• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.12
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• pp.1060-1064
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• 2002

We have studied the effect of crystallization temperature, composition and film thickness, which are the fundamental processing parameters of lead zirconate titanate(PZT) thin film fabrication, in the respect of the piezoelectric properties by our pneumatic loading method(PLM). A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system(MEMS) and thin film sensor devices, a few reports for the piezoelectric characterization are provided for the last decade unlikely the bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750$\^{C}$ and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, X-ray diffraction and scanning electron microscopy. The effect of Zr/Ti composition has been also studied. This gives us the fact that the maximum piezoelectricity is found near Morphotropic Phase Boundary(MPB) as bulk PZT system does.

• Smart Structures and Systems
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• v.20 no.6
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.

• Journal of Sensor Science and Technology
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• v.29 no.1
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• pp.59-62
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• 2020

Currently, increasing attention is being paid to relaxor-based ferroelectric single crystals in photoacoustic images, especially for high-end applications. Among the crystals are (1-x)Pb(Mg_1/3Nb_2/3)O₃-xPbTiO₃ (PMN-100xPT) single crystals located near their morphotropic phase boundary (x = 0.30-0.35) because of their ultrahigh piezoelectric and electromechanical coupling properties. The alternating current poling (ACP) treatment, rather than the conventional direct current poling treatment, has recently been spotlighted due to its effectiveness in enhancing the piezoelectric properties. So far, it has been suggested that the enhanced piezoelectricity originates from either a domain miniaturization to nanodomains or from an electric-field-induced monoclinic symmetry. In this study, we demonstrate by thermally stimulated depolarization current measurements that the effect of ACP is too complex to be explained using a single mechanism and that the proposed electric-field-induced monoclinic symmetry is unlikely to exist.