta-endorphin$ level as conventional transcutaneous electrical nerve stimulation (TENS) application on acupuncture paints. Twelve healthy adult male volunteers were participated in this study. The subjects were assigned to TENS group (n=6) and naloxone group (n=6). The LI 3 and M 10 meridian points of dominant arm were stimulated comfortably with 100 pps, $75{\mu}s$ conventional TENS for 30 minutes. Experimental pain threshold measurement and plasma $\beta-endorphin$ level were detected before and after conventional TENS application. Experimental pain threshold increased significantly (p<.01) but plasma $\beta-endorphin$ level was not change in TENS group. Experimental pain threshold increased significantly (p<.01) but plasma $\beta-endorphin$ level was not change in naloxone group. In this study, the conventional TENS induced analgesic effect, and plama $\beta-endorphin$ level was not increase concomitantly with analgesia. These results suggest that the $\beta-endorphin$ did not involved in conventional TENS analgesia.

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Measurement of electron density of atmospheric pressure Ne plasma jet by laser heterodyne Interferometer with voltage

  • Lim, Jun Sup;Hong, Young June;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.140.1-140.1
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    • 2015
  • Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.

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