• 한국정밀공학회지
• /
• 제15권12호
• /
• pp.169-179
• /
• 1998

Plane mirror type laser interferometers are popularly being used in many modern ultraprecision machines, as they can perform simultaneous measurements of multiple axis positions with nanometer resolution capabilities. One important issue in this application of laser interferometers is to provide a good level of alignment between the reflecting mirrors and the laser beams so that measurement errors due to undesirable coupling effects can be avoided in multiple axis measurements In this investigation, a thorough metrological analysis is given to develop an suitable mathematical model for a precision x-y stage in which the orthogonality misalignment between the reflecting mirrors significantly affects overall x-y mea-surement results. Then a noble calibration method is suggested in which two-dimensional displacement sensors of moire gratings of concentric circles are used to realize the reversal principle of orthogonality evaluation in situ. Finally, actual experimental results are discussed to verify that the suggested method can effectively calibrate the orthogonality error with an uncertainty of 0.2667 arcsec.

• 대한기계학회논문집A
• /
• 제26권1호
• /
• pp.160-170
• /
• 2002

Many of aged and damaged concrete structure have been revitalized with composite reinforcement. Flexural behaviors of composite-patched concrete specimens are characterized by high-sensitivity moire interferometry. The three-mirror, four-beam interferometry system and a compact loading system are used for obtaining singe patterns representing whole-field contour maps of in-plane displacements. It is seen from the calibration test for the loading system that the measured bending displacement is in excellent agreement with the displacement calculated by the beam theory. The crack opening displacement as well as the bending and the horizontal displacement fur the notched and unnotched specimen are investigated. The results also show that the notched specimen reinforced by a composite sheet has sufficient stiffness and strength compared to the original concrete specimen.

• 대한기계학회논문집
• /
• 제17권12호
• /
• pp.3115-3123
• /
• 1993

This paper presents a real-time correction method of the movemont errors of a translatory precision machine axis. This method is a null-balances technique in which two plane mirrors are used to generate an interferometric fringe pattern utilizing the optical principles of TwymanGreen interferometry. One mirror is fixed on a reference frame, while the other is placed on the machine axis being supported by three piezoelectric actuators. From the fringe pattern, one translatory and two rotational error components of the machine axis are simultaneously detected by using CCD camera vision and image processing techniques. These errors are then independently suppressed by activating the peizoelectric actuators by real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with movement errors less than 10 nm in vertical straightness, 0.1 arcsec in pitch, and 0.06 arcsec in roll for 50mm travel by adopting the real-time correction method.

• Journal of the Optical Society of Korea
• /
• 제20권6호
• /
• pp.669-677
• /
• 2016

A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

• 대한기계학회논문집A
• /
• 제28권11호
• /
• pp.1646-1655
• /
• 2004

A description of the basic principles of moire interferometry leads to the design of a eight-mirror four-beam interferometer for obtaining fringe patterns representing contour-maps of in-Plane displacements. The technique is implemented by the optical system using an environmental chamber for submicro-displacement mesurement. In order to estimate the reliability and applicabili쇼 of the system developed, the measurement of coefficient of thermal expansion (CTE) for a aluminium block is performed. Consequently, the system is applied to the measurement of thermal deformation of a WB-PBGA package assembly. Temperature dependent analyses of global and local deformations are presented to study the effect of the mismatch of CTE between materials composed of the package assemblies. Bending displacements of the packages and average strains of solder balls are documented. Thermal induced displacements calculated by FEM agree quantitatively with experimental results.

• 한국광학회지
• /
• 제3권1호
• /
• pp.20-26
• /
• 1992

Twyman-Green형 간섭계의 시험파면의 변형을 추출하기 위하여 fourier변환을 이용하는 방법을 모사실험과 실험을 통하여 검토하였다. 대상 방법중에서는 Takeda의 방법이 변형을 추출하는 용도로 적절함이 밝혀졌다. 이 방법을 평면경에 적용하여 얻은 표면의 구조에는 curvature가 존재하며, 그 크기는 $\lambda$/6정도였다. 이 축정의 정확도는 $\lambda$/40정도로 얻어져, 기 발표된 유사연구의 결과보다 그 정도가 높음을 확인하였다.

• 한국광학회지
• /
• 제14권4호
• /
• pp.392-398
• /
• 2003

구면 거울을 정밀하고 정확하게 측정할 수 있는 위상천이 회절격자 간섭계를 제시한다. 간섭계는 하나의 회절격자를 이용하여 간섭계의 기준광과 측정광을 분할하고, 다시 결합시켜 간섭무늬를 생성시키고 위상천이 시키는 간단한 구조로 설계되었다. 광원으로부터의 광을 큰 수치구경인 고정도의 집속렌즈의 초점에 위치한 회절격자 위에 집속하여 반사회절된 파면을 기준파면과 측정파면으로 사용한다 부가적인 기준면이 없이 회절격자 위의 매우 작은 영역이 기준면을 대신하므로 시스템 오차가 작다. 광섬유 형태의 공초점현미경 구조를 광원과 집속렌즈 사이에 설치하여 집속렌즈와 회절격자사이의 정렬오차를 최소화 하였다. 회절격자를 광축에 수직한 방향으로 이송함으로써 기준파면과 측정파면사이에 상대적인 위상천이를 일으켜서 일련의 위상천이된 간섭무늬를 쉽게 획득할 수 있다. 간섭계를 제작하고, 결상렌즈와 CCD를 이용해서 얻은 위상천이된 대상구면 거울의 간섭무늬들을 해석하여 전체적인 간섭계 시스템의 성능을 평가해 보았다.